MFS02 Thermal Mass Flow Sensor For ultra fast measuring of gas flow and direction

Transcription

1 W MFS02 Thermal Mass Flow Sensor For ultra fast measuring of gas flow and direction Benefits & Characteristics Detection of flow direction Ultra fast response time Robust construction Excellent long term stability Excellent for low mass flow Bare sensor element resists short-term up to +275 C Low power consumption Small thermal mass Customer specific sensor available upon request Illustration 1) chip standard exposed H2 H W H2 H W L H L L2 L 1) For actual size, see dimensions Technical Data Dimensions (L / L2 x W x H / H2 in mm): chip 3.5 x 5.1 x 0.5 standard 38.2 x 10.8 x 1.0 / 2.0 exposed 34.2 / 37.4 x 10.8 x 1.0 / 2.0 Operating measuring range: 0 m/s to 1.5 m/s (full bridge mode) 0 ml/min to 100 ml/min (full bridge mode) 0 m/s to 150 m/s (CTA mode) 0 l/min to 10 l/min (CTA mode) Minimum operating range: 0 ml/min to 1 ml/min Response sensitivity: m/s (20 microliter/min) Accuracy: < 2 % of the measured value (dependent on the electronics and calibration) Response time t 63 : < 10 ms DFMFS02 + DFMFS02 on PCB_E /29

2 MFS02 Thermal Mass Flow Sensor For ultra fast measuring of gas flow and direction Temperature range (chip): -40 C to +160 C Temperature range (gas): -40 C to +80 C (maximal +80 C less than chip temperature) Temperature sensitivity: < 0.1 % / K (dependent on the electronics) Connection: bonding pads 2 elements: R high (0 C) = 710 Ω ±10 % R A, R D 2 elements: R low (0 C) = 530 Ω ±10 % R B, R C Matching between elements: < 2 % 1 element: Pt RTD similar to Pt1000 Voltage range (nominal):* 2 V to 6 V (full bridge mode) Bridge offset (full bridge mode): Maximal ±50 mv at V CC = 5 V; typical ±10 mv TCR bridge offset (full bridge mode): Maximal ±50 ppm/k x V CC /2 Power consumption (no flow): 10 mw to 50 mw (resp. chip temperature +50 C to +160 C) * Customer specific alternatives available Pin Assignment Pt1000 R D R A /R D R A R B R C /R B R C Pt1000 R A R B R C R D RB, RC - heater / RA, RD - temperature sensor DFMFS02 + DFMFS02 on PCB_E /29

3 MFS02 Thermal Mass Flow Sensor For ultra fast measuring of gas flow and direction Order Information - Bonding Pads Sensor element MFS 02 Order code Sensor element on PCB (standard) MFS02.PSTD.0 Order code Sensor element on PCB (exposed) MFS02.PEXP.0 Order code Additional Electronics Evakit: Amplifier module: Document name: MFS02 EvaKit_E DFMFS_Amplifier_Module_E Additional Documents Application note: Document name: AFMFS02_E DFMFS02 + DFMFS02 on PCB_E2.2.4 Innovative Sensor Technology IST AG, Stegrütistrasse 14, CH-9642 Ebnat-Kappel, Switzerland, Phone: +41 (0) Fax: +41 (0) info@ist-ag.com Web: All mechanical dimensions are valid at 25 C ambient temperature, if not differently indicated All data except the mechanical dimensions only have information purposes and are not to be understood as assured characteristics Technical changes without previous announcement as well as mistakes reserved The information on this data sheet was examined carefully and will be accepted as correct; No liability in case of mistakes Load with extreme values during a longer period can affect the reliability The material contained herein may not be reproduced, adapted, merged, translated, stored, or used without the prior written consent of the copyright owner Typing errors and mistakes reserved Product specifications are subject to change without notice All rights reserved 3/29

