C103-E056C. Shimadzu Infrared Microscope

Transcription

1 C103-E056C Shimadzu Infrared Microscope

2 Complete Control with AIMView Right on Target... This intelligent infrared microscope provides convenient control of stage movement, aperture setting and focusing, all from the PC screen. Supporting analysis using transmission, reflection as well as ATR methods, the AIM-8800 widens the range of application fields. With emphasis on sensitivity for basic performance of this infrared microscope, ease of operation was also a high design priority. The AIM-8800 Infrared Microscope advances one step further into the new generation. Auto Aperture Maximizes IR illumination on the sample spot. The aperture is motor-driven, and its size and angle are freely set using mouse operation alone. Simply set the aperture over the sample, and the sampling area is automatically positioned for maximum infrared intensity. The aperture size and angle are always maintained. Auto X-Y Stage Simplifies exact sample positioning. Up to 10 sample positions and 2 background positions can be placed into memory, and the stage can be moved in increments as small as 1µm for finely detailed mapping. Auto Focus True focus is only one mouse-click away! Arduous focusing is unnecessary. Just one click of the mouse automatically brings the image into focus. Auto Centering Sample viewing couldn t be easier! Double-clicking on any point in the visible observation screen will bring that spot to the center of the viewing area. (Note : AIMView is the register trade mark of the software used to control the AIM-8800 Shimadzu Infrared Microscope.) High Sensitivity, Maintenance-Free MCT Detector High sensitivity of course! A signal-to-noise ratio of 2600 to 1 is guaranteed in transmission measurement. The high-sensitivity glass dewar type MCT detector eliminates the need to re-evacuate every 1 to 2 years, as required with metallic dewar type MCT detectors. Abundant Options A variety of options are available, including an ATR objective, 32 objective, micromanipulator, mapping software, etc. ATR Objective ATR-8800M 2 3

3 Easy Operation with Link 2 View All operations for controlling the infrared microscope are performed on the PC screen. Sample Holder When mounting the sample stage to the Auto X-Y stage, clicking the position of the displayed opening automatically moves the Auto X-Y stage to the center of the sample stage opening. Link 3 Position Recording Up to 10 sample positions and 2 background positions can be placed into memory, and at the same time, the aperture size and angle are also recorded in memory. Link 1 Auto Centering Double-click on any point in the visible observation screen, and that location instantly moves to the center of the viewing area. Visible observation screen Auto X-Y stage Y-axis movement Measurement position is moved to right-hand screen Returns to recorded position Maximize display Aperture Setting screen Aperture Setting Click near corner to change the aperture angle. Operation is also possible from the AIM-8800 main unit controller. Auto X-Y stage X-axis movement Manual focus adjustment Aperture Setting Enter a number to set size Auto focus Visual mode - IR mode switching Transmission mode - reflection mode switching 4 5

4 Abundant accessories for wide range of applications Wide ranging applications possible with array of optional accessories for the AIM-8800 Infrared Microscope. For pretreatment of micro samples... The MMS-77D-IR Micromanipulator System excels. The Shimadzu MMS-77D-IR Micromanipulator System greatly facilitates pretreatment of micro samples. With this system installed on the AIM8800, sampling and measurement can be conducted without fear of sample loss or contamination, thereby greatly enhancing analysis reliability. MMS-77 Functions and Applications Micro Cutting Microscopic foreign materials are reliably isolated and cut out of high molecular weight polymer, plastics, films, magnetic tapes, paints, semiconductors, liquid crystals, thin film transistors, etc. Infrared Microscope with Mounted Micromanipulator System MMS-77 Foreign particle on sheet a Micro Pick-up Foreign materials from a few µm to a few hundred µm in size can be effectively isolated and picked up from the surfaces of semiconductors, liquid crystals, magnetic tape, filters, or from powders, etc. Micro Injection Microliter quantities of solvent or cleansers can be injected into a microscopic area, or aspirated. Ideal for testing cleansing or corrosion characteristics, or for removing microscopic particles from liquids. A 30µm width section is cut out to remove section including foreign particle (a). b) Biocut c) Cutout section b Cutout section c Particle adhering to IC chip Sampling of foreign particle on filter Note : The Manipulator Mounting Kit (Cat.No ) is required for mounting the MMS-77 on the AIM a b a b a) Foreign particle b) Metal needle a) Foreign particle b) Metal needle Spectrum of particle removed from filter determined to be ABS resin. 6

