OPERATION MANUAL Model 30 COLLIMATED UV LIGHT SOURCE

Transcription

1 OPERATION MANUAL Model 30 COLLIMATED UV LIGHT SOURCE 685 RIVER OAKS PARKWAY SAN JOSE, CA / P/N , Rev. G 03/14/07

2 COLLIMATED UV LIGHT SOURCE Definitions of the following Symbols and Words should be understood before working with this manual and/or the equipment with this manual. The definitions are: Caution -indicates a potentially hazardous situation which, if not avoided, may result in minor or moderate injury. Warning - Indicates a potentially hazardous situation which, if not avoided, could result in death or serious injury. Danger -Indicates an eminently hazardous situation which, if not avoided, will result in death or serious injury. Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 1

3 Sec. TABLE OF CONTENTS Page PURPOSE, SCOPE AND REVISION HISTORY INTRODUCTION GENERAL DESCRIPTION NEAR UV LIGHT SOURCE SYSTEMS MID AND DEEP UV LIGHT SOURCE SYSTEMS 1.2 APPLICATION GETTING HELP RECEIVING AND UNPACKING THE EQUIPMENT CHECK SHOCK WARNING LABEL OPEN CRATE AND UNPACK EQUIPMENT SAFETY PRECAUTIONS HAZARDS TO PERSONNEL UV HAZARD BURN HEAT BURN HAZARD HAZARDS DUE TO LAMP EXPLOSION HAZARDS DUE TO ELECTRICAL SHOCK HAZARDS DUE TO OZONE HAZARDS DUE TO MERCURY EXPOSURE FROM LIGHT SOURCE BREAKAGE TOXIC OR HAZARDS SUBSTANCES AND ELEMENTS CONTAINED IN ASSEMBLY LAMP INSTALLATION AND CLEANING ITEMS SUPPLIED BY THE FACILITY INSTALL OR CHANGE THE LAMP ADJUSTING THE LAMP POSITION CLEANING OPTICAL COMPONENTS SYSTEM OPERATION MEASURING UNIFORMITY ADJUSTING UNIFORMITY MIRROR ALIGNMENT LIGHT SOURCE SETUP FOR MIRROR ALIGNMENT SECONDARY MIRROR ADJUSTMENT SYSTEM INTERLOCKS UV LIGHT SOURCE INTERLOCKS The Personal Safety interlock The Overheat System interlock The Air-flow System Safety interlock HAZARDOUS MATERIALS USED WITH THE SYSTEM ISPROPYL ALCHOL Mercury SYSTEM SPECIFICATIONS AND DRAWINGS SYSTEM SPECIFICATIONS SYSTEM DRAWINGS...30 Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 2

4 PURPOSE SCOPE AND REVISION HISTORY PURPOSE. To provide instructions on how to receive/ship, install, handle, use, trouble-shoot and maintain the UV LIGHT SOURCE hereinafter referred to as the EQUIPMENT. SCOPE. The user of this document should have a complete understanding of the EQUIPMENT. OBJECTIVE. To ensure that this document provides as much information as possible on the Equipment so that few, if any, questions will be raised relative to its operation and functionality over the short and long-term. REVISION HISTORY. Purpose Rev Level Release Date New Release A 7/96 Updated for ECO Control, Per ECO 8755 B 12/03 Updated for Revised Drawing Spec's, Per ECO 8787 C 2/04 Updated for Safety, Per ECO 8896 D 09/04 Updated by Placing Spec/Dwg Info Last, Per ECO 8932 E 10/04 Updated TOC Inconsistencies, Per ECO 9249 F 02/06 Added toxic table in Chinese ECO 9625 G 03/07 The Remainder of This Page is Intentionally Left Blank Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 3