4 L MFS02 Amplifier Module Thermal Mass Flow Sensor For demonstration and evaluation of the MFS02 Benefits & Characteristics Single supply 12 V DC Separate temperature sensor on chip Interfacing with screw termination block Illustration 1) 1) For actual size, see dimensions Technical Data W Flow channel and pneumatic connectors mounted Monitoring for internal supply, offset and heater voltages at termination block Adjustment with three trimming potentiometers (gain, offset, heater voltage) H Dimensions (L x W x H in mm): 70 x 35 x 30 Operating measuring range: 0 m/s to 2 m/s (0 ml/min to 240 ml/min) Integrated sensor: MFS02 Temperature sensor: Pt RTD similar to Pt1000 (passive - directly wired to output) Voltage range (heater): 2 V DC to 5 V DC Current consumption: < 50 ma Supply voltage: 12 V DC external supply (no reverse polarity protection) Output signal range (flow): -1.8 V DC to 12 V DC (not linearized), adjustable with trimming potentiometer Gain: 23 to 10000, adjustable with trimming potentiometer Analog output load: R L 25 kω (output short circuit protected) Heater power: approx. 6.6 mw at 2 V heater voltage, 14.9 mw at 3 V heater voltage approx mw at 4 V heater voltage, 41.3 mw at 5 V heater voltage Channel cross section: 2 mm 2 Mounting: 2 x M3 screw Operating mode: full bridge mode PRELIMINARY DFMFS_Amplifier_Module_E2.2_preliminary 4/29

5 MFS02 Amplifier Module Thermal Mass Flow Sensor For demonstration and evaluation of the MFS02 Pin Assignment pneumatic connector sensor pneumatic connector V CC = 12 V DC GND V out diff temperature temperature 5.5 V DC out [-1.8 V DC to 12 V DC ] sensor PT1000 sensor PT V DC out Heater voltage output [0 V DC to 5.7 V DC ] Offset voltage output [-1.8 V DC to 5.7 V DC ] R 1 (gain) R 4 (offset) R 5 (heater) Order Information IST_A05_Flowmodul mit MFS02 Order code Additional Documents Datasheet: Application note: PRELIMINARY Document name: DFMFS02 + DFMFS02 on PCB_E AFMFS02_E DFMFS_Amplifier_Module_E2.2_preliminary Innovative Sensor Technology IST AG, Stegrütistrasse 14, CH-9642 Ebnat-Kappel, Switzerland, Phone: +41 (0) Fax: +41 (0) info@ist-ag.com Web: All mechanical dimensions are valid at 25 C ambient temperature, if not differently indicated All data except the mechanical dimensions only have information purposes and are not to be understood as assured characteristics Technical changes without previous announcement as well as mistakes reserved The information on this data sheet was examined carefully and will be accepted as correct; No liability in case of mistakes Load with extreme values during a longer period can affect the reliability The material contained herein may not be reproduced, adapted, merged, translated, stored, or used without the prior written consent of the copyright owner Typing errors and mistakes reserved Product specifications are subject to change without notice All rights reserved 5/29

6 MFS02 EvaKit Thermal Mass Flow Sensor For easy evaluation of the MFS02 Benefits & Characteristics High sensitivity Software included with graphical signal representation Excellent measuring dynamics Data logging function Fully calibrated and with USB connection Integrated flow channel with pneumatic connections Illustration 1) L H 1) For actual size, see dimensions W Technical Data Dimensions (W x L x H in mm): 55 x 70 x 33.5 Operating measuring range: 0 ml/min to 200 ml/min Power supply: USB Accuracy: ±1 % at +25 C Pneumatic connection: Hose with Ø inner = 4 mm PC connection: USB 1.1 or 2.0 compatible DFMFS02 EvaKit_E2.2 6/29

7 MFS02 EvaKit Thermal Mass Flow Sensor For easy evaluation of the MFS02 Pin Assignment pneumatic connector sensor USB pneumatic connector V DA_D GND V 12 V DA_A DA_B DA_B: temperature sensor / DA_D: flow low / DA_A: U Right (flow high) Order Information Order code Microflowsens EVA-KIT Additional Documents Datasheet: Application note: Document name: DFMFS02 + DFMFS02 on PCB_E AFMFS02_E DFMFS02 EvaKit_E2.2 Innovative Sensor Technology IST AG, Stegrütistrasse 14, CH-9642 Ebnat-Kappel, Switzerland, Phone: +41 (0) Fax: +41 (0) info@ist-ag.com Web: All mechanical dimensions are valid at 25 C ambient temperature, if not differently indicated All data except the mechanical dimensions only have information purposes and are not to be understood as assured characteristics Technical changes without previous announcement as well as mistakes reserved The information on this data sheet was examined carefully and will be accepted as correct; No liability in case of mistakes Load with extreme values during a longer period can affect the reliability The material contained herein may not be reproduced, adapted, merged, translated, stored, or used without the prior written consent of the copyright owner Typing errors and mistakes reserved Product specifications are subject to change without notice All rights reserved 7/29

