Vacuum Technology and Related Solution Components for plasma application

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1 Components for plasma application Our long term experience in the vacuum and related technology fields allowed to develop a product line of electronic instruments such as Plasma Source Generators and Matching Networks. These products have been created by the deep experience and knowledge of Plasma inside our technical department which lead to the realization of user-friendly, reliable and advanced solutions. G.Gambetti Kenologia Srl Via A. Volta n Binasco (Milano) - Italy ph fax sales@gambetti.it Vacuum Technology and Related Solution Components for plasma application

2 Plasma source and power generator LF500 AC Vacuum Technology and Related Solution Components for plasma application The GGK_LF500 is a compact,low cost AC plasma source. Matching tansformer and measurement system are built-in. The maximum output power is 50Khz, sinewave. Impedances from 200 to 2000 ohms can be allowed. This unit is a better replacement for glow discharge applications, if compared to DC hi-voltage. The discharge is much more stable and charge GGK-LF side view build-up is avoided. It can be used for sputtering of conductive targets or PECVD processes.the physical construction is a compact open frame chassis. Features and benefits Very compact: 310 x 95 x 150 mm weight approx 2Kg. Direct electrode connection. No matching network required. Full power of 500Watt available over an impedance range of 3 to 1 without transformer tap adjustment. Full,accurate measurement built-in system: RMS voltage, DC selfbias, power readings available on user port. Power or voltage control loop. Active arc detection and quencing. Hi efficiency >90% no forced cooling required. Complete protection circuit: Overtemperature, overvoltge, output power limiting. GGK-LF four layers pcb technology GGK-LF internal view

3 GGK-RF15 new 200Watt, 13.56Mhz power generator for Plasma Applications The RF15 model is the most compact and reliable RF power generator available on the market in its power range. It is designed to be used in small plasma and sputtering systems.thanks to its compactness, in most cases it can be mounted very close to the process chamber. The modern design of the unit, with limited part count and no wiring allows to offer the unit at a very competitive price. GGK-RF15 Gambetti s Advantage New design. This unit is using a state-of-the art hi-speed, hi-current IC driver,a class E power stage and a switching modulator for precise power control. The unit is physically constructed around 2 PCB and there is no wiring. This reduces the production costs whilst maximizing the reliability and reducing the physical size. Flexibility: Gambetti is open to customizations, such as special control signal scaling or other frequencies than 13.56Mhz. Proven stability on any type of load. GGK-RF15 BNC output connector

4 Hilights and benefits Compact: 220 x 180 x 80 mm, 2.5Kg weight. Frequency: 13.56Mhz quarz stabilized. Hi-efficiency: The output stage is 85% efficient to convert DC to RF, this means that little cooling is required. Full outpt protection including hi-wsvr, PA overcurrent, output FET overvoltage, overtemperature, short circuit. The unit can work without failure on any load including short and open circuits for unlimited time. WSVR limit is 40Watt making the unit an ideal solution to be use in conjunction with fixed matching networks like the model GGK_MM2. Simple and complete user interface: the user interface is a D-Type 15 pins connector, all analog signals (sepoint,frw power reading and REV power reading) are 10V scaled. Digital control signals are standard 24V levels. Alarms are provided. Regulation tolerance : better than 3% at full scale on 50 ohm load Output connector is 50 ohms BNC type. Air cooling with internal 50mm fan. The fan is switched on, only when RF output is active. This strongly extends the fan life. Thanks to the low heat generation, the unit can work at full power with ambient temperature above 40 Celsius. GGK-RF15 Hi frequency module overview GGK-RF15 class E amplifier and matching components

5 GGK Matching Networks Gambetti Approach in matching network In any plasma system the matching network is a critical component. The purpose of the matching unit is to transform the complex, variable impedance of the plasma load into 50 ohm resistive requested by the transmission line (coax CABLE) and the RF generator to operate efficiently. Gambetti currently produce a family of automatic and manual matching networks for HF (13.56Mhz) and have the knowledge and experience to provide customers with customized product. Quality and Component selection The most critical parts in any matching network are the variable tuning elements. These are usually variable capacitors and in some case (like the model GGK_MM2) variable inductors. We use hi-quality, air variable capacitors, equipped with double wiper contact for currents up to 15 Amps RF and voltages up to 3000 Volts. Above these levels we use Comet vacuum elements. For power levels up to 1Kwatt air capacitors are generally the best solution: they move faster, compared to vacuum models, and the match can be obtained in less than 2 seconds. GGK-AM1 Auto match model This is our standard auto matching network. Rugged construction, hi-reliability and inclusion of all the features to make installation, configuration and operation easy. As the plasma impedance is normally unknown, special efforts have been made to make quick tuner configuration: Several coil configurations are available. The standard coil is made by 6mm copper, silver plated tube with 4 user configurable taps turns available. Mounting hardware and pre-drilled holes are provided to assemble up to 3 pad fixed capacitors. GGK-AM1 Features and benefits Full preset capability. Each servo channel (magnitude and phase) can work independently in auto/hold/preset mode. This flexibility is unique in Gambetti s Matching network. Fast tuning. With optimal preset less than 1 second. DC bias reading on user interface. All IO s optically isolated. Digital signals 24V, analog 10V full scale. Output connector 7/16 type. Diagnostic LED s on front panel. GGK-AM1 D-type 25 pin user port Each tuning capacitor has its own low and hi limiting potentiometr, user adjustable. This is another unique Gambetti feature.

6 GGK-MM1 Manual Match model This is our entry-level matching network. It is equipped with the same tuning elements than AM1 model but with manual capacitors position control. This is a good choice in case of stable plasma with repeatable process and/or cost sensitive applications. Vacuum Technology and Related Solution Components for plasma application GGK-MM1 front panel GGK_MM2 Manual Matching network This is a new and innovative product. It is intended to be used in conjunction with the model GGK-RF15 HF power generator in low power application (up to 200 Watts) and small process chambers. The dimensions and cost are absolutely the best on the market. It is now possible to have the RF equipment needed for plasma excitation at a fraction of the cost available from all our competitors. The overall dimensions are 120 x 80 x 55 mm; this is possible because of special variable inductor tuning elements developed by Gambetti. Low permeability ferrite cylinders have been used; a lead screw mechanism permits to precisly move the cylinder into a solenoid, thus varying the solenoid inductance. This is also a very reliable solution due to the absence of moving contacts therefore there is no risk of arcing. GGK-MM1 Features and benefits Most compact RF tuner on the market: 120 x 80 x 55mm Extremly low cost Input connector BNC Output connector N-Type GGK-MM2 internal view