5 Copyright 2004 by OAI All rights reserved. No part of this publication may be reproduced, transmitted, transcribed, stored in a retrieval system or translated into any language or computer language, in any form or by any means, electronic, mechanical, magnetic, optical, chemical, manual or otherwise, without the prior written permission of OAI. Disclaimer: OAI makes no representations or a warranty with respect to the contents hereof and specifically disclaims any implied warranties or merchantability or fitness for any particular purpose. Further, OAI reserves the right to revise this publication and to make changes from time to time in the content hereof, without obligation of OAI to notify any person of such revision or changes. WARNING! The high intensity energy produced by systems employing mercury arc lamps can se serious eye or skin damage. Personnel working with this equipment must wear eye protection with suitable filtration to block ultraviolet and infrared radiation, and avoid directly exposing skin for extended periods. OAI will not be responsible for injuries arising from incorrect or unprotected work with these Light sources. They should not be adjusted or serviced by personnel lacking specific training on them. Before installing or operating this equipment, be sure to read Section 3, on safety. Due to the high voltage to start mercury arc lamps, the light source power supply starter circuit may create RF noise during the start up cycle that might possibly have an effect on sensitive electronic equipment in the immediate area. Noise may also be created on the power supply AC input line during the start up cycle. To eliminate this potential problem, it is recommended that the power supply and lamp be started before turning on any sensitive electronics in the immediate area. If this is not possible, it is also recommended that the power supply and cabling be placed at a distance from any sensitive electronics that has not been adequately shielded. Before installing or operating this equipment, be sure to read Section 4, SAFETY PRECAUTIONS Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 4

6 1 INTRODUCTION This manual is intended to provide instructions and recommendations for the proper use and maintenance of the EQUIPMENT. 1.1 GENERAL DESCRIPTION NEAR UV LIGHT SOURCE SYSTEMS UV light sources produce an intense, uniform, collimated beam of ultraviolet energy. The radiation from either a 200W, 350W, 500W, 1000W and 2000W Mercury (Hg) arc lamp is collected by an ellipsoidal reflector and directed to a dielectric turning mirror. This dielectric coated mirror reflects the UV radiation and removes the IR (heat) portion of the radiation. The beam converges onto the optical integrator made up of arrays of 49 or more closely-spaced lenses. The exit beam diverges through the open shutter to the second dielectric mirror, where it is reflected through the output (collimating) lens onto the exposure plane. In a Near UV system, the first and second dielectric mirror have dielectric coatings which have been optimized to reflect the radiation in the 350nm to 450nm spectral band and remove most of the unwanted longer-wavelength energy (IR). This dramatically reduces the IR (heat) delivered to the exposure plane. Controls for adjusting the lamp s position within the main reflector housing are located inside one of the access doors of the light source system. Typically, power for the blower, shutter, and accessories is supplied via a multi-conductor cable which is located on the rear of the housing. Some systems use a separate connector for the blower fan. Lamp power is fed through the high-voltage cables permanently mounted to the housing. The beam size and shape can be controlled by the use of replaceable apertures located just in front of the collimating lens. These apertures are accessible through either side of the lens housing assembly. Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 5

7 1.1.2 MID AND DEEP UV LIGHT SOURCE SYSTEMS Mid UV (260nm-325nm) and Deep UV (200nm-260nm) Light systems differ from the standard system in several ways. The optics are optimized for high reflection and transmission at shorter wavelengths. The mirrors are tuned to the wavelength spectral regions desired. All transmitting optics (optical integrator and collimating lens) are made of hightransmission (low-absorption) quartz materials. The lamp used can be either Mercury (Hg), Xenon (Xe), Mercury-Xenon (Hg- Xe), or Mercury-Xenon Plus (Hg-Xe Plus). The section depends on the wavelength and level the radiation desired. The 200 watt through 1000 watt (Hg) type lamps are installed with the anode (+) down, while the 2000 watt (Hg) are installed with anode (+) up. The 500 watt through 2000 watt (Xe) types are installed with the anode (+) up. In all situations, the gold band on the envelope should be down. The electrical system for the Mercury-only lamp is different from the Xenon type of lamp. Different power supplies must be used as (Hg) lamps operate at a higher voltage and lower current, while the (Xe) lamps operate at a significantly higher current and lower voltage. For example, a typical 500W (Hg) lamp operates at 67 volts / 7.5 amperes, while a typical (Xe) lamp operates at 30 volts / 16.7 amperes.) 1.2 APPLICATION The EQUIPMENT is designed to emit collimated UV light. OAI s Light Source Systems are high performance systems intended for a variety of UV exposure related applications. Typical applications include: * Photoresist Patterning * Flood Exposure * Resist Stabilization * Edgebead Exposure Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 6

8 1.3 GETTING HELP Assistance in answering questions relating to the operation of the EQUIPMENT can be obtained by calling OAI s customer support at 1 (408) between the hours of 8:00 A.M. and 5:00 P.M., Pacific Standard Time. Outside normal business hours, or at any other time, written questions may be Faxed to 1 (408) to the attention of the Optical Products Group Customer Support. The Remainder of This Page is Intentionally Left Blank Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 7