8 Application Note Thermal Mass Flow Sensor MFS02 Product Variant 1 Sensor mounted in cavity Variant 2 Exposed active sensor part Technical Data Sensor element: Measuring range: Mechanical dimensions Variant 1 (L*B*H): Mechanical dimensions Variant 2 (L*B*H): MFS02 (see separate datasheet) ±0.001 ±2m/s (0 ±240ml/min) 38.2mm * 10.8mm * 1.0mm (including Glob Top 2.0mm) 37.4mm * 10.8mm * 1.0mm (including Glob Top 2.0mm) Wiring electrically replacement circuit diagram MFS PT RC 6 RC / RB 5 RB 4 RA 3 RA / RD 2 RD 1 PT1000 Application recommendation Flow area Var. 1 Var. 2 8/29

9 Application Note Thermal Mass Flow Sensor MFS02 Pin definition (not bonded) R A R B R C R D Temperature Sensor Pin No Figure 1. Design of MFS02 Sensor. Table 1. Pin definition of not bonded sensor. Pin no. Description Resistant Value Temperature 1, 8 Temperature Sensor At T=0 C 2, 3 R A 710 Ω +/- 10% At T=0 C 3, 4 R D 710 Ω +/- 10% At T=0 C 5, 6 R B 530 Ω +/- 10% At T=0 C 6, 7 R C 530 Ω +/- 10% At T=0 C 9/29

10 Application Note Thermal Mass Flow Sensor MFS02 Pin definition (bonded versions) Table 2. Pin definition. Pin no. Description Resistant Value Temperature 1, 8 Temperature Sensor At T=0 C 2, 3 R A 710 Ω +/- 10% At T=0 C 3, 4 R D 710 Ω +/- 10% At T=0 C 5, 6 R B 530 Ω +/- 10% At T=0 C 6, 7 R C 530 Ω +/- 10% At T=0 C Temp. Sensor RD RC RB RA Pin No Figure 2. Sensor MFS 02 bonded in PCB. 10/29

11 Application Note Thermal Mass Flow Sensor MFS02 Pinning of microflow sensor Sensor membrane (active sensor structure) Application recommendation 3.5 Pt Flow area Sensor Glob Top PCB Electronics Rc 500 Ra 650 Rb 500 Rd Bonding Area Construction size All dimensions are in μm. 11/29

12 Application Note Thermal Mass Flow Sensor MFS02 Electronic circuit recommendation The 4 elements can be connected to a Wheatstone bridge circuit. The bridge is operated with a constant bridge supply voltage VCC. The bridge voltage V_Br = V1-V2 is dependent on the flow. In order to measure high flow speeds up to 50m/s the sensor element can be connected in a constant temperature anemometer (CTA). v [m/s] Vout [mv] Flow [ml/min] Typical signal curve between m/s (example) Sensor in simple bridge mode Sensor in CTA-mode (constant temperature anemometer) Both circuits in combination Rs1 = RA; Rs2 = RD; Rs3 = RC; Rs4 = RB All mechanical dimensions are valid at 25 C ambient temperature, if not differently indicated. All data except the mechanical dimensions only have information purposes and are not to be understood as assured characteristics. Technical changes without previous announcement as well as mistakes reserve. The information on this data sheet was examined carefully and will be accepted as correct; No liability in case of mistakes. Load with extreme values during a longer period can affect the reliability. All rights reserved. The material contained herein may not be reproduced, adapted, merged, translated, stored, or used without the prior written consent of the copyright owner. Typing errors and mistakes reserved. Product specifications are subject to change without notice. All rights reserved 12/29

