hurryscan, hurryscan II

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1 hurryscan, hurryscan II more Information at: universal and compatible These compact scan heads from SCANLAB provide optimal solutions for nearly all challenges found in industrial laser materials processing. The mechanically and electrically inter-compatible scan heads have apertures ranging from 7 to 30 mm and various levels of dynamics. High long-term stability and low drift values are ensured via integrated temperature stabilization. SCANLAB has products for practically every customer need. Smallaperture systems optimally combine top speed and exceptional precision along with large image fields, enabling marking speeds exceeding 1000 characters per second when used with appropriate lasers. Also available are large-aperture scan heads offering small spot size, high speed and laser-power handling up to the multi-kilowatt range. The housing concept as well as tight manufacturing and assembly tolerances bring high flexibility and certainty to the design and operation of laser materials processing systems. This also facilitates speedy adaptation to individual customer requirements. The hurryscan II scan heads set high-end performance standards with their optimized combination of dynaxis galvanometer scanners, mirror designs and high-performance electronics. Typical applications: Materials processing Marking Microstructuring Rapid manufacturing 3D applications Processing-on-the-fly

2 hurryscan 10, 14 + hurryscan II 7, 10, * * Optics Scan mirrors and objectives with optimized mounts are available for all typical laser types and working fields. To optimally utilize standard objectives, the hurryscan 25 s two scan axes have differing maximum scan angles. This results in an elliptical image field with the larger semi-axis perpendicular to the entrance beam axis. Control 2 1 Legend 1 2 Screws (M6 thread) (#) 3 Flange (#) 4 Alignment pins (6 h6 ) (#) 5 Mounting bracket 6 Connectors 7 Objective 8 Beam out (#) not included all dimensiions in mm Mounting Bracket 42.8 * 8 Beam Exit Side with Beam Displacement Dimension a All scan heads of these series are equipped with either analog or digital standard interfaces and are easily controlled via SCANLAB s RTC controle boards. All scan heads are optionally available with an optical fiber data interface. Attachment Provisions Threaded and non-threaded holes at the housing s beam entrance side at hurryscan 20, 25 and 30 facilitate mounting of the scan head and installation of fiber optic outputs. On the beam exit side, threaded holes are available for attaching add-on components such as cross jets, illumination, distance sensors or thermal shields Cooling 91.6 * Ø6 H7 M6 Ø M6 Ø6 H * The hurryscan II 7's mounting bracket is higher (101.6 mm instead of 91.6 mm) The hurryscan 20, 25 and 30 scan heads provide water-cooling connections for the entrance aperture, electronics and galvanometer scanners, along with air-cooling of the deflection mirrors. This ensures constant working conditions and excellent long-term stability, thus guaranteeing reliable operation even in high-laser-power applications. Cooling is also available optionally for the hurryscan 7, 10 and 14. * The hurryscan II 7 s mounting bracket is higher (101.6 mm instead of 91.6 mm) and the bore holes are horizontally displaced (45.3 mm instead of 42.8 mm). Dimensions hurryscan II hurryscan Aperture 7 mm 10 mm 14 mm 10 mm 14 mm Beam displacement (dimension b) 9.98 mm mm mm mm mm

