Precision Positioning Stage 2018
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- Hugh Owens
- 5 years ago
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1 SF TECHNOLOGY CO.,LTD. Taiwan Tainan Headquarter No.22, Aly. 53, Ln. 428, Sec. 3, Wenhua Rd., Rende Dist., Tainan City 717, Taiwan (R.O.C.) Taiwan Taoyuan Sales Office (T): (F): F., No.1, Ln. 30, Siyuan Rd., Jhongli Dist., Taoyuan City 32057, Taiwan (R.O.C.) China Dongguan Sales Office: DONGGUAN SHENGLV AUTOMATION EQUIPMENT TECHNOLOGY CO.,LTD. (T): (F): Room 1002 Yihe Business Center, No.516, highway 358, Xinan Community Chang'an Town. Dongguan city Precision Positioning Stage 2018
2 Manuel positioning stage Stage outline & Characteristics P03 Feeding mode instruction P04-05 Precision inspection method P06-09 Installation procedure P10-11 Use and handling precautions P12 Crossed roller guide Model no. instruction P13 Crossed roller guide / X-Axis stage P14-21 Crossed roller guide / XY-Axis stage P12-29 Crossed roller guide / Z-Axis stage P30-37 Crossed roller guide / Thin-type /XY-Axis stage P38-43 Crossed roller guide / High load & High accuracy / X-Axis stage P44 Linear Ball guide / X-Axis stage P45-46 Linear Ball guide / Z-Axis stage P47-48 Linear Ball guide / Horizontal type /Z-Axis stage P49-50 Rotary stage / -Axis stage P51-54 Rotary Stage/ Small Angular type / -Axis stage P55-56 Dovetail guide Model no. instruction P57 Dovetail guide / Feeding screw type / X-Axis stage P58-60 Dovetail guide / Feeding screw type / XY-Axis stage P61-63 Dovetail guide / Feeding screw type / Horizontal type /Z-Axis stage P64-65 Dovetail guide / Feeding screw type / Z-Axis stage P66-68
3 Dovetail guide / Feeding screw type / Long lead /X-Axis stage P69-72 Dovetail guide / Rack and Pinion type/ Long stroke/ X-Axis stage P73-79 Dovetail guide / Rack and Pinion type/ Long stroke/ Z-Axis stage P80-82 Dovetail guide / Rack and Pinion type/ X-Axis stage P83-85 Dovetail guide / Rack and Pinion type/ XY-Axis stage P86-88 Dovetail guide / Rack and Pinion type/ Z-Axis stage P89-91 Dovetail guide / Rack and Pinion type/ Thin-type / X-Axis stage P92-94 Dovetail guide / Rack and Pinion type/ Thin-type / XY-Axis stage P95-97 Dovetail guide / Rack and Pinion type/ Thin-type / Z-Axis stage P Dovetail guide / α-axis Goniometer stage P Dovetail guide /αβ-axis Goniometer stage P Feeding screw type / Laboratory Jacks /Z-Axis stage P
4 Outline 1.Mini-Stage is applied for high precision or mid and heavy of various production machinery, testing device, precise positioning and quantitative movement. 2.There re many kinds of mini-stages with single axis ( X axis); dual axis ( XY axis); Z axis; θ axis; α axis...can be collocated as needed. Characteristics 1.Can be customized according to requirements of precise fine turning ; positioning ; quantitative movement and able to proceed mass feed of fine tuning. 2.Coordinated customer's precise machinery or instrument and fixed in suitable position. 3.Feeding mode diversification such as coarse moving handle / micrometer head ; feed screw, rank and pinion with scale and able to manage movement rate. 4.The sets of mini stages, XY-axis, XYZ-axis, XZ-axis, and multi-axis modules are able to effectively reduce assembling process because of adjusting their vertical angle before shipping. Feeding mode instruction A circle movement Main feeding mode Characteristics of handle rotation Applied for guiding device Rack and pinion 1.Suitable for high speed mass feed. 2.Not suitable for precise positioning. Dovetail Feeding Screw Micrometer head 1.Use precise threadscrew pitch to proceed simple precise moving situation. 2.Used by various products due to it's cheaper than micrometer head. Precise reading Unit:0.01mm is suitable for precise tuning. 1. Dovetail 2. Crossed roller 3. Linear ballbearing 1. Dovetail 2. Crossed roller 3. Linear ballbearing 03