5 ATR Objective (slide-on type) A magnification of 15, incident angle of 30 and single refection are provided with the incorporated 3mm-diameter Ge semicircular prism. The slide-type prism permits switching between the usual observation and infrared measurement modes. The ATR objective can be effectively used to analyze foreign particles on substrates which do not reflect light easily, such as paper or plastic, and well as to perform surface analysis. (%T) The spectrum of the adhesives on a glass board Diamond Cell A This attachment is used to compress a micro sample into a thin film, which is then analyzed directly by trasmission with an infrared microscope. Applications include pharmaceuticals, rubber compounds, plastics and polymers. The A type cell is constructed using artificial diamond, while the B type cell is also available, using natural diamond. (%T) The spectrum of the single fiber of polyester Above: Diamond cell use Below: Diamond cell unused Micro Vice Holder This holds various types of samples for microscopy. Sample orientation can be selected, or samples can even be stretched while being analyzed. 7

6 AIM-MAP Mapping Software Mapping software allows dimensional analysis of points, lines and surfaces. Capture microscope images and Synthesize a large visual image The mapping software captures microscope images and synthesizes a large visual image to determine the mapping area. Set mapping parameters on the synthesized visual image Mapping parameters such as mapping area, Aperture setting, scan interval, and so on are set op on the synthesized visual image by a mouse. Easy microscope operation Functions to control the AIM-8800 and Mapping operation such as switching the Transmittance/Reflectance mode are short-cut by icons on the screen. Various mapping mode Random (multi^point), Line and Area mapping are available. Not only general Transmittance/Reflectance mapping but also ATR mapping are available (ATR Objective is an optional). Manipulation of mapped data Spectra and map based on specified functional group are calculated from obtained mapping data. The mapped data is displayed by 3-dimensional (bird's-eye view), Contour or Spectral overly mode. The mapping software captures microscope images and synthesizes a large visual image to determine the mapping area. Mapping parameters such as mapping area, Aperture setting, scan interval, and so on are set op on the synthesized visual image by a mouse. An area mapping data consists of 4 coordinates-scanned position (x, y), wavenumber and absorbance. Display functions and Data manipulation functions of AIM-MAP calculates peak height, peak area or ratio at scanned position. And AIM-MAP calculates maps based on specified functional group. Shown data is a map calculated by alkyl group ( cm-1). The mapped data is displayed by 3dimensional (bird's-eye view), Contour or Spectral overly mode. 8

7 Distribution analysis is also possible. Distribution analysis of additive in film Various types of additives are applied to materials to impart a variety of characteristics. To ensure uniform product quality, uniform mixing of additives is necessary. Even in general macro measurement, where distribution analysis has been difficult, the infrared microscope enables such analysis. Spectrum of Film Cross-section Plots of Additive Peak (1510~1470cm -1 ) Surface Analysis using ATR Mapping Analysis of chrome plated surface film on glass substrate Processes such as surface improvement and coating are used to impart various types of functionality to materials. Further, it is necessary to meticulously control the surface state of processed materials. By performing mapping in the ATR microscopy mode, the surface state of the sample can be viewed in detail. ATR microscopy and mapping were used to analyze the two mixed components, polyimide (PI) and polyamide acid (PAA), in the chrome plating surface film on a glass substrate. A map was obtained based on the ratio of the 1720cm -1 peak and 1600cm -1 peak, allowing verification of the PI distribution. Blue line : Polyimide infrared spectrum Red line : Polyamide acid infrared spectrum Polyimide Distribution Map Mapping Line Mapping Measure data on the line from start to end points. Mapped data is 3 dimensional data consisted of wavenumber, absorbance and position. Area Mapping Measure data in the rectangular area specified by start and end points. Mapped data is 4 dimensional data consisted of wavenumber, absorbance and x-/y-position. 9