9 2 RECEIVING AND UNPACKING THE EQUIPMENT Normal receiving inspection procedures should be followed prior to unpacking the EQUIPMENT including the inspection of the Shock Warning label on the front of the crate. Then, use a copy of these guidelines when ready to unpack and prepare the Equipment for installation. Be sure to follow all safety precautions used during the handling of packaging and related materials. 2.1 CHECK SHOCK WARNING LABEL The color of the liquid capsule on the Shock Warning label affixed to the side of the UV LIGHT SOURCE crate (shown in Figure 3-1) should be clear; if it s red, the shipment should be inspected for physical damage. If damage is found, reject the shipment per whatever process is used for unacceptable shipments. Check per para. 3.1 Remove clips. Cut straps using metal shears. Figure 3-1. Warning label, straps and clips on front of crated UV LIGHT SOURCE. The Remainder of This Page is Intentionally Left Blank Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 8

10 2.2 OPEN CRATE AND UNPACK EQUIPMENT CAUTION! WEAR SAFETY GLASSES AND GLOVES AS PROTECTION FROM CUTS OR DAMAGE TO EYES WHEN CUTTING STRAPS AND REMOVING CLIPS! 1) If the shipment is accepted, cut and remove any straps securing the crate to the pallet (shown in Figure 3-1). 2) Remove any bolts along the bottom of the front of the crate. 3) If clips are used on the crate, use one hand loosely cupped over each clip to prevent damage to the eyes, pop off the clips around the edges of the front of the crate (shown in Figure 3-1). Use either the claw side of a hammer or a screwdriver to loosen same. 4) Remove the front of the crate and set it aside. 5) Remove any bolts from the bottom of the sides and back of the crate. 6) Lift the remaining three sides of the crate from the pallet and set it aside. 7) The pallet should contain several boxes. Remove the boxes and set them aside. Note: Some of the boxes are very heavy. Use proper lifting techniques when handling this unit Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 9

11 3 SAFETY PRECAUTIONS There are several major hazards to personnel: Ultraviolet light or non-ionizing radiation exposure Lamp explosion Electrical shock Ozone Poisoning UV Burn Hazard Heat Burn Hazard Possible mercury exposure from light source breakage There is also a hazard to the equipment: Risk of damage to the light source during handling and shipping 3.1 HAZARDS TO PERSONNEL Personnel using the UV LIGHT SOURCE should be aware of the hazards that stem from the UV LIGHT SOURCE. This section of the manual describes precautions that help avoid personal injury while using the equipment. Also, be sure to read the Section entitled, SYSTEM INTERLOCKS. The Remainder of This Page is Intentionally Left Blank Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 10

12 3.1.1 UV BURN HAZARD Prolonged exposure to diffused reflection from the output beam, illuminated surfaces in the beam, exposures of even a few seconds to the direct output beam or to the lamp itself, can cause ultraviolet skin burns or burns to the outer layers of the eye. Prolonged skin exposure can cause burns similar to severe sunburn. WARNING! WHEN IN THE VACINITY OF A LIGHT SOURCE WITH ITS COVER REMOVED, ALWAYS WEAR UV FILTERED GLASSES TO PROTECT EYES AND LIMIT EXPOSURE TIME TO UV RADIATION HEAT BURN HAZARD When the UV lamp is on, the lamp heat sink and other metal pieces near the lamp get very hot. The heat sink and other metal pieces are located inside the lamp main housing to protect the operator from burns. The outside of the lamp main housing is safe to touch. If the main lamp housing needs to be opened for service and the lamp is on, the system that the light source is mounted on should be power down and locked out. Then the exhaust should be left on for 15 minutes to cool down the inside of the lamp housing before opening it for service HAZARDS DUE TO LAMP EXPLOSION During operation, the light source is subjected to very high internal pressure; thus there is always the possibility of a lamp exploding due to internal strains or physical abuse. A lamp explosion can also be caused by contamination of the quartz envelope. Handle the lamps only by the metal end caps. Do not touch the quartz with bare hands. A lamp explosion inside the closed light source housing can damage its internal components such as its reflector, light sensor, etc. Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 11

