High Voltage Power Supply VAPTEC LITEC PLASMATEC WELTEC GLOWTEC

Transcription

1 High Voltage Power Supply VAPTEC LITEC PLASMATEC WELTEC GLOWTEC

2 High Voltage Planning, developing and producing new technologies - our know-how means complete solutions. In the High Voltage (HV) division of J. Schneider Elektrotechnik GmbH high voltage and DC power supplies for the high voltage and vacuum process equipment are designed and manufactured. Schneider DC power supplies range in the output rating from 1kW - 30kW with output voltages from 150V up to 150kV. J. Schneider built up its reputation as a competent supplier of high voltage power supplies for ion and electron beam applications, x-ray, laser and high voltage plasma processes. The high reliability and robustness of the products in a variety of customer application environments led to this reputation. Typical applications we serve in the industrial and research markets include e-beam evaporation, e-beam welding, ion beam systems, capacitor charge systems, glow discharge and x-ray supplies. 2

3 From a vision to the final product At Schneider, technology is backed up by an innovative development team. Our engineers and technicians respond to constant market observation at an early stage; client's projects for the future are identified and jointly realised. This high degree of engineering potential reflects our feeling for quality, so that we are open for tomorrow's ideas and tasks. New developments open new horizons In order to survive in the global market, we constantly and continually redefine our product range: together with the customer and in close cooperation with technical institutes and universities, new products are developed and produced. Customized Solutions We have made our web site easy to use in order to assist you in finding the DC power supply to satisfy your requirement. If you are not finding a DC power supply which meets your requirements, we would be pleased to develop a customized solution for you. Distribution and Service Since development, production, distribution and service lay at the company of J. Schneider Elektrotechnik GmbH in one hand, a close teamwork in each stage of the lifecycle is granted. Further developments are made close to the market requirements, customer specified modifications are realized in tight cooperation between sales department and development department. Very good product acknowledgement guarantees an optimised service and maintenance. 3

4 Product overview CAPTEC The primary switched high voltage power supplies of the series CAPTEC work according the resonance converter principle with a frequency of 100kHz. Adverse to the normally used pulse width modulation in which the regulation is realized by the variation of the power-on time, in this technique the regulation is realized by the variation of the pause time during fixed power-on time. The generation of the high voltage is effected in the CAPTEC series via converter cascades. The CAPTEC series is specially designed for the requirements to charge condensers. Four different charge powers with 500J/sec, 1500J/sec, 2500J/sec, 5000J/sec and nine different output voltages from 2kV up to 30kV are available. GLOWTEC The primary switched high voltage power supplies of the series GLOWTEC work according the same technology as the CAPTEC series. The GLOWTEC series is specially adapted for high voltage plasma processes / glow processes. Options for the devices are an integrated interlock for the safe separation of the power converter from the mains, a patented ARC-current limitation which limits current peaks to five times the rated current as well as an ARC-counter. The GLOWTEC series is available in the different output ratings of 1kW, 3kW, 5kW und 10kW as single device with output voltages of 2kV, 3kV, 5kV, 8kV, 10kV, 15kV, 20kV, 25kV and 30kV. Parallel operation to increase power and current capabilities is possible for 10kW models with power outputs of 20-30kW. VAPTEC The switch mode power supplies of the VAPTEC series are specially designed for electron-beam evaporation processes. This series includes the actual high voltage power supply NHRR which provides an output voltage of 8 10kV at an output power of 3, 5, 10kW as well as the necessary cathode-heat transformer NDRG and the XY-sweep amplifier RNTR. Furthermore we recently developed a new device technology which includes the high voltage power supply as well as the cathode heat transformer in one cabinet called NHCR. The NHCR provides an output voltage of 8kV at an output power of 2kW. The integrated cathode transformer provides a heat current of 26A at an output voltage of 8V DC. Because at the most evaporation processes an ion-source is used to accelerate the electrons, the necessary ion supply NDOR was be developed in the VAPTEC series. LITEC The primary switched high voltage power supplies of the series LITEC are specially developed for the requirement of linear ion-sources which work according the anode layer principle. The LITEC products are available with two different output voltages of 3kV or 5kV and output ratings of 6kW, 12kW and 24KW. The LITEC series is extremely compact because it is water cooled. PLASMATEC The power supplies of the PLASMATEC series are primary switched and specially developed for plasma processes with V. These power supplies are characterized by smallest output energy as well as by a sophisticated arc management. They are available as DC-devices NDCC as well as uni-polar pulsed devices NDCC pulse. By serial connection of the SXEG a bipolar operation is also possible. WELTEC The power supplies of the WELTEC series are primary switched and specially developed for e-beam welding and x-ray applications. They are oil cooled / oil isolated and it is possible to integrate the necessary auxiliary supply such as heat or Wehnelt supply. They are available with output voltages of 60kV up to 150kV and with output ratings of 5kW, 10kW and 15KW. 4

