Mikrobohren mit gepulsten Faserlasern
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1 Mikrobohren mit gepulsten Faserlasern Ronald Holtz (Class 4 Laser Professionals AG) Christoph Rüttimann, Noémie Dury (Rofin Lasag AG)
2 Content - Market and applications overview - Properties of lamp pumped pulsed laser technology - Comparison to conventional cw fiber laser technology - qcw diode pumped pulsed fiber laser technology - Current application ranges and process limitations - Application examples - Comments and Conclusions 2
3 Markets for typical laser micro drilling applications Medical Engineering Electronics Tool Automotive Turbine Mechanical Devices SP drilling Trepanning Shaped holes scribing Perc. drilling Trepanning OTF drilling OTF drilling Perc. drilling OTF drilling Shaped holes Perc. Drilling SP drilling SP Drilling OTF drilling Perc. drilling OTF drilling Trepanning Perc. Drilling Perc. drilling 3
4 Micro drilling strategies Source: ILT Aachen
5 Laser drilling market: requirements and limits Aspect ratio (Depth/Diameter) Quality (Geometry tolerance % ) Nozzles Throttles 10 Nozzles Throttle Chir. needles Scribing 5 Chir. needles 1 Lubrication holes Filters Sieves Productivity (Holes per second) Cooling holes, lubrication holes Filters/Sieves Scribing
6 Requirements of industry Quality Costs Geometry Shape Tolerances - Taper - Roundness - Diameter - Conicity - Aspect ratio - Flow - Roughness - Entrance geometry Metallurgy - HAZ - Recast, oxide layer - Micro cracks - Delamination Side effects - debris - burr - delamination of coatings - backwall strikes - Investments - Running costs - process speed - pre- and post process - production steps $ Efficiency Quality 6
7 Properties Nd:YAG ( s-pulse): drilling process Laser beam Wavelength ( m) Power (W) Irradiance (W/cm 2 ) Energy (J) Interaction time/ pulse duration (ms) Polarisation Beam quality (mm mrad) Optics Focussing length/distance to surface Aperture Quality Beam shaping Gas Type/mixture/purity Velocity/distance nozzle - surface Beam expansion Source: LLT Aachen Material Surface Absorption Roughness Temperature Dirt Melt property -tension -chem. reactions bulk properties material type thickness heat conduction heat capacity microstructure f = w f = F = focal length of lens (mm) also working distance diameter of focal spot (mm) speed of lens (f/diameter on lens = beam divergence (mrad) w 0 = M 2 4l/p = beam product Focal position Resonator: Optics: Achievable focal spot diameter: w f = (4l/p) M 2 F Rayleigh length (depth of focus) z R = (4l/p)M 2 F 2 changeable: - M 2 - Power - beam diameter - no Change of beam quality - M 2 constant: change of spot size in relatioship to divergence Important process parameters Depending on w 0 : Threshold (pulse power/w f ) Tolerances (Rayleigh length) Productivity 7
8 Properties of lamp pumped pulsed laser technology Advantages: - High peak power - Low average power - Controllable heat transfer - Pulse shaping - Pulse modulation 16 kw 1 kw a b g d Disadvantages: - Lamp pumped system - Low power efficiency - Low beam quality - High maintance costs - High running costs 8
9 P P [W] P P [W] Comparison to conventional cw fiber laser technology LD LD LD LD LD LD Yb fiber Power Amplifier LD LD LD LD LD LD Advantages: - High average power - High beam quality - Low maintanance costs - Low running costs - High power efficiency 16 kw Disadvantages: - Peak power limited to max. cw power - Thermal drift of optics 1 kw 1 kw t [s] t [s] 9