13 The lamp contains mercury, however, any vapor released by an exploded lamp will be drawn out the UV LIGHT SOURCE exhaust and poses no danger to the operator, However, a minute amount of liquid mercury will be contained within the light source housing. Follow the procedures below in the event of a lamp explosion: 1) Clear the area of personnel. 2) Notify the tool owner that mercury is in the facility exhaust. 3) Ensure that the UV LIGHT SOURCE exhaust system is working, then give it thirty minutes of run time to clear out the vapors and for the light source housing to cool to room temperature. 4) If the exhaust system is NOT working, put a full face respirator on prior to opening the light s containment area. 5) Put an extra pair of gloves on over the existing pair. 6) Using an ear syringe, clean out the remaining liquid mercury. 7) Clean up broken glass and debris using a vacuum with a disposable filter attachment. 8) Wipe down the inside of the light source housing using alcohol and cleanroom wipes (or equivalent). 9) After clean-up, dispose of the ear syringe, wipes, vacuum filter and outer pair of gloves in a container marked as mercury contaminated waste. The Remainder of This Page is Intentionally Left Blank Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 12

14 3.1.4 HAZARDS DUE TO ELECTRICAL SHOCK Before changing the lamp or working on the light source, turn off the power at the AC POWER DISTRIBUTION BOX for light sources on systems or turn off the power at the UV power supply for stand alone light sources. After the power has been turned off, verify that the output voltage is zero HAZARDS DUE TO OZONE Do not operate the system without proper room ventilation as some Deep UV lamps produce significant levels of ozone. The Remainder of This Page is Intentionally Left Blank Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 13

15 3.1.6 HAZARDS DUE TO MERCURY EXPOSURE FROM LIGHT SOURCE BREAKAGE During operation, the light source is subjected to 20 to 30 atmospheres of pressure so there is always the possibility of a lamp exploding due to internal strains or physical abuse. A lamp explosion inside the closed light source housing can damage its internal components such as its reflector, light sensor, etc. The lamp contains mercury, however, any vapor released by an exploded lamp will be drawn out the UV LIGHT SOURCE exhaust and poses no danger to the operator. However, a minute amount of liquid mercury will be contained within the light source housing. Follow the procedures below in the event of a lamp breakage: 1) Clear the area of personnel. 2) Notify the tool owner that mercury is in the facility exhaust. 3) Ensure that the UV LIGHT SOURCE exhaust system is working, then give it thirty minutes of run time to clear out the vapors and for the light source housing to cool to room temperature. 4) If the exhaust system is NOT working, put a full face respirator on prior to opening the light s containment area. 5) Put an extra pair of gloves on over the existing pair. 6) Using an ear syringe, clean out the remaining liquid mercury. 7) Clean up broken glass and debris using a vacuum with a disposable filter attachment. 8) Wipe down the inside of the light source housing using alcohol and cleanroom wipes (or equivalent). 9) After clean-up, dispose of the ear syringe, wipes, vacuum filter and outer pair of gloves in a container marked as mercury contaminated waste. Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 14

16 3.1.7 TOXIC OR HAZARDS SUBSTANCES AND ELEMENTS CONTAINED IN ASSEMBLY 部件名称 Part Name 500 瓦近紫 外线灯泡 500 W NUV Lamp 光源外壳 组合 Light Source Housing Assembly 铅 Lead (Pb) 汞 Mercury (Hg) 有毒有害物质和元素 Toxic or Hazardous Substances and Elements 镉 Cadmium (Cd) 六价铬 Hexavalent Chromium (Cr(VI)) 多溴联苯 Polybrominated Biphenyls (PBB) 多溴二苯醚 Polybrominated Diphenyl Ethers (PBDE) O X O O O O X O X O O O O: 表示该有毒有害物质在该部件所有均质材料中的含量均在 SJ/T 规定的限量要求以下. X: 表示该有毒有害物质至少在该部件的某一均质材料中的含量超出 SJ/T 规定的限量要求. 从光源到紫外线控制器和 150 定时器的接线组合包括在外壳组合的声名中. O: Indicates that this toxic or hazardous substance contained in all of the homogeneous materials for this part is below the limit requirement in SJ/T X: Indicates that this toxic or hazardous substance contained in at least one of the homogenous materials used for this part is above the limit requirement is SJ/T The cable assembly from the light source housing to the UV controller and 150 timer is included in the housing assembly declaration. Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 15

