Nmark AGV-HP. High Accuracy, Thermally Stable Galvo Scanner

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Gwen Quinn
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Nmark AGV-HP Galvanometer Nmark AGV-HP High Accuracy, Thermally Stable Galvo Scanner Highest accuracy scanner available attains single-digit, micron-level accuracy over the field of view Optical

of mirror surface treatments for a variety of laser wavelengths The Ultimate in Accuracy and Stability The highly repeatable and thermally stable feedback sensors used on the AGV-HP scanner systems

1 Nmark AGV-HP Galvanometer Nmark AGV-HP High Accuracy, Thermally Stable Galvo Scanner Highest accuracy scanner available attains single-digit, micron-level accuracy over the field of view Optical feedback technology significantly improves thermal stability Industry-best resolution of >24 bits when used with Aerotech s Nmark CLS controller Wide range of apertures and focal lengths Many choices of mirror surface treatments for a variety of laser wavelengths The Ultimate in Accuracy and Stability The highly repeatable and thermally stable feedback sensors used on the AGV-HP scanner systems can be calibrated down to single-digit, micron-level accuracy over the field of view (see figure below). With the extremely low thermal gain drift performance of the position transducers, complex, high-density laser machining applications that take long periods of time to complete will maintain consistent micron-level feature placement accuracy over the lifetime of the process. Likewise, high throughput applications will maintain consistent part-to-part quality without having to re-calibrate between parts. For the highest level of thermal stability, the AGV-HP scanners can be equipped with water cooling to stabilize the operating AGV-HP galvo scanner offers micron-level accuracy over the field of view. temperature of the device under varying loads, changes in ambient temperature or beam clipping on the input aperture. Real-Time Process Visibility The location of the AGV-HP mirrors can be captured and analyzed in real time. With direct access to the positions of the scanner the user no longer has to program delay parameters to compensate for lag and tracking errors in the servo system. The process can be optimized prior to marking the part, saving time and reducing material waste. The state of the laser can also be controlled based on inposition and velocity criteria, further reducing programming complexity. Advanced Programming Features The AGV-HP utilizes all of Aerotech s advanced motion and PSO (Position Synchronized Output) capabilities that have been developed for traditional servo-based laser processing applications. Contouring functions such as Acceleration Limiting can be used to automatically reduce speeds in tight corners or small radii to minimize overshoot. The laser can be triggered based on the position feedback of the mirrors with PSO to ensure consistent spot overlap as the scanner changes speed. Aerotech s Infinite Field of View (IFOV) function seamlessly combines servo and scanner motion to extend the marking capability of the scanner across the entire travel of the servo stages, eliminating stitching errors that can occur in a more traditional move-expose-repeat process. Nmark AGV-HP provides industry-best micron-level 2D accuracy over the entire field of view. Design Choices The AGV-HP family is available with 10,, 20, and 30 mm input apertures and can be equipped with an F-Theta or telecentric lens directly from Aerotech. Users can also acquire the focusing optic directly from a trusted supplier with Aerotech supplying a spacer ring to ensure that back reflections through the optic do not damage the scanner mirrors. Mirror coatings for a wide range of UV, visible, IR and CO2 wavelengths are supported. Coatings optimized for ultra-fast lasers are also available. 1