13 MFS02 Amplifier Module Product The Microflow amplifier module is an easy to use demonstration and evaluation board for the Microflow MFS02 series sensors. The signal of the integrated sensor is amplified to a range of [0 10Vdc] and then applied to the analog output Vout diff. For further information about the Microflow MFS02 sensor see the MFS02 datasheet. Advantages Single supply 12.0Vdc Adjustment with 3 multiturn trimming potentiometer (gain, offset, heater voltage) Interfacing with screw termination block Separate temperature sensor Monitoring for internal supply, offset and heater voltages at termination block Flow channel and pneumatic connectors mounted Technical Data Supply voltage: 12.0Vdc external supply, no reverse polarity protection! Current consumption: < 50mA Measuring range: ±0.001 ±2m/s (0 ±240ml/min) Output signal: -1.8Vdc +12.0Vdc (not linearized) Gain: adjustable with trimming potentiometer Analog output load: R L 25kΩ, output short circuit protected Temperature sensor: PT1000 temperature sensor according to DIN IEC Supported sensor: MFS02 (Microflow sensor on polymer membrane) Heater voltage range: 2.0V 5.0Vdc Heater power dissipation: 2.0V heater voltage, 3.0V heater voltage, 4.0V heater voltage, 5.0V heater voltage Mounting: 4 x screw M3 Mechanical dimension (L*W*H): 35mm x 70mm x 30mm Channel cross section: 2mm 2 Wiring electrically VCC = 12.0Vdc 2 GND 3 Vout diff [-1.8Vdc +12.0Vdc] 4 Temperature sensor PT Temperature sensor PT Vdc out 7-5.0Vdc out 8 Heater voltage output [0 5.7Vdc] 9 Offset voltage output [ Vdc] 13/29

14 MFS02 Amplifier Module Pneumatic connection and adjustments Equipment needed Adjustable flow source 0 2m/s (0 ±240ml/min) Pneumatic tube outer diameter 6mm, inner diameter 4mm (e.g. FESTO PUN 6x1) 12.0Vdc power supply / 50mA Voltage meter Screwdriver size 0 Series of actions Unpack the module and place it horizontally on a surface Fit and tighten pneumatic tube (not included) Wiring electrically as described on page 1 Connect voltmeter to terminal 8 Adjust heater voltage with R H to 3.3Vdc Connect voltmeter to terminal 3 Adjust gain with R G clockwise (max. 12 turns) to minimum Adjust output signal with R O to 5.0Vdc 1) Adjust flow velocity to 2m/s (240ml/min) 2) With R G adjust gain until output signal reaches 10.0Vdc 3) Adjust flow velocity to 0m/s 4) With R O adjust output signal to 5.0Vdc 5) Repeat steps 1) to 5) until the output signal reaches the requirements of 0m/s = 5.0Vdc and 2m/s = 10.0Vdc If the pneumatic connections are interchanged the output signal will be 5.0Vdc to 0Vdc Flow input (flow output) Gain Flow direction pos. output signal 5.0Vdc 10.0Vdc (adjusted) R G 1 R O R H 9 Heater voltage Flow output (flow input) Offset voltage 14/29

15 Characteristics All mechanical dimensions are valid at 25 C ambient temperature, if not differently indicated. All data except the mechanical dimensions only have information purposes and are not to be understood as assured characteristics. Technical changes without previous announcement as well as mistakes reserve. The information on this data sheet was examined carefully and will be accepted as correct; No liability in case of mistakes. Load with extreme values during a longer period can affect the reliability. All rights reserved. The material contained herein may not be reproduced, adapted, merged, translated, stored, or used without the prior written consent of the copyright owner. Typing errors and mistakes reserved. Product specifications are subject to change without notice. All rights reserved MFS02 Amplifier Module Instruction Manual 15/29

16 MFS02 EVA Kit 16/29

17 MFS02 EVAKit Index Introduction Technical data Microflow-Sensor MFS Data sheet EVAKit Pin Configuration Driver, Software and Accessories FTDI CDM Drivers Microflow Required Accessories Microflow GUI Connect Automatically Connect Manually Write Data Data Retrieval start/stop Diagram Preferences Calibration Mode EvaKit Calibration Device Parameters Calibration Parameters Temperature Calibration Parameters URight Calibration Parameters Flow Calculation of the Polynomial Parameters for Re-Calibration Temperature Flow_High ( = URight ) Flow_Low /29

18 MFS02 EVAKit Introduction The EVAKit is a gas flow module, based on the RTD On Membrane -Sensor Technology (ROM) of the company IST AG. (10µm thin Polymer membrane on glass substrate) Microflow Sensors (3.5 x 5 x 0.5mm) manufactured using this technology are characterized by a high sensitivity, high measuring dynamics, a wide measuring range, stability and low power consumption. The EVAKit is used for a simple evaluation of this sensor technology for customer applications in order to test the properties of the sensors for a possible future series application. The EVAKit has been calibrated for operation with air under standard conditions. Other gases are possible on request. After installing a Windows Software and driver (see subsequent sections) and establishing USB connection, the device is ready for operation. This connection is also used for feeding. The measuring range varies from ml/min air. The air is fed over the provided hose connectors (hose ID = pun 6x1) in direction of the arrow. Possible application areas for Microflow Sensors Spirometer Differential pressure measuring (bypass module instead of differential pressure sensors) Low flow / high flow gas measuring Gas dosage Aspiration monitoring in climate and gas measuring devices 3 18/29