17 4 LAMP INSTALLATION AND CLEANING The EQUIPMENT consists of a single housing containing components of the UV LIGHT SOURCE. 4.1 ITEMS SUPPLIED BY THE FACILITY NOTE: For Exhaust requirements for the LIGHT SOURCE, See Section 8 System Specifications and Drawings. 4.2 INSTALL OR CHANGE THE LAMP WARNING! Be sure to wear safety goggles and gloves when handling lamps. If the lamp has been operating, turn it off and allow the housing to cool before proceeding Always Disconnect the High Voltage Leads on the UV POWER SUPPLY before changing or installing the lamp 1) If the lamp has been operating, turn it off and allow the housing to cool before Proceeding 2) Disconnect the High Voltage leads from the back of the Intensity Controller. 3) Remove the screw(s) securing the large door of the lamp housing and set door aside. WARNING! On some models of the Series 30, when the door is removed, an interlock switch will open, preventing operation of the lamp. Do not attempt to defeat this interlock. * Never operate the lamp with this door removed! Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 16

18 4) On those models equipped with a hinged primary mirror assembly, turn the captive wing nut counterclockwise one-half turn and swing the hinge plate clear to provide access to the lamp. NOTE When installing the lamp, do not touch the quartz envelope. Handle the lamp only at the bases, by the metal end-caps. If fingerprints are inadvertently transferred to the lamp, clean with isopropyl alcohol before reinstalling. 5) Carefully remove the knurled nut from the end-cap of the lamp and slip off the wire with attached lug and the heat-sink. Gently unscrew the lamp counterclockwise and carefully remove the lamp from the housing. WARNING! Since most lamps contain mercury or other toxic materials, they should be disposed of in an ecological manner 6) When replacing the lamp, make certain that it is installed with anode and cathode in the proper configuration. For 200- through 1000-watt Near-UV lamps, the anode (+) is installed down. For 2000-watt near-uv and all Deep-UV lamps, the anode (+) is installed up. Double check by making sure that the gold or silver band at one end of the envelope is installed down. It is possible to accidentally ignite an upside down lamp, but the lamp will be irreparably damaged by this and must be immediately discarded! 7) On those models equipped with a hinged primary mirror, return the mirror to the normal location and turn the wing nut clockwise one half turn to lock it in place. 8) Replace the large door of the lamp housing and tightened the screw that secures the door. The lamp s positioning should be adjusted to achieve maximum output. This is referred to as peaking a lamp. See adjusting the lamp position. Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 17

19 4.3 ADJUSTING THE LAMP POSITION The lamp positioning should be adjusted to achieve maximum output. With a lamp warned-up to normal operating temperature, and the Intensity controller in constant Power (or Idle) mode, removed the small door of the lamp main housing. Open the shutter, place a UV measurement probe at the center of the exposure area, and vary the adjustments for maximum intensity. Due to subtle differences between the lamps, the X, Y, and Z adjustment should be a readjusted every time a lamp is replaced. This is referred to as "peaking" a lamp. 4.4 CLEANING OPTICAL COMPONENTS Periodic cleaning of optics is recommended to maintain light intensity and uniformity. Items to be cleaned include the mirrors and lens. Do not attempt to clean the condensing lens array (integrator),elliptical reflector or feedback probes. These should only be disassembled and cleaned at OAI. With the Light source fully cooled, gently clean the optics with a soft, lint-free, lens tissue and a small amount of isopropyl alcohol. NOTE Dispose of the alcohol soaked lens tissue as described in Section 7 HAZARDOUS MATERIALS USED WITH THE SYSTEM The Remainder of This Page is Intentionally Left Blank Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 18

20 5 SYSTEM OPERATION 5.1 MEASURING UNIFORMITY WARNING! There are hazards to personnel if the light source is on while a light source cover is removed for service or adjustment. Clear the area of all non-essential personnel. Eye protection is essential to prevent Permanent damage to the retina of the eye and subsequent blindness can result. Make sure to wear safety goggles With the lamp properly peaked, i.e. warmed-up to normal operating temperature, and operating in constant power (idle) mode, open the shutter and measure the intensity over the entire exposure area. Record the maximum and minimum readings. To calculate intensity variation in percent, divide the difference of the high and low readings by the sum of the high and low readings, and then multiply by 100: High - Low High + Low X 100 = +% uniformity The Remainder of This Page is Intentionally Left Blank Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 19