5 Characteristics of different guide type Slide way Crossed roller Structure Characteristic Composed of moving rails with 2 V-groove surfaces harden finish, ground precisely,and roller bearings which are connective and take turns moving in 90 degrees to meet requirement of high parallism and high flatness.in structure, V-groove and crossed roller acquire movement in high accuracy and by linear transmission to act a high precision movement and load performance Application This applied to precise movement device in high accuracy and high,optical instruments in precise gauging and fine tuning,various machine tool,gauging instrument,precise positioning and quantitative movment etc Moving accuracy Rigidity Excellent Excellent Excellent 04
6 Linear ball Doventail type Slide way and body is in one unit, and Gothic arc-groove ground precisely to meet requirement of high parallism and high flatness.gothic arc-groove formed by dual arc-grooves individually on upper and lower rails of body.ball moving in single groove is structured by 2 point-contact,and total 4 contact points in dual arc-groove to form strong rail construction. In case of rails of SUS-STAGE is to set ball assembly in arc-groove to save traditional adjustment and revision time.in addition,without adjustment screw would save accuracy problem and maintenance time caused by loosen screw,and cheaper as well. Dovetail plane pinion and rack (Main material Brass or )SFT supply proper models suitable for equipped to various modules such as small,rough-vibrate, large size for installation.driven-adjustment mode is rack and pinion.apply to higher working frequency,requirement of faster movement and large stroke. Screw-driven plan (main meterial:brass)prepared by easy-carry standard and slide mode is screw shaft mode.apply to lower frequency,fine tuning environment. This applied to precise posistioning device in high accuracy and mid-,product and design integrated system,optical experiment precise transportion and fine tuning mechanism application. This applied to optical instruments and equipments,sampler,detecting device,semi-conductor manufacturing equipment,test machine,micorscope,transiting machine,maching center,medical instrument,printer and others. Excellent good good Fair good Excellent 05
7 Precision inspection method Straightness (refer to JIS B ) In linear motion units, geometric straight line decides positions in order from datum point to same direction, differences between length variation in those positions and datum is as measured value, the max. difference of geometric line is called " Straightness". Yawing and pitching (refer to JIS B ) Linear motion parts would occur slanting in transmitting, and slanting proportion would cause deflection in linear transmission. Position is decided by same direction from datum point in order, and maximum angular gap measured from horizontal direction of each position corresponding to the datum is called yawing (deviation). Same situation to have the maximum angular gap from vertical direction of each position corresponding to the datum called pitching. Parallelism (refer to JIS B ) Parallelism of plane, and slanting proportion between parallel interval to mechanism parts, and degrees between center place of manual stage movement and base plate is called parallelism. Parallelism measurement is to fix micrometer on the plate, and operate manual stage with clamping device to measure the maximum of 4 corner errors. 06
8 Vertical Z axis To check measured figures from the meter applied to the area between limited strokes during vertical movement. The sum of plus and minus figures measured from the meter means the variation between the movement verticality with base surface. XY Vertical value (refer to JIS B ) Vertical value between 2 axes also for one line of geometric line in transmission datum and one in its corresponding right angle. In the other direction(opposite), to take slanting proportion in linear transmission, reference point of X-axis stage, and geometric line of final tested position as datum axes. X-axis stage as for datum axis, maximum of parallel errors from its vertical geometric line in opposition to datum position of Y-axis stage to final texted position is called XY vertical value. 07