8 Applications Analysis by ATR Microscopy and Mapping Measurement Analysis of foreign substance on paper using ATR microscopy Figure 1 shows a photographic enlargement of a foreign particle on paper. Using ATR microscopy, infrared spectral measurement was conducted for the particle as well as the paper substrate. The result is displayed in Figure 2. There is no peak associated with the paper on the infrared spectrum of the particle, illustrating how ATR microscopy provides a good infrared spectrum of the particle without any influence from the paper substrate. A peak of the amide1appears in the vicinity of 1650cm-1 and another of amide2at 1550cm-1, indicating that the foreign particle is a secondary amide compound. Figure 1 Photographic Enlargement of Foreign Particle on Paper Figure 2 Infrared Spectra of Particle (red) and Paper (green) Mapping Measurement of Flux Adhering to Electronic Component Figure 3 shows a photographic enlargement of a flux particle adhering to an electronic component. Reflectance mapping measurement was performed on 15µm intervals of the area including the flux particle. Figure 5 shows the acquired map data, and Figure 4 shows the spectral data, with the flux peak observed at cm-1 (carbonyl group peak). The height in Figure 5 is proportional to the amount of the adhering substance containing the carbonyl group. The red color indicates that there is a large amount of contaminant present. Figure 3 Photographic Enlargement of Flux Particle on Electronic Component Figure 4 Infrared Spectrum of Flux Figure 5 Flux Map of Carbonyl Peak at cm-1 10

9 Specifications Optics : 15 Cassegrain objective 15 Cassegrain condenser mirrors w / inlet for purging MCT detector : w / liquid nitrogen monitoring system Wavelength range : Type cm -1 Type cm -1 Signal-to-noise ratio * : Transmission mode, aperture size 50µm, 8cm -1, 60 scans 2600 : 1 or higher (Type 1), 2000 : 1 or higher (Type 2) * These are the guaranteed signal-to-noise values when connected to the Shimadzu Fourier Transform Infrared Spectrophotometer Electrically activated aperture XYθ directional drive. Setting of XY direction increments is 1µm over sample surface, and 1 increments in θ direction (numerical entry possible). Minimum setting value : 3µm Motor-driven X-Y sample stage Positioning range : X axis : 70mm; Y axis : 30mm Resolution : 1µm pitch Sample thickness : Reflection mode - < = 40mm Transmission mode - < = 10mm Operation control via main unit keyboard Measuring mode selection / XY stage operation (speed variable in 4 steps) / manual focusing / illumination control Control via PC Measuring mode selection / XY stage operation / auto centering / manual focusing / auto focusing / illumination control / aperture setting / aperture preview / measurement position and aperture setting recording (10 sample positions, 2 background positions) Ambient conditions : Ambient temperature : 15 C ~ 30 C Ambient humidity : 70% or less External dimensions, weight : W410mm D540mm H520mm, 36kg Power requirements : AC100 / 120 / 220 / 230 / 240V 125VA Options Ge prism ATR objective Diamond ATR objective (Spectra Tech) ZnSe ATR objective (Spectra Tech) Grazing angle objective (Spectra Tech) 32 objective (Spectra Tech, only for reflection mode) Visual objective lens (10, 20, 40, 100 ) Note : When connected to a PC type FTIR-8000 Series, the PC for operating the FTIR main unit is also used for operating the AIM When connected to a non-pc type FTIR-8000 Series, the PC must be purchased separately. 11

10 Registered SHIMADZU CORPORATION. International Marketing Division 3. Kanda-Nishikicho 1-chome, Chiyoda-ku, Tokyo , Japan Phone: 81(3) Fax. 81(3) Cable Add.:SHIMADZU TOKYO SHIMADZU SCIENTIFIC INSTRUMENTS, INC Riverwood Drive, Columbia, Maryland 21046, U.S.A. Phone: 1(410) Fax. 1(410) Toll Free: 1(800) SHIMADZU DEUTSCHLAND GmbH Albert-Hahn-Strasse 6-10, D Duisburg, F.R. Germany Phone: 49(203) Fax. 49(203) SHIMADZU (ASIA PACIFIC) PTE LTD. 16 Science Park Drive #01-01 Singapore Science Park, Singapore , Republic of Singapore Phone: Fax SHIMADZU SCIENTIFIC INSTRUMENTS (OCEANIA) PTY. LTD. Units F, South Street Rydalmere N.S.W. 2116, Australia Phone: 61(2) Fax. 61(2) SHIMADZU DO BRASIL COMERCIO LTDA. Rua Cenno Sbrighi, 25, Agua Branca, Sao Paulo, CEP , BRAZIL Phone: (55) Fax. (55) SHIMADZU (HONG KONG) LIMITED Suite 1028 Ocean Center, Harbour City, Tsim Sha Tsui, Kowloon HONG KONG Phone: (852) Fax. (852) Overseas Offices Istanbul, Beijing, Shanghai, Guangzhou, Shenyang, Chengdu, Moscow URL Printed in Japan A-IK