MicCell Product Overview

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1 Easy-to-Use Microperfusion System Versatile, modular, expandable perfusion system with microchannels made of polymer, glass or silicon All peripherals (i.e. pumps, tubes, fittings) are reused, making it extremely easy and cost-effective The microfluidic system is set up by casting a polymer channel plate, adding a coverslip, mounting it in the holder, and doing experiments. All in a matter of minutes. The is ideal for rapid prototyping: creating a new channel requires only a new silicon master, which can be ordered from GESIM. The system is completed by a macrofluidic environment controlled by a GUI-based software and is customizable, using various materials, microvalves, microelectrodes, and more. Electrical signals can be processed or optical fibres added. A version for upright microscopes is available. GESIM 1

2 Contents 4 Microscope Interface Components 5/6 Fluid Processor 7 Channel Plates Different Size, Different Features Casting Stations Complete Casting Station Sets Casting Station Accessories 10 Flow Cells Type: PDMS Channel Plate Type: Glass-Glass Channel Plate Type: Silicon-Glass Channel Plate Type: Silicon-Silicon Channel Plate 12 Microvalves 14 Masters for PDMS Channel Plate Disposables Software 15 Casting Stations (Details of Shipment) Casting Station 22x22 Casting Station 22x50 Casting Station 25x75 2 GESIM GESIM 3

3 Microscope Interface Components The microfluidic system comes in Lid a variety of designs, but the basic idea is Inlet always the same: The system must be mechanically adapted to your microscope, using the work plate into which the assembled is inserted. Different versions for microscopes such as Zeiss, Olympus, Nikon etc. are available. Channel spacers Master PDMS Coverslip A Work plates for inverted microscope (standard design) A Customized design for upright microscopes A support for 22x22 mm 2 coverslips Casting of the PDMS channel plate (left), by which the master structures produce channels in the PDMS, and its The microchannel system is assembled and held together in a metal plate, the support. There is one for each channel plate size. We call the microfluidic system PDMS channel plate (CP). You can buy pre-cast channel plates of different size or better cast them yourself in a casting chamber. In the assembled, the threaded holes of the lid serve as standardized chip-to-world interface. The channel plate is sealed by a coverslip (with or without electrodes) and mounted use as flow cell (right). Note that the holes in the PDMS must be held open by the channel spacers, which are replaced by regular fittings in the final. in the support, which is put in the work plate. The assembly is inverted in an upright microscope. This is the minimal configuration of the flow cell. You can also add macrofluidic (syringe pumps, macrovalves etc. in a Fluid Processor) and microfluidic accessories (e.g. hydrogel valves, pressure sensors), plus control software (see below), plus versions for electrodes or customized solutions. The entire system is modular and so costs you little money, if you use your own equipment. Please contact us to find out which configuration is right for you. Light microscope is not included. A support 25x75 mm² A support with PCB for electrodes A PEEK fluid connectors to connect silicone and electrical connector tubes Microscope Interface Components A Work plate for inverted microscope customized for user s inverted microscope Work Plate A A Work plate for upright microscope customized for user s upright microscope A support 22x22 mm² A support 25x75 mm² A support PCB and connector support with PCB to connect electrodes on the chip A PEEK fluid connector to connect silicone tubes ID mm PDMS-CP 22x22 A Support A Fluid Processor A FP_1_0 1 syringe pump in a 1-channel housing A FP_2_0 2 syringe pumps in 4-channel housing A FP_2_1 2 syringe pumps, 1x 4/1 selector valve A FP_4_0 4 syringe pumps in 4-channel housing A FP_1_1_HGV 1x syringe pump, 1x 4/1 selector valve, 1 x hydrogel microvalve, in a 4 channel housing A Twin FP_3_3 x FP_3_3 two FPs in two 8-channel housings A Upgrade 1 syringe pump 1x syringe pump upgrade for Fluid Processor A Upgrade 1 Smart Valve 1/4-Port 1x selector valve upgrade for Fluid Processor (here: 22 mm x 22 mm) in an inverted microscope, consisting of the work plate, the support, the channel plate (with lid), and tubes with fittings. This is the minimal configuration; further macrofluidic and microfluidic accessories can be added. 4 GESIM GESIM 5