5 Type: ND RG -L031M01 Ue: 2 x400v AC +/ - 10% 50/60H z Ua: 6V DC Pa: 360W Ia: 60 Kom. Nr externe Absicherung: 5A Seriennr.: Type: NDRG -L031M01 Ue: 2 x400v AC +/ -10% 50/60H z Ua: 6V DC Pa: 360W Ia: 60 Kom. Nr externe Absicherung: 5A Seriennr.: Product choice table Voltage / Power If you do not find a module in the table below which meets your requirements, we are ready to develop a customized solution for you. Therefore regard the below listed power supplies only as a basic device for a product, which full fills your requirements. We would be pleased if you would send us your complete specification at info@jschneider.de or fill out the quote request form at our web-page device series power voltage type NRSG V 150 V 180 V 300 V 600 V 800 V 1 kv 2 kv 3 kv 5 kv 6 kv 8 kv 10 kv kv kv kv page 0,3 W 6 NDRR 1kW 7 CAPTEC 500J/s bis 5000J/s CAPTEC 8 GLOWTEC 1kW bis 30kW GLOWTEC 9 LITEC 6kW to 24kW LITEC 10 VAPTEC 1kW bis 30kW NHRR 12 NDRG VAPTEC 400W 13 RNTR VAPTEC 14 VAPTEC 1080W/ 1000W NDOR 15 NHCR VAPTEC 2kW 16 WELTEC 5kW to 15kW NHRG 17 WELTEC 10kW to 15kW NHRG 18 NDCC PLASMATEC 8kW 19 NDCC pulse PLASMATEC 8kW 20 SXEG PLASMATEC 8kW 21 5

6 NRSG 2 6kV CURRENT REGULATION OEM CUSTOMIZATION AVAILABLE The NRSG power supplies are primary switched DC/DCconverters with an input voltage of 24V DC. The 24V input voltage is fed to a single frequency square wave generator. The square wave is then transformed upward, rectified and filtered and provides the precise output voltage. The output is controlled by means of pulse-width modulation of the square wave. The output voltage is related to 0V (negative connection) of the input voltage. All versions are continuously short circuit proof and can operate in current and voltage source mode. The output voltage and current are set by using the 0-10V analogue interface or by an external potentiometer, by using the available reference voltage. For acknowledgement of the actual voltage and current, a 0-10V output is provided. A failure message is also generated if a specific current limit is exceeded. This specific current limit can also be adjusted by a 0-10V external control voltage. To detect short overcurrent impulses the failure message will be extended about 5 ms. TYPICAL APPLICATIONS Photo-multiplier Test applications OPTIONS Other output voltages 24VDC ±10% 3 models with output voltages of 2kV, 3kV and 6kV are available. Each model is available with positive or negative polarity. Analogue I/O-interface: Output voltage and current are continuously adjustable over 0-10 V analogue inputs. The output voltage and output current is given out by a 0-10V analogue output. Voltage Regulation: Load dependent: 0,05% at 100 % load step input voltage dependent: ± 0,05% within defined input voltage range Current Regulation: Load dependent: 0,05% at nominal current at each voltage jump input voltage dependent: ± 0,05% within defined input voltage range Residual ripple: 0,1% pp. related to nominal voltage 0,5% pp. related to nominal current AC input DC output Dimensions (H x W x D): 130 x 159 x 300 mm combicon connector HV connector EN part 1/03-93 EN class B EN part 2/03-93 EN part 4 / inspection severity: 2 EN EN MAXIMUME RATING MODUL NUMBER kv DC ma W 2 0,1 0,2 NRSG ,1 0,3 NRSG NRSG ,1 0,6 NRSG

7 NDRR V / 1kW CURRENT REGULATION OEM CUSTOMIZATION AVAILABLE NDRR switch mode power supplies are available in 3 models with voltage outputs ranging from 150V to 600V. The NDRR series is specially designed for extremely harsh conditions. TYPICAL APPLICATIONS OPTIONS Constant power regulation Constant voltage regulation Manual programming on front panel Digital display 400Vac ±10%, 50 or 60Hz, three phase 3 models from 150V to 600V are available. Each model is available with positive or negative polarity. Output Controls: Current is continuously adjustable over 0 10 V analogue inputs. Optionally voltage or power regulation and control is possible over analogue input. Voltage Regulation: Load: 0,3% of full voltage for full load change. Line: ± 0,1% of full voltage over specified input range Current Regulation: Load: 0,3% of full current for any voltage change. Line: : ± 0,1% of full current over specified input range. Residual ripple: 1% rms. related to nominal voltage AC Input connector power combicon connector DC output connector power combicon connector 3U x 19 x 310mm EN50178 EN EN MAXIMUM RATING MODUL NUMBER V DC A NDRR ,5 NDRR 3003k ,7 NDRR 6001k7 7

