Low Temperature Superconductor Electronics. H.-G. Meyer, Institute of Photonic Technology Albert Einstein Strasse Jena, Germany

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1 Low Temperature Superconductor Electronics H.-G. Meyer, Institute of Photonic Technology Albert Einstein Strasse 9 07745 Jena, Germany

2 Outline Status of Semiconductor Technology Introduction to Superconductor Electronics Superconductor Electronics Technology Applications Conclusions

3 Silicon is not so bad Pentium: ~ 100mm 2 5µm active layer = 0.5mm 3 Mosquito s head ~ 0.5mm 3? Computers are capable of wining chess with Gary Kasparov (Deeper Blue > 1,000 Pentium) Forecasting next day s weather calculating trajectory of Mars making my slides

4 Moore s Law - Chip Complexity Number of Transistors [M] 10,000 1,000 100 10 1.6 /year 0.6 mm 0.25-0.35 mm Trends of the number of transistors on a single chip of recent high performance processors 90 nm 0.13-0.18 mm 65 nm 45 nm 1 1990 1995 2000 2005 2010 Calendar Year Background slide from N. Yoshikawa

5 Consequences of Scaling - Clock Frequency Frequency [MHz] 10,000 1,000 100 10 8085 8086 286 386 486 8080 P6 Pentium proc 30 GHz 6.5 GHz 14 GHz 3 GHz 1 8008 4004 1970 1980 1990 2000 2010 Calendar Year

6 Breakdown of Moore s Law for Clock Frequency 10,000 Trends of the clock frequency of recent high performance processors Clock Frequency [MHz] 1,000 100 1.6 /year 1.0 /year 10 1990 1995 2000 2005 2010 Calendar Year Background slide from N. Yoshikawa

7 Power Density Will Increase P = n f requency C load V 2 d Power Density [W/cm 2 ] 10,000 1,000 100 10 1 8004 8008 8086 8080 8085 rocket nozzle nuclear reactor hot plate 286 386 486 Pentium proc desired trajectory 1970 1980 1990 2000 2010 Calendar Year P6 Sun ~6kW/cm 2 Ref. Intel

8 Increase of Power Consumption 300 Trends of the power consumption of single chips of recent high performance processors Power Consumption [W] 250 200 150 100 50 P = n f C 2 V d 0 1990 1995 2000 2005 2010 Calendar Year Background slide from N. Yoshikawa

9 Limit Technology - Lowest Barrier Required: low probability Π of spontaneous thermal transitions between two wells (error probability) Double potential well: thermal escape Π classic E = b exp kbt Limit: 1 2 = exp E b kbt E b = k B T ln2 E b a Ref. R. Cavin, V. Zhirnov, J. Hutchby & G. Burianoff, SCR

10 Limit Technology - Heisenberg s Uncertainty Principle Minimum size x min of a switch (Heisenberg uncertainty principle): x min = Δp 2 min = 2m e E bit = 2m e k B Tln2 = 1.5nm (T = 300K) Minimum size corresponds to a maximum integration density n max of switches: 1 13 2 n ITRS22nm node: 2.2 10 9 /cm 2 max = = 4.7 10 switches/cm x Minimum switching time τ min (Heisenberg uncertainty principle): τ ΔE k B Tln2 min = = = 0.04ps ITRS22nm node: 0.15ps Power dissipation P of this limit technology: n P = E τ max min bit = 3.7 10 6 W/cm ITRS22nm node: 2 ultimate! 100W/cm 2 practical Ref. A. Jakubowski, A. Swit

11 End of Story? Use Magnetic Flux Quanta Instead of Electrical Charges

12 Power Dissipation 1p energy-delay product 100f 10f 10-27 Js CMOS 250nm bit energy [J] 1f 100a 10a 10-30 Js 90nm 35nm 22nm thermal noise E=1,000k B T (T=300K) 1a 0.1a 0.35µm SFQ *) 2µm thermal noise E=1,000k B T (T=4.2K) *) Single Flux Quantum Heisenberg s uncertainty principle E=1,000ħ/Δt 0.1p 1p 10p 100p 1n 10n gate delay [s]

13 Single Flux Quantum Electronics Basic building blocks of SFQ circuits Josephson Junction: basic switching device, generates single flux quanta Inductance Resistor In contrast to CMOS In SFQ circuits inductances define the functionality. The mode of operation depends on the wiring between the Josephson junctions. Drawbacks Careful inductance calculation is required. Layout scaling is not possible. Storage of flux quanta is chip-area-consuming.