21 5.2 ADJUSTING UNIFORMITY Both of the mirrors in these Light sources are adjusted and locked into position at OAI. You should never need to move these adjustments, even if you replace the mirrors. In Series 30 Light sources which have a single adjustment of the integrator (where the integrator and shutter solenoid are clearly separate assemblies) a uniformity/intensity adjustment is available. This knurled thumbscrew adjusts the distance between the two lens arrays of the integrator and can be easily accessed through the small, side door in the lens housing. Turning this adjustment clockwise will separate the two lens arrays, focusing the UV energy into a smaller area. This will increase the intensity while adversely affecting the uniformity at the outer edge of the target. Turning this adjustment counterclockwise will bring these two lens arrays closer together, spreading the UV energy out onto a larger area. This will decrease the intensity while improving the uniformity. The integrator adjustment is preset by OAI for the maximum possible intensity, within our uniformity specification, across the largest target area that will fit the lens diameter. The Light sources are tuned for a uniformity of +5% for 6 inch or smaller lenses and +6% for square beams or larger lenses. The integrator adjustment allows for higher intensity within a smaller target, or superior uniformity at a lower energy level. It is not advisable to perform this adjustment with the shutter open. NOTE Care must be taken not to touch the lenses in the condensing lens array as permanent damage can result if the Lightsource is operated with lenses soiled by fingerprints. If lenses are touched, a soft lens tissue may be used to clean only the area with the fingerprint. Do not attempt to remove and disassemble this unit for cleaning. This should be performed only at OAI. The Remainder of This Page is Intentionally Left Blank Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 20

22 5.3 MIRROR ALIGNMENT Both the mirrors in these light sources are adjusted and locked into position at OAI. You should not need to move these adjustments, even if you replace the mirrors. The following procedure is supplied in the event that the adjusting screws may have been moved since leaving the factory. This procedure is for a light source operating in production, equipped with satisfactory cable assemblies, power supply (or intensity controller), and the correct lamp. To operate properly, the light source should have the correct mirrors and filter stacks. Both mirrors should have the same wavelength coatings and corresponding filter stack in the feedback probe. Channel one is the filter stack located near the entrance of the probe cable to the probe body and normally has the shorter wavelength sensor. Channel two is the filter stack farthest from that point where the cable enters. SAFETY CAUTION Make certain that lamps are given sufficient time to cool down before removal. DUV lamps are positively pressurized even when cool, and should always be handled carefully. Use safety glasses and gloves when handling DUV lamps. Use amber colored UV glasses with approximately 10% or less transmission at the UV light range when looking at UV light inside the lens housing or at the wafer plane. Use a welders face shield with UV blocking filters when looking inside main lamp housing. Avoid looking directly at the lamp. The large access door (where the primary mirror is located) and the small access door (where the X,Y, and Z adjustments are located) should remain on, as much as possible, to prevent overheating of the lamp, and to maintain proper cooling.. Gloves (thin rubber, cotton, or nylon) and long sleeves should be worn when working with UV light under the collimating lens and when checking uniformity or intensity for extended periods of time. Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 21

23 5.4 LIGHT SOURCE SETUP FOR MIRROR ALIGNMENT The secondary mirror (head mirror) located above the collimating lens needs to be adjusted only if the adjusting screws have been adjusted after leaving the factory. If the head mirror adjusting screw has not been moved after leaving the factory, the light source can remain on the aligner and save unnecessary adjustment time. If it has been adjusted after leaving OAI, the light source will have to be removed from the aligner and mounted to a stand which can adjust the level of the light source and provide a small aperture (1/8 inch diameter) under the center of the collimating lens. Defeat the safety interlock system with a shorting interlock plug in the back of the intensity controller (power supply). This will prevent shutting down the lamp when opening the large access door. This will also defeat the thermo-interlock, so be certain that the primary mirror is in place before starting lamp. Pre-adjust Light source ( This should not be performed by untrained personnel.) If the primary mirror assembly is hinged, be certain that it is locked in place. Fully tighten all three primary mirror adjusting screws, then back out them out.. On the integrator (condensing lens array or fly s eye ) turn the knurled thumbscrew fully counterclockwise, until the two lens arrays are closed together. Close all doors and start the lamp. Check that the lamp cooling system is operating properly. WARNING! When opening the large door of the lamp housing with the UV lamp on, be sure to wear a welding mask, gloves, and long sleeves! Be sure no one else is in view of the open light source! Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 22

