Virtual Institute Laboratory of the. VisionOnline Project.

Transcription

1 CIRP WG: Virtual Research Laboratories Virtual Institute Laboratory of the VisionOnline Project Swavik A. Spiewak University of Calgary, Canada Depart. of Mechanical and Manufacturing Engg

2 European Society for Precision Engineering and Nanotechnology EU - Fifth Framework Programme Competitive and Sustainable Growth VisionOnline University of CALGARY A Virtual Institute Supporting Industry On-line in the Precision Engineering, Micro engineering, Microsystems and Nanotechnologies 1

3 VisionOnline Membership Coordinator: euspen Ltd. Project Partners 1. Cranfield University (UK) 3. Eindhoven University of Technology (NL) 2. IPT Aachen Fraunhofer Institute (DE) 4. Technology for Industry Limited (UK) 5. Scuola Superiore Sant'Anna (IT) 6. University of Calgary (CA) Advisory Members 7. ASM Lithography (NL) 8. Danish Institute of Fundamental Metrology (DK) 9. Katholieke Universiteit Leuven (B) 10. National Technical University of Athens (EL) 11. SDL Queensgate Ltd (UK) 2

4 University of CALGARY Background The new and expanding markets are demanding miniaturized, more reliable and customized devices at everincreasing rates and reduced costs. To remain competitive, companies must take full advantage of electronic commerce, electronic R&D and collaborating with specialized partners from different nations. 3

5 University of CALGARY Background, cont. The virtual institute VisionOnline addresses a range of services to promote industrial growth in the ultra precision technologies, including: ultra precision engineering micro engineering and microelectronics micro-opto-electromechanical systems (MOEMS) nanotechnology and the supporting precision technologies nano- and precision metrology. 4

6 University of CALGARY VisionOnline Key features: Multidisciplinary awareness training using traditional and CD/on-line media techniques Remote, Internet enabled design, prototyping, testing and manufacturing of Microsystems Technology and Nanotechnlogy based devices Industrial seminars with a focus on 'future technology challenges', including the formation of working groups Innovative Internet services including a 'hot line' Internet advisory service, a comprehensive search facilities through the access of euspen's international expertise database and a novel patent library, A 'wish-list' from SME companies - databank of required feasibility studies and/or industrial problems 5

7 University of CALGARY Virtual Institute Laboratory (VIL) for use in the on-line Nanotechnology/MEMS training modules, with real-time, telepresence based access to the test facilities. Training contents (current and near term): Case studies Parameters quantifying the performance of MEMS Experimental techniques and equipment for the assessment of these parameters Self-tuning and fault-tolerant MEMS Predictive monitoring and diagnostics of MEMS Statistical design of experiments and evaluation of results 6

8 University of CALGARY VIL - Calgary Our focus: Measuring and control devices/techniques that feature: nanometre dimensional resolution tolerances better than ten parts-per-million high speed low intrusiveness and robustness (self-tuning, fault-tolerance) 7

9 VIL - Calgary - Rationale When feasible sensor locations violate the Abbe s principle, significant tool path errors do occur... Suboptimal solutions have been applied in ultra precision machine tools to overcome this problem... TETRAFORM (Cranfield University) achieves sub-nanometer surface finish and the form accuracy down to 1 part-per-million (ppm). Such solutions are not satisfactory in the next generation equipment, in which spatial movements are controlled in a complex way... HEXAGLIDE (ETH-Z) employs six linear motors to control the tool in six degrees of freedom. 8

10 Internet enabled R&D - Example: Application of MEMIS in a study of 6 DOF motion Signals Internet Remote control and DAQ Real -time communication Source:Rehsteiner F., Weikert S., Brisbine B., Spiewak S.A., Model Based Minimization of Dynamic Tool Path Errors, SAE Transactions, Journal of Aerospace,

11 Internet enabled R&D - Example: Application of MEMIS in a study of 6 DOF motion Video Signals and Video Internet Remote control and DAQ Real -time communication Source:Rehsteiner F., Weikert S., Brisbine B., Spiewak S.A., Model Based Minimization of Dynamic Tool Path Errors, SAE Transactions, Journal of Aerospace,

12 Internet enabled R&D - Example: Application of MEMIS in a study of 6 DOF motion Signals Internet Remote control and DAQ Real -time communication Source:Rehsteiner F., Weikert S., Brisbine B., Spiewak S.A., Model Based Minimization of Dynamic Tool Path Errors, SAE Transactions, Journal of Aerospace,

13 Internet enabled R&D - Example: Application of MEMIS in a study of 6 DOF motion Conceptual model MEMS inertial sensors mounted on the spindle assembly allow 6 DOF motion visualization on the remote workstation Signals Internet Remote control and DAQ Real -time communication Source:Rehsteiner F., Weikert S., Brisbine B., Spiewak S.A., Model Based Minimization of Dynamic Tool Path Errors, SAE Transactions, Journal of Aerospace,

14 Internet enabled R&D - Example: Application of MEMIS in a study of 6 DOF motion Conceptual model MEMS inertial sensors mounted on the spindle assembly allow 6 DOF motion visualization on the remote workstation Signals Internet Remote control and DAQ Real -time communication Symbolic, constitutive model. x = A x + B u y = C x + D u Source:Rehsteiner F., Weikert S., Brisbine B., Spiewak S.A., Model Based Minimization of Dynamic Tool Path Errors, SAE Transactions, Journal of Aerospace,

15 Internet enabled R&D - Example: Application of MEMIS in a study of 6 DOF motion Conceptual model MEMS inertial sensors mounted on the spindle assembly allow 6 DOF motion visualization on the remote workstation Signals Internet Remote control and DAQ Real -time communication Symbolic, constitutive model. x = A x + B u y = C x + D u Source:Rehsteiner F., Weikert S., Brisbine B., Spiewak S.A., Model Based Minimization of Dynamic Tool Path Errors, SAE Transactions, Journal of Aerospace,

16 Conclusions A hint from the Nature. A setup for investigation of the dynamics of microsystems (University of Calgary) 15

17 Outreach Virtual Institute Laboratory 16