14 Important Attributes of SFQ Digital Circuits Fast and low-power switching devices that generate identical single-flux-quantum data pulses. Loss-less superconducting wiring for power distribution. Latches that store a magnetic-flux quantum. Low loss, low dispersion integrated superconducting transmission lines that support ballistic data and clock transfer at the clock rate. Cryogenic operating temperatures that reduce thermal noise and enable low power operation. SFQ circuit fabrication that can leverage processing technology and computer-aided design (CAD) tools developed for the semiconductor industry.

15 Operation of SFQ Circuits damping resistor SFQ circuits are built from superconducting loops and overdamped Josephson junctions isolator superconductor superconductor bias current transfer: a single flux quantum is moved from one loop to another one via switching a Josephson junction TRANSFER STORAGE DECISION decision: a clock signal drives a tow junction pair and forces one of them to switch storage: a large inductor allows to store the circulating current and traps the flux quantum

16 Josephson Junction Characteristic Parameters L P C J J I C R critical current density j C = 1kA/cm 2 critical current I C = 250µA capacitance C J = 1.25pF resistance R ~ 1 Ω parasitic inductance L P = 1pH Josephson junction as a thin-film device. Cross section and top view.

17 C J Josephson Junction Dynamics J pulse duration pulse amplitude I C τ V SFQ max = π ω C = 2I C R 1ps R 1mV h ΔΦ = V(t)dt = Φ0 = = 2.07mV ps 2e voltage [μv] 300 200 100 0 magnetic flux quantum Φ 0 energy dissipated power char. frequency E = I P D C Φ = 2I 0 2 C 2 10 19 J R 0.1μW 2πICR ωc = fc = 500GHz Φ 0 0 20 40 60 80 time [ps] SFQ pulse at a Josephson junction with I C = 250µA, R = 1.02Ω, C = 1.26pF, and I C R = 0.255mV; pulse width ~ 6.5ps, pulse amplitude ~ 320μV.

18 Superconductor Electronics Technology Main features of SFQ technology Works with metals rather than semiconductors Three superconducting layers Nb/AlAlO X /Nb trilayer for junctions with typically j C =1 ka/cm 2 External shunt with typical sheet resistance of 1Ω/ Layer Thickness Material Josephson Junction Shunt Via, Pad R2 M2 I2 R1 I1B 50 nm 350 nm 150 nm 80 nm 150 nm Au Nb SiO Mo SiO I1A 70 nm Nb 2 O 5 T1 M1 60 nm 12 nm 30 nm 250 nm Nb Al 2 O 3 Nb Nb I0B 200 nm SiO I0A 50 nm Nb 2 O 5 M0 200 nm Nb

19 Scaling Down SFQ - Chip Performance Josephson Junction Size [μm] Integrated Circuit Density [cells per cm²] Integration Level SFQ Pulse Width [ps] Maximum Clock Rate [GHz] Minimum Power Dissipation [μw per cell] 3.5 10,000 LSI 4 10-40 0.03 1.5 30,000 VLSI 2 40-80 0.06 0.8 100,000 ULSI 1 70-130 0.1 0.4 1,000,000 SLSI 0.8(?) 100-200(?) 0.15(?) Basic figures of merit for niobium trilayer SFQ circuits for different minimum feature sizes.

20 Scaling down the SFQ - Technology Maximum Clock Frequency [GHz] 1,000 100 10 1 Junction Size [μm] 10 3 1 0.3 0.1 10-1 1 10 10 2 10 3 Current Density [ka/cm 2 ] Critical Current Density [ka/cm 2 ] 10 2 1 10-2 IPHT: room temperature IPHT: UV oxidation W. M. Mallison et al., IEEE Trans. Appl. Supercond. 5(1995)2, 2330-2333. 10-3 10-1 10 10 3 10 5 Oxygen Exposition [mbar min] Shrinking superconductor electronics. Scaling the junction size down to 0.3 μm the clock speed of integrated circuits can be increased well-above 100 GHz. Critical current density as a function of oxygen exposition; ultra-violet light-assisted oxidation allows to reach very low values of the critical current density (triangles).

21 SFQ Foundries Japan USA EU Institution NEC Hypres IPHT Process SDP ADP2 1000-1 4500-1 rsfq1d Current Density [ka/cm 2 ] Minimum Lateral JJ Dimension [μm] 2.5 10 1 4.5 1 2 1 3 1.5 3.5 Nb Layers 3 6 10 4 4 3 Complexity 23.5k 12k...15k 5k Manufacturing facilities for niobium-based digital superconducting electronic circuits on costumer request.