8 CAPTEC 2-30kV / J/sec The primary switched high voltage power supplies CAPTEC are specially designed for the requirements to charge condensers. Four different charge powers with 500J/sec, 1500J/sec, 2500J/sec, 5000J/sec and nine different output voltages from 2kV up to 30kV are available. The charge voltage as well as the charge current can be independently adjusted. The actual value is issued at the analogue interface. By enabling the charge process, the voltage mounts linear up to the desired voltage value. If the desired value of the voltage is reached, the power supply switches automatically over from current regulation to voltage regulation and you get the status message HV-OK from the digital interface. The voltage at the condenser is kept constant. For the CAPTEC series a manual programming and digital LCD displays on the front panel are available. Each model is available with positive or negative polarity. 400Vac ±10%, 50 or 60Hz, three phase 36 models from 2kV up to 30kV with a charge power of 500J/sec to 5000J/sec. Every model is available with positive or negative polarity. Analogue I/O-Interface: Voltage and current are continuously adjustable over 0 10 V analogue inputs. Optionally power regulation and control is possible over an analogue input. Voltage Regulation: Load: 0,01% of full voltage for full load change. Line: ± 0,01% of full voltage over specified input range Current Regulation: Load: 0,1% of full current for any voltage change. Line: : ± 0,1% of full current over specified input range. Residual ripple: 1% rms. related to nominal voltage AC input terminal connector HV output Lemo connector with 10m shielded HV cable 3HE x 19 x 580mm, 2kV - 10kV to 1500J/sec 6HE x 19 x 680mm, 15kV - 30kV to 1500J/sec 9HE x 19 x 550mm, 2kV - 10kV to 5000J/sec 9HE x 19 x 710mm, 15kV - 30kV to 5000J/sec EN55011/03.91 (limit value class A) EN /03.95 MAXIMUM RATING MODUL NUMBER kv DC ma J / sec CAPTEC CAPTEC 0021k CAPTEC 0022k CAPTEC 0025k CAPTEC CAPTEC 0031k CAPTEC 0031k CAPTEC 0033k CAPTEC CAPTEC CAPTEC 0051k CAPTEC 0052k CAPTEC CAPTEC CAPTEC CAPTEC 0081k CAPTEC CAPTEC CAPTEC CAPTEC 0101k CAPTEC CAPTEC CAPTEC CAPTEC CAPTEC CAPTEC CAPTEC CAPTEC CAPTEC CAPTEC CAPTEC CAPTEC CAPTEC CAPTEC CAPTEC CAPTEC

9 GLOWTEC 2 30kV / 1 30kW The primary switched high voltage power supplies of the series GLOWTEC work according the same technology as the CAPTEC series. The GLOWTEC series is specially adapted for high voltage plasma processes / glow processes. Optionally the devices can be delivered with an integrated interlock for safe separation of the power converter from the mains, a patented ARC-current limitation which limits current peaks to five times of the rated current as well as an ARC-counter. The GLOWTEC series is available with different output ratings of 1kW, 3kW, 5kW and 10kW as single device with output voltages of 2kV, 3kV, 5kV, 8kV, 10kV, 15kV, 20kV, 25kV and 30kV. Parallel operation to increase power and current capabilities is possible for 10kW models with power outputs of 20-30kW.. 400Vac ±10%, 50 or 60Hz, three phase 36 models from 2kV up to 30kV. Each model is available with positive or with negative polarity. Output voltages up to 10kV are available with reversible polarity referring to earth. Analogue I/O-Interface: Voltage and current are continuously adjustable over 0 10 V analogue inputs. Optionally power regulation and control is possible over analogue input. Voltage Regulation: Load: 0,01% of full voltage for full load change. Line: ± 0,01% of full voltage over specified input range Current Regulation: Load: 0,1% of full current for any voltage change. Line: : ± 0,1% of full current over specified input range. Residual ripple: 1% rms. related to nominal voltage Patented Arc-Current limitation: Limits the output current peaks to five times of the rated current. AC input terminal connector HV output Lemo connector with 10m shielded HV cable 3HE x 19 x 580mm, 2kV - 10kV to 3kW 6HE x 19 x 680mm, 15kV - 30kV to 3kw 9HE x 19 x 550mm, 2kV - 10kV to 10kW 9HE x 19 x 710mm, 15kV - 30kV to 10kW EN55011/03.91 (limit value class A) EN /03.95 MAXIMUM RATING MODUL NUMBER kv DC ma kw GLOWTEC GLOWTEC 0021k GLOWTEC 0022k GLOWTEC 0025k GLOWTEC GLOWTEC 0031k GLOWTEC 0031k GLOWTEC 0033k GLOWTEC GLOWTEC GLOWTEC 0051k GLOWTEC 0052k GLOWTEC GLOWTEC GLOWTEC GLOWTEC 0081k GLOWTEC GLOWTEC GLOWTEC GLOWTEC 0101k GLOWTEC GLOWTEC GLOWTEC GLOWTEC GLOWTEC GLOWTEC GLOWTEC GLOWTEC GLOWTEC GLOWTEC GLOWTEC GLOWTEC GLOWTEC GLOWTEC GLOWTEC GLOWTEC