10 Speed (m/min.) Schweisstiefe [µm] Comparison to conventional cw fiber laser technology Schweisstiefe über Fokuslage (10m/min 200W-cw) d(fokus) 25µm d(fokus) 50µm d(fokus) 75µm 100 Cw FL vs. pulsed Nd:YAG laser CFS W Tiefe (mm) Bronze Brass Aluminium G. Silver Cu SS Fokus-Z-Achse [mm] Welding penetration FL focal postion d (Weld Spot distance bifocal optic Cutting performance of a 400 W cw fiber laser 10
11 Comparison to conventional cw fiber laser technology 1999 introduction of pulsed qcw diode pumped rod lasers Technical Specifications Average power: Pulse length: Frequency: Energy: Peak power: air-cooled max. 40 W W W 0.5 J 1.5 kw 2012 still in use for Nitinol cutting LASAG DLS 11
12 QCW fiber lasers a silent revolution IPG YLR-150/1500-QCW-AC IPG YLS-600/6000-QCW-AC 12
13 QCW fiber lasers a silent revolution Properties: Rofin-Lasag LFS High peak power - High beam quality - Fiber output - Air cooled - 2 phase power interface - Low maintenance - High power efficiency 13
14 Beam Parameter Product (mm mrad) Behaviour of state of the art drilling lasers Resonator setup FLS 652 RU 26 A 2 2 LFS SM LFS MM 50 m KLS / FLS stabile resonator 0.37 KLS / FLS dedicated instabile resonator 14
15 Applications drilling of silicon nitride Material: Laser: Parameter: Comments: Silicon nitride 0.2 mm LASAG LFS 150 SM 1.5 kw Peak power, 0.06 ms Pulse length O2, 200 holes/s Diameter: 0.1 mm 15
16 Applications drilling of oxide ceramics Material: Laser: Parameter: Comments: Al2O3 0.4 mm LASAG LFS SM 1.5 kw Peak power, 0.08 ms Pulse length 4 W Average Power Air 16
17 Applications drilling of filters Material: Laser: Parameter: Comments: mm LASAG LFS 150 SM 0.8 kw Peak power, 0.1 ms Pulse length Air, 1800 holes/s Diameter: 0.05 mm Limitation of conventional lamp pumped pulsed Lasers is 400 holes/s. 17
18 Applications air bearings Material: Laser: Parameter: Comments: Stainless steel 0.8 mm LASAG LFS 150 SM 1.0 kw Peak power, 0.05 ms Pulse length O2 Diameter: 0.15 mm 18
19 Applications drilling of perforation holes Material: Laser: Parameter: Comments: Al 0.15 mm LASAG LFS 150 SM 1.0 kw Peak power, 0.05 ms Pulse length O2 Diameter: 0.15 mm 19
20 Applications drilling of titanium Material: Laser: Parameter: Comments: Titanium 0.8 mm LASAG LFS 150/ 50 m 1.5 kw Peak power, 0.08 ms Pulse length 4 W Average Power Ar, 100 holes/s, 4 m/min
21 Applications high speed hole cutting Material: Laser: LASAG LFS 150/ 50 m Parameter: 0.6 kw Peak power, 2 ms Pulse length 50 W Average Power Comments: O2, 12 bar, 200 m/min 21
22 Applications percussion drilling Material: Laser: Parameter: Comments: Graphite 2 mm LASAG LFS 150 SM 0.75 kw Peak power, 0.2 ms Pulse length O2, 0.5 s Diameter: mm 22
23 Applications silicon wafers Material: Laser: Parameter: Comments: Silicon wafer 0.7 mm LASAG LFS 150/ 50 m 0.78 kw Peak power, 0.1 ms Pulse length N2, 0.25 s Diameter: mm
24 Applications silicon nitride ceramics Material: Laser: Parameter: Comments: Silicon nitride 1.5 mm LASAG LFS 150/ 50 m 1.5 kw Peak power, 0.11 ms Pulse length N2, 4 s/ 6 mm/min Diameter: 0.098/0.096 mm
