Impact of 3-D Mask Effects on CD and Overlay over Image Field in Extreme Ultraviolet Lithography

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Impact of 3-D Mask Effects on CD and Overlay over Image Field in Extreme Ultraviolet Lithography 5 th International EUV Symposium Barcelona, Spain Sven Trogisch Markus Bender Frank-Michael Kamm

Disclaimer This presentation may contain forward-looking statements. Statements that are not historical facts, including statements about our beliefs and expectations, are forwardlooking statements. These statements are based on current plans, estimates and projections, and you should not place too much reliance on them. These forwardlooking statements speak only as of the date they are made, and we undertake no obligation to update any of them in light of new information or future events. These forward-looking statements involve inherent risks and are subject to a number of uncertainties, including trends in demand and prices for semiconductors generally and for our products in particular, the success of our development efforts, both alone and with our partners, the success of our efforts to introduce new production processes at our facilities and the actions of our competitors, the availability of funds for planned expansion efforts, the outcome of antitrust investigations and litigation matters, as well as other factors. We caution you that these and a number of other important factors could cause actual results or outcomes to differ materially from those expressed in any forward-looking statement. These factors include those identified under the heading "Risk Factors" in our initial public offering prospectus on Form F-. Qimonda Sven Trogisch Markus Bender Frank-Michael Kamm "5th International EUV Symposium" - Barcelona (Spain) - October 6th, 26 Page 2

Outline shadowing root causes and effects ITRS: requirements on CD-control and Overlay simulation results (angle variations across slit) one possible way to minimize shadowing effects summary Qimonda Sven Trogisch Markus Bender Frank-Michael Kamm "5th International EUV Symposium" - Barcelona (Spain) - October 6th, 26 Page 3

'shadowing' effect root cause source scan direction across slit Non-telecentricity on reticle causes 'shadowing effect' angle of incidence (with respect to scan-direction) varies across the illumination slit Qimonda Sven Trogisch Markus Bender Frank-Michael Kamm "5th International EUV Symposium" - Barcelona (Spain) - October 6th, 26 Page 4

'shadowing' effect root cause Z X scan direction side view top view across slit front view side view an offset of printed features in scan direction is expected X Z Qimonda Sven Trogisch Markus Bender Frank-Michael Kamm "5th International EUV Symposium" - Barcelona (Spain) - October 6th, 26 Page 5

'shadowing' effect root cause Z X scan direction side view top view across slit front view side view an offset of printed features in scan direction is expected X Z the displacement in X direction will depend on the maskposition of the feature Qimonda Sven Trogisch Markus Bender Frank-Michael Kamm "5th International EUV Symposium" - Barcelona (Spain) - October 6th, 26 Page 6

'shadowing' effect root cause Z X scan direction side view top view across slit front view side view an offset of printed features in scan direction is expected X Z the displacement in X direction will depend on the maskposition of the feature Qimonda Sven Trogisch Markus Bender Frank-Michael Kamm "5th International EUV Symposium" - Barcelona (Spain) - October 6th, 26 Page 7

Feature displacement across slit at best dose and focus shadowed feature non-shadowed feature X X top-down-view half pitch 32nm 4nm 5nm center of feature y-direction 4.5.5 4 3.5 3 2.5 5 x -3 offset - shadowed line 2 -.5 -.5-25 -2-5 - -5 5 5 2 25.5 -.5 2 x -3 offset - not shadowed line x-direction -2 65 7 75 8 85 9 95 5 5 Qimonda Sven Trogisch Markus Bender Frank-Michael Kamm "5th International EUV Symposium" - Barcelona (Spain) - October 6th, 26 Page 8

ITRS Roadmap (25) ear of Production 29 2 2 22 23 DRAM ½ pitch (contacted) (nm) 5 45 4 36 32 Flash ½ pitch (un-contacted poly) (nm) 45 4 36 32 28 Contact in resist (nm) 56 5 44 39 35 Contact after etch (nm) 5 45 4 36 32 Overlay (3 sigma) (nm) 9 8 7. 6.4 5.7 CD control (3 sigma) (nm) 5.3 4.7 4.2 3.7 3.3 Overlay (nm) Overlay is a vector component (in X and directions) quantity defined at every point on the wafer. It is the difference, O, between the vector position, P, of a substrate geometry, and the vector position of the corresponding point, P2, in an overlaying pattern, which may consist of resist. O=P-P2. The difference, O, is expressed in terms of vector components in the X and directions, and the value shown is three times the standard deviation of overlay values on the wafer. CD control (nm) Control of critical dimensions compared to mean line width target at all pattern pitch values, including errors from all lithographic sources (due to masks, imperfect optical proximity correction, exposure tools, and resist) at all spatial length scales (e.g., includes errors across exposure field, across wafer, between wafers and between wafer lots) Qimonda Sven Trogisch Markus Bender Frank-Michael Kamm "5th International EUV Symposium" - Barcelona (Spain) - October 6th, 26 Page 9