4 Fluid Processor The most reliable way to pump liquid through the channel(s) is by external syringe pumps. These pumps (with three-way-valves) and other macrofluidic switching devices, such as simple valves (2/2) or selector (turn) valves (one inlet, multiple outlets or vice versa), are built in various combinations. Controller(s) for hydrogel microfluidic valve(s) can also be part of the device. Fluid Processors are driven by a GUI-based software for Windows, which controls all pumps and valves directly (interactive mode). Complex procedures can also be programmed by graphical means. Versions for various channel designs exist. See table at the end of the catalogue or inquire. Syringe pump module Selector valve A Twin Fluid Processor. Two FP_3_3 systems are part of the system. Six syringe pumps and six selector valves are assembled in two cases. Channel Plates Different Size, Different Features Different sizes and layouts of the channel plate are available. Standard off-theshelf sizes are: 22 mm x 22 mm (normal coverslip) 22 mm x 50 mm (large coverslip) 25 mm x 75 mm (slide size) Different sizes allow for different numbers of inlet and outlet ports. The 22x22 channel plate, for instance, normally has two inlets and two outlets; so to fit this design, a single channel has an S-shape. You can get other setups, too. The channel layout is defined by the silicon master, i.e. by you. At GESIM, you pay for a full batch of masters that fit on a 4-inch (10 cm) wafer. GESIM silicon masters are deep etched (reactive ion etching, Bosch process) and can have different resolutions (25 µm with photo-emulsion mask, or 2 µm with chrome mask). They are always coated with PTFE (Teflon) for easy demoulding. If you own a casting station, you can make your own channel plate. If not, you can order pre-cast channel plates for immediate use. The PC body is recycled, thus reducing costs. Channel plates from other materials (e.g. glass only) and with electrodes exist. For more information on channel plate details and on ready-to-use channel plates, see the table on page 10 below. Casting Stations Ordering and recycling pre-cast channel plates is cumbersome. You can reach much higher flexibility by making your own gels in the GESIM casting chambers: The silicon master lies under the PDMS gel. So the order of assembly is: first the holder for the master ( calotte ), then the master, then the Teflon case, then the polycarbonate lid for the channel plate ( PC body, as it is from polycarbonate), all fixed together by screws. A coverslip is added and the stack fixed in the support by screws. The coverslip is pressed against the PDMS via springs and so the channel is tight. Finally, the support is inserted into the work plate sitting in your microscope and the tubes and other accessories connected to the. We recommend to purchase enough PC bodies so that you can cast a new PDMS-CP while other ones are in use. A Casting chamber 22x22, completely A Fluid Processor FP_1_1_HGV. From left to right: syringe pump with three-way valve, control unit for a hydrogel valve and a simple (2/2) macrovalve, four-channel selector (turn) valve. A Fluid Processor FP_1_0 with one syringe pump As liquid must pass through the PDMS layer to reach the channel, holes must be created using channel spacers. These look like regular fittings, but have pins that are pressed against the master via springs. Accessories can be hydrogel microvalves (see below), connectors for heaters, sensors, and microelectrodes, a sample carrier to observe opaque objects, to name a few. assembled, including channel spacers A mixture of silicone elastomer base and curing agent (crosslinker) is prepared, degassed, and injected into the gap between A Fluid Pro- PC body and master. After curing, the channel plate (PC body with PDMS) is taken out and channel spacers and PDMS burs removed. The lid (also called body ) stays on and is used in the microscope as chip-to-world interface. Silicon masters are not part of the delivery. They are usually built to order. Prices depend on the necessary photomask. Predefined designs (e.g. single channel, T-channel, K-channel) are available; see table on page 14 at the end of the catalogue. Please inquire for details. A Casting chamber 25x75, completely cessor FP_4_0 with four assembled, including channel spacers syringe pumps 6 GESIM GESIM 7