22 dc-sfq Converter bias R2=14.3Ω input R1=9.1Ω J1 225μA L1 Lp1 Lb1 L2 J2 225μA Lp2 Lb2 L3 J3 output 250μA Lp3 Chip Layout Schematic. The optimisation of parameters is very important for the correct function.

Standard Cell Library 23 www.fluxonics-foundry.de Josephson transmission line Line Crossing dc/sfq converter splitter merger micro-strip line interconnects (MSL) SFQ/dc converter RS-FF delay-ff toggle-ff dc/sfq-jtl-sfq/dc circuit

24 Circular Shift Register www.fluxonics-foundry.de 512 bit memory 5,153 Josephson junctions

25 Fields of Application SFQ is not a technology for everyday devices but can do well at the high-end. High-speed computing. Telecommunication. Imaging. Mixed signal.

SFQ in Telecommunication The All Digital Receiver (ADR) chips comprise either a low-pass or band-pass single loop delta modulator with phase modulation demodulation architecture together with digital in-phase and quadrature mixer and digital decimation filters. 26 The Cryocooled X-band All-Digital Receiver (XADR) system demonstration with live XTAR satellite. Digital data including video were transmitted over satellite and received by HYPRES XADR system by directly digitizing X-band (7.6 GHz) satellite downlink signal with high sampling rate clock. Microphotograph of the low-pass ADR 1 cm 2 chip (Hypres Inc.) containing 12,000 Josephson junctions clocked at 29.44 GHz. In the Nyquist band of 10 MHz, this chip shows 75.7 db signal-tonoise-and-distortion ratio (SINAD).

27 SFQ Based Microprocessor Most complex circuit realised in 10 ka/cm 2 process by ISTEC Japan. controller inst. cache (64 b) data cache (128 b) register file ALUs 8 bit, bit-serial 1,000 MOPS at peak 25 GHz bit-operation 4-stage pipelining 22,302 JJs 2.63A (6.5 mw) 128-bit inst. Cache 64-data cache 6.3 6.3 mm 2 8 mm die Photograph of the 8 bit serial microprocessor Core1γ (photo - courtesy of A. Fujimaki). Background slide from N. Yoshikawa

28 Superconducting petaflop Computer SFQ core Design study of the system installation concept for petaflops computer. Enclosure for the superconducting processors is 1 m 3 white structure with cooling lines into the top (left hand side). Packaging concept showing 512 fully integrated multi-chip modules (right hand side). NSA Study on Superconducting Technology Assessment, 2005

29 Conclusion Silicon has still a lot of potential: Performance instead of speed! SFQ is a technology for high-end devices. Works well on lab level, foundries are the next step. Comparatively simple thin-film technology: only metals and insulators. High performance can be reached already at moderate feature sizes: submicron range. Cooling needed but is not an issue. SFQ opens new performance levels in high-speed computing, telecommunication, ADC, mixed signal.

30 About SFQ WHAT IS RSFQ CIRCUITRY? Single Flux Quantum (SFQ) is the latest generation of superconductor circuits based on Josephson junction devices. It uses generation, storage, and transmission of identical single magnetic flux quantum pulses at rates approaching 1,000 GHz. Small asynchronous circuits have already been demonstrated at 770 GHz, and clocked SFQ circuits are expected to exceed 100 GHz. JOSEPHSON JUNCTIONS The Josephson junction (JJ) is the basic switching device in superconductor electronics. Josephson junctions operate in two different modes: switching from zero voltage to the voltage state and generating single flux quanta. The early work, exemplified by the IBM and the Japanese Josephson computer projects of the 1970 s and 1980 s, exclusively used logic circuits where the junctions switch between superconducting and voltage states and require AC power. SFQ junctions generate single flux quantum pulses and revert to their initial superconducting condition. RSFQ circuits are DC powered.

31 Moore s Law Frequency Scaling 10,000 Historical grow rate = frequency 2 every 4½ years (meaning 17% per year, since 1.17 4.5 =2) This corresponds to 2 CMOS generations (since F n+2 /F n =1/k 2 =2) Giving 1 CMOS generation per 2.25 years Frequency [GHz] 1,000 100 10 4½ years = 17%/year 2 intrinsic, 1/τ NAND gate chip clock 1 2003 2005 2007 2009 2011 2013 2015 2017 Calendar Year Background slide from P. Zeitzoff, Sematech