9 Concentricity (refer to JIS B , B ) Difference of datum circle and geometric circle. All points in line in same plane of 2 concentric circles, radius difference of 2 concentric circles is in case of smallest radial interval difference. Opposite to geometric circle, measured difference is called concentricity. Fix rotating stage on the plate, and put micrometer around stage. Have it to rotate one circle(360 ) to proceed measuring. Concentricity is half of top value shown in micrometer. Plane travel amplitude (refer to JIS B ) Rotate as center of single axis, in the period of plane turning, max. slanting value of deviation of vertical plane to datum axis back to stage vertically is called plane travel amplitude. Take micrometer fixed on the plate to contact upper edge of rotating stage( rotating one circle 360), and proceed measuring. Top value shown in micrometer is called Plane-pulsating. 08
10 AXIS Definition About definition of moving axis and rotating axis, SFT defines as chart below. X axis, Y axis are in parallel direction: Z axis in vertical direction; Rotating around X, Y, Z axes are called αaxis,βaxis,θaxis individually. Zaxes θaxes Yaxes Xaxes βaxes αaxes Temperature of environment Please operate stages in regular range of temperature as listed. Please contact SFT if products in larger range required Volume-loaded limit recommendation Stages classification Working temperature 1.5 times Stainless steel stage 1.5 times Stainless steel slide 1 times Others 09
11 Installation procedure Single axis Move upper plate back and forth, and secure the screw on the base plate and work piece with tight confirmation. Dual-axes Screw security same as single axis. 10
12 θ-axes Move upper plate by rotating, and take the screw through it. Proceed taking screws through base plate in order and finding matched holes at same time. Lock the stage on the work piece with tight confirmation. Other stages Considering easy installation fit for other device, threaded hole pattern is made to meet requirement of securing from upper or lower direction, and this provides more options for installation. 11
13 Installation procedure Diagrams of representative explanation in catalogs are sampled in SFT products series. Products compared to diagrammatic examples in same series may have some difference in shape due to different mechanism design and spec, but basic operation remark are all the same. NOTICE Please read notices as follows before operation, this would have SFT series performed as best motion accuracy and usage life. Operation principles 1 SFT product series are all composed of part in high accuracy, please avoid environment of extreme high temperature, extreme low temperature, huge temperature variation, exposed to sun light, high humidity, high dust, high vibration, high shock and easy-dewed...etc. 2 To maintain motion accuracy and usage life of products in all series, please check allowable of the product before operation. Don't overload out of rated. 3 Besides allowable limit, please avoid taking gravity of loaded object over the edge of the stage. 4 All kinds of rolling mechanisms set in the product need proper clean and lubricated maintenance in the period of operating, depending on situations of operation, and use appropriate lubricant. 5 All kinds of rolling mechanisms set in the product are adjusted and leveled by engineers before shipment, please do not try any adjustment if not trained or authorized. 6 Please use right lock unit, tools and wrench torque while processing products in positioning security and connecting security. 7 For accessories of SFT product series or related information, SFT sales could offer best consultation. 8 SFT also provide customized service for special purpose application or other unique spec. 12