5 Casting Stations Complete Casting Station Sets A Casting station for 22x22 PDMS-CP complete set, content see table 1 at the end of the document A Casting station for 22x50 PDMS-CP complete set, content see table 2 at the end of the document A Casting station for 25x75 PDMS-CP complete set, content see table 3 at the end of the document Casting Station Accessories A Casting chamber 22x22 spare part to extend the casting station A A Casting chamber 22x50 spare part to extend the casting station, A A Casting chamber 25x75 spare part to extend the casting station, A A Al calotte 22x22 aluminium plate to support the fragile master chip, type 22x22 A Al calotte 22x50 aluminium plate to support the fragile master chip, type 22x50 A Al calotte 25x75 aluminium plate to support the fragile master chip, type 25x75 A Channel spacer, diam. 1,6 mm, UNF1/4-28 A Stopper fitting, UNF 1/4-28 A Aluminium calotte 22x22 for casting chamber, holds the silicon master in the casting station A Aluminium calotte 25x75 for casting chamber A , -514, -519 Casting of a PDMS channel system using a 5 ml syringe and hypodermic needle (PDMS dispense tip) A Desiccator, small vacuum bell A Desiccator, large, with N 2 /UV inlets vacuum bell with N 2 gas inlet and UV-light adapter A Vacuum pump for PDMS degassing A PDMS, 1 l Sylgard 184 A Adhesion promoter for PDMS, type Wacker 790 A Channel spacer, 1.6 mm diameter, in A Stopper fitting, UNF 1/4-28 A , -665 PDMS elastomer and curing agent UNF1/4-28 fitting, with a spring-loaded tip.. Create for gel casting, plus syringes and mixing glass a hole in the PDMS layer during gel casting. A Casting station for 22x22 PDMS-CP in a box, with all necessary accessories. Please note that casting chamber only means the Teflon/aluminium case in which the casting takes place, whereas the casting station (complete set) includes all accessories, as A Desiccator, small, to degas PDMS A Desiccator, large, with N 2 /UV inlets A Ready-to use PDMS-CP, 22x22 mm 2, shown in the picture on mixtures (curved) 3 mm S-channel, shown with tubes the left. 8 GESIM GESIM 9

6 Flow Cells Type: PDMS Channel Plate A PDMS-CP 22x22, new PDMS-CP, ready to use, max. 4x UNF1/4-28 inlets A PDMS-CP 22x22, recycled used body, new PDMS layer ( ) A PDMS-CP 22x50, new PDMS-CP, ready to use, max. 6x UNF1/4-28 inlets A PDMS-CP 22x50, recycled used body, new PDMS layer A PDMS-CP 25x75, new PDMS-CP, ready to use, max. 10x UNF1/4-28 inlets A PDMS-CP 25x75, recycled used body, new PDMS layer ( ) A PDMS-CP with O 2 -bonded coverglass PDMS and glass, irreversibly bonded ( ) A PDMS-CP 22x22, sample carrier special design for sample carrier (inquire) Type: PDMS Channel Plate A PDMS-CP 22x22, 4 inlet electrodes PDMS-CP, inlets electrically conducting, with PCP and connector A Sample carrier A Au contact fitting, UNF1/4-28 A , -107 The sample carrier can bring opaque objects (up to 2.5x2.5 mm 2 ) into the flow channel; the sample must be illuminated from the objective side. The specimen can be rotated by 360. Picture left, principle; centre, sample carrier outside channel with silicon samples; right: sample carrier screwed into its special 22x22 PC body. Please inquire for more information or other configurations. A Ag/AgCl contact fitting, UNF1/4-28 A Pressure sensor fitting, UNF1/4-28 A PC body for PDMS-CP 22x22 PC body (PC = polycarbonate), ready for PDMS casting A PC body for PDMS-CP 22x50 PC body ready for PDMS casting A PC body for PDMS-CP 25x75 PC body with max. 10 inlets, ready for PDMS casting at customer site A Al body for PDMS-CP 25x75 aluminium body, ready for PDMS casting Type: Glass-Glass Channel Plate A Glass-glass CP, µ-electrodes on one side A Glass-glass CP, µ-electrodes on both sides Type: Silicon-Glass Channel Plate A Si-Si realised by direct bonding CAD from GESIM design library, based of 4 Si wafer A Si-Si realised by direct bonding customised CAD, not part of GeSiM design library, 4 Si wafer based Type: Silicon-Silicon Channel Plate A Si-Si realised by direct bonding CAD from GESIM design library, based of 4 Si wafer A Si-Si realised by direct bonding customised CAD, not part of GESIM design library wafer, 4 Si wafer based A UNF1/4-28 fitting with Au contact A UNF1/4-28 fitting with Ag/AgCl contact A Pressure sensor fitting, UNF1/4-28 A PC body (lid) for PDMS-CP 22x22 A PC body (lid) for PDMS-CP 25x75 A Glass-glass channel plate; microelectrodes on both sides of channel, wire-bonded PCBs A , -108 CPs 22x22 and 22x50 in A PDMS channel plate, 25x75 (slide size), A PDMS CP 22x22 with four inlet elec- comparison, each mounted in its support. New and in support; here with 3 inlets and 1 outlet trodes, in support recycled CPs look the same. 10 GESIM GESIM 11