24 After warm-up, open both lamp housing doors. Adjust the X,Y, and Z for the smallest perfectly round, uniform light image on the shutter blade (or integrator lenses, depending on model). If the image is not centered on the shutter or integrator, adjust the primary mirror to center the beam. The lamp is not receiving proper cooling while the doors are removed. PERFORM THIS ADJUSTMENT AS RAPIDLY AS POSSIBLE, AND CLOSE THE DOORS IMMEDIATELY! Place the UV light meter probe under the center of the lens and fine tune the X,Y, and Z adjustments for maximum intensity. Distance of the probe from the lens should be four inches, for five inch or smaller lenses, and six inches, for seven inch or larger lenses. 5.5 SECONDARY MIRROR ADJUSTMENT The light source will have to be removed from the aligner and mounted to a stand which can adjust the level of the light source and provide a small aperture (1/8 inch diameter) under the center of the collimating lens. Level the light source with a bubble level by checking from front- to-back and side-to-side on the light source base. Drop a plumb bob through the hole in the light source stand located under the exact center of the collimating lens. A piece of bead chain over three feet long will work fine. Place a target, marked with an X, three feet below the stand. Position the target with the hanging plumb bob directly over the center of the X. CAUTION Use amber colored UV glasses with approximately 10% or less transmission at the UV light range when looking at UV light inside the lens housing or at the wafer plane. Also gloves (thin rubber, cotton, or nylon) and long sleeves should be worn when working with UV light under the collimating lens and when checking uniformity or intensity for extended periods of time. Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 23

25 Remove the chain and open the shutter. On the target an image of a grid pattern will be visible (it may be necessary to dim the ambient light to clearly see this image). WARNING! When opening the large door of the lamp housing with the UV lamp on, be sure to wear a welding mask, gloves, and long sleeves! Be sure no one else is in view of the open light source! If previous step was performed properly, the center dot f this grid pattern will be the brightest. If not, fine tune the position of the primary mirror to achieve the correct image. PERFORM THIS ADJUSTMENT AS RAPIDLY AS POSSIBLE, AND CLOSE THE DOOR IMMEDIATELY! The three adjustments for the head mirror are accessible from the outside of the lens housing. Tighten them all fully clockwise, then back-off three turns. While watching the image on the target, tweak the three head mirror adjustments until the image is centered on the X. Close the shutter and tighten the jam nuts on the adjustment screws from inside the lens housing. Be very careful working with tools or hardware over the collimating lens It is advisable to cover the lens before working inside the lens housing. Recheck lamp peak and measure uniformity The primary mirror position may now be fine tuned for optimum uniformity. If the intensity is greater at the rear of the light beam (closer to the lamp housing), lower the bright spot on the integrator by using the primary mirror adjustments. The front of the light beam will become brighter as the rear dims. By redirecting light around the integrator, more light can be shifted from front to back and from side to side. After uniformity has been achieved, maximize intensity by following the procedure for adjusting the lamp position in section 5. Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 24

26 Shut-off lamp and lock-down the jam nuts on the primary mirror adjustments. Be sure to remove the shorting interlock plug from the back of the intensity controller. NOTE THE FOLLOWING ITEMS COULD AFFECT UNIFORMITY: Moving either mirror after adjustments have been made. Lamp located too far away from its peak position or lamp not centered. Improper, unmatched, or incorrectly installed mirrors. Integrator adjustment (if available) open too much. When desired uniformity and the intensity are achieved, calibrate the Intensity Controller with the Set and Cal potentiometers, as outlined in the Intensity Control Manual. The Remainder of This Page is Intentionally Left Blank Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 25

27 6 SYSTEM INTERLOCKS 6.1 UV LIGHT SOURCE INTERLOCKS There are 3 interlocks on the UV LIGHT SOURCE. One is for personal safety and the other two are for equipment safety. WARNING! The light emanating from the light source is a hazard to vision. DO NOT LOOK INTO THE OUTPUT BEAM of the UV Lamp or reflection of the beam. Permanent damage to the retina of the eye and subsequent blindness can result. Prolonged exposure to diffused reflection from the output beam, illuminated surfaces in the beam, exposures of even a few seconds to the direct output beam or to the lamp itself, can cause ultraviolet skin burns or burns to the outer layers of the eye. Prolonged skin exposure can cause burns similar to Severe sunburn WHEN IN THE VACINITY OF A LIGHT SOURCE WITH ITS COVER REMOVED, ALWAYS WEAR UV FILTERED GLASSES TO PROTECT EYES AND LIMIT EXPOSURE TIME TO UV RADIATION. Dangerous voltage is present on the ends of the UV Lamp when the lamp is lighted or being started. Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 26