19 MFS02 EVAKit 1 Technical data Microflow Sensor MFS Data sheet Flow Sens MFS02 Product Especially for fast flow measurements, the Flow Sens MFS02 was developed. Due to a membrane system the thermal mass is reduced to the minimum. Very fast response time and low power consumption are resulting from this little thermal mass. The membrane is just a few microns thick and is carried by a glass substrate. Therefore the system is robust and the device can be handled easily. Advantages Fast response time Small mass flows Detection of flow direction Low power consumption Small thermal mass Robust Best price-performance ratio Applications Medical devices Differential pressure sensors Microfluidic (gas) Technical Data Measuring principle Thermal Measuring range m/s (50m/s) Response time < 10 ms Temperature range chip C Temperature range gas C Electrical connection Bonding on PCB or other carrier 2 Elements R high (0 C) = % R A, R D 2 Elements R low (0 C) = % R B, R C Matching between elements Less than 2% 1 Element Temperature sensor Pt1000 Required voltages Typical 3-7 V dc Bridge offset Max +- 50mV (@ 5V Ub; Typ mV TK Bridge offset Max +- 50ppm/K x Ub/2 Power consumption still air 10 50mW (resp. Chip temperature C) Substrate glass substrate Sensor membrane Organic membrane; thickness less than 10 microns In general All data are temporary and valid in air. Other media and higher requirements upon request. No responsibility accepted. 4 19/29

20 MFS02 EVAKit Flow Sens MFS02 Pinning of microflow sensor Application recommendation Sensor membrane (active sensor structure) 3.5 Pt Flow area Sensor Glob Top PCB Electronics Rc 500 Rb 500 Bonding Area Ra 650 Rd Electronic circuit recommendation Construction size The 4 Elements are connected to a Wheatstone bridge circuit. The bridge is operated with a constant bridge supply voltage. The bridge voltage V_Br = V1-V2 is dependent on the flow. v [m/s] Vout [mv] Flow [ml/min] Typical signal curve between m/s (example) VCC R A V1 V R C V2 Signal processing: - simple bridge as depicted on the left - CTA (constant temperature anemometer) - Both circuits in combination - Customer developed resistive signal processing circuits R D R B GND 5 20/29

21 IInstruction Manual MFS02 EVAKit 1.2 EVAKit Pin Configuration JTAG Interface RST/NMI 2 TCK 3 TMS 4 TDI 5 TDO 6 GND 7 VCC_IN Analog Exits Gnd DA_D 3.6V x x DA_B DA_A 12V 15V x DA_B : Temperature DA_D : Flow Low DA_A : URight (Flow High) The voltage of the analog exits ranges between V. For more details on configuration, please see point /29

22 MFS02 EVAKit 2 Driver, Software and Accessories 2.1 FTDI CDM Drivers To enable communication between EVAKit and your computer, it might be necessary to install the Virtual COM Port Driver by FTDI to ensure that the Microflow software can identify the EVAKit. Latest drivers can be found under Microflow The programme Microflow enables communication between EVAKit and your computer. Installation: Microflow is available as a.zip file and has to be unzipped into a target directory of your choice. The programme can be started by executing the file "frmistmicroflow.exe" in your target directory. 2.3 Required Accessories To connect the EVAKit with your computer a USB cable type Mini-B (5-pin) is required, see illustration below. If the EVAKit needs to be re-calibrated, an additional measuring device for airflow is required and a software capable of calculating regression polynomial parameters (e.g. Datafit or Excel). 7 22/29

23 MFS02 EVAKit 3 Microflow GUI 3.1 Connect Automatically Once the EVAKit has been connected to the computer, connection can be started with Connect Automatically. The corresponding port will be searched automatically and inserted into the text field above and the connection to the EVAKit will be started. 3.2 Connect Manually If "Connect Automatically" cannot detect the EVAKit, you can try to establish a connection to the EVAKit manually. You need to indicate the address of the COM port to which the EVAKit is connected in the text field above the button. Once it has been detected, the address should be displayed in the device manager under Ports (COM and LPT) USB Serial Port (COMX). The number which needs to be indicated in the text field is x. (The device manager can be opened e.g. over control panel Administrative Tools Computer management or with Start Run Open: devmgmt.msc OK.) If the USB serial port is not displayed in the device manager, the driver, as instructed in point 2.1, might not have been installed correctly. 8 23/29