3 hurryscan 20, 25, 30 Options Extendable into a 3-axis scan system with varioscan (hurryscan 20, 25 and 30 also with varioscan 40 FLEX ) Can be equipped with an additional reference sensor system (10 mm apertures and higher) W E A 180 Can be equipped with high-performance light-weight mirrors (14 mm apertures and higher) Available without a housing as a scan module (except hurryscan 30) Available with water cooling (standard for hurryscan 20, 25 and 30) For extremely conditions available with air-cooling of the deflection mirrors (standard for hurryscan 20, 25 and 30) All scan heads can be supplemented via a camera adapter for process monitoring Quality The high quality of SCANLAB s scan heads is the result of years of experience in the development and manufacture of galvanometer scanners and scan systems. In addition, every scan system must first pass the SCAN check burn-in test before it is released for shipment to the customer. 2 1 Legend 1 2 Mounting screws (M6 threads) (#) 3 Flange (#) 4 Alignment pins (6 h6 ) (#) 5 Objective 6 Beam out 7 Wider construction (drawn dashed) only for hurryscan 30 E Electrical connectors A Connection for cooling air W Connections for cooling water (#) not included all dimensions in mm Beam exit side with beam displacement x M6x5 50 dimension c x 6H7x dimension b 3x M6 10* 85 2x 6H7 7 4x M4 2x 4H7 dimension a * typ. 5 *Dimensions only relevant for the hurryscan 30 Dimensions hurryscan 20 hurryscan 25 hurryscan 30 Aperture (dimension a) 20 mm 25 mm 30 mm Beam displacement (dimension b) mm mm mm Dimension c mm mm mm

4 hurryscan II, hurryscan Type-Dependent Specifications (all angles are in optical degrees) hurryscan II hurryscan Aperture 7 mm 10 mm 14 mm 10 mm 14 mm 20 mm 25 mm 30 mm Optical performance Typical scan angle of scanner 1 ±0.35 rad ±0.35 rad ±0.35 rad ±0.35 rad ±0.35 rad ±0.35 rad ±0.26 rad ±0.35 rad Typical scan angle of scanner 2 ±0.35 rad ±0.35 rad ±0.35 rad ±0.35 rad ±0.35 rad ±0.35 rad ±0.40 rad ±0.35 rad Typical field size ellipse (1), (2) x 130 mm 2 - Typical field size square (1), (2) 110 x 110 mm x 110 mm 2 90 x 90 mm x 110 mm 2 90 x 90 mm 2 90 x 90 mm 2 75 x 75 mm 2 50 x 50 mm 2 Nonlinearity < 3.5 mrad < 3.5 mrad < 3.5 mrad < 3.5 mrad < 2.1 mrad < 3.5 mrad < 3.5 mrad < 3.5 mrad Dynamic performance Tracking error 0.11 ms 0.14 ms 0.24 ms 0.18 ms 0.42 ms 0.35 ms 0.50 ms 0.55 ms Long-term drift over 8 hours < 0.3 mrad (4) < 0.6 mrad (5) < 0.6 mrad (5) < 0.6 mrad (5) < 0.6 mrad (5) < 0.6 mrad (5) < 0.6 mrad (5) < 0.6 mrad (5) Step response time (settling to 1/1000 of full scale) 1 % of full scale 0.23 ms 0.25 ms 0.40 ms 0.35 ms 0.80 ms 0.80 ms 0.90 ms 1.20 ms 10 % of full scale ms 0.90 ms 2.20 ms 2.50 ms 3.20 ms 4.50 ms Typical speeds (1) Marking speed 3.5 m/s 2.5 m/s 1.5 m/s 2.0 m/s 1.0 m/s 1.0 m/s 0.8 m/s 0.7 m/s Positioning speed 15.0 m/s 10.0 m/s 7.0 m/s 7.0 m/s 7.0 m/s 6.0 m/s 5.0 m/s 3.0 m/s Writing speed (3) good writing quality 1100 cps 800 cps 500 cps 640 cps 350 cps 320 cps 260 cps 220 cps high writing quality 800 cps 500 cps 340 cps 400 cps 220 cps 210 cps 170 cps 150 cps Weight (without objective) approx. 3 kg (6) approx. 3 kg (6) approx. 3 kg (6) approx. 3 kg (6) approx. 3 kg (6) approx. 5.8 kg approx. 5.8 kg approx. 5.8 kg (1) with F-Theta objective, f = 160 mm (hurryscan II 7-14 and hurryscan 10-14) or f = 163 mm (hurryscan 20-30) (2) limited by vignetting at objective (3) single-stroke characters of 1mm height (4) at constant ambient conditions, plus offset drift < 30 µrad/k and gain drift < 100 ppm/k (5) after warm-up (6) with optional water cooling up to 4.7 kg Common Specifications (all angles are in optical degrees) Dynamic performance Repeatability Optical performance Gain error Zero offset Skew Power requirements Input signals Analog version Digital version Output signals Analog version Digital version < 22 µrad < 5 mrad < 5 mrad < 1.5 mrad ±(15+1.5) V DC max. 3 A (max. 6 A for hurryscan 20-30) alternatively: ±4.8 V; ±9.6 V; ±4.8 ma; ±9.6 ma XY2-100 Standard, SL2-100 or optical data transfer 3 status signals per axis TTL level XY2-100 Standard, SL2-100 or optical data transfer Operating temperature 25 C ± 10 C Typical air requirements (1) clean, filtered air 20 l/min at p < 2 bar Typical water requirements (1) 5 l/min at p < 0.1 bar, p < 4 bar (1) air and water cooling optional for hurryscan II 7-14 and hurryscan / 2011 Information is subject to change without notice. SCANLAB AG Siemensstr. 2a Puchheim Germany Tel. +49 (89) Fax +49 (89) info@scanlab.de SCANLAB America, Inc. 100 Illinois St St. Charles, IL USA Tel. +1 (630) Fax +1 (630) info@scanlab-america.com

