Piezomechanik GmbH. PosiCon.an for piezoactuators (low voltage and high voltage actuators) Position Feedback control electronics

Similar documents
Electronic Supplies for Piezomechanics:

Piezomechanik Dr. Lutz Pickelmann GmbH. Amplifiers D/A Converters Electronic HV-Switches for Piezoactuators

The PIA-devices are used for high g-accelerating an attached mass or to produce a compression impact into extended mass-loaded structures.

Piezo-shakers are covering a different application spectrum than electro-magnetic shakers.

Piezomechanik GmbH. Piezoelectric bending actuators Disk translators ( bimorphs ) Piezoelectric tubes

PDu150CL Ultra low Noise 150V Piezo Driver with Strain Gauge Feedback

Description of options, upgrades and accessories for the laser beam stabilization system Compact

LIGO PROJECT. Piezo-Electric Actuator Initial Performance Tests. Eric Ponslet April 13, Abstract

Compact Nanopositioning System Family with Long Travel Ranges

Piezomechanik Dr. Lutz Pickelmann GmbH. Piezomechanical Stackactuators

E Charge-controlled amplifier module

PDu150CL Ultra-low Noise 150V Piezo Driver with Strain Gauge Feedback

P-810 P-830 Piezo Actuators

10 Things to Consider when Acquiring a Nanopositioning System

MS2000 performs calibration on ADEPT card on startup, so the system maintains calibration.

High Power Piezo Driver

Analog Vs. Digital Weighing Systems


1. A transducer converts

R30D RVDTs DC-Operated Rotary Variable Differential Transformers

NDR6110 Single Channel Dynamic Driver for Piezoelectric Actuators

Advanced Test Equipment Rentals ATEC (2832)

Strain Gauge Measurement A Tutorial

Fast Tip/Tilt Platform

P-611.Z Piezo Z-Stage

ACCUMEASURE. Non-contact Capacitance Position Measurement with Nanometer Accuracy. A worldwide leader in precision measurement solutions

Active Vibration Isolation of an Unbalanced Machine Tool Spindle

Sentido KNX Manual. Sentido KNX. Manual. basalte bvba hundelgemsesteenweg 1a 9820 merelbeke belgium

Synchronization Control Scheme for Hybrid Linear Actuator Based on One Common Position Sensor with Long Travel Range and Nanometer Resolution

Contents: Movement & Positioning News M&P 23, 1997, Text Only Version

Q181V Whammy Bar Controller

5. Transducers Definition and General Concept of Transducer Classification of Transducers

12V40 piezo-amplifier

Non-Contact Capacitance Gauging Instrument & Series 2800 Capacitive Probes

Introduction. ELCT903, Sensor Technology Electronics and Electrical Engineering Department 1. Dr.-Eng. Hisham El-Sherif

Q181RC Ribbon Controller

BTA Rotary Actuators. Torque - mnm. 100% Duty Cycle. 25% Duty Cycle 5 50% Duty Cycle 2

The Anderson Loop: NASA s Successor to the Wheatstone Bridge

Differential Amplifier : input. resistance. Differential amplifiers are widely used in engineering instrumentation

Introduction to Measurement Systems

Q181EB Expression Block Controller

Digital Potentiometers Selection Guides Don t Tell the Whole Story

MAGNETIC LEVITATION SUSPENSION CONTROL SYSTEM FOR REACTION WHEEL

IT.MLD900 SENSORS AND TRANSDUCERS TRAINER. Signal Conditioning

PiezoMike Linear Actuator

Active Vibration Control in Ultrasonic Wire Bonding Improving Bondability on Demanding Surfaces

OPERATING INSTRUCTIONS AND SYSTEM DESCRIPTION FOR THE TEC-B-01M VOLTAGE CLAMP MODULE FOR EPMS SYSTEMS. VERSION 1.2 npi 2014

Fatigue testing. Fatigue design

SP75 - SWITCHING AMPLIFIER FOR PIEZOELECTRIC ACTUATORS PRODUCT AND WARRANTY INFORMATION

CHEOPS CHaracterizing Exoplanets by Opto-infrared Polarimetry and Spectroscopy. CHEOPS Group