7 Microvalves For controlled injection of liquids into the channel, e.g. to start and stop reactions, a hydrogel microvalve (HGV, GESIM patent) with small dead volume is placed into the standard (UNF1/4-28) inlets. It contains hydrogel particles that dramatically shrink (dehydrate) above 34 C, thus opening the valve. In the primarily used PV6 HGV, liquid passes through holes etched into the actuator chamber. Hydrogel: ground and sieved particles of pure N-isopropylacrylamide, switching at 34 C ( > normally closed valve at RT), for neutral aqueous solutions A HGV PV6, complete valve housed in PEEK fitting (UNF1/4-28) with tube connection A Hydrogel valve PV6, complete microvalve housed in PEEK injector fitting UNF1/4-28 A Hydrogel valve PV6, naked chip with electrical socket Heating power 250 mw via Pt thin film heaters, switching time 1 3 seconds, watertight up to 500 kpa (5 bar) A HGV-PV5, complete microvalve in PEEK housing, with UNF1/4-28 tapped holes A HGV PV5, naked chip. Note the meandering Pt heater in the middle of the channel. Temperature control using built-in PT100 sensor by a module in the Fluid Processor Microvalves A HGV PV5, complete µ-valve housed in PEEK and UNF1/4-28 HGV = hydrogel valve A turn valve with PDMS rotor (A ) is also available; please ask for details. A HGV PV6, complete valve housed in PEEK tube fitting UNF1/4-28 A HGV PV6, complete µ-valve, housed in injector fitting UNF1/4-29 HGV = hydrogel valve housing with UNF1/4-28 threads and electrical cable A HGV housing, PV5 and PV6 A HGV PV5, naked chip spare part for A HGV chip PCB A HGV PV6, naked chip spare part for A A PDMS rotary valve microfluidic selector valve with PDMS sealing, different designs; details on request Fitting A040-81, -100 HGV PV6 in UNF fitting. Left, injector for manual sample addition via microfunnel; right, sample injection Masters for PDMS Channel Plate through tube. HGV PV6 actuator chamber, with platinum heater and temperature sensor structures, filled with hydrogel particles, before assembly A , -551 Sample GESIM has a library of channel designs from which you can choose. In this case no charges for a master are necessary. Of course customized designs are possible, please inquire. injection into T-channel. The main flow is stopped; then the HGV (red inlet) opens and the All masters are deep reaction ion etched on a 10 cm (4 ) silicon wafer, teflonised for better demoulding, and cut for immediate use. sample is sucked in. The extra K-channel (white outlet) can flush the dead volume between HGV and T-junction. Customized designs are always made (and charged for) on a 4-inch wafer, so you can put as many different masters on a wafer as fit on it. A x22 master, K-channel design A x22 master, T-channel design 12 GESIM GESIM 13

