Application of ANSI/ESD S20.20 to Semiconductor Manufacturing. Carl Newberg River s Edge Technical Service, Inc.

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Peter Gilmore
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1 Application of ANSI/ESD S20.20 to Semiconductor Manufacturing Carl Newberg River s Edge Technical Service, Inc.

2 Acknowledgements We would like to acknowledge Patrick Lim of 3M for many of the drawings used in this presentation. Many thanks to Patrick and 3M for their willingness to allow the use of their drawings.

3 What Is ANSI/ESD S20.20? ANSI/ESD S20.20 defines a companies ESD control program Can be equated with (and actually is becoming a part of) ISO 9000 quality programs Applies to areas handling devices down to 100 volts (HBM).

4 ANSI/ESD S20.20 Applying ANSI/ESD S20.20 to semiconductor manufacturers Equipment Manufacturers Semiconductor Manufacturers/Processors

5 ANSI/ESD S20.20 Equipment Manufacturers Program ensures that equipment is manufactured in a high quality ESD controlled environment Protects Customers from equipment delivery delays and latent failures Semiconductor Manufacturers Prevents equipment lockup problems Increased yield due to ESD damage and electrostatic charge contamination Protects customers from latent failures

6 ANSI/ESD S20.20 & SEMI E-78 Not explicitly stated SEMI E-78 ties into S20.20 Grounding/Bonding Electric Fields Materials Ionization E-78 has some additional elements not called out in S20.20

7 Overview of ANSI/ESD S20.20 Goal: Provide continuous ESD protection Administrative Requirements The Plan Training Compliance Verification (Audits/Inspections) Technical Requirements Tailoring

8 Steps to Compliance with S20.20 Develop an ESD control plan Tie into the quality program (ISO 9000) Implement the plan Training Installation of ESD controls Develop and begin inspections & audits Pursue certification (many ISO Auditors now offer S20.20 certification also).

9 The ESD Control Plan The Plan should address each of the requirements of the program Training Compliance Verification Technical Requirements Organizational Requirements Contractual Obligations

10 The Training Plan All personnel involved in handling or contacting ESDS items must be trained Initial training Recurrent training (frequency determined by organization typically 1/year or 1/two-years) Documentation retained in personnel records Type & content of training determined by the organization.

11 Compliance Verification Plan This makes sure the program continues to work Internal Audits Inspections Frequency depends upon sensitivity and cost of failure Typically performed by internal personnel Audits External Audits

12 Technical Requirements Grounding / Bonding Systems Personnel Grounding Protected Areas Packaging Marking Equipment Handling

13 Grounding / Bonding Systems Equipment Ground Auxiliary Ground Equipotential Bonding Common Point Ground < 1.0 Ω (AC Impedance) < 1.0 Ω (AC Impedance) < 1.0 x 10 9 Ω < 1.0 Ω (AC Impedance)

14 Personnel Grounding Wrist Strap System ESD S1.1 < 35 x 10 6 Ω Ohmmeter Stainless Steel Electrode Wrist Strap Ground Cord Drawing compliments of 3M

15 Personnel Grounding Flooring / Footwear System Resistance (ESD STM 97.1) Body Voltage Generation (ESD STM 97.2) < 35 x 10 6 Ω < 100 Volts Graphical Recording Device Ohmmeter Drawing compliments of 3M 91x91cm (36x36 inch) or Larger Flooring Sample Charge Plate Monitor Drawing compliments of 3M Material Under Test 91x91cm (36x36 inch) or Larger Flooring Sample

16 Protected Area Work Surface Wrist Strap Cord Footwear Flooring Seating Ionization (other than room systems) Ionization (room systems) < 1.0 x 10 9 Ω or < 200 Volts 0.8 x x 10 6 Ω < 1.0 x 10 9 Ω < 1.0 x 10 9 Ω < 1.0 x 10 9 Ω < + 50 Volts Voltage Offset < Volts Voltage Offset

17 Protected Area (Continued) Mobile Equipment Continuous Monitors Signs Equipment AC Powered Tools Battery Powered and Pneumatic Hand Tools Garment Humidity < 1.0 x 10 9 Ω Manufacturer Specification Required < 1.0 Ω < 1.0 x Ω 1 x 10 5 Ω > Resistance <1 x Ω 30% < RH < 70%

18 Packaging Conductive Dissipative Shielding Low Charging Protective Material Marking < 1.0 x 10 4 Ω > 1 x 10 4 to < 1 x Ω < 50 nj ESD ADV 11.2 EOS/ESD S8.1

19 Work Surfaces (ESD S4.1) R < 1 x 10 9 ohm Ohmmeter 3 A D E To: A, B, C, D, E B C 2 Resistance-to-Groundable Point - New Installations 2 Slide compliments of 3M

20 Work Surfaces (ESD S4.1) R < 1 x 10 9 ohm TABLE TOP 10 TABLE TOP 10 TABLE TOP TABLE TOP Resistance Point-to-Point - Installed Work Surfaces 2 Slide compliments of 3M

21 Footwear (ESD S9.1) R < 1 x 10 9 ohm Ohmmeter One Sock Inside the Other Filled with Shot Aluminum Foil Footwear Under Test Stainless Steel Plate Insulator Slide compliments of 3M

22 Flooring (ANSI/ESD S7.1) R < 1 x 10 9 ohm Electrode (5 lbs, 2.5 dia) Groundable Point A Groundable Point B Resistance to Groundable Point Measurement Slide compliments of 3M

23 Flooring (ANSI/ESD S7.1) R < 1 x 10 9 ohm Position A 3 Position B Point to Point Resistance Measurement Slide compliments of 3M

24 Seating (ESD STM12.1) 1 x 10 5 ohm < R < 1 x 10 9 ohm Ohmmeter Back Rest Rear of Back Rest Electrode A Seat Foot Rest Electrode B 5 x10 Foot Plate Drag Chain Base Conductive Casters Resistance to Groundable Point Positions Slide compliments of 3M

25 Seating (ESD STM12.1) 1 x 10 5 ohm < R < 1 x 10 9 ohm Seat Back Rest Rear of Back Rest 1 Arm Rest Any Location Foot Rest Seating Component Test Positions 5 4 Base with Plastic Covering Note: If base is bare metal, test only at Position 1. Slide compliments of 3M

26 Ionization (ANSI EOS/ESD S3.1) Offset Voltage < + 50 volts 60 cm (24 ) Center Line of Test Points Overhead Ionizer Air Flow 45 cm (18 ) Charge Plate Monitor (CPM) 6 x6 Plate 15 cm (6 ) Work Surface Test Locations for Overhead Ionizer Slide compliments of 3M

27 Ionization (ANSI EOS/ESD S3.1) Offset Voltage < + 50 volts 30 cm (12 ) 30 cm (12 ) 30 cm (12 ) 30 cm (12 ) Bench Top Ionizer Air Flow 15 cm (6 ) Work Surface Test Locations for Bench Top Ionizer Slide compliments of 3M

28 Garment (ESD STM2.1) 1 x 10 5 ohm < R < 1 x ohm Ohmmeter Insulators Clamps Sleeve to Sleeve Resistance Slide compliments of 3M

29 Garment (ESD STM2.1) 1 x 10 5 ohm < R < 1 x ohm Ohmmeter Five Pound Electrodes Insulative Surface Point to Point Resistance Slide compliments of 3M

Footwear Foot Grounders Resistive Characterization (not to include static control shoes)

for the Protection of Electrostatic Discharge Susceptible Items- Footwear Foot Grounders Resistive Characterization (not to include static control shoes) Electrostatic Discharge Association 7900 Turin