Fiber Optic Device Manufacturing

Electronically controlled proportional pressure regulating valves

APPLICATION NOTE POSITION CONTROL OF PIEZO ACTUATORS

Introduction to Charge Mode Accelerometers

Making Basic Strain Measurements

Real-time Laser Beam Position Detector. XY-4QD User Manual

Bridge Measurement Systems

Ultrasonic. Advantages

Operational Amplifiers

Specifying A D and D A Converters

Principles of Analog In-Circuit Testing

CAPACITIVE SENSORS. Series KS. Key-Features:

Chapter 30: Principles of Active Vibration Control: Piezoelectric Accelerometers

High-speed wavefront control using MEMS micromirrors T. G. Bifano and J. B. Stewart, Boston University [ ] Introduction

S-330 Tip/Tilt Platform

SGIM Strain Gauge Input Module. user manual

Sensors (Transducer) Introduction By Sintayehu Challa

Signal Conditioning for MEAS Pressure Sensors

E-500 E-501 Modular Piezo Controller

Industrial Sensors. Proximity Mechanical Optical Inductive/Capacitive. Position/Velocity Potentiometer LVDT Encoders Tachogenerator

Telemetrie-Messtechnik Schnorrenberg

Model 4800 O P E R AT I O N M A N U A L L O A D C E L L S U M M I N G T R A N S M I T T E R

Bedienungsanleitung Spannungsverstärkersystem ENT/ENV instruction manual

n Measuring range ,02 N m to N m n Clockwise and counter-clockwise torque n Low linearity deviation of ± 0.05 % F.S.

Series APD4059. For Load Cells/Pressure Transducer Transmitters. Field Rangeable, with Calibration Resistor. Standard Features.

Thermocouple Conditioner and Setpoint Controller AD596*/AD597*

Model 176 and 178 DC Amplifiers

Introduction to LIVM Accelerometers

How to Select the Right Positioning Sensor Solution A WHITE PAPER

Catalog Hydraulics meets Electronics.

AN5E Application Note

Amptek sets the New State-of-the-Art... Again! with Cooled FET

Laser scale axis referencing with controllers with low bandwidth sine and cosine inputs

16.2 DIGITAL-TO-ANALOG CONVERSION

A New Type of Very High Reliability Torsion IDC Which Can Accept A Large Range of Wire Gauges

MEASUREMENT AND INSTRUMENTATION QUESTION BANK UNIT I INTRODUCTION. Part A

nanomca 80 MHz HIGH PERFORMANCE, LOW POWER DIGITAL MCA Model Numbers: NM0530 and NM0530Z

Tabor Electronics Signal Amplifiers. Quick Start Guide

Model Hz to 10MHz Precision Phasemeter. Operating Manual

Nanomotion Tech Note 105 Using AC and DC Modes with Nanomotion AB2 Driver in Closed-Loop for Nanometer Level Positioning

1. INTRODUCTION. Keywords: Piezo, Mechanism, Tip-tilt, Stability, Strain gages. BSM Mechanism context

PL112 PL140 PICMA Bender

OPERATING INSTRUCTIONS AND SYSTEM DESCRIPTION FOR THE. ISO-STIM 01D STIMULUS ISOLATION UNIT ±100 V / ±10 ma, bipolar output

87000 Series Size 34 Hybrid Linear Actuators

EKT 314/4 LABORATORIES SHEET

Do all accelerometers behave the same? Meggitt-Endevco, Anthony Chu

Design of Pipeline Analog to Digital Converter

Measurements 2: Network Analysis

Step vs. Servo Selecting the Best

AlphaProx inductive sensors. Measure distances accurate to a micrometer.

Transcription:

Piezomechanik GmbH Position Feedback control electronics PosiCon.an for piezoactuators (low voltage and high voltage actuators) Above: PosiCon 150/3 with actuator PSt 150/14/20 VS 20, option: position detection. Sensor: white cable and actuator: brown cable are connected to channel I.

Precision positioning by piezoactuators: open and closed loop operation One essential feature of a piezoceramic actuator is its ability to make infinitely small movements, when a correspondingly small voltage signal is applied.this enable piezoactuators for ultraprecise positioning tasks (unlimited relative positioning sensitivity). On the other hand, when a large change in the