Talysurf CCI Lite Non-contact 3D Profiler

Transcription

1 Talysurf CCI Lite Non-contact 3D Profiler PRODUCT Automated non-contact small footprint system Talysurf CCI delivers results you can trust with industry leading performance... Three position turret 100 mm close loop Z Single mode of operation Greater than 1 million data points Fully programmable, X, Y stitching, Z stitching

2 Next generation interferometer, based on the world leading coherence correlation algorithm. High performance capability within the reach of both global manufacturing and the research markets. Scanning interferometry The Talysurf CCI Lite is an advanced type of measurement interferometer. It uses an innovative, patented correlation algorithm to find the coherence peak and phase position of an interference pattern produced by a selectable light source. Flexibility The Talysurf CCI Lite is invaluable for many applications requiring high precision 3D profile analysis. A variety of objectives are available for the 3 position turret to enable a variety of surfaces to be measured. A fully automated stage and auto measurement routines add to the high level of flexibility of the system. Matt black surface without data restore All types of surfaces can be measured Versatility is a prime benefit of the Talysurf CCI Lite. Polished or rough, curved, flat or stepped surfaces with reflectivity between 0.3% and 100% can all be analyzed using one single algorithm, with no need to change mode for different surfaces and no concerns about the wrong mode being used. Measurement of SIMS Creaters All material types are measurable including glass, liquid inks, photo resist, metal, polymer and pastes. Data analysis tools Surfaces are quantified absolutely using the latest internationally recognized parameters for both 3D and 2D surface characterization. area and volume parameters 120 x 2D & 40 x 3D parameters counting and sorting automatic step height Automation Full automation options are included as standard. The programmable X, Y stage, autofocus and autorange enables easy to use automation such as programmable measurement, X, Y stitching and Z stitching options. Diamond turned surface - measured using auto fringe find and auto range Diamond turned surface - after form removal Talysurf CCI Lite System Specifications Measurement technique Coherence Correlation Interferometry Vertical range (Z) 2.2 mm as standard (z-stitching also available) Vertical resolution [max] 0.01 nm [0.1 Å] Noise floor (Z) >0.08 nm [0.8 Å] 1 Repeatability of surface RMS (Z) 0.02 nm [0.2 Å] 2 Measurement area (X, Y) 0.33 mm mm (square area) Number of measurement points 1024 x 1024 standard Optical resolution (X, Y) µm (surface dependent) Step height repeatability 0.1% Surface reflectivity 0.3% - 100% Measurement time 5-40 seconds (typical) 1 2 As demonstrated by multiple measurements on a levelled fused silica optical flat As demonstrated by 1 sigma Std Dev of 20 Sq (RMS) measurements on SiC flat Specifications are subject to change without notice.

3 Talysurf CCI Objective Lenses Selection table for objective lenses A range of objectives lenses are available for the Talysurf CCI system, the choice of lens will depend on the application. The key parameters are: Field of view, which determines the measurement area. Optical resolution, which defines the smallest features that can be distinguished. Slope, which will indicate how curved the sample can be as well as how rough, as rougher surfaces usually contain higher slopes. All objective lenses are supplied with quick change adapters and a protective storage box to ensure lenses not in use are protected from accidental damage. Mirau Interferometer Michelson Interferometer Magnification 10 X, 20 X, 50 X Magnification 5 X, 2.5 X Interferometric Objectives With standard 1024 x 1024 pixel camera Mag FoV OptRes SamRes Slope WD Type Design NA (um) (um) (um) (deg) (mm) 2.5x 6600 x Std Michelson x 3300 x Std Michelson x 1650 x Std Mirau x 825 x Std Mirau x 330 x Std Mirau 0.55 Mag magnification power of the objective lens WD working distance, distance between sample and lens FoV area of the sample measured by a given objective Type lens system, Std Standard, Uln Ultra low noise OptRes optical resolution, the ability to distinguish adjacent heights Design type of interferometer used, Michelson or Mirau SamRes sample resolution, pixel pitch (spatial sampling interval) NA numerical aperture, expresses the angular aperture of the lens Slope maximum specular slope, restricted by the numerical aperture Specifications are subject to change without notice.