5 SCANcube, intellicube more Information at: scanning in pocket size The ultra-compact scan heads of the SCANcube series deliver excellent dynamics and superior SCANLAB product quality in a minimum-size package. The scan heads of the intellicube series advantageously combine the features of the successful SCANcube and intelliscan platforms. Sealed against water and dust, the SCANcube s and intellicube s robust and exceptionally compact housing facilitates straightforward integration into production environments even confined, difficult-to-access locations. A wide variety of objectives can be used with these scan heads. SCANcube and intellicube scan heads bring success to applications demanding very fast marking speeds and integration in the tightest of spaces. Applications include packaging-industry coding and marking of electronic components, i.e. market domains typically served in the past by inkjet systems. The intellicube is also ideal for applications requiring very high dynamics or the acquisition of important status information. Typical applications: Marking and coding Semiconductor and electronics industry Processing-on-the-fly

6 SCANcube 7, 8.5, 10, 14 SCANcube 7 SCANcube H7 (4 deep) Beam exit side with 32.5 Ø M55x1 (6 deep) Optics SCANLAB precisely optimizes and tunes all optical components to one another to ensure maximum focus quality and stable process parameters. Optical components offered by SCANLAB include compact objectives, as well as objective mounts for standard objectives. Optics for various wavelengths, power densities, focal lengths and image fields are available. Control SCANcube Beam exit side Ø9.8 SCAN cube scan heads are equipped with either an analog or a digital standard interface accessible via a 25-pin D-SUB connector. They are easily controlled via SCANLAB s RTC PC interface board or the PC-independent RTC SCAN alone board from SCANLAB. intellicube scan heads are equipped with a digital standard interface. They are easily controlled via SCANLAB s RTC 4 or RTC 5 PC interface board. Scan head diagnosis and all essential configuration parameters are controlled via software commands. Beam exit side M79x1 (6 deep) Options For optical process monitoring, SCANLAB offers a camera adapter SCANcube 14 Ø Beam exit side M79x1 (5 deep) Ø M55x1 (6 deep) Legend 1 2 Connector 3 Beam out all dimensions in mm Dimensions SCANcube Aperture 7 mm 8,5 mm 10 mm 14 mm Beam displacement 9.98 mm mm mm mm