10 LITEC 3 5kV / 6 24kW CONSTANT VOLTAGE / POWER OPERATION WITH AUTOMATIC CROSSOVER WIDE OUTPUT POWER OPERATING RANGE EXTREM LOW ARC ENERGY OEM CUSTOMIZATION AVAILABLE The switch mode, water-cooled power supplies LITEC are available with output voltages of 3kV and 5kV. The LITEC power supply series provides 6kW or 12kW and is specially designed for applications which need extreme low arc energy and the full output power over a wide range. Parallel operation to increase power and current capabilities are available as option. TYPICAL APPLICATIONS Anode layer systems Capacitor charging High-Voltage plasma OPTIONS RS232 Patented arc-current limitation Current regulation Manual programming on front panel 400Vac ±10%, 50 or 60Hz, three phase Models with output voltages of 3kV or 5kV and with two different output powers of 6 or 12kW are available. To increase power capabilities parallel operation for the 12kW model is available as option. Each model is available with either positive, negative, or reversible polarity referring to earth. Analogue I/O-interface: Voltage and power are continuously adjustable over 0 10 V analogue inputs. The actual value is issued at the analogue interface with 0 10 V. Digital I/O-interface: Over the digital interface the power supply can be released as well as device-specific and processspecific messages are issued. Voltage Regulation: Load: 0,01% of full voltage for full load change. Line: ± 0,01% of full voltage over specified input range Current Regulation: Load: 0,1% of full current for any voltage change. Line: : ± 0,1% of full current over specified input range. Residual ripple: 50% rms. related to nominal voltage smaller ripples are possible depending on arc-energy. AC Input connector 3-pin Han modular HV output connector HV power connectors with 10m shielded HV cable. EN55011/03.91 (limit value class A) EN / U x 19 x 650mm, 6kV / 12kW. 8U x 19 x 650mm, 24kW. MAXIMUM RATING MODUL NUMBER KV ma kw LITEC 0032k LITEC 0034k LITEC 0038k LITEC 0051k LITEC 0052k LITEC 0034k8 10

11 Type: NDRG-L031M01 Ue: 2 x400v AC +/-10% 50/60Hz Ua: 6V DC Pa: 360W Ia: 60 Kom. Nr externe Absicherung: 5A Seriennr.: VAPTEC The switch mode power supplies of the VAPTEC series are specially designed for electron-beam evaporation processes. This series contains the actual high voltage power supply NHRR which provides an output voltage of 8 10kV at an output power of 3, 5, 10kW as well as the necessary cathode-heat transformer NDRG and the XY-sweep amplifier RNTR. Furthermore we recently developed a new device technology which includes the high voltage power supply as well as the cathode heat transformer in one cabinet called NHCR. The NHCR provides an output voltage of 8kV with an output power of 2kW. The integrated cathode transformer provides a heat current of 26A with an output voltage of 8V DC. Because for the most evaporation processes an ion-source is used to accelerate the electrons, the necessary Ion supply NDOR was developed within the VAPTEC series Substrat Vapor XY coil Ionsource RNTR E B E A M NDOR NDRG filament NHRR NHCR 11

12 VAPTEC NHRR 8-10kV / 3-30kW CONSTANT VOLTAGE / CONSTANT CURRENT OPERATION WITH AUTOMATIC CROSSOVER ARC DETECTION, PATENTED ARC-CURRENT LIMITATION AND ARC COUNTER UP TO THREE HV-OUTPUTS POSSIBLE The switch mode power supply NHRR is available with three different output ratings with output voltages of 8kV 10kV. The NHRR series is specially designed for electron beam evaporation processes. This power supplies contain an ARC-counter and a patented ARC-current limitation which limits the output current peaks to five times of the rated current. Parallel operation to increase power and current capabilities is possible for 10kW models with power outputs of 20-30kW. OPTIONS RS232 emission current survey per HV-output HV-ripple generator for sweeping 400Vac ±10%, 50 or 60Hz, three phase 3 models from -8kV up to -10kV with output ratings of 3kW, 5kW and 10kW are available. Analogue I/O-Interface: Voltage and current are continuously adjustable over 0 10 V analogue inputs. Optionally power regulation and control is possible over analogue input. Digital I/O-Interface: With the digital interface the power supply can be enabled and device-specific and process-specific messages are issued. Voltage Regulation: Load: 0,01% of full voltage for full load change. Line: ± 0,01% of full voltage over specified input range Current Regulation: Load: 0,1% of full current for any voltage change. Line: : ± 0,1% of full current over specified input range Residual ripple: 1% rms. related to nominal voltage Patented Arc-Current limitation: Limits the output current peaks to five times of rated current. ARC-Counter: With the ARC-Counter a flash-over can be detected and counted. AC input terminal connector HV output Lemo connector with 10m shielded HV cable 3HE x 19 x 580mm, 3kW 9HE x 19 x 550mm, 5kW to 10kW EN55011/03.91 (limit value class A) EN /03.95 MAXIMUM RATING MODUL NUMBER kv ma KW NHRR NHRR NHRR 0100k NHRR 0102k NHRR 0103k0 12