14 Crossed roller guide/model no. instruction SEMY60-AC M: Manual X: Single axis Y: Dual axes Stage Axis Material Feeding table size ZL: X axis+l bracket R: θ axis R: Angle θ axis Selectable Spec A: Aluminum alloy S: Staniniess steel F: Carbon steel S: Side SR: Reversed side SZ: Side feeding with micrometer on the top SZR: Reversed side feeding with micrometer on the top C: Central feeding YW: Super thin dual axes ZA: Z axis CR: Reversed Central feeding R: Right side feeding L: Left side feeding Feeding Postion Side feeding Central feeding Reversed side Feeding Vertical side feeding Reversed Vertical side feeding Reversed Vertical side feeding Reversed Vertical side feeding 13
15 Crossed roller guide X-Axis stage Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 4-M3 Bolt holes 14
16 X-Axis stage Crossed roller guide Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 9-M4 6.5DP 4-M4 Bolt holes 15
17 Crossed roller guide X-Axis stage Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 13-M4 5.5DP 4-M4 Bolt holes 16
18 X-Axis stage Crossed roller guide Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 15-M4 5.5DP 4-M4 Bolt holes 17
19 Crossed roller guide X-Axis stage Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 9-M3 6.5DP 4-M3 Bolt holes 18
20 X-Axis stage Crossed roller guide Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 9-M4 6.5DP 4-M4 Bolt holes 19
21 Crossed roller guide X-Axis stage Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 13-M4 5.5DP 4-M4 Bolt holes 20
22 X-Axis stage Crossed roller guide Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 15-M4 5.5DP 4-M4 Bolt holes 21
23 Crossed roller guide XY-Axis stage Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 4-M3 Bolt holes 22
24 XY-Axis stage Crossed roller guide Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 9-M4 6.5DP 4-M4 Bolt holes 23
25 Crossed roller guide XY-Axis stage Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 13-M4 5.5DP 4-M4 Bolt holes 24
26 XY-Axis stage Crossed roller guide Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 15-M4 5.5DP 4-M4 Bolt holes 25
27 Crossed roller guide XY-Axis stage Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 9-M3 6.5DP 4-M3 Bolt holes 26
28 XY-Axis stage Crossed roller guide Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 9-M4 6.5DP 4-M4 Bolt holes 27
29 Crossed roller guide XY-Axis stage Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 13-M4 5.5DP 4-M4 Bolt holes 28
30 XY-Axis stage Crossed roller guide Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 15-M4 5.5DP 4-M4 Bolt holes 29
31 Crossed roller guide Z-Axis stage Model No Table size Travel stroke Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 9-M3 Bolt holes 9-M3 6.5DP 30
32 Z-Axis stage Crossed roller guide Model No Table size Travel stroke Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 9-M4 Bolt holes 9-M4 6.5DP 31
33 Crossed roller guide Z-Axis stage Model No Table size Travel stroke Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 4-M4 Bolt holes 13-M4 5.5DP 32
34 Z-Axis stage Crossed roller guide Model No Table size Travel stroke Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 15-M4 5.5DP 33
35 Crossed roller guide Z-Axis stage Model No Table size Travel stroke Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 9-M3 Bolt holes 9-M3 6.5DP 34
36 Z-Axis stage Crossed roller guide Model No Table size Travel stroke Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 9-M4 Bolt holes 9-M4 6.5DP 35
37 Crossed roller guide Z-Axis stage Model No Table size Travel stroke Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 4-M4 Bolt holes 13-M4 5.5DP 36
38 Z-Axis stage Crossed roller guide Model No Table size Travel stroke Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 15-M4 5.5DP 37
39 Crossed roller guide Thin-type XY-Axis stage Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm M3 6.0DP M3 Bolt holes 38
40 Thin-type XY-Axis stage Crossed roller guide Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 8-M3 6.0DP 4-M4 Bolt holes 39
41 Crossed roller guide Thin-type XY-Axis stage Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 4-M4 6.5DP 4-M4 Bolt holes 40
42 Thin-type XY-Axis stage Crossed roller guide Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 4-M4 6.5DP 4-M4 Bolt holes 41