2 Nmark AGV-HP SPECIFICATIONS Mechanical Specifications AGV-10HP AGV-HP AGV-20HP AGV-30HP Optical Performance Beam Aperture 10 mm mm 20 mm 30 mm Maximum Scan Angle ±20 Beam Displacement 13.0 mm 18.0 mm.1 mm 35.7 mm Feedback Resolution µrad (26 bit) Dither (Min. Incremental Motion) (2) 0.2 µrad rms Accuracy µrad pk-pk Repeatability (3) 0.4 µrad rms Gain Error 0.05 mrad Non-Linearity 0.005% Dynamic Performance Tracking Error 0 µsec Galvanometer Nmark AGV-HP Peak Acceleration (4,5) 288,000 m/s 2 224,000 m/s 2 80,000 m/s 2 56,000 m/s 2 Continuous Acceleration (4,6) 75,200 m/s 2 56,000 m/s 2 20,800 m/s 2 19,200 m/s 2 Positioning Speed (4) 75 m/s 75 m/s m/s 20 m/s Marking Speed (4, 7, 8) 5 m/s 5 m/s 5 m/s 5 m/s Jump & Settle Time, 1 mm Move (4,9) 270 µsec 270 µsec 4 µsec 700 µsec Stability Offset 10 µrad/12 hrs Long-Term Drift (3) µrad/24 hrs Gain 10 ppm/24 hrs Offset 10 µrad/ C Thermal Drift Gain 1 ppm/ C Mechanical Specifications Weight 4.0 kg 4.3 kg 5.0 kg 5.8 kg Material Aluminum (Black Anodize and Blue Paint) MTBF (Mean Time Between Failure) 20,000 Hours Notes: 1. All angles are optical unless otherwise specified 2. Without -AC air cooling option 3. After initial 3 hour warm-up, ambient temperature variation <±0.5 deg C 4. Typical performance with f = 160mm F-Theta objective 5. Based on maximum rated current of the motor 6. Based on rated rms current of the motor with -WC water cooling option; maximum continuous acceleration is 70% of this value without water cooling 7. Achievable with < 1% velocity error over continuous velocity portion of move 8. Marking speed is dependent on allowable tracking error 9. Settled to within 1% of move distance 10. All specifications are per axis unless otherwise noted 2

3 Nmark AGV-HP SPECIFICATIONS Electrical Specifications AGV-10HP AGV-HP AGV-20HP AGV-30HP Nmark AGV-HP Galvanometer Drive System Feedback Maximum Bus Voltage Limit Switches Home Switch Mirror Specifications (1) Brushless Direct-Drive Galvano Motor Noncontact Rotary Encoder ±40 VDC Software Limits Only At Center Wavelength 343 nm 355 nm 5 nm 532 nm 1030 nm 1064 nm 52 nm 1030/5 /343 nm Substrate Beryllium Coating Dielectric 1064/532 /355 nm 9.4 µm (2) 10.6 µm Reflectance >99% Flatness Wavelength of Use Maximum CW Laser Power (3) Damage Threshold of Coating AGV-10HP 300 W (3) 120 W (3) 300 W (3) 120 W (3) 300 W (3) 300 W (3) 300 W (3) 120 W (3) 120 W (3) 60 W (3) 1 W (3) AGV-HP 4 W (3) 180 W (3) 4 W (3) 180 W (3) 4 W (3) 4 W (3) 4 W (3) 180 W (3) 180 W (3) 90 W (3) 2 W (3) AGV-20HP 10 W (3) 600 W (3) 10 W (3) 600 W (3) 10 W (3) 10 W (3) 10 W (3) 600 W (3) 600 W (3) 300 W (3) 7 W (3) AGV-30HP W (3) W (3) - 22 W (3) - 4 W (3) 11 W (3) Pulsed (8 ns) - 2 J/cm 2-4 J/cm 2-10 J/cm 2 7/3/1.5 J/cm 2 Pulsed (120 ns) J/cm J/cm 2 Pulsed (3 fs) 0.10 J/cm J/cm J/cm J/cm J/cm J/cm J/cm /0. /0.10 J/cm 2 - Notes: 1. Partial listing of supported wavelengths. Please consult Aerotech for a complete list of available mirrors. 2. Values shown use the same mirror coating for both 10.6 µm and 9.4 µm wavelengths. 3. With -AC air cooling option; maximum average laser power is 1/3 this value without air cooling. 3

4 AGV-10HP-RSE COMPRESSION FITTINGS FOR Galvanometer Nmark AGV-HP 71 SQR ( ) OPTICS CONFIGURATION C'BORE AS SHOWN SIDE VIEW 5 4

5 AGV-10HP-LSE Nmark AGV-HP Galvanometer 21 COMPRESSION FITTING FOR SQR ( ) OPTICS CONFIGURATION C'BORE AS SHOWN SIDE VIEW 5

6 AGV-HP-RSE COMPRESSION FITTINGS FOR Galvanometer Nmark AGV-HP 71 SQR ( ) OPTICS CONFIGURATION C'BORE AS SHOWN SIDE VIEW 1 6

7 Nmark AGV-HP Galvanometer AGV-HP-LSE 21 COMPRESSION FITTINGS FOR SQR ( ) OPTICS CONFIGURATION C'BORE AS SHOWN SIDE VIEW 7

8 AGV-20HP-RSE COMPRESSION FITTINGS FOR 20 Galvanometer Nmark AGV-HP ( ) OPTICS CONFIGURATION C'BORE AS SHOWN 2 1 SIDE VIEW

9 Nmark AGV-HP Galvanometer AGV-20HP-LSE 21 COMPRESSION FITTINGS FOR ( ) OPTICS CONFIGURATION C'BORE AS SHOWN SIDE VIEW 9

10 AGV-30HP-RSE COMPRESSION FITTINGS FOR 30 Galvanometer Nmark AGV-HP SQR (8) PLACES ( ) OPTICS CONFIGURATION C'BORE AS SHOWN () PLACES

11 AGV-30HP-LSE Nmark AGV-HP Galvanometer 21 COMPRESSION FITTINGS FOR SQR (8) PLACES ( ) OPTICS CONFIGURATION C'BORE AS SHOWN SIDE VIEW 11

12 Nmark AGV-HP ORDERING INFORMATION AGV-HP Series Galvanometer Scanner AGV-HP -RSE MP -NC Series Beam Entry Orientation Optics Configuration Mounting Option Cooling Options AGV-10HP AGV-HP AGV-20HP AGV-30HP -RSE -LSE -CO2 -DS /532/ /5/ T T CO2-100T T T T T T T T -CO T T T T T T T CO MP -NC -AC -WC -AC-WC Galvanometer Nmark AGV-HP AGV-HP Series Galvanometer Scanner AGV-10HP 2-axis galvanometer scanner with 10 mm diameter beam aperture and integral high-precision feedback AGV-HP 2-axis galvanometer scanner with mm diameter beam aperture and integral high-precision feedback AGV-20HP 2-axis galvanometer scanner with 20 mm diameter beam aperture and integral high-precision feedback AGV-30HP 2-axis galvanometer scanner with 30 mm diameter beam aperture and integral high-precision feedback Beam Entry Orientation -RSE Right-side laser beam entry (standard) -LSE Left-side laser beam entry 12

13 Nmark AGV-HP ORDERING INFORMATION Optics Configuration (Partial listing. Please consult Aerotech for other supported wavelengths and lens combinations.) Nmark AGV-HP Galvanometer No Lens Options, F-Theta Not Included Option AGV-10HP AGV-HP AGV-20HP AGV-30HP -CO2 Mirrors for 10.6 µm wavelength; no focal lens -DS Durable silver coated mirrors; 4 nm µm wavelength; limited operating power; no focal lens Mirrors for 52 nm wavelength; no focal lens Mirrors for 1064 nm wavelength; no focal lens Mirrors for 1030 nm wavelength; no focal lens Mirrors for 532 nm wavelength; no focal lens -5 Mirrors for 5 nm wavelength; no focal lens Mirrors for 355 nm wavelength; no focal lens -343 Mirrors for 343 nm wavelength; no focal lens /532/355 Mirrors for 1064, 532, and 355 nm wavelengths; no focal lens /5/343 Mirrors for 1030, 5, and 343 nm wavelengths; no focal lens - (1, 2) F-Theta Included Options Option AGV-10HP AGV-HP AGV-20HP AGV-30HP T 53 mm Focal Length 17.2 x 17.2 mm FOV T 53 mm Focal Length 16.8 x 16.8 mm FOV (3) 66.9 x 66.9 mm FOV Non (3) 57.2 x 57.2 mm FOV Non- -CO2-100T T T (3) T T (3) T T T 52 nm Wavelength 55.2 x 55.2 mm FOV 69.8 x 69.8 mm FOV 1030 nm Wavelength 41.6 x 41.6 mm FOV 64.6 x 64.6 mm FOV 5 nm Wavelength 41.4 x 41.4 mm FOV 51.6 x 51.6 mm FOV 51.2 x 51.2 mm FOV 53 mm Focal Length 8.2 x 8.2 mm FOV 53 mm Focal Length 8.0 x 8.0 mm FOV 37.0 x 37.0 mm FOV Non µm Wavelength.0 x.0 mm FOV 52 nm Wavelength 49.4 x 49.4 mm FOV 61.6 x 61.6 mm FOV 1030 nm Wavelength 34.8 x 34.8 mm FOV 57.0 x 57.0 mm FOV 5 nm Wavelength 34.6 x 34.6 mm FOV 10.6 µm Wavelength 38.6 x 38.6 mm FOV 44.0 x 44.0 mm FOV

14 Nmark AGV-HP ORDERING INFORMATION F-Theta Included Options (1, 2) (Continued) Option AGV-10HP AGV-HP AGV-20HP AGV-30HP -CO mm Focal Length (3) x mm FOV Non mm Focal Length (3) x mm FOV Non mm Focal Length 92.4 x 92.4 mm FOV Non mm Focal Length 92.4 x 92.4 mm FOV Non µm Wavelength 160 mm Focal Length 89.2 x 89.2 mm FOV Non- 160 mm Focal Length 78.4 x 78.4 mm FOV Non- 160 mm Focal Length 77.2 X 77.2 mm FOV Non (3) T T T T T T T 52 nm Wavelength 93.8 x 93.8 mm FOV 92.0 x 92.0 mm FOV 1030 nm Wavelength 92.0 x 92.0 mm FOV 79.6 x 79.6 mm FOV 5 nm Wavelength 79.2 x 79.2 mm FOV 80.8 x 80.8 mm FOV 80.4 x 80.4 mm FOV (3) (3) µm Wavelength 160 mm Focal Length 76.0 x 76.0 mm FOV Non nm Wavelength 87.2 x 87.2 mm FOV 85.2 x 85.2 mm FOV 1030 nm Wavelength 85.0 x 85.0 mm FOV 66.0 x 66.0 mm FOV 5 nm Wavelength 65.8 x 65.8 mm FOV 74.6 x 74.6 mm FOV 74.0 x 74.0 mm FOV 170 mm Focal Length x mm FOV Non- 170 mm Focal Length x mm FOV Non x 72.4 mm FOV Non x 71.6 mm FOV (3) - -CO µm Wavelength 5 mm Focal Length x mm FOV Non mm Focal Length 68.0 x 68.0 mm FOV Non µm Wavelength 5 mm Focal Length x mm FOV Non- Galvanometer Nmark AGV-HP

15 Nmark AGV-HP ORDERING INFORMATION F-Theta Included Options (1, 2) (Continued) Option AGV-10HP AGV-HP AGV-20HP AGV-30HP (3) (3) mm Focal Length 3 x 3 mm FOV Non- 5 mm Focal Length 2 x 2 mm FOV Non- 5 mm Focal Length x mm FOV Non- 5 mm Focal Length x mm FOV Non- 5 mm Focal Length 4.2 x 4.2 mm FOV Non- 5 mm Focal Length 8.0 x 8.0 mm FOV Non- 5 mm Focal Length 91.6 x 91.6 mm FOV Non mm Focal Length x mm FOV Non- Notes: 1. Input beam diameter is assumed to be equal to scan head entrance aperture at 1/e 2 Gaussian profile. 2. Reported field size is minimum achievable based on zero beam vignetting. 3. F-Theta lens is not recommended for use with short pulse lasers (ps and fs pulse durations). Please consult factory for lens options that are compatible with short pulse lasers. - Mounting Option -MP Cooling Options -NC -AC -WC -AC-WC Optional mounting plate with integral flanges for bridge/gantry installation No air cooling of mirrors and no water cooling of beam entrance plate and motors (standard) Air cooling of mirrors for high-powered laser applications Water cooling of beam entrance plate and motors for high-powered laser, high duty cycle and thermal drift intolerant applications Air cooling of mirrors and water cooling of beam entrance plate and motors for high-powered laser, high duty cycle and thermal drift intolerant applications Lens Mounting Adapters (order as separate line item) LM10HP-XXX Lens mount adapter for AGV-10HP and AGV-10HPO; standard versions support the lens configurations offered by Aerotech; custom versions available on request LMHP-XXX Lens mount adapter for AGV-HP and AGV-HPO; standard versions support the lens configurations offered by Aerotech; custom versions available on request LM20HP-XXX Lens mount adapter for AGV-20HP and AGV-20HPO; standard versions support the lens configurations offered by Aerotech; custom versions available on request LM30HP-XXX Lens mount adapter for AGV-30HP and AGV-30HPO; standard versions support the lens configurations offered by Aerotech; custom versions available on request

Nmark AGV-HP. High Accuracy, Thermally Stable Galvo Scanner

Nmark AGV-HP. High Accuracy, Thermally Stable Galvo Scanner Nmark AGV-HP High Accuracy, Thermally Stable Galvo Scanner Highest accuracy scanner available attains single-digit, micron-level accuracy over the field of view Optical feedback technology significantly