7 intellicube 10, 14 SCANcube or intellicube? The intellicube and SCAN cube are electrically and mechanically inter-compatible. intellicube 10 In addition to the 10 and 14 mm apertures, the SCAN cube series also offers extremely compact scan heads with 7 or 8.5 mm apertures. Further the SCAN cube can be equipped with either a digital or an analog interface. The intellicube provides improved dynamic performance. And as a direct beneficiary of SCANLAB s years of experience developing digitally controlled intelliscan scan systems, the intellicube also offers all the advantages of idrive technology: high flexibility, superior dynamics, real-time monitoring of actual position and advanced status information, etc Beam exit side Ø M79x1 (6 deep) intellicube scan heads are available with vector-tuning or step-tuning. intellicube 14 Quality The high quality of SCANLAB s scan solutions is the result of years of experience in the development and manufacture of galvanometer scanners and scan systems. In addition, every scan system must first pass the SCAN check burn-in test before it is released for shipment to the customer Ø13.8 Beam exit side 39.5 M79x1 (5 deep) Legend 1 2 Connector 3 Beam out all dimensions in mm The housing dimensions of intellicube 10 and 14 are identical to SCANcube 10 and 14. Dimensions intellicube Aperture 10 mm 14 mm Beam displacement mm mm

8 SCANcube, intellicube Type-Dependent Specifications (all angles are in optical degrees) SCAN cube 7 SCAN cube 8.5 SCAN cube 10 intellicube 10 SCAN cube 14 intellicube 14 Aperture 7 mm 8.5 mm 10 mm 10 mm 14 mm 14 mm Beam displacement 9.98 mm mm mm mm mm mm Dynamic performance Tracking error 0.14 ms 0.14 ms 0.16 ms 0.14 ms 0.30 ms 0.24 ms Step response time (settling to 1/1000 of full scale) 1 % of full scale 0.25 ms 0.30 ms 0.40 ms 0.35 ms 0.65 ms 0.50 ms 10% of full scale 0.70 ms 0.70 ms 1.2 ms 1.2 ms 1.6 ms 1.4 ms Typical speeds (1) Marking speed 2.5 m/s 2.5 m/s 2.0 m/s 2.5 m/s 1.0 m/s 1.5 m/s Positioning speed 15.0 m/s 15.0 m/s 10.0 m/s 15.0 m/s 7.0 m/s 12.0 m/s Writing speed (2) good writing quality 900 cps 900 cps 640 cps 800 cps 410 cps 460 cps high writing quality 600 cps 600 cps 400 cps 500 cps 280 cps 320 cps Weight (without objective) 650 g 1 kg 1.9 kg 1.9 kg 2.3 kg 2.3 kg (1) with F-Theta objective, f = 160 mm (2) single-stroke characters of 1 mm height Common Specifications (all angles are in optical degrees) Dynamic performance Repeatability < 22 µrad Offset drift 30 µrad/k Gain drift 80 ppm/k Long-term drift over 8 hours < 0.3 mrad plus temperature-induced gain and offset drift Optical performance Typical scan angle ±0.35 rad Gain error < 5 mrad Zero offset < 5 mrad Nonlinearity < 3.5 mrad Power requirements ±15 V DC, max. 3 A each (SCAN cube 7 max. 2 A) Interface Analog version (SCAN cube ) ±4,8 V Digital version XY2-100 (3) or SL2-100 Operating temperature 25 C ± 10 C (3) intellicube XY2-100 Enhanced, SCAN cube XY2-100 Standard 12 / 2011 Information is subject to change without notice. SCANLAB AG Siemensstr. 2a Puchheim Germany Tel. +49 (89) Fax +49 (89) info@scanlab.de SCANLAB America, Inc. 100 Illinois St St. Charles, IL USA Tel. +1 (630) Fax +1 (630) info@scanlab-america.com