4 Talysurf CCI Calibration Standards As a leading manufacturer of high precision measuring instruments, we always provide the very latest inspection technology. The artefacts used by Taylor Hobson are best in class and we offer on-site certification in our ISO accredited UKAS calibration laboratory. Step Height Calibration Step height standards are used to calibrate the vertical gain of the Talysurf CCI system. This is achieved via a simple automatic calibration routine, which will enable you to make measurements traceable to international standards. Step height calibration artefacts from Taylor Hobson Limited are supplied certified and traceable to international standards. Certification is issued in accordance to UKAS and ISO Standard options 5µm Step Height 112/ µm Step Height 112/ Calibration Set (500µm step height) 112/ Lateral Calibration The lateral calibration standard is used to calibrate the instrument s magnification. This corrects both field of view and pixel spacing simultaneously. Concentric circles are used with the calibration to enable better than 1 pixel accuracy. 5 µm step height calibration standard One single lateral standard is used to calibrate all lenses and system configurations and is available both with and without international traceable certification. One standard for all lenses Non-Certified Standard 112/ Certified Standard 112/ Z Datum Correction To deliver the optimum measurement performance it is necessary to remove all optical aberrations and errors due to the interferometer reference mirror. This is achieved using a patented method of advanced datum correction. lateral calibration standard for all lenses Taylor Hobson supplies the highest quality 0.2nm RMS Silicon Carbide standards for this calibration. Combined with the advanced calibration this allows surfaces below 0.04nm (0.4Å) to be measured. One standard for all lenses Non-Certified Standard 112/ Certified Standard 112/ calibration flat mirror 0.2 nm RMS Certification of Standards An ISO accredited calibration standards will improve measurement capability by quantifying the errors in a measuring instrument. These errors can subsequently be taken into account, and compensated for, thus improving the practical measurement accuracy (uncertainty) of the system. The Taylor Hobson UKAS (United Kingdom Accreditation Service) Laboratory was successfully audited against ISO in February 2002, and also gained Testing Laboratory accreditation in January Regular accreditation assessments include a complete audit of the laboratory's quality system, including staff, equipment, traceability of measurement, record, reports, and the laboratory environment.

5 TalyMap surface analysis software TalyMap surface analysis software is used by research laboratories and industrial facilities worldwide for product development, process improvement and predictive behavior analysis in many sectors including abrasives, aerospace, automotive, bearings, cosmetics, cutting tools, dental, electronics, medical, MEMS, mould making, paper, PCB s and semiconductor. TalyMap is continuously evolved by a multidisciplinary team of specialists in metrology, software engineering and automation in order to meet present and future surface metrology needs. Regular software releases incorporate a stream of innovations, together with the very latest standards and methods. New generation brings even more powerful analysis The latest generation of TalyMap software assures conformity with the new 3D standard ISO 25178, full metrological traceability and faster surface metrology report generation. New analytical functions include 4D studies of series of 3D surfaces and statistics. Integration of the latest standards on 3D and filtering ISO is the first international standard on 3D areal surface texture. TalyMap integrates the height, functional bearing ratio, functional volume, hybrid, spatial and feature parameters defined in this standard. Some of these parameters were anticipated by EUR EN. TalyMap can be configured to use the new ISO parameters or the old EUR EN parameters for compatibility with earlier projects. ISO/TS is a new standard on filtration techniques. TalyMap integrates advanced filters defined by this standard including spline, robust Gaussian and morphological filters. Back-side silicon wafer measurement Full metrological traceability A new analysis workflow makes it easy to trace every step in an analysis document. New steps can be added and existing steps can be fine-tuned or deleted at any time. Quick results Using the minidoc function, any sequence of analysis steps can be defined one time only and saved into a minidoc library. Minidocs can be inserted into any document at any time, significantly speeding up the preparation of a new analysis report. Flight simulation It is possible to simulate a flight over a surface. Different flight paths can be defined and saved as.avi animations for use during presentations. Statistics for quality control The new statistics option makes it possible to track and generate statistics on parameters across multiple measurement data sets. Diffrective molded lens measurement Multi-language support Work in one of six European languages, Japanese or Chinese. Customization Add company logos, measurement identity cards, screen notes and illustrations including bitmaps, text blocks, arrows, at any time. Fast report generation Convert the document into a PDF analysis report with a couple of clicks (using 3rd party PDF printer software) and distribute it. Advanced Modules Talymap Advanced Modules enhance the functionality of Talymap by providing additional analysis or presentation capabilities. MEMS device measurement