13 VAPTEC NDRG 6-13V / 5-60A (Filament supply) Type: NDRG-L031M01 Ue: 2 x400v AC +/-10% 50/60Hz Ua: 6V DC Pa: 360W Ia: 60 Kom. Nr externe Absicherung: 5A Seriennr.: SELECTION BETWEEN HEAT-CURRENT OR EMISSION CURRENT REGULATION ADJUSTABLE HEAT-CURRENT LIMITATION CONTROL PATH LINEARISATION FOR YOUR E-BEAM SOURCE OEM CUSTOMIZATION AVAILABLE NDRG switch mode power supplies are used to heat a cathode or a filament in applications such as evaporation or x-ray. In principle the power supply is a current source. It has two control circuits. One regulates the current through the cathode (heating current control system) and the other regulates the emission current of the tube (emission current control system). The emission current control system can be switched on via an external signal and overrides the heating current control. Both control systems are controlled by using an external set value. OPTIONS Up to 15 different control path linearisations are programmable. Under voltage detection for emission current stop 400Vac ±10%, 50 or 60Hz, two phase 4 models are available. 6V/60A, 8V/30A, 8V/50A and 13V/5A. Output Controls: Heat current and emission current are continuously adjustable over 0 10 V analogue inputs. For the emission current, there are two measuring ranges (1A or 500mA). They can be switched over via an external signal. Emission Current Regulation: Load: 0,1% of full current for any voltage change. Line: ± 0,1% of full current over specified input range. Heat Current Regulation: Load: 1% of full current for any voltage change. Line: ± 0,1% of full current over specified input range. Residual ripple: 5% rms. related to nominal voltage AC Input connector HV input connector HV output connector 190mm x 238mm x 370mm Protection System: IP 54 PrEN50178 circular plug-in connector HV power connector HV power connectors MAXIMUM RATING MODUL NUMBER V DC A 6 60 NDRG NDRG NDRR NDRG

14 VAPTEC RNTR 2403 (XY Sweep amplifier) LOW COST OVER CURRENT PROTECTION OEM CUSTOMIZATION AVAILABLE RNTR 2403 XY sweep amplifier consolidates the sweep patterns to drive the X and Y coils of electron beam deposition sources. The sweep patterns must be generate by the higher level control system. Coils of up to 8 2,8 Amps can be driven. Power 24VDC ±10% Max. Output voltage: Uo = Ui 2,5V Output current: 0 3A Output control: Output current is continuously adjustable over 0 10V analogue input. 0 10V DC = 0-3A Frequency range: DC... 1kHz (3dB) Reinforcement deviation: 0,2% to final value ± 100 ppm/k DC Input connector combicon power connectors Output connector combicon power connectors 3HU x 21TE x 300mm Protection System: IP 20 EN50178 MAXIMUM RATING MODUL NUMBER V A 24 3 RNTR 2403 POWER INPUT X0 +24V +24VDC GND GND PE EARTH ANALOG INPUT X1 SIGNAL SIGNAL 1 SET VALUE SWEEP COIL X+ 2 SET VALUE SWEEP COIL X- 3 SET VALUE SWEEP COIL Y+ 4 SET VALUE SWEEP COIL Y- 5 EARTH DIGITAL INPUT/ OUTPUT X2 SIGNAL E+ RELEASE + E- RELEASE - NO GENERAL ERROR COM GENERAL ERROR NC GENERAL ERROR OUTPUT X3 SIGNAL X3A/1 OUTPUT SWEEP COIL X+ X3A/2 OUTPUT SWEEP COIL X- X3B/1 OUTPUT SWEEP COIL Y+ X3B/2 OUTPUT SWEEP COIL Y- 14