9 intelliscan, intelliscan de more Information at: smart scanning intelliscan series scan heads offer advantages such as digital servo circuitry, whose powerful algorithms can boost both dynamic performance and marking quality. In addition, the electronics extensively enhance the range of diagnosis possibilities as well as communication between the scan system and the customer s control computer. SCANLAB can equip its digital servo firmware with multiple control algorithms and parameter sets. Switching between different algorithms or sets (even during processing) allows scan head dynamics etc. to be reconfigured and thereby optimally adapted to particular task requirements. intelliscan scan heads allow real-time monitoring of all key operational states of the scan system, such as mirror positions, mirror speeds, drive currents, supply voltage and temperature. As a result, the scan process can be simulated or especially in safety-critical applications monitored, logged and modified if required. Scan heads of the intelliscan series also create new remotediagnosis possibilities. They have the necessary facilities to support software-querying of accumulated operating hours, serial number, date-of-manufacture and essential operational states. Thus, deviations can be quickly detected and corrected. intelliscan de is the high-end member of this scan head series. Using galvanometer scanners with digital encoders, the intelliscan de features remarkably low drift and dither values, making it ideal for high-end applications. Typical applications: Micromachining Marking, welding, drilling Rapid prototyping, rapid tooling Photovoltaic production Processing-on-the-fly

10 intelliscan 10, 14 + intelliscan 20, 25, 30 intelliscan 10, 14 and intelliscan de 14 Dimensions: same as hurryscan II 10,14 Weight: approx. 3 kg (without objective) Housing The housings of all intelliscan scan heads are identical with those of the hurryscan series. For detailed dimensions, refer to these products data sheets. Optics Galvanometer mirrors and objectives with optimized mounts are available for all typical laser types and image fields. Customerspecific configurations are also possible intelliscan 20, 25, 30 and intelliscan de 20, 25, 30 Dimensions: same as hurryscan 20, 25 and 30 Weight: approx. 5.8 kg (without objective) Control The intelliscan is equipped with a digital standard interface and is easily controlled via SCANLAB s RTC 4 or RTC 5 PC interface board. Scan head diagnosis and all essential configuration parameters are controlled via software commands. intelliscan scan heads are available with either an SL2-100 interface (20 bits) or an XY2-100 enhanced interface (16 bits, optical also optionally available). Options W 6 A 180 Extendable into a three-axis scan system with varioscan focusing units As high-performance version available with high-performance light-weight mirrors (for 14, 20 and 30 mm apertures) Available with water cooling (standard for 20, 25 and 30 mm apertures) Available without a housing as a scan module 1 8 Additional reference sensor system for automatic self-calibration (not for intelliscan de and intelliscan 7 ) Legend 1 2 Screws (M6 threads) * 3 Flange * 4 Alignment pins (6 h6 )* (* not included) 5 Mounting bracket 6 Electrical connectors 7 Objective 8 Beam out A Connection for cooling air W Connections for cooling water Application-specific and customerspecific tunings Camera adapter for process monitoring all dimensions in mm

11 intelliscan de 14 + intelliscan de 20, 25, 30 Digital Encoder Technology intelliscan de scan heads equipped with digital encoder technology are specifically optimized to enhance positioning accuracy without impairing dynamics or mechanical dimensions. This brings maximized dynamic performance and positioning accuracy to application areas needing XY-stage precision and enables applications that demand the highest throughput and accuracy. The intelliscan de scan heads base upon the dynaxis de galvanometer scanners and equal or exceed the high dynamic performance of the industry-proven dynaxis (with analog position detectors). They enable laser scanning with a positioning resolution of bits, exceptionally low dither (electronic noise), best linearity and lowest drift. An SL2-100 interface facilitates comprehensive 20-bit control via SCANLAB s RTC 5 PC control board. Line pitch can be precisely adjusted for scribing applications and to eliminate effects such as Moiré patterns. Compatibility Integration of digital encoders does not appreciably change the outer dimensions of the galvanometer scanners. Therefore the housings of all intelliscan de scan heads are identical to those of the hurryscan and intelliscan series. Moreover, intelliscan de scan heads are electrically and optically fully compatible with hurryscan and intelliscan scan heads. Quality The high quality of SCANLAB s scan solutions is the result of years of experience in the development and manufacture of galvanometer scanners and scan systems. In addition, every scan system must first pass the SCAN check burn-in test before it is released for shipment to the customer. Example Processing Result Structure parameters approx. 40 µm line spacing approx. 60 µm and 90 µm corner radii System intelliscan de 14 f = 170 mm objective Process parameters sharp edge tuning 2 m/s marking speed 5 m/s positioning speed 0.10 ms tracking error Results smooth corners with small corner radii (low tracking error) excellent line straightness (low dither)