ITRS Roadmap (25) ear of Production 29 2 2 22 23 DRAM ½ pitch (contacted) (nm) 5 45 4 36 32 Flash ½ pitch (un-contacted poly) (nm) 45 4 36 32 28 Contact in resist (nm) 56 5 44 39 35 Contact after etch (nm) 5 45 4 36 32 Overlay (3 sigma) (nm) 9 8 7. 6.4 5.7 CD control (3 sigma) (nm) 5.3 4.7 4.2 3.7 3.3 Overlay (nm) Overlay is a vector component (in X and directions) quantity defined at every point on the wafer. It is the difference, O, between the vector position, P, of a substrate geometry, and the vector position of the corresponding point, P2, in an overlaying pattern, which may consist of resist. O=P-P2. The difference, O, is expressed in terms of vector components in the X and directions, and the value shown is three times the standard deviation of overlay values on the wafer. CD control (nm) Control of critical dimensions compared to mean line width target at all pattern pitch values, including errors from all lithographic sources (due to masks, imperfect optical proximity correction, exposure tools, and resist) at all spatial length scales (e.g., includes errors across exposure field, across wafer, between wafers and between wafer lots) Qimonda Sven Trogisch Markus Bender Frank-Michael Kamm "5th International EUV Symposium" - Barcelona (Spain) - October 6th, 26 Page

CD-variation and feature displacement across slit at best dose and focus.65 shadowed feature CD - shadowed line.65 non-shadowed feature CD - not shadowed line.6 6.6 6 CD.55.55.5.5 5 5.45.45.4.4 4 4-25 -2-5 - -5 5 5 2 25 65 7 75 8 85 9 95 5 5 half pitch 32nm 4nm 5nm center of feature y-offset 4.5.5 4 3.5 3 2.5 2 5 x -3 offset - shadowed line.5 -.5-25 -2-5 - -5 5 5 2 25.5 -.5 2 x -3 offset - not shadowed line x-displacement -2 65 7 75 8 85 9 95 5 5 (absorber thickness = 7nm, dense L/S, data out of aerial image simulations, NA=.25, σ=.5, dose-to-size with +7nm offset for dark feature) - Qimonda Sven Trogisch Markus Bender Frank-Michael Kamm "5th International EUV Symposium" - Barcelona (Spain) - October 6th, 26 Page

CD-variation and feature displacement across slit at best dose and focus.65 shadowed feature CD - shadowed line.65 non-shadowed feature CD - not shadowed line.6 6.6 6 center of feature CD y-offset.55.5 5.45 4.5.5 3.5 2.5-25 -2-5 - -5 5 5 2 25 5 x -3 offset - shadowed line.5 -.5-25 -2-5 - -5 5 5 2 25 65 7 75 8 85 9 95 5 5 Qimonda Sven Trogisch Markus Bender Frank-Michael Kamm "5th International EUV Symposium" - Barcelona (Spain) - October 6th, 26 Page 2.55.5 5.45.4.4 4 4 4 3 2 ~.5nm.5 -.5-2 x -3 offset - not shadowed line -2 65 7 75 8 85 9 95 5 5 45% of the total CD control (32nm node) and 56% of total Overlay budget (32nm node) lost due to different illumination angles x-displacement ~3.2nm half pitch 32nm 4nm 5nm

CD-variation and feature displacement for 32nm node over dose shadowed feature non-shadowed feature.5.5 CD center of feature y-offset.48.48.46.46.44.44.42.42.4.4.38.38.36.36-25 -2-5 - -5 5 5 2 25 4.5.5 4 3.5 3 2.5 2 5 x -3.5 -.5-25 -2-5 - -5 5 5 2 25.5 -.5-65 7 75 8 85 9 95 5 5 2 x -3 x-displacement -2 65 7 75 8 85 9 95 5 5 dose -8% -4% best + 4% + 8% Qimonda Sven Trogisch Markus Bender Frank-Michael Kamm "5th International EUV Symposium" - Barcelona (Spain) - October 6th, 26 Page 3

CD-variation and feature displacement for 32nm node over dose shadowed feature non-shadowed feature.5.5 CD center of feature y-offset.48.48.46.46.44.44.42.42.4.4.38.38.36.36-25 -2-5 - -5 5 5 2 25 4.5.5 4 3.5 3 2.5 2 5 x -3.5 -.5-25 -2-5 - -5 5 5 2 25.5 -.5-65 7 75 8 85 9 95 5 5 2 x -3 x-displacement -2 65 7 75 8 85 9 95 5 5 dose -8% -4% best + 4% + 8% Overlay error stable at dose variations, only negligible changes in CD signature Qimonda Sven Trogisch Markus Bender Frank-Michael Kamm "5th International EUV Symposium" - Barcelona (Spain) - October 6th, 26 Page 4