15 VAPTEC NDOR (Ion Supply) INTEGRATED ANODE AND FILAMENT SUPPLY INTEGRATED MEASUREMENT OF NEUTRALISATION CURRENT OEM CUSTOMIZATION AVAILABLE The power supply NDOR is a switch mode power supply which is specially designed for ion sources. It includes the anode power supply, the filament power supply and measurements for the neutralisation current. The anode power supply is frequency controlled. Contrary to the normally used pulse width modulation this principle provides a short circuit proof, a better efficiency and a lower charge of the electronic switches. 400Vac ±10%, 50 or 60Hz, three phase Output Anode Power Supply: 180V / 6A Output Filament Power Supply: 40V / 25A Output Controls: Anode voltage and filament current are continuously adjustable over 0 10 V analogue inputs. For the neutralisation current, a measuring range (+250mA up to 750mA) exists. Anode Voltage Regulation: Load: 1% of full current for any voltage change. Line: ± 1% of full current over specified input range. Filament Current Regulation: Load: 1% of full current for any voltage change. Line: ± 1% of full current over specified input range. Accuracy of neutralisation current: ± 0,2% related to final value AC Input connector combicon power connectors Output connector combicon power connectors 3HU x 19 x 396mm Protection System: IP 20 EN50178 / EN61558 MAXIMUM RATING MODUL NUMBER Anode Filament 180V / 6A 40V / 25A NDOR

16 VAPTEC NHCR 8kV-2kW / 8V-26A INTEGRATED FILAMENT SUPPLY ARC DETECTION PATENTED ARC LIMITATION OEM CUSTOMIZATION AVAILABLE The switch mode power supply consists of two independent power elements. One of them generates the high voltage, the other the filament current. Both have a common control-regulation-unit. The output current of the high voltage is limited in case of an ARC to the maximum of five times of the rated current by the patented Arc-current limitation. For the operation and adjustment of the unit an analogue / digital interface is available. In addition the unit includes a RS232-interface for the service. Power: 400Vac ±10%, 50 or 60Hz, three phase Regulation: 24VDC ±20%, max. 2A High voltage: -8kV / 250mA/ 2kW Filament:: 8Vdc / 27,5Adc / 220W Analogue I/O-Interface: Voltage and current are continuously adjustable over 0 10V analogue inputs. The actual value is issued at the analogue interface with 0 10V. Digital I/O-Interface: Over the digital interface the power supply can be released as well as device-specific and process specific messages are issued. Voltage Regulation: Load: 0,01% of full voltage for full load change. Line: ± 0,01% of full voltage over specified input range Current Regulation: Load: 0,1% of full current for any voltage change Line: ± 0,1% of full current over specified input range. Residual ripple: 1% eff. related to nominal voltage Patented Arc-Current limitation: Limits the output current peaks to five times of the rated current. Arc-Counter: With the arc-counter a flash-over can be detected and counted. AC input terminal connector DC input terminal connector HV output Special HV-female Dimension (H x B x T): 3HE x 19 x 580mm EN50178, EN60950 EN55011/03.91 (limit value class A) EN /03.95 IEC801-3/02.88, IEC85A-77B IEC801 part 2 u. part 4 AUSWAHLTABELLE MAXIMUM RATING MODUL NUMBER kv ma KW NHCR

17 WELTEC NHRG 40-60kV / 10kW CONSTANT VOLTAGE / CONSTANT CURRENT OPERATION WITH AUTOMATIC CROSSOVER ARC DETECTION AND ARC COUNTER OEM CUSTOMIZATION AVAILABLE NHRG 10kW switch mode power supplies are oil insulated and available for different applications. For each application the necessary power supplies (grid, filament, bias) is included optionally 4 models with voltage outputs ranging from 40kV to 60kV. The NHRG series is specially designed for extremely harsh conditions. TYPICAL APPLICATIONS Electron beam systems X-ray Ion implantation Capacitor charging OPTIONS Integrated grid and filament supply Integrated bias supply for x-ray applications Constant power regulation RS232 Manual programming on front panel Adjustable soft start ramp Adjustable delay time after arc Digital display Voltage Regulation: Load: 0,01% of full voltage for full load change. Line: ± 0,01% of full voltage over specified input range Current Regulation: Load: 0,1% of full current for any voltage change. Line: : ± 0,1% of full current over specified input range. Residual ripple: 1% rms. related to nominal voltage AC Input connector terminal connector HV output connector HV power connectors one end manufactured with 5m shielded HV cable. 510 x 550 x 1270 mm EN55011/03.91 (limit value class A) EN / Vac ±10%, 50 or 60Hz, three phase 4 models from 40kV to 60kV. Each model is available with positive and negative polarity. Output Controls: Voltage and current are continuously adjustable over 0 10 V analogue inputs. Optionally power regulation and control is possible over analogue input. MAXIMUM RATING MODUL NUMBER KV DC ma NHRG NHRG NHRG kV/250mA 60kV/166mA NHRG