43 Crossed roller guide Thin-type XY-Axis stage Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 4-M4 6.5DP 4-M4 Bolt holes 42
44 Thin-type XY-Axis stage Crossed roller guide Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Pitching Yawing Micrometer minimum reading capability: 0.01mm 4-M4 6.5DP 4-M4 Bolt holes 43
45 Crossed roller guide High load & High accuracy X-Axis stage Model No Table size Travel stroke Parallelism Moving Parallelism Straightness 7075 Minimum reading scale: 0.01mm Ball screw lead :1.25mm 8-M4 8DP 4-M6 Bolt holes 44
46 X-Axis stage Linear Ball guide Model No Table size Travel stroke Parallelism Straightness Pitching Yawing carbon steel Micrometer minimum reading capability: 0.01mm Surface finish: Electroless nickel plating 4-M3 6.0DP 4-M3 Bolt holes 45
47 Linear Ball guide X-Axis stage Model No Table size Travel stroke Parallelism Straightness Pitching Yawing carbon steel Micrometer minimum reading capability: 0.01mm Surface finish: Electroless nickel plating 4-M4 6.0DP 4-M4 Bolt holes 46
48 Z-Axis stage Linear Ball guide Model No Table size Travel stroke Straightness Pitching Yawing carbon steel Micrometer minimum reading capability: 0.01mm Surface finish: Electroless nickel plating 3.5THRU 4-M3 6DP 47
49 Linear Ball guide Z-Axis stage Model No Table size Travel stroke Straightness Pitching Yawing carbon steel Micrometer minimum reading capability: 0.01mm Surface finish: Electroless nickel plating 4.5THRU 4-M4 6DP 48
50 Horizontal type Z-Axis stage Linear Ball guide Model No Table size Travel stroke Parallelism Minimum reading scale carbon steel Surface finish: Electroless nickel plating 4-M3 5.0DP 3.5THRU 49
51 Linear Ball guide Horizontal type Z-Axis stage Model No Table size Travel stroke Parallelism Minimum reading scale carbon steel Surface finish: Electroless nickel plating 4-M4 6.0DP 4.5THRU 50
52 θ-axis stage Rotary stage Model No Table size Eccentric Travel stroke : Coarse 360 Fine ±5 9-M2 4DP 4-M3 Bolt holes 51
53 Rotary stage θ-axis stage Model No Table size Eccentric Travel stroke : Coarse 360 Fine ±5 4-M4 Bolt holes 8-M3 6DP 4-M4 8DP 52
54 θ-axis stage Rotary stage Model No Table size Eccentric Travel stroke : Coarse 360 Fine ±5 8-M3 6DP 8-M4 7DP 4-M4 Bolt holes 53
55 Rotary stage θ-axis stage Model No Table size Eccentric Travel stroke : Coarse 360 Fine ±5 4-M3 6DP 12-M4 7DP 4-M4 Bolt holes 54
56 Small Angular type θ-axis stage Rotary stage Model No Table size Parallelism Minimum reading scale : 1 51 mm Travel stroke : ±10 4-M4 6.4DP 55
57 Rotary stage Small Angular type θ-axis stage Model No Table size Parallelism Minimum reading scale : 1 12 mm Travel stroke : ±10 4-M4 6.4DP 56
58 Dovetail guide Model no. instruction SEMC2A-60 Transmission Guide Axis Feeding specification Stage Table Size Manual C: Dovetail Guide 1: X axis A: Feeding screw 2: XY axis 3: Z axis C: Rack and pinion Long stroke D: Rack and pinion Selectable Spec 4: X axis+l bracket E: Feeding screw(long lead) 57
59 Dovetail guide Feeding screw type X-Axis stage Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Minimum reading scale : 0.1mm Travel distance per rotation of knob : 0.5mm 4-M2 Bolt holes 8-M2 3DP 58
60 Feeding screw type X-Axis stage Dovetail guide Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Minimum reading scale : 0.1mm Travel distance per rotation of knob : 0.5mm 4-M3 Bolt holes 8-M3 5DP 59
61 Dovetail guide Feeding screw type X-Axis stage Model No Table size Travel stroke Parallelism Moving Parallelism Straightness Minimum reading scale : 0.1mm Travel distance per rotation of knob : 0.5mm 4-M4 Bolt holes 8-M4 6DP 60
62 Feeding screw type XY-Axis stage Dovetail guide Model No Table size Travel stroke Straightness XY vertical value Weight Material Minimum reading scale : 0.1mm Travel distance per rotation of knob : 0.5mm 4-M2 Bolt holes 8-M2 3DP 61
63 Dovetail guide Feeding screw type XY-Axis stage Model No Table size Travel stroke Straightness XY vertical value Weight Material Minimum reading scale : 0.1mm Travel distance per rotation of knob : 0.5mm 4-M3 Bolt holes 8-M3 5DP 62