CD-variation and feature displacement for 32nm node over defocus shadowed feature non-shadowed feature.5.5 CD center of feature y-offset.48.48.46.46.44.44.42.42.4.4.38.38.36.36 3.5 2.5-25 -2-5 - -5 5 5 2 25 5 x -3 4.5.5 4 3 2.5 -.5-25 -2-5 - -5 5 5 2 25 46 42 38.5 -.5-65 7 75 8 85 9 95 5 5 2 x -3 x-displacement -2 65 7 75 8 85 9 95 5 5 defocus -2nm -nm nm +nm +2nm Qimonda Sven Trogisch Markus Bender Frank-Michael Kamm "5th International EUV Symposium" - Barcelona (Spain) - October 6th, 26 Page 5

CD-variation and feature displacement for 32nm node over defocus shadowed feature non-shadowed feature.5.5 CD center of feature y-offset.48.46.44.42.4.38.36 4.5 4 3.5 3 2.5 2.5-25 -2-5 - -5 5 5 2 25 5 x -3-25 -2-5 - -5 5 5 2 25 65 7 75 8 85 9 95 5 5 Qimonda Sven Trogisch Markus Bender Frank-Michael Kamm "5th International EUV Symposium" - Barcelona (Spain) - October 6th, 26 Page 6.48 46.46.44 42.42.4 38.38.36.5.5 -.5 - -.5 2 x -3-2 65 7 75 8 85 9 95 5 5 X-Overlay-error is stable, while -Overlay-error sensitive to focus shifts, CD-control of shadowed features is very delicate due to a focus shift x-displacement defocus -2nm -nm nm +nm +2nm

Conclusions 'shadowing' effects due to non-telecentric illumination will consume at least 5% of the Overlay- and CD-Control budget defined in ITRS roadmap for the 32nm node massive full-field OPC and/or tuning of tool settings may reduce the impact for a dose range - but only for one fixed focus changes in CD-signature across illumination slit due to defocus-variation will reduce the useable process-window Will an enhanced absorber stack solve the problem? Qimonda Sven Trogisch Markus Bender Frank-Michael Kamm "5th International EUV Symposium" - Barcelona (Spain) - October 6th, 26 Page 7

Aerial image intensity as a function of absorber thickness shadowed feature non-shadowed feature rel. intensity @ AI threshold.8.6.4.2.4.3.2 absorber- thickness thickness [µm]. -.4 -.2 x [µm].2.4 threshold.8.6.4.2.4.3.2 absorber- thickness thickness [µm]. -.4 -.2 x [µm].2.4 absorberthickness -.4 -.2.2.4 shadowed features determine the upper limit of absorber thickness contrast requirements determine the lower limit of absorber thickness Qimonda Sven Trogisch Markus Bender Frank-Michael Kamm "5th International EUV Symposium" - Barcelona (Spain) - October 6th, 26 Page 8

Center of printed feature as function of absorber thickness shadowed feature absorber thickness 4 3 2.4.35.3.25.2.5..5 -.4 -.3 -.2 -...2.3.4-4 -2 2 4 y-direction center of printed feature (displacement) displacement as a function of absorber thickness shows a linear trend (in a st order approximation) a thinner absorber will reduce displacement errors Qimonda Sven Trogisch Markus Bender Frank-Michael Kamm "5th International EUV Symposium" - Barcelona (Spain) - October 6th, 26 Page 9

summary 'shadowing' effects of EUV absorber masks in a non-telecentric projection system will consume 5% and more of the ITRS Overlay-budget if no full-field OPC or tool tuning is applied CD-signature across illumination slit might be balanced by a massive full-field OPC since CD-signature of shadowed features is non-comparable with nonshadowed features an adjusted dose-distribution across slit will not help simulations show that an enhanced absorber stack will reduce 'shadowing' effects as well as improve aerial image contrast due to the high flare level of early EUV tools the advantage of the enhanced absorber stack needs experimental verification This work was financially supported by the Federal Ministry of Education and Research of the Federal Republic of Germany (BMBF) under the Contract No. M362. Qimonda Sven Trogisch Markus Bender Frank-Michael Kamm "5th International EUV Symposium" - Barcelona (Spain) - October 6th, 26 Page 2

Thank you The World s Leading Creative Memory Company Sven Trogisch Markus Bender Frank-Michael Kamm

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