25 Applications percussion drilling Material: Laser: Parameter: Comments: Al 0.4 mm LASAG LFS 150 SM 0.7 kw Peak power, 0.05 ms Pulse length N2, 0.1 s 25
26 Applications injection nozzles (trucks) Material: Laser: Parameter: Comments: Stainless steel 2 mm LASAG LFS 150/ 50 m 1.5 kw Peak power, 0.11 ms Pulse length O2, 3 s/ 20 mm/min Diameter: 0.2 mm angle 17 26
27 Applications Sapphire cutting Material: Laser: Parameter: Comments: Sapphire 1 mm LASAG LFS 150 SM 1.2 kw Peak power, 0.08 ms Pulse length N2, 200 mm/min 1 s 27
28 Applications Ni-based alloys drilling Material: Laser: Parameter: Comments: alloy mm IPG YLS-600/6000-QCW 6 kw Peak power, 1 ms Pulse length 120 W Average Power O2, 2 s Limitation for trepanning 12 mm! 28
29 Applications percussion drilling Material: Laser: Parameter: Comments: mm LASAG LFS 150 SM 1.5 kw Peak power, 0.2 ms Pulse length O2, 20 s Pulse shape with Modulation Aspect ratio: > 1:100! Process efficiency improvement by pulse modulation 29
30 Applications percussion drilling a) b) c) a), b): c): 45 µm-hole in 12 mm tungsten carbide 75 µm-hole in 16 mm steel 30
31 Applications percussion drilling Single Pulse Percussion <10Hz 0.1-1ms J High Frequency Percussion Hz ms 0.1-1J Highest Frequency Percussion kHz ns J 31
32 Applications percussion drilling Material: Laser: Parameter: Comments: Carbon steel 10 mm LASAG LFS 150/ 50 m 1.5 kw Peak power, 0.1 ms Pulse length O2, 80 s 32
33 Applications needle drilling Material: Laser: Parameter: Comments: stainless steel LASAG NA 0.2 ms Pulse length no gas, 1 pulse mm Aspect ratio 1:4 1:8 33
34 Applications percussion drilling experiment: using of free scalable pulse shaping for controlling the energy application into the material < 1ms Leading edge trailing edge 3 peaks 8 peaks Pulse duration: 1ms<T<7ms packages of energy: 0.1ms<T<3ms 34
35 Applications percussion drilling 35
36 Applications percussion drilling Material: Laser: Parameter: Comments: Carbon steel 10 mm LASAG LFS 150/ 50 m 1.5 kw Peak power, 0.2 ms Pulse length O2, 50 s 36
37 Applications scribing Material: Laser: Parameter: Comments: C70 LASAG LFS 150/ 50 m 1.5 kw Peak power, 0.1 ms Pulse length 60 W Average Power Air, 3 m/min Material: C70 Laser: LASAG KLS 246 Parameter: 0.75 kw Peak power, 0.2 ms Pulse length 15 W Average Power Comments: Air, 1.8 m/min (Comparence to 200 W cw fiber laser: 0.5 mm - 1 m/min) 37
38 Applications tungsten carbide cutting Material: Laser: Parameter: Comments: Tungsten carbide 1 mm LASAG LFS 150/ 50 m 1.5 kw Peak power, 0.5 ms Pulse length 150 W Average Power Air, 3 m/min Tungsten carbide 2 mm speed mm/min Comparison: LASAG FLS 352 N 80 mm/min 0 LASAG LFS kw SM LASAG LFS kw 50 um IPG YLS300QCW IPG YLS600QCW 3 kw 50 um 6 kw 50 um 38
39 Comments and Conclusions - Pulsed fibre laser technology is ready to use - Pulsed fiber laser technology can cover many typical LPSSL applications - High beam quality in combination with high peak power is expanding existing application limits - Diodes offer new process features for cutting and drilling - QCW fiber lasers close the gap between fibre lasers and LPSSL s 39
40 Questions or comments? Thank you for your attention! Ronald Holtz Class 4 Laser Professionals AG Industriering 43 CH-3250 Lyss Switzerland phone: ronald.holtz@class4laser.ch
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