Oriel Flood Exposure Sources

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1 218 Oriel Flood Exposure Sources High intensity outputs CALIBRATION SOURCES Highly uniform, large collimated beams Efficient out of band rejection Timed exposures DEUTERIUM SOURCES ARC SOURCES INCANDESCENT SOURCES MONOCHROMATOR AND SOLAR SIMULATORS PHOTOLITHOGRAPHY W Oriel Flood Exposure Source, 6 x 6 inch Beam Size (9.5 inch high pedestal not shown). We offer 500 and 1000 W Flood Exposure Sources for the near UV ( nm), mid UV ( nm) and deep UV ( nm). NUV is designed to expose most photoresists, MUV is used for polymer cross-linking and novel resists, and DUV for deep ultraviolet studies. Our illuminators irradiate samples from 2.13 x 2.13 inches up to 10 x 10 inches (54x54 to 254x254 mm). Three Spectral Ranges The spectral output of the illuminator is determined by three factors: The type of lamp The dichroic mirror The collimating lens NUV sources run an Hg lamp, use a BK 7 glass lens (which does not transmit below 350 nm), and have the appropriate dichroic mirrors. MUV and DUV sources run an HgXe lamp, use a UV grade fused silica lens (which transmits down to 200 nm), and have the appropriate dichroics. If you need the flexibility to work in all regions, select a DUV source and purchase additional dichroic mirrors for the respective regions. ABSORPTIVE HEAT SINK 45 DICHROIC MIRROR ELLIPSOIDAL REFLECTOR PROPRIETARY BEAM HOMOGENIZER 45 MIRROR COLLIMATING LENS What Makes Up an Oriel Flood Exposure System? Illuminator Housing Fig. 1 shows the beam path of the housing. An efficient ellipsoidal reflector, coated with AlSiO for the NUV or enhanced Rhodium for MUV and DUV systems, collects up to 70% of the arc lamp output. A 45 primary dichroic mirror spectrally reflects the light after passing through a proprietary design beam homogenizer. A shutter may be opened and closed manually with a switch on the housing side panel or via the Hand-Held Switch. For automated exposure control, we offer the Digital Exposure Controller or Digital Timer (see page 207). Upon request, the housing may also be wired to operate the shutter via a computer logic level. Each housing contains three interlock systems. Opening the housing door will trigger an electronic interlock switch to automatically interrupt power to the system. This prevents inadvertent operator exposure to the lamp. A thermal interlock shuts down the system if the temperature exceeds the level for safe operation. A third interlock shuts down the system if the lamp's cooling fan fails. See page 207 for dimensional diagrams of all the illuminator housings. Fig. 1 Optical configuration of W Oriel Flood Exposure Source 6 x 6 Beam Size. Phone: Fax:

2 219 Lamp The NUV sources run Hg short arc lamps; these contain a precise amount of mercury and either xenon or argon, which act as a starter gas. Strong mercury lines through the ultraviolet and visible wavelengths dominate their output spectrum. The 365 nm line makes it ideal for use in the NUV. The MUV and DUV sources operate Hg(Xe) short arc lamps, which are similar to Hg lamps but contain more xenon gas than just the starter gas. The additional xenon enhances the short wave UV making it ideal for use below 350 nm. We supply ozone free Hg(Xe) lamps with the NUV and MUV sources, and UV enhanced models for the DUV models. Power Supply Our Series Power Supplies are ultra stable supplies that send a low level pulse to the ignitor. Once the arc is established, the supply controls the lamp directly. Their highly efficient switch circuitry operates the lamp under extremely tight current control. This results in low ripple and high line voltage regulation. Optional Accessories Digital Exposure Controller and Digital Timer The is a light intensity controller and digital timer in one. It interfaces with the power supply to provide a constant level of output to within ±1%. The Digital Timer portion of the (which is also available as a stand alone device under model 68945) controls the split-blade shutter and is recommended for accurate and consistent timed exposures. For complete details on both instruments, refer to page 207. Filters and Filter Mounting Hardware These sources produce a specific broadband spectral output. Optional narrowband filter assemblies enable you to isolate specific, narrowband outputs, such as 365 nm (i-line), and 436 nm (g-line). For 500 W Sources, purchase the Filter Mount; 1000 W sources include the filter mount. Power Meter and Probes SPECTRAL IRRADIANCE (µw cm nm ) at 50 cm Distance -2-1 Table 1 Probe Specifications WAVELENGTH (nm) Fig. 2 Typical output of W Hg Lamp For These Flood Exposure Sources Spectral Region Peak Wavelength Sensitivity Sensor Area (mm) NUV (nm) 400 nm 2,5 x 10-7 to 33 x 33 8,75 x NUV (nm) 365 nm 5,2 x 10-7 to 33 x 33 1,8 x MUV (nm) 280 nm 8,3 x 10-8 to 60 x 43 8,3 x DUV (nm) 240 nm 8,3 x 10-8 to 60 x 43 8,3 x 10-4 Safety Considerations These sources, particularly the DUV and MUV systems, emit dangerous levels of UV radiation. Always wear protective clothing, gloves and a faceshield when working around these sources (see page 246 for UV safety equipment). CALIBRATION SOURCES DEUTERIUM SOURCES ARC SOURCES INCANDESCENT SOURCES MONOCHROMATOR AND You may wish to monitor the intensity and uniformity of your output beam, especially if you have chosen not to purchase a Digital Exposure Controller. Also, during installation of a new lamp, you should align your lamp for optimal irradiance. In order to do this, you need a power meter and probe for your specific wavelength region, to determine when you have the lamp in the correct position.you may wish to monitor the intensity and uniformity of your output beam, especially if you have chosen not to purchase a Digital Exposure Controller. Also, during installation of a new lamp, you should align your lamp for optimal irradiance. In order to do this, you need a power meter and probe for your specific wavelength region, to determine when you have the lamp in the correct position. SOLAR SIMULATORS PHOTOLITHOGRAPHY sales@newport.com Web: newport.com

3 220 Ordering Information CALIBRATION SOURCES DEUTERIUM SOURCES ARC SOURCES INCANDESCENT SOURCES Flood Exposure Sources Beam Size Lamp Type in. (mm) 500 W Hg 2.13 x 2.13 (54 x 54) 4.25 x 4.25 (108 x 108) 6.0 x 6.0 (152 x 152) 8.0 x 8.0 (203 x 203) 500 W Hg(Xe) 2.13 x 2.13 (54 x 54) 4.25 x 4.25 (108 x 108) 6.0 x 6.0 (152 x 152) 8.0 x 8.0 (203 x 203) 1000 W Hg(Xe) 2.13 x 2.13 (54 x 54) 4.25 x 4.25 (108 x 108) 6.0 x 6.0 (152 x 152) 8.0 x 8.0 (203 x 203) 10.0 x 10.0 (254 x 254) Note: These figures are nominal. They are based on integrated spectral radiometric measurements of similar sources. These do not necessarily correspond with measurements by various broadband instruments with varying spectral response. Beam Uniformity: ± 5% over the specified area. This is measured at a plane at the recommended working distance from the collimating lens. Uniformity will degrade somewhat at other distances. Replacement Lamps Collimation Angle Working Distance in. (mm) Spectral Region nm nm nm Typical Output Typical Output Typical Output ± (51) 266 mw cm ± (76) 76 mw cm ± (101) 38 mw cm ± (140) 22 mw cm ± (51) 28 mw cm mw cm ± (76) 8 mw cm mw cm ± (101) 4 mw cm mw cm ± (140) 3 mw cm mw cm ± (51) 59 mw cm mw cm mw cm ± (76) 17 mw cm mw cm mw cm ± (101) 8,4 mw cm mw cm mw cm ± (140) 4,9 mw cm mw cm mw cm ± (178) 3,5 mw cm mw cm mw cm Availability Guaranteed on select newport.com Meter MONOCHROMATOR AND SOLAR SIMULATORS PHOTOLITHOGRAPHY Lamp Type W Hg W Hg(Xe) W Hg(Xe) 6295NS 1000 W Hg(Xe), OF Calibrated Probes Spectral Range Peak Wavelength nm 400 nm nm 365 nm nm 280 nm nm 240 nm Description Power Meter Accessories For 500 W sources, you will also need the Filter Mounting Assembly; 1000 W sources include a filter mount. Description Filter Mount Assembly (for 500 W Flood Exposure Sources) g-line (436 nm) i-line (365 nm) Flood Source 1 Year Extended Care Plan Digital Exposure Controller Digital Timer Remote Switch Phone: Fax:

4 OPEN 221 Oriel Flood Exposure Sources Drawings Here we show dimensional drawings of the Flood Exposure Sources described on the previous page. 2.13X2.13 INCH SYSTEMS 4.25X4.25 INCH SYSTEMS (644) (229) OPEN OPEN 6.25 (159) (474) 6X6 INCH SYSTEMS (557) 8.70 (221) (303) 7.73 (196) MIN MAX (696) (229) OPEN 8.41 (214) (751) (558) 12.0 SLOTS 8X8 INCH SYSTEMS 2.00 MIN (238) 4.00 MAX (310) CALIBRATION SOURCES DEUTERIUM SOURCES ARC SOURCES INCANDESCENT SOURCES MONOCHROMATOR AND (742) (7.13) DIA (212) 9.0 (229) 9.50 Fig. 3 Dimensional diagram of 500 W Flood Exposure Housings MIN (285) MAX (844) 6.36 (162) 8.75 (222) sales@newport.com Web: newport.com 8.06 (205) MIN MAX. SOLAR SIMULATORS PHOTOLITHOGRAPHY

5 OPEN 222 CALIBRATION SOURCES DEUTERIUM SOURCES G (313) 10.6 (269) 0 F A (324) (302) B E ( ) C D 1000 W SYSTEMS BEAM SIZES 2X2 4X4 A (665) (758) B 7.25 (184) (276) C 7.25 (184) 8.50 (216) D 6 (281) 8.12 (206) E MIN. MAX (32) 2.0 (51) 2.0 (51) 4.0 (102) F 8.87 (225) G 20.5 (521) 19.0 (483) ARC SOURCES 6x6 INCH HOUSING INCANDESCENT SOURCES (270) (901) (419) MONOCHROMATOR AND 19.0 (482) OPEN (292) SOLAR SIMULATORS PHOTOLITHOGRAPHY (313) Fig. 4 Dimensional diagram of 2 x 2 to 6 x 6 inch 1000 W Flood Exposure Housings (390) ** (324) SLOTS 3.00 MIN MAX * 7.34 (186) Phone: Fax:

6 OPEN OPEN (267) 8x8 INCH HOUSING (974) (486) (518) (818) (267) (394) (413) ** 10x10 INCH HOUSING (1202) (356) * THE DISTANCE FROM THE VERTEX OF THE LENS TO THE. ** THE DISTANCE FROM THE CENTER OF THE BEAM PATH TO THE CENTER OF THE HOLE (470) (394) 4.00 MIN MAX. * CALIBRATION SOURCES DEUTERIUM SOURCES ARC SOURCES INCANDESCENT SOURCES MONOCHROMATOR AND 16.0 (406) SLOTS (457) 15.6 (396) 8.16 (207) ** 5.00 MIN MAX. * (457) SOLAR SIMULATORS PHOTOLITHOGRAPHY Fig. 5 Dimensional diagram of 8 x 8 and 10 x 10 inch 1000 W Flood Exposure Housings. sales@newport.com Web: newport.com See our website WEB for more info

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