8 No. Casting Stations (Details of Shipment) Figure Masters for PDMS Channel Plate A Master design and prototyping customised CAD related to 4"-Si wafer processing A x22 master, S-T-K channel mask is part of GeSiM design library based on 4 Si wafer size A x22 master, T-channel design mask is part of GeSiM design library based on 4 Si wafer size A x22 master, 2Y channel design mask is part of GeSiM design library based on 4 Si wafer size ( ) A x50 master, 3-channel design mask is part of GeSiM design library based on 4 Si wafer size A x75 master, T channel design mask is part of GeSiM design library based on 4 Si wafer size Casting Station 22x22 A x22 PC body, 4 inlets A Casting chamber aluminium/teflon A PDMS mixing glass, 20 ml ( ) A PDMS dispense tip (hollow needle) A Channel spacer, based on UNF1/4-28 fitting A Coverslip glass #1,0 or #1,5, size 22x22 mm² ( ) Disposables A Cover glass with Pt-electrodes 22x22 mm², 175 µm thick, glass coverslip with microelectrodes A Coverslip glass with Pt-electrodes and SiO2 insulation batch of 10 glasses, 22x22 mm² #1 or #1,5, Pt 100nm/SiO 2 600nm A Coverslip glasses, fully ITO coated batch of 10 coverslip glasses, diam. 22mm, coated with ITO 100 nm A Coverslip glasses with ITO electrodes batch of 10 coverslip glasses coated with ITO 100 nm electrodes A Coverslip glass, non-coated, customized size batch of 10 coverslip glasses, customised size A Syringe 5 ml disposable ( ) A Syringe 1 ml disposable ( ) A PDMS mixing glass 20 ml disposable ( ) A PDMS dispense tip, conical, pink disposable A PDMS dispense tip, conical, green disposable ( ) A Teflon tube, diam. = 1.58 mm inner diameter selectable (range µm) ( ) A Tube cutter to prepare flangeless tube/fitting connections Software A software, "Mixing Project can be customised; details on request A software, "S-T-K Project A software, "FC1" only to drive syringe pumps A PDMS-CP with attached coverslip, moulded from a master with 2Y channel design A x75 master, T-channel, in aluminium calotte A PDMS syringe 1 ml ( ) A PDMS syringe 5 ml ( ) A PDMS, 1 l Sylgard 184, crosslinker A Adhesion promoter Wacker 790G A Desiccator, small A PEEK stopper fitting Casting Station 22x50 A x50 PC body, 4 inlets A Casting chamber 22x50 aluminium/teflon A PDMS mixing glass, 20 ml ( ) A PDMS dispense tip (hollow needle) A Channel spacer, UNF1/4-28 fitting A Coverslip glass, #1 or #1,5, size 22x50 mm² ( ) A PDMS syringe 1 ml ( ) A PDMS syringe 5 ml ( ) A Adhesion promoter Wacker 790G A desiccator A Desiccator, small A PEEK stopper fitting Casting Station 25x75 A x75 PC body, 4 inlets A Casting chamber aluminium/teflon A PDMS mixing glass, 20 ml ( ) A PDMS dispense tip (hollow needle) A Channel Spacer, UNF1/4-28 fitting A Coverslip Glass, (25x75x0,3) mm³ ( ) A PDMS syringe 1 ml ( ) A PDMS syringe 5 ml ( ) A PDMS, 1 l Sylgard 184, crosslinker A Adhesion promoter Wacker 790G A Desiccator, small A PEEK stopper fitting A software, S-T-K project, here with two dilutors and a hydrogel valve. It can control, interactively and programmable, a simple S-channel, a T-channel with two inlets, or a K-channel that allows to clean the branch downstream of the hydrogel valve. Different flow configurations are selected by the buttons on the left. A FC1 software for the control of six dilutors and two selector valves. No special channel design is associated with this software. 14 GESIM GESIM 15

9 Gesellschaft für Silizium-Mikrosysteme mbh Bautzner Landstraße Radeberg, Germany Tel. +49 (0) Fax +49 (0) Technical data subject to change without notice

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