64 Feeding screw type XY-Axis stage Dovetail guide Model No Table size Travel stroke Straightness XY vertical value Weight Material Minimum reading scale : 0.1mm Travel distance per rotation of knob : 0.5mm 4-M4 Bolt holes 8-M4 6DP 63
65 Dovetail guide Feeding screw type Horizontal type Z-Axis stage Model No Table size Travel stroke Parallelism Travel distance per rotation of knob : 0.5mm Feeding Konb 4-M3 6.0DP A visual angle 6.0DP 3-M4 THRU M3 Bolt holes 64
66 Feeding screw type Horizontal type Z-Axis stage Dovetail guide Model No Table size Travel stroke Parallelism Travel distance per rotation of knob : 0.5mm Feeding Konb 8-M4 8DP A visual angle 3-M5 THRU M4 Bolt holes 65
67 Dovetail guide Feeding screw type Z-Axis stage Model No Table size Travel stroke Straightness Minimum reading scale : 0.1mm Travel distance per rotation of knob : 0.5mm 8-M2 3DP 2.5 THRU 66
68 Feeding screw type Z-Axis stage Dovetail guide Model No Table size Travel stroke Straightness Minimum reading scale : 0.1mm Travel distance per rotation of knob : 0.5mm 8-M3 5DP 8-M3 Bolt holes 67
69 Dovetail guide Feeding screw type Z-Axis stage Model No Table size Travel stroke Straightness Minimum reading scale : 0.1mm Travel distance per rotation of knob : 0.5mm (11.5) (20.5) 8-M4 6DP 9-M4.2 THRU 8x4.5 Bolt holes 9-M4x0.8 68
70 Feeding screw type Long lead X-Axis stage Dovetail guide Model No Table size Travel stroke Parallelism (Horizontal) (Vertical ) Minimum reading scale : 0.1mm Feeding screw long lead type: 4.5mm 8-M3 5DP 4-M4 THRU 6 Bolt holes 3.5DP 69
71 Dovetail guide Feeding screw type Long lead X-Axis stage Model No Table size Travel stroke Parallelism (Horizontal) (Vertical ) Minimum reading scale : 0.1mm Feeding screw long lead type: 4.5mm 8-M4 6DP 4-M5 THRU 8 Bolt holes 4.5DP 70
72 Feeding screw type Long lead X-Axis stage Dovetail guide Model No Table size Travel stroke Parallelism (Horizontal) (Vertical ) Minimum reading scale : 0.1mm Feeding screw long lead type: 4.5mm 6-M4 6DP 4-M5 THRU 8 Bolt holes 4.5DP 71
73 Dovetail guide Feeding screw type Long lead X-Axis stage Model No Table size Travel stroke Parallelism (Horizontal) (Vertical ) Minimum reading scale : 0.1mm Feeding screw long lead type: 4.5mm 10-M4 6DP 8-M5 THRU 8 Bolt holes 4.5DP 72
74 Rack and Pinion type Long stroke X-Axis stage Dovetail guide Model No Table size Travel stroke Moving Parallelism Parallelism (Horizontal) (Vertical ) Minimum reading scale : 0.1mm 4-M2 4DP 6-M4 5DP 6-M3 Bolt holes 73
75 Dovetail guide Rack and Pinion type Long stroke X-Axis stage Model No Table size Travel stroke Moving Parallelism Parallelism (Horizontal) (Vertical ) Minimum reading scale : 0.1mm 6-M4 5DP 8-M3 Bolt holes 4-M2 4DP 74
76 Rack and Pinion type Long stroke X-Axis stage Dovetail guide Model No Table size Travel stroke Moving Parallelism Parallelism (Horizontal) (Vertical ) Minimum reading scale : 0.1mm 6-M4 5DP 4-M2 4DP 12-M3 Bolt holes 75
77 Dovetail guide Rack and Pinion type Long stroke X-Axis stage Model No Table size Travel stroke Moving Parallelism Parallelism (Horizontal) (Vertical ) Minimum reading scale : 0.1mm 6-M4 5DP 4-M2 4DP 16-M3 Bolt holes 76
78 Rack and Pinion type Long stroke X-Axis stage Dovetail guide Model No Table size Travel stroke Moving Parallelism Parallelism (Horizontal) (Vertical ) Minimum reading scale : 0.1mm Above travel stroke value is for 1 blocks.the travel stroke reduce 40mm when adding 1 block. 4-M4 Bolt holes 2 -M4 8DP 8-M3 6DP M6 7 DP 77
79 Dovetail guide Rack and Pinion type Long stroke X-Axis stage Model No Table size Travel stroke Moving Parallelism Parallelism (Horizontal) (Vertical ) Minimum reading scale : 0.1mm Above travel stroke value is for 1 blocks.the travel stroke reduce 40mm when adding 1 block. 6-M4 Bolt holes 2 -M4 8DP M6 7 DP 8-M3 6DP 78
80 Rack and Pinion type Long stroke X-Axis stage Dovetail guide Model No Table size Travel stroke Moving Parallelism Parallelism (Horizontal) (Vertical ) Minimum reading scale : 0.1mm Above travel stroke value is for 1 blocks.the travel stroke reduce 40mm when adding 1 block. 2 -M4 8DP M6 7 DP 8-M3 6DP 79
