As Semiconductor Devices Shrink so do their Reliability and Lifetimes

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As Semiconductor Devices Shrink so do their Reliability and Lifetimes National Software and Airborne Electronic Hardware Standardization Conference August 20-21 Denver, CO Lloyd Condra, Boeing Gary Horan, FAA Bill Scofield, Boeing

Outline Background As semiconductor devices shrink, so do their reliability and lifetimes What we have done about it AVSI research results What we have yet to do Tool development Implementation

What Does COTS Mean? Part Sub-assembly (module) Equipment Modified Standard Consumer Commercial Industrial Mil-Aero System 32 Flavors of COTS (Baskin Robbins only has 31)

Our Challenge Our COTS supply chain is a Complex Adaptive System that evolves according to forces beyond our control We develop processes, methods, and standards that allow our customers to..design, produce, certify, and support products using parts and materials from Complex Adaptive Systems.

The COTS Semiconductor Industry is a Complex Adaptive System Feature size, nm 500 400 300 200 100 0 Voltage Scaling Driving factors: Cost Speed Size Time-to-market Cu Conductors Incidental factors: Reliability Configuration continuity What aerospace needs Low-D k Dielectrics Model-based Design 1994 1996 1998 2000 2002 2004 2006 2008 A feature is a line width, gate length, etc. of a CMOS gate.

Semiconductor Wearout 1000 100 Mean Service life, yrs. 10 Mil/Aero lifetimes 1.0 Computer/cell phone lifetimes 0.1 Technology 0.5 mm 0.25 130 nm 65 nm 35 nm 1995 mm 2005 2015 Year produced 1.0μ Most microcircuits are designed for 3-10 year service life Strong motivation to limit insight into longterm reliability Service Life (years) 100 10 Margin Source: E. Snyder (Sandia), IRPS, 2002) 0.35μ 0.18μ 0.1μ Typical service life goal (10 yrs.) 1990 1995 2000 2005

Predictions Confirmed by Experience* Wearout failures (Hot Carrier Injection) in 90nm ASIC devices Telecom OEM: 10% failure within 4 years Process Monitoring OEM: 20% failure within 3 years Major manufacturer of graphic processor units (GPU) limits maximum junction temperature to 80ºC in order to meet 5-year lifetime requirement *Source: DfR Solutions

Predictions Confirmed by Testing AVSI #17 Results 700 FIT 90 nm: ~ 100-300 FIT 0.25 μm: ~20-50 FIT Current state-of-the-art is 45 nm Avionics Inservice Data Test system at Tower semiconductor

What We Have Done About Early Semiconductor Wearout Aerospace Vehicle Systems Institute Project #17 Participants: Boeing, Honeywell, Goodrich, GE, Rockwell Collins, DoD, FAA, NASA Time span: 2003-2007 Subcontractor: Dr. Joseph Bernstein, U of MD Results Literature search failure mechanisms, models, parameters Confirmed models by testing Alpha version of FaRBS software Avionics system design handbook

Predictions Confirmed by Testing AVSI #17 Results 1.E+03 Acceptable for Commercial Applications 2010 2005 2000 FIT 1.E+02 Required for Avionics 1.E+01 1.E+02 1.E+03 1.E+04 1.E+05 1.E+06 1.E+07 1.E+08 Time (equivalent hours) Early Wearout Confirmed!!!

Wearout Mechanisms Electromigration Source Conducting Gate channel oxide Gate Drain Trench isolation Drain Gate oxide Gate Conducting channel Source P+ P+ N+ N+ P-well N-substrate Oxide breakdown Hot carrier injection (HCI) Negative bias temperature instability (NBTI) Voltage stresses TDDB NBTI HCI EM V γ TDDB g γ E atddb exp( ) kt V E anbti exp( ) exp( ) NBTI g kt γ V HCD ahcd exp( ) exp( ) kt n J d E E aem exp( ) kt Current stresses

FaRBS Reliability Software BQR Reliability User Supplied

90 nm NBTI Degradation Reliability Prediction with FaRBS ~0.98 Reliability, R(t)=1-F(t) 1.00 0.95 0.90 β=1 Reliability vs Time Fast Slow Typ ~2% failure in 2-4 years 0.85 0 5 10 15 20 ~3 Time, (yr) yrs.

Example FaRBS Outputs Reliability and Failure Rate Estimates 36Mb SRAM 1 0.998 Reliability 0.996 0.994 0.992 36 MB SRAM 1GB DRAM 0.99 Board failure rate 0.988 0 2 4 6 8 10 12 14 16 18 20 36 MB SRAM 90 nm technology 1.2 volts, 70ºC Time (years) FIT 900 800 700 600 500 400 300 200 100 0 0 2 4 6 8 10 12 14 16 18 20 Time (years)

Example FaRBS Output 900 800 700 600 Board failure rate Board with one 36Mb SRAM and one 1GB DRAM FIT 500 400 300 200 100 0 1 FIT = 1 failure/10 9 hrs. 0 2 4 6 8 10 12 14 16 18 20 Time (years)

Effect of Feature Size β = 2.1 β = 4.0 β = 7.3 β = 1.6 β = 1.3 Source: Wu, E.Y., and R.-P. Vollertson, On the Weibull Shape Factor of Intrinsic Breakdown of Dielectric Films and Its Accurate Experimental Determination Part I: Theory, Methodology, Experimental Techniques, IEEE Transactions on Electronic Devices, vol. 49, no. 12, December 2002. Pp. 2131-2140.

Effect of Voltage on TDDB 256M DRAM, 78nm CMOS process Gate oxide thickness approximately 5.5nm Operating voltage 1.5V. HTOL at 5.0V/125C Exponential voltage acceleration 1 with γ = 2.7 0 l ( l (1 F)) -1-2 -3 7.75V 7.50V 7.25V 7.00V BetaW=1.32-4 10 0 10 1 10 2 10 3 10 4 Time-to-fail (s)

What We Have Yet To Do AVSI Project #71 Commercial version of FaRBS software (DfR Solutions) Verify software by test data Beta test FaRBS software tool on selected Boeing systems Update with future technology data, models, and parameters Invite participation by others Provide inputs to aerospace design and reliability documents DO-254 MIL-HDBK-217

Commercial FaRBS Inputs Make AVSI 17 results user-friendly Graphical user interface (GUI) designed to interact with a wide range of users, e.g., design engineers, reliability engineers, etc. Requires a minimal set of inputs Manufacturer Manufacturer part number Duty cycle Use environment (temperature) Assumptions can be modified by expert users Operation at rated voltage Only mfr.-specified thermal solutions (no uprating) International Technology Roadmap for Semiconductors (ITRS) models and parameters Applicable to <130nm technology Default and package failure rates from handbooks (-217, Telcordia) or part manufacturer

Commercial FaRBS Outputs Make AVSI 17 results user-friendly Failure rate as a function of time Results can be exported in a.doc or.xls /.csv format Expert user will be able to extract failure rates for each failure mechanism Validation link will provide details on approach and experimental results

Implementation Update System Reliability and Certification Documents Hardware Reliability Prediction MIL-HDBK-217 Hardware Design Assurance RTCA DO-254 Software Design Assurance RTCA DO-178B System Functional Hazard Assessment System FMEA System FTA System Certification Analysis Updates needed