12 intelliscan, intelliscan de Type- and Tuning-Dependent Specifications (all angles are in optical degrees) intelliscan / intelliscan de Aperture 10 (1) Fast Vector tuning Typical speed (2) Marking speed 3.0 m/s 1.5 m/s 1.0 m/s 0.8 m/s 0.7 m/s Positioning speed 14.0 m/s 12.0 m/s 11.0 m/s 10.0 m/s 9.0 m/s Writing speed Good writing quality 1150 cps 500 cps 340 cps 260 cps 220 cps High writing quality 800 cps 340 cps 230 cps 170 cps 150 cps Dynamic performance Tracking error 0.12 ms 0.21 ms 0.32 ms 0.50 ms 0.55 ms Step tuning Step response time (3) 1% of full scale 0.37 ms 0.7 ms 0.75 ms 1.0 ms 1.2 ms 10% of full scale 1.0 ms 1.4 ms 1.9 ms 2.7 ms 3.5 ms 100% of full scale 3.0 ms 3.7 ms 5.3 ms 8.0 ms 11.0 ms (1) currently not available as intelliscan de (2) with F-Theta objective, f = 160 mm (f = 163 mm for intelliscan 20, 25 and 30) Common Specifications (all angles are in optical degrees) Optical performance Typical scan angle ±0.35 rad (1) Gain error < 5 mrad Zero offset < 5 mrad Power requirements ±15 V DC, max. 6 A each (2) or 30 V DC, max. 6 A (2) Interface XY2-100 Enhanced, SL2-100 or optical data transfer Operating temperature 25 C ± 10 C Typical air requirements (3) Typical water requirements (4) clean, filtered air 20 l/min at p < 2 bar 5 l/min at p < 0.1 bar, p < 4 bar (1) for intelliscan 25: ±0.26 rad (scanner 1), ±0.40 rad (scanner 2) (2) max. 3A with intelliscan 10, 14 (3) only with intelliscan 20, 25, 30 (4) optional for intelliscan 10, 14 (3) settling to 1/1000 of full scale Optimized for Client-Specific Applications, these Tunings are available: Tuning optimized for Step tuning Sharp Edge tuning Micromachining tuning minimal step response time high marking speed, small edge rounding low dither Type-Dependent Specifications (all angles are in optical degrees) intelliscan de intelliscan Dynamical performance Repeatability < 11 µrad (*) < 22 µrad Dither (position noise, maximum < 5 µrad < 22 µrad (1) amplitude) Long-term drift over 8 hours < 0.1 mrad (2) < 0.6 mrad (3) Offset drift < 15 µrad/k - Gain drift < 8 ppm/k - Optical performance Nonlinearity < 0.5 mrad < 3.5 mrad Positioning resolution up to 0.41 µrad (4) up to 1.6 µrad (*) preliminary (1) for Micromachining tuning (2) at constant environmental conditions (3) after warm-up (4) for intelliscan de 14 positioning resolution up to 0.65 µrad * * 12 / 2011 Information is subject to change without notice. * Samples provided by EOS. SCANLAB AG Siemensstr. 2a Puchheim Germany Tel. +49 (89) Fax +49 (89) info@scanlab.de SCANLAB America, Inc. 100 Illinois St St. Charles, IL USA Tel. +1 (630) Fax +1 (630) info@scanlab-america.com