6 Talysurf CCI Lite system specifications System Measurement Type Measurement Mode Z Scanner Field of View Illuminator Objective Mount Measurement Array 3D non-contact (>1 million point grid) Coherence Correlation Interferometry. Patented by Taylor Hobson Ultra high precision closed loop scanner Up to 6.6 mm x 6.6 mm (objective dependent) Green LED (Blue and White LED available, others available on request) Three position turret 1024 x 1024 Computer Model Operating System Processor RAM Hard Disk DVD DELL Precision MINI Tower Microsoft Windows XP Professional Quad Core 2 GHz Intel Xeon 2GB, 677MHz DDR2 160GB (7200RPM) DVD +/- RW 16x Software Analysis Talysurf CCI written for Windows XP Over 120 2D & 40 3D parameters Automatic feature counting and sorting Dual screen compatible Stages Component size (max) Component weight (max) Automated X-Y stage (medium) Automated X-Y stage (large) Automated Tip / Tilt (Standard) X and Y = 150 mm; Z = 100 mm 10 kg 112 x 75 mm 150 x 150 mm +/- 4 Degrees Performance Vertical range (Z) Vertical resolution (max) Noise floor (Z) Repeatability of surface RMS (Z) Measurement area (X, Y) Maximum Data Points Optical resolution (X, Y) Step height repeatability Measurement time 2.2 mm as standard (z-stitching also available) 0.01 nm [0.1Å] < 0.08 nm [0.8Å] nm [0.2Å] mm mm (square area) 1,048, µm (surface dependent) 0.1% 5-40 seconds (typical) Calibration Standards Step Height Lateral Calibration Flatness Traceable Certification 5 µm (25 nm, 50 µm or 500 µm optional) Single standard with concentric circles for all lenses 2 Å (0.02 nm) RMS SiC Reference Flat Standard on Step Heights (Flatness and Lateral optional) Sample Material Type Material Surface Surface reflectivity Opaque or Transparent Specular or Scattering 0.3% - 100% 1 As demonstrated by multiple measurements on a levelled fused silica optical flat 2 As demonstrated by 1 sigma Std Dev of 20 Sq (RMS) measurements on SiC flat Specifications are subject to change without notice.

7 Talysurf CCI Lite system specifications Installation Electrical System Input Voltage Power Consumption Supply Voltage Transients Safety EMC Air Supply Alternating supply, single phase with earth, 3-wire 90 to 240 VAC, 50 Hz / 60 Hz auto switching 500 VA (maximum) Amplitude < 5 x RMS Operating voltage width > 2 µs and < 20 µs EN EN : 2001, EN : 2001 Not required System Dimensions Full System Dimensions (floor space) Temperature (storage) Temperature (operating) Temperature Gradient Humidity Vibration 530 mm wide x 530 mm deep x 850 mm high C C < 1 C / hour (for best measurement capability) < 70% non-condensing Anti-vibration as standard Analysis parameters and software modules 2D Parameters 3D Parameters Primary (Unfiltered) Pa, Pc, Pdc*, Pdq, PHSC*, PHtp, Pku, Plo, Plq, Pmr*, Pp, PPc*, Pq, Prms, Psk, PSm, Pt, Ptp, Pv, Py, Pz, Pz(JIS), P3z, Pfd, Pda, Pla, PH, PD, PS, Pvo Amplitude Sa, Sq, Sp, Sv, St, Ssk, Sku, Sz Waviness (Filtered) Wa, Wc, Wdc*, Wdq, WHSC*, WHtp, Wku, Wlo, Wlq, Wmr*, Wp, WPc*, Wq, Wrms, Wsk, WSm, Wt, Wtm, Wtp, Wv, Wy, Wz, Wz(JIS), W3z, Wda, Wla, Wmax, WH, WD, WS, Wvo Functional Sk, Spk, Svk, Sr1, Sr2, Sbi, Sci, Svi, Sm, Vv, Vm, Vmp, Vmc, Vvc, Vvv Roughness (Filtered) Ra, Rc, Rdc*, Rdq, RHSC*, RHtp, Rku, Rlo, Rlq, Rmr*, Rp, RPc*, Rq, Rrms, Rsk, RSm, Rt, Rtm, Rtp, Rv, Ry, Rz, Rz(JIS), R3z, Rfd, Rda, Rla, Rmax, RH, RD, RS, Rvo Hybrid & Spatial Sdq, Ssc, Sdr Spc, Sds, Str, Sal, Std, Sfd Rk (DIN 4776, ISO ) A1, A2, Mr1, Mr2, Rk, Rpk, Rvk, Rpk*, Rvk* R&W (ISO 12085) AR, AW, HTrc, Pt, R, Rke, Rpke, Rvke, Rx, Trc, W, Wte, Wx, Kr, Nr, SR, SAR, Kw, Nw, SW, SAW Straightness (ISO 12780) STRt, STRp, STRv, STRq * Qualifiers All parameters marked with an asterisk are suitable for user assigned single or multiple qualifiers; e.g., material ratio (mr) may be assessed at one or more slice levels within a single measurement. Area & Volume Stp, SHtp, Smmr, Smvr, Smr, Sdc Flatness FLt, FLTp, FLTs, FLTq, FLTv Data analysis Step height, Lateral Distance, Pitch, Angle Measurement, Peak Count, Interactive Abbott-Firestone Curve, Volume of Islands, Autocorrelation, Fractal Analysis, Motifs Analysis, Frequency Analysis, Data Patching Filters Gaussian, Robust Gaussian, Spline, Wavelet, Robust Wavelet and Morphological Advanced Modules Crown, Cross-crown & Twist Laser Zone Texture Advanced Profile PSD Advanced Data Stitching