18 WELTEC NHRG kV / 15kW CONSTANT VOLTAGE / CONSTANT CURRENT OPERATION WITH AUTOMATIC CROSSOVER ARC DETECTION AND ARC COUNTER OEM CUSTOMIZATION AVAILABLE NHRG 15kW switch mode power supplies are oil insulated and are available for different applications. For each application the necessary power supplies (grid, filament, bias) are included optionally. 5 models with voltage outputs from 80kV to 170kV. The NHRG series is specially designed for extremely harsh conditions. TYPICAL APPLICATIONS Electron beam systems Ion implantation Capacitor charging OPTIONS Integrated grid and filament supply Constant power regulation RS232 Manual programming on front panel Adjustable soft start ramp Adjustable delay time after arc Digital display 400Vac ±10%, 50 or 60Hz, three phase 5 models from 80kV to 170kV. Each model is available with positive and negative polarity. Output Controls: Voltage and current are continuously adjustable over 0 10 V analogue inputs. Optionally power regulation and control is possible over analogue input. Voltage Regulation: Load: 0,01% of full voltage for full load change. Line: ± 0,01% of full voltage over specified input range Current Regulation: Load: 0,1% of full current for any voltage change. Line: : ± 0,1% of full current over specified input range. Residual ripple: 1% rms. related to nominal voltage AC Input connector terminal connector HV output connector HV power connectors one end manufactured with 5m shielded HV cable. up to 150kV = 360 x 910 x 1185 mm EN55011/03.91 (limit value class A) EN /03.95 MAXIMUM RATING MODUL NUMBER kv DC MA NHRG NHRG NHRG NHRG NHRG

19 PLASMATEC NDCC (Plasma Power supply) NDCC switch mode power supplies are available in 2 models with 400 to 800VDC or 600 to 1000VDC. The NDCC series is specially designed for extremely harsh conditions. OPTIONS 19 Rack Input voltage 400Vac ±10% 50 or 60Hz, three phase Input current 18A Output power 10kW Output voltage 50 to 800VDC 400 to 800 VDC at rated power Output current 25A max. Ignition capability 1130VDC up to 1300VDC Passive Arc Energy < 15mJ I[A] 25,0A 16,6A 12,5A 8,0A WIDE OUTPUT VOLTAGE RANGE LOW STORED ENGERGY AND RAPID ARC RECOVERY ANALOG / DIGITAL INTERFACE SERVICE INTERFACE RS232 WATER COOLING OEM CUSTOMIZATION AVAILABLE Output Controls: Regulation Arc detection Arc trip level Arc feeding time Arc pause time Cooling system: Water cooling Temperature Water flow Water connector voltage, current and power over 0 10V analogue inputs < 1,5µs 0V to 250V 10µs to 2,5msec adjustable 10µsec to 2,5msec yes 5 C min., 35 C max. non condensing 4 l/min., > 3.5bar < 6bar quick connector for tube 10x1mm AC input connector 3-pin Han modular (Harting) Output connector 2-pin Han modular (Harting) 128 x 216 x 680mm 5 x 8.5 x 26.8 Note: Connectors not included EN50178 EN EN V 600V 800V 1000V U[V] MAXIMUM RATING MAXIMUM POWER MODUL NUMBER VDC A kw ,5 10 NDCC0212E ,6-12,5 12,5-8, NDCC0420E

20 PLASMATEC NDCC pulse (DC pulsed Plasma Supply) NEW WIDE OUTPUT VOLTAGE RANGE LOW STORED ENGERGY AND RAPID ARC RECOVERY PROGRAMMABLE ANALOG/DIGITAL INTERFACE SERVICE INTERFACE RS232 WATER COOLING OEM CUSTOMIZATION AVAILABLE NDCC pulse switch mode power supplies with a pulsed output voltage from 100 to 800V with a output frequency of 76kHz. The duty factor of pulses can be selected over the serial service interface RS232 in four steps, which can be specified by the customer. In combination with the SXEG it is possible to generate bipolar pulses. OPTIONS 19 Rack Input voltage 400Vac ±10% 50 or 60Hz, three phase Input current 18A Output power Output voltage Output current U Ignition Arc-detection = off under load votage 8kW 100 to 400V at 15,2A average 400 to 800V at rated power 7,6A average at 800V 15,2A average at 400V current Arc 80 µs -pause 80 µs Arcfeeding time Arc-detection = off Ignition capability 1130VDC up to 1300VDC Passive Arc Energy < 15mJ Output Controls: Regulation Arc detection Arc trip level Arc feeding time Arc pause time Cooling system: Water cooling Temperature Water flow Water connector power, voltage or current over 0 10 V inputs < 1,5µs 0V to 800V 0µsec to 175µsec 0µsec to 310µsec yes 5 C min., 35 C max. non condensing 4 l/min., > 3.5bar < 6bar quick connector for tube 10x1mm AC Input connector 3-pin Han modular (Harting) Output connector 2-pin Han modular (Harting) 128 x 216 x 680mm = 5 x 8.5 x 26.8 Note: Connectors not included EN50178 EN EN MAXIMUM RATING MODUL NUMBER V A kw ,2-7,6 8 NDCC0426E

21 PLASMATEC SXEG (Bipolarpulser) NEW PROGRAMMABLE OVER DIP-SWITCH OEM CUSTOMIZATION AVAILABLE The SXEG is used in combination with the plasma power supply NDCC0426E02001 as a bi-polar pulser. The SXEG generates out of the positive pulses of the plasma power supply NDCC0426E02001 positive and negative pulses with the same output voltage level. The number of positive and negative pulses can be selected over internal DIP-switches. Mains: Input voltage 400Vac ±10% 50 or 60Hz, two phase Input current 100mA Input voltage Vac ±10% max. frequency 80kHz Input current 100mA Output power 8kW Output voltage ±200 - ±800V pulse Output current max. 15,2A Output control: Setting range of pulses: Positive pulses 2 30 in double steps Negative pulses 0 7 in single step Ignition voltage current Mains circular plug-in connector 5 pin. Input 2pin-shielded cable 2m with connector HAN C 2-pol. Output 2 HV-female Output cable 2 x RG213/U, max. length 10m per cable 185 x 245 x 390mm Protection System: IP 41 DIN VDE 0160 / EN50178 t MAXIMALE RATING MODUL NUMBER V A kw ,2 7,6 8 SXEG0528E

22 Patented ARC-current limitation The patented arc current limiter works like a non-linear resistance. Until a specific current level is reached, it has low Ohm resistance. Once that level is exceeded, the resistance changes, so that current remains constant, whatever voltage applies. A graph showing the idealized voltage/current relationship across the resistance is given below. voltage Once the current threshold is reached, current remains constant despite increasing voltage. Resistance progressively increases in this area. threshold current The arc current limiter is switched into the high voltage circuit like a resistance. If there is an arc, it is absolutely sure, that current stays limited at the threshold level. ARC current limitation short circuit U, I current propagation with and without patented arc-limitation voltage in case of short circuit current without arc-limitation current with arc-limitation t Without arc current limiting, current peaks up to 1000 times the rated current can occur. Our patented arc current limiter keeps current peaks down to 4 times of the rated current, at the very most. Advantages: Prolonged life of filament in electronic beam guns Processes, such as coating, run more smoothly as arcs are suppressed, instantly Almost complete elimination of the contamination of deposited film which normally arises from the extremely high currents associated with arcs higher stoichiometry Enhanced equipment reliability Due to the very small current fluctuations (di/dt), there are fewer breakdowns. This leads to cost savings on such items as cables, filters and surge-voltage protection devices. The Arc current limiter can be configured to meet your specific requirements. Versions for continuous current levels of 10A and voltages of 100kV can be provided. 22

23 High voltage cable The high voltage cables, shown in the table below, as well as the plugs and sockets are suitable for voltages until 10kVDC. If you need cables or plugs for a higher voltage we would be pleased to offer them. article no. from <====> to end 1 Cable length end 2 Cable type convert with convert with One end converted NHRR to universal HV-right angle plug 10m - RG NHRR to universal HV-right angle plug 20m - RG213 Both ends converted NHR40505E01001 NHRR to NDRG HV-right angle plug 1,5m ODU- female 4mm RG213 NHR40505E02001 NHRR to NDRG HV-right angle plug 2,0m ODU- female 4mm RG213 NHR40505E04001 NHRR to NDRG HV-right angle plug 4,0m ODU- female 4mm RG213 NHR40505E06001 NHRR to NDRG HV-right angle plug 6,0m ODU- female 4mm RG213 NHR40505E08001 NHRR to NDRG HV-right angle plug 8,0m ODU- female 4mm RG213 NHR40505E10001 NHRR to NDRG HV-right angle plug 10,0m ODU- female 4mm RG213 NHR40505E01002 NHRR to ground HV-right angle plug 1,5m cable lug M8 RG213 NHR40505E02002 NHRR to ground HV-right angle plug 2,0m cable lug M8 RG213 NHR40505E04002 NHRR to ground HV-right angle plug 4,0m cable lug M8 RG213 NHR40505E06002 NHRR to ground HV-right angle plug 6,0m cable lug M8 RG213 NHR40505E08002 NHRR to ground HV-right angle plug 8,0m cable lug M8 RG213 NHR40505E10002 NHRR to ground HV-right angle plug 10,0m cable lug M8 RG213 HV-right angle plug ODU-female reference dimensions [mm] dimensions [mm] electrical data module series A A1 H L M S1 S2 d D L s g Q I Nom I max FLA 4S ,5 12,5 6 55A 80A filter pad for replacement article no. type usable for protection class dimensions [mm] pieces / VE RFF 120 NDRR CAPTEC GLOWTEC NHRR IP x NDOR SXEG FP80T NHCR IP20 80 x AFF 01 NDRG IP x

24 J. Schneider Elektrotechnik GmbH Helmholtzstrasse 13 D Offenburg Deutschland Tel. : +49 / (0) 781 / Fax : +49 / (0) 781 / info@j-schneider.de HV_Prospekt_07_englisch_070205