24 MFS02 EVAKit 3.3 Write Data... The button will only be activated once the data retrieval (see 3.4 below) has been started. A Log file with den measurements will be generated. The name of the file is MESSDATUM_STARTZEIT.txt and can be found in the program directory in the subfolder "Data". The measurements can for example be imported into Excel. In the dialog the interval between the measurements (sampling rate in milliseconds) and the overall duration (duration in seconds) can be specified. As soon as OK is pressed, the recording is started. 3.4 Data Retrieval start/stop As soon as the connection to the EVAKit has been established, the data retrieval can be started or stopped using the Play / Pause buttons. The data are continuously read by the Kit and displayed in the diagram. 3.5 Diagram Preferences The diagram settings can be displayed using the button at the top left in the main window. The following dialog appears: 9 24/29

25 MFS02 EVAKit The two output modes Flow_Low und Flow_High can be chosen in the dropdown menu. With Flow_Low the flow value is calculated from the voltage at the flow sensor. With Flow_High the flow value is calculated from the voltage URight. Flow_Low can be calibrated over the parameters in 4.4 and Flow_High with the parameters in 4.3. Scale X-Axis: These settings do not cause anything. The scaling cannot be changed. Always the last 200 values are displayed. Scale Y-Axis: Here, the start and end values of the Y-Axis can be specified. If in both values, "-1" is entered, the scaling of the Y-Axis will automatically adjust itself so that all values are displayed. However the Y-Axis will also adjust itself with fixed settings as soon as the EVAKit data exceed the range. Label X/Y- Axis, Plot Title: With this the axis caption and the diagram title can be changed. The axis caption does not affect the scaling. Grid, Legend and Background colour are not available /29

26 MFS02 EVAKit 3.6 Calibration Mode If the EVAKit needs to be re-calibrated, an additional reference measuring device for the flow rate and software capable of calculating regression polynomial parameters (e.g. Datafit Trial version or Excel). The "Calibration Mode" can be accessed over the menu Tools -> Calibration Mode. Also in the Menu Tools you can find "Command Mode". However, it is not available. Calibration Mode is only available once the EVAKit has been connected and the data retrieval has been paused. Parameter Get: Parameter Set: Parameter Save: Write Config... The calibration parameters are read from the EVAKit Flash memory. The changed parameters are temporarily stored in the EVAKit memory. Once the power supply to the Kit is interrupted (e.g. by pulling the USB cable), the old values will be re-established. The parameters will be saved permanently and will be preserved even in the event of a loss of power supply. However, they need to be transferred to the EVAKit using Parameter Set" previously. Opens a dialog in order to save the parameter data into a file Read Config... Previously saved parameters can be retrieved by the file /29

27 MFS02 EVAKit 4 EvaKit Calibration The EVAKit has already been pre-calibrated. Further adjustments should normally not be necessary. In Calibration Mode a lot of parameters can be changed. It is therefore recommendable to create a backup copy with Write Config previous to any changes. This will allow restoring a working configuration just in case. Please see point 4.5 if information is needed on what influence the various parameters have on the calibration. 4.1 Device Parameters None of the parameters under this rubric have an influence on the measurement performance except the usdac_x values. Most of the settings here should be clear due to their name. usdac_a - D Need to be in the range (It is advisable to set them all to 0) 4.2 Calibration Parameters Temperature ustemperaturemode unused! ftemperatureoffset Offset correction for temperature display in GUI ftemperatureincrease linear correction for temperature display in GUI ftemperaturedacoffset ] ftemperaturedacx1 ]Polynomial factors for analog exit DA_B ftemperaturedacx2 ] ftemperaturedacx3 ] iresistorbridge unused! 4.3 Calibration Parameters URight URight is displayed once Flow_High has been chosen. furighttemperatureoffset Offset correction for temperature dependence furighttemperatureincrease linear correction for temperature dependence furightoffset unused! Form of the Regression Polynomials: ax^5 + bx^4 + cx^3 + dx^2 + ex + f [x indicates the modified raw data URight] furneg_x5, furpos_x5 =a furneg_x4, furpos_x4 =b furneg_x3, furpos_x3 =c neg_x parameters are used if x <= zeroline. furneg_x2, furpos_x2 =d pos_x parameters are used if x > zeroline. furneg_x1, furpos_x1 =e zeroline see 4.4 Calibration Parameters Flow furneg_off, furpos_off =f UR_DAC_A_inc UR_DAC_A_off UR_offset_cor unused! upper limit for the analog exit DA_A in [ml/min] additional Offset of neg_off resp. pos_off 12 27/29