8 t 1988 Serving a global market Taylor Hobson is world renowned as a manufacturer of precision measuring instruments used for inspection in research and production facilities. Our equipment performs at nanometric levels of resolution and accuracy. To complement our precision manufacturing capability we also offer a host of metrology support services to provide our customers with complete solutions to their measuring needs and total confidence in their results. Contracted Services from Taylor Hobson Inspection services measurement of your production parts by skilled technicians using industry leading instruments in accord with ISO standards Metrology training practical, hands-on training courses for roundness and surface finish conducted by experienced metrologists Operator training on-site instruction will lead to greater proficiency and higher productivity UKAS Calibration and Testing certification for artifacts or instruments in our laboratory or at customer s site For the above services, contact our Center of Excellence: taylor-hobson.cofe@.ametek.com or call: Design engineering special purpose, dedicated metrology systems for demanding applications Precision manufacturing contract machining services for high precision applications and industries Preventative maintenance protect your metrology investment with a Talycare service cover plan For the above services, contact our Sales Department: taylor-hobson.sales@ametek.com or call: Taylor Hobson France Rond Point de l Epine Champs Batiment D, Elancourt, France Tel: Fax: taylor-hobson.france@ametek.com Taylor Hobson Germany Postfach 4827, Kreuzberger Ring Wiesbaden, Germany Tel: Fax: taylor-hobson.germany@ametek.com Taylor Hobson Italy Via De Barzi Robecco sul Naviglio, Milan, Italy Tel: Fax: taylor-hobson.italy@ametek.com Taylor Hobson Japan Sankyo Meguro Building , Kamiosaki, Shinagawa-Ku, Tokyo , Japan Tel: Fax: taylor-hobson.japan@ametek.com Taylor Hobson Korea Hungkuk Life Building. 5th Floor 6-7, Soonae Dong Pundang-Ku, Seongnam, Kyungki-Do, , Korea Tel: Fax: taylor-hobson.korea@ametek.com Taylor Hobson China Beijing Office Room 2305, CITIC Building #19 Jianguomenwai Dajie, Beijing, , China Tel: Fax: taylor-hobson.beijing@ametek.com Taylor Hobson China Shanghai Office Room 408, Metro Tower, No 30 TianYao Qiao Road, Shanghai, , China Tel: Fax: taylor-hobson.shanghai@ametek.com Taylor Hobson Singapore AMETEK Singapore, 10 Ang Mo Kio Street 65 No Techpoint, Singapore Tel: Ext 120 Fax: Ext 120 taylor-hobson.usa@ametek.com Taylor Hobson USA 1725 Western Drive West Chicago, Illinois 60185, USA Tel: Fax: taylor-hobson.usa@ametek.com TAYLOR HOBSON A8248 ISO9001 Taylor Hobson UK (Global Headquarters) PO Box 36, 2 New Star Road Leicester, LE4 9JQ, England Tel: Fax: taylor-hobson.uk@ametek.com Copyright 2008 Taylor Hobson Precision Talysurf CCI Lite_04/08