81 Dovetail guide Rack and Pinion type Long stroke Z-Axis stage Model No Table size Travel stroke Parallelism Minimum reading scale : 0.1mm 4-M2 4DP 6-M4 5DP 80
82 Rack and Pinion type Long stroke Z-Axis stage Dovetail guide Model No Table size Travel stroke Parallelism Minimum reading scale : 0.1mm 4-M2 4DP 6-M4 5DP 81
83 Dovetail guide Rack and Pinion type Long stroke Z-Axis stage Model No Table size Travel stroke Parallelism Minimum reading scale : 0.1mm 4-M2 4DP 82
84 Rack and Pinion type X-Axis stage Dovetail guide Model No Table size Travel stroke Parallelism (Horizontal) (Vertical ) Minimum reading scale : 0.1mm 8-M4 7.5DP 4-M4 Bolt holes 83
85 Dovetail guide Rack and Pinion type X-Axis stage Model No Table size Travel stroke Parallelism (Horizontal) (Vertical ) Minimum reading scale : 0.1mm 6-M4 7.5DP 4-M4 Bolt holes 84
86 Rack and Pinion type X-Axis stage Dovetail guide Model No Table size Travel stroke Parallelism (Horizontal) (Vertical ) Minimum reading scale : 0.1mm 10-M4 7.5DP 4-M4 Bolt holes 85
87 Dovetail guide Rack and Pinion type XY-Axis stage Model No Table size Travel stroke Parallelism Minimum reading scale : 0.1mm 8-M4 7.5DP 4-M4 Bolt holes 86
88 Rack and Pinion type XY-Axis stage Dovetail guide Model No Table size Travel stroke Parallelism Minimum reading scale : 0.1mm 6-M4 7.5DP 4-M4 Bolt holes 87
89 Dovetail guide Rack and Pinion type XY-Axis stage Model No Table size Travel stroke Parallelism Minimum reading scale : 0.1mm 10-M4 7.5DP 4-M4 Bolt holes 88
90 Rack and Pinion type Z-Axis stage Dovetail guide Model No Table size Travel stroke Parallelism Minimum reading scale : 0.1mm 8-M4 7.5DP 89
91 Dovetail guide Rack and Pinion type Z-Axis stage Model No Table size Travel stroke Parallelism Minimum reading scale : 0.1mm 6-M4 7.5DP 90
92 Rack and Pinion type Z-Axis stage Dovetail guide Model No Table size Travel stroke Parallelism Minimum reading scale : 0.1mm 10-M4 7.5DP 91
93 Dovetail guide Rack and Pinion type Thin-type X-Axis stage Model No Table size Travel stroke Parallelism (Horizontal) (Vertical ) Minimum reading scale : 0.1mm 8-M4 7.5DP 4-M4 Bolt holes 92
94 Rack and Pinion type Thin-type X-Axis stage Dovetail guide Model No Table size Travel stroke Parallelism (Horizontal) (Vertical ) Minimum reading scale : 0.1mm 6-M4 7.5DP 4-M4 Bolt holes 93
95 Dovetail guide Rack and Pinion type Thin-type X-Axis stage Model No Table size Travel stroke Parallelism (Horizontal) (Vertical ) Minimum reading scale : 0.1mm 10-M4 7.5DP 4-M4 Bolt holes 94
96 Rack and Pinion type Thin-type XY-Axis stage Dovetail guide Model No Table size Travel stroke Parallelism Minimum reading scale : 0.1mm 8-M4 7.5DP 4-M4 Bolt holes 95
97 Dovetail guide Rack and Pinion type Thin-type XY-Axis stage Model No Table size Travel stroke Parallelism Minimum reading scale : 0.1mm 6-M4 7.5DP 4-M4 Bolt holes 96
98 Rack and Pinion type Thin-type XY-Axis stage Dovetail guide Model No Table size Travel stroke Parallelism Minimum reading scale : 0.1mm 10-M4 7.5DP 4-M4 Bolt holes 97
99 Dovetail guide Rack and Pinion type Thin-type Z-Axis stage Model No Table size Travel stroke Parallelism Minimum reading scale : 0.1mm Sectional view 8-M4 7.5DP 98
100 Rack and Pinion type Thin-type Z-Axis stage Dovetail guide Model No Table size Travel stroke Parallelism Minimum reading scale : 0.1mm Sectional view 6-M4 7.5DP 99
101 Dovetail guide Rack and Pinion type Thin-type Z-Axis stage Model No Table size Travel stroke Parallelism Minimum reading scale : 0.1mm Sectional view 10-M4 7.5DP 100
102 α-axis Goniometer stage Dovetail guide Model No Table size Height of rotation center Travel stroke Travel distance per rotation of knob Minimum reading scale : 0.1mm 4 5.0DP L 4-M2 4.0DP L 4-M3 6.0DP L 4-M3 Bolt holes 101
103 Dovetail guide α-axis Goniometer stage Model No Table size Height of rotation center Travel stroke Travel distance per rotation of knob Minimum reading scale : 0.1mm 4 4.0DP L 4-M2 4.0DP L 4-M3 6.0DP L 4-M3 Bolt holes 102
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