28 6.1.1 The Personal Safety Interlock Removes power from the UV power supply. Pull the interlock out to perform maintenance functions that require the UV POWER SUPPLY to be turned on. Personal Safety Interlock Figure Personal Safety Interlock The Overheat System Interlock Removes power from the UV power supply if the mirror is not in place at approximately a 45-degree angle and locked into position. The interlock is designed to prevent the UV lamp from burning the bottom of the UV LIGHT SOURCE. Overheat Equipment Safety Interlock Figure 7-3. Overheat System Safety Interlock The Air-flow System Safety Interlock Removes power from the UV power supply if insufficient exhaust air-flow is detected. Exhaust Air-flow Equipment Safety Interlock Figure 7-4. Airflow Equipment Safety Interlock Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 27

29 7 HAZARDOUS MATERIALS USED WITH THE SYSTEM 7.1 ISPROPYL ALCHOL Isopropyl alcohol is used to clean parts during maintenance activities. Isopropyl alcohol and the wipes used with the isopropyl alcohol are considered hazardous waste. As hazardous waste the isopropyl alcohol and the wipes should not be thrown into the garbage or flushed down the sewer. Instead the wipes that are soaked in isopropyl alcohol should be placed in a chemical waste container and sent to a RCRA approved incinerator or to a RCRA approved waste facility. Check the local and state disposal regulations because some local and state regulations differ from federal disposal regulations. Isopropyl alcohol is a clear, colorless, flammable liquid with an odor of rubbing alcohol. Relatively low toxicity by all exposure routes. Inhalation of vapor can cause eye and respiratory tract irritation. Exposure to extremely high concentrations (>1000ppm) can cause intoxication, dizziness, headache, anesthesia and coma. Avoid skin and eye contact. Use solvent resistant gloves, and safety glasses when using small quantities (e.g., squirt bottle amounts). Keep away from ignition sources, such as flame, spark, and heat. Both ACGIH TLV and OSHA PEL values are 200ppm. ACGIH also cites the STEL as 500ppm. The chemical is used to clean the UV lamp if fingerprints or oil are on the surface. The amount used is less than 10ml. The chemical is used to clean the UV lamp housing as needed. The amount is less than 10ml. The Remainder of This Page is Intentionally Left Blank Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 28

30 7.2 Mercury Mercury is contained in the mercury UV lamps and the mercury-xenon UV lamps that are used in the light source. Mercury is a regulated solid waste that should not be thrown in to the garbage but should be recycled according to local, state, or federal laws. OAI recycles the mercury by sending the old UV lamps to Advance Radiation Corporation ( ) or to North State Environmental ( ). The used UV lamps are considered Hazardous Waste and do require a manifest recorded through the California Department of Toxic Substance Control or similar state agency outside of California, but only for quantities in excess of 10 pounds of waste mercury or 24 lamps. Otherwise, no special paperwork is required for shipment of used lamps. It is suggested that used or damaged lamps be double wrapped in a Ziplock bag then packaged in a corrugated box. Also broken mercury lamps and mercury contaminated wipes should be double wrapped in a Ziplock bag then packaged in a corrugated box and shipped to the same location as the lamps. The UV lamps will have to be replaced about every 1000 hours. The weight of the mercury in each of the different sizes of lamps is shown on the next page. Lamp Wattage Weight of Mercury in Ounces Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 29

31 8 SYSTEM SPECIFICATIONS AND DRAWINGS 8.1 SYSTEM SPECIFICATIONS For Light Source Wavelength and UV Lamp Power Level. Wavelength of the Light Source is: nm. Power Level of the UV Lamp is: watts. For Exhaust requirements for the LIGHT SOURCE Exhaust requirements for the LIGHT SOURCE are inches of water. 8.2 SYSTEM DRAWINGS Drawing Description Drawing Number SCHEM ELEC SYS MAIN CFG-ALL MDL SCHEM ELEC SYS MAIN CFG-ALL CE MDL The Remainder of This Page is Intentionally Left Blank Manual PN: , Rev: G MANUAL MDL 30 COLLIM UV L/S OPER 30

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