28 MFS02 EVAKit 4.4 Calibration Parameters Flow ce Flow_Low has been chosen. zeroline : raw data threshold value, from which the polynomial for the negative range is changed to the polynomial for the positive range. Form of Regression Polynomials: ax^5 + bx^4 + cx^3 + dx^2 + ex + f [x indicates the raw data flow] neg_x5, pos_x5 = a neg_x4, pos_x4 = b neg_x3, pos_x3 = c neg_x2, pos_x2 = d neg_x1, pos_x1 = e neg_off, pos_off = f Flow_DAC_D_inc Flow_DAC_D_off Flow_offset_cor neg_x parameters are used if x <= zeroline. pos_x parameters are used if x > zeroline. unused upper limit for the analog exit DA_D in [ml/min] additional Offset of neg_off or pos_off 4.5 Calculation of the Polynomial Parameters for Re-Calibration It is possible to calibrate the indicated values of Flow_Low, Flow_High and the temperature values. The above mentioned parameters can be used as default values to depict the raw data on the displayed values. To re-calibrate a reference measuring device is required in order to be able to adjust the raw data to the measurement values. Below you will find a short description of how the in GUI displayed values respectively analog exits (green) are calculated from raw data (red) and parameters (blue Temperature Display in Microflow GUI: x = raw data a...d = ftemperaturedacx3... ftemperaturedacoffset Temperature = (x*ftemperatureincrease) + ftemperatureoffset Analog exit DA_B = a*x^3 + b*x^2 + c*x + d Attention: Changes of the parameters for the analog exit affect also the values of Flow_Low and Flow_High! Flow_High ( = URight ) In order to achieve the raw data, all parameters of "Calibration Parameters URight" are set 13 28/29

29 MFS02 EVAKit to 0, except furpos_x1 = 1. With these settings data pairs (URight setpoint value) are determined by measurements. Afterwards the parameters pos_x5...pos_off respectively neg_x5...neg_off can be determined based on the data pairs for the regression polynomial (e.g. in Datafit). Analog exit (Pin DA_A) and display in Microflow GUI: r0 = raw data r = modified raw data (temperature dependence) a...f = furpos_x5... furpos_off respectively furneg_x5... furneg_off r = r0 + (TempRawdata*fURightTemperatureIncrease + furighttemperatureoffset) Flow_High = (ar^5 + br^4 + cr^3 + dr^2 + er + f) + UR_offset_cor Analog exit: DA_A = ( Flow_High / UR_DAC_A_off ) * 13.5V, Analog exit is min. 0V and max 13.5V Flow_Low To determine the raw data all parameters in "Calibration Parameters Flow" are set to 0 except pos_x1 = 1 and pos_off to approx pos_off might differ slightly. The parameter should be selected in such a way that the raw data for the entire measurement range (0-1 l/min) can be displayed by GUI. The raw data are calculated as follows: Raw data = [flow (slpm) in GUI] * pos_off [example: For an applied flow of 100 ml/min, pos_off = and pos_x1 = 1 the value is displayed in the Microflow GUI. This is equivalent to a raw data value of (-31385) = Therefore the data pair ( ) would be determined.] Afterwards the parameters pos_x5...pos_off resp. neg_x5...neg_off for the regression polynomial can be determined based on the data pairs (e.g. in Datafit). Analog exit (Pin DA_D) and display in Microflow GUI: x = raw data a...f = pos_x5... pos_off resp. neg_x5... neg_off Flow_Low = (a*x^5 + b*x^4 + c*x^3 + d*x^2 + e*x + f) + Flow_offset_cor Analog exit: DA_D = (Flow_Low / FLOW_DAC_D_off) * 13.5V,Analog exit is min. 0V und max. 13.5V 14 29/29