Mirrors. Plano and Spherical. Mirrors. Published on II-VI Infrared
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1 Page 1 of 13 Published on II-VI Infrared Plano and Spherical or total reflectors are used in laser cavities as rear reflectors and fold mirrors, and externally as beam benders in beam delivery systems. Silicon is the most commonly used mirror substrate; its advantages are low cost, good durability, and thermal stability. Copper is typically used in high-power applications for its high-thermal conductivity. Molybdenum s extremely tough surface makes it ideal for the most demanding physical environments. Molybdenum is normally offered uncoated. Specifications Standards Dimensional Tolerances Diameter Thickness /-0.010
2 Page 2 of 13 Parallelism Plano Radiused, Diameter < 1 Radiused, Diameter > 1 <= 3 arc minutes <= 10 arc minutes <= 5 arc minutes Clear Aperture (polished) 90% of diameter Surface Figure (power/irregularity) at 0.63µm Plano and Radiused, r > 1 m Power: 2 fringes Irregularity: 1 fringe Scratch-Dig 10-5 Part # Description Diameter (inches) Diameter (mm) Edge Thickness (inches) Edge Thickness (mm) Side 1 Coating Si EG Si ES Si MMR Si EG Si DEMMR Si TRZ
3 Page 3 of Si TRZ Si TRZ Cu EG Cu TRZ Cu EG Cu TRZ Cu TRZ Cu PS 27/03/ Cu-WC* ES Mo UC *WC is water-cooled copper The above parts are plano. For spherical parts, please contact a II-VI sales representative. Contact a II-VI sales representative for exact specifications.
4 Page 4 of 13 Off-Axis Parabolic Mirr, made from copper substrate withstand extremely high laser power industrial environments, providing dif limited focusing when properly moun aligned. Copper mirrors are available with a h reflectivity and durable molybdenum This allows for the mirror s easy clea Parabolic mirrors are designed for re focusing the laser beam through 90 d any other convenient angle. Custom designed features, such as w and non-standard mounting configura available upon request. To guarantee performance specification, all mounting surfaces must b conditioned, screw torques cannot exceed II-VI recommendations, and source must be aligned to the parabolic axis. Specifications Standards Diameter +0.00/-0.12 mm
5 Page 5 of 13 Angle of Incidence +3.5 minutes Working Distance ±0.008 Clear Aperature 90% of mirror surface Surface Roughness < 175 A RMS Scratch-Dig Surface Figure 2 Fringes peak to 632 Part # Description Diameter (mm) Turning Angle Working Distance PM-CU UC*-MM2 Cu º 200 PM-CU UC*-MM2 Cu º 125 PM-CU UC*-MM2 Cu º 250 PM-CU UC*-MM2 Cu º 175 PM-CU UC*-MM3 Cu 25 90º 125 PM-CU UC*-MM3 Cu 25 90º 200 *UC is uncoated Contact a II-VI sales representative for exact specifications.
6 Page 6 of 13 Cylinder As the name suggests, cylindrical mirrors are either round or rectangular objects which have cylindrically shaped surfaces. They differ from spherical mirrors in that they focus a beam to a focal line rather than a focal point. Reflectivity is improved by applying a highly reflective coating on the optical surface. Multilayer coatings are available for various areas of the light spectrum. Cylindrical mirrors are made from Cu, Si, Ge, Al, and other metallic materials. Applications include laser scanners, laser diode systems, spectrophotometers, projectors, and optical data storage and retrieval systems. Toroid In many applications, spherical mirrors, cylinder mirrors, and parabolic mirrors are used to help shape the laser beam. Biconic mirrors or the more general toroidal mirrors can be used to combine two separate optics into one. Biconic mirrors have two different radii on one surface. It s possible to make a biconic mirror with spherical curves or aspheric curves, depending on the application and need to eliminate aberrations. Toroids can replace common 90 bend mirrors to recollimate a laser beam.
7 Page 7 of 13 Galvo Scanning laser systems whether for marking, engraving, or for drilling micro via holes all rely on galvo mirrors to precisely position the laser beam. II-VI manufactures built-to-spec galvo mirrors from mirror-grade silicon substrates. We apply our precision thin-film coatings to these substrates, producing highly efficient galvo mirrors that reflect laser light in the 1.0 to 12.0 µm range. Ideally suited for Nd:YAG lasers (1.06µm) and CO2 lasers (9.3 to 10.6 µm), II-VI galvo mirrors are suitable for a wide range of industrial applications. And for those applications requiring a visible helium-neon or diode laser alignment beam, our dual wavelength coatings provide maximum reflectivity for the CO2 laser infrared beam while providing good reflectivity for the visible alignment beam. Our Dual Enhanced Maximum Metal Reflection (DEMMR) coating is the best choice for this application. (Details are shown in Figures 1 and 2.) II-VI galvo mirror sizes typically range from 0.5 to 4.0 inches in diameter, based on OEM specifications. II-VI galvo mirrors feature Mirror-grade silicon substrates Greater thermal stability than fused silica substrates Geometries built to OEM specifications Highly reflective coatings for Nd:YAG lasers, CO2 lasers, and CO2 lasers with coaxial
8 Page 8 of 13 helium-neon or diode laser alignment beams Applications include Laser marking and engraving Laser drilling Laser welding Rapid prototyping Imaging and printing Semiconductor processing (memory repair, laser trimming) Remote laser welding Variable Radius The II-VI Variable Radius Mirror (VRM) allows users to dynamically change their beam characteristics on the fly. By controlling the V radius of curvature with water pressure, users adjust the laser beam divergence. VRMs allow focus depth adjustment during material piercing; this produces optimum cutti speeds. It also allows flying optics systems manufacturers to compensate for focal length variations across the working table. This is especially important with large working tables where laser beam divergence changes at the as the optical path moves across the work are The VRM is designed for use at near-normal of incidence. Many laser cutting systems use mirrors as telescope optics. The telescope is of one convex and one concave mirror. Repla one of these mirrors with a VRM allows all of benefits listed above. Pressure Control There are at least two ways to control the pre in the VRM and, as a result, control the radius the mirror surface. The key component is eith variable-speed pump or a proportional contro
9 Page 9 of 13 valve. These items are driven by an amplifier. Input to the amplifier is typically a 0 to 10 volt signal. The amplifier is run open-ended or in a closed-loop system. Custom Designs II-VI has the engineering capability to design adaptive mirrors for any beam delivery system Using proprietary design techniques, II-VI can accurately model the VRM shape and predict it will deform under pressure. The mirror shap optimized to match the pressure-radius curve defined by the customer. Water Pressure System Example The drawing below shows the closed-loop sys that uses a pressure transducer to measure t pressure in the mirror cavity. This signal is fed back to the CNC controller. Specifications Standards Substrate: Copper
10 Page 10 of 13 Standard Mirror Diameter: 57.1 mm, 79.0 mm Usable Clear Aperture: 35 mm, 50 mm 6 MCC - 6 MCX Radius Range*: 3 MCC - PO PO - 3 MCX 1.2 MCX MCX Pressure Range: 3 to 11 bar Water Flow Rate: ~1 liter/minute Angle of Incidence: Near normal Reflectivity with MMR-A Type Coating: > 99.8% Pointing Stability: <= 30 arc seconds *Customized radius range available. M is meter, CC is concave, CX is convex, PO is plano
11 Page 11 of 13 Standard Mirror Coatings
12 Page 12 of 13 Uncoated Metal Silver Based Gold Based Ma Al Cu Mo PS ES BG PG EG PEG SEG MMR 0º 10.6µm º AOI 10.6µm º AOI 10.6µm º AOI 10.6µm º AOI µm ~50-90 >90 ~ ~ ~ ~ Phase 45º AOI <2º <2º <2º 6º- 9º + <2º <2º * These products are used at 45º AOI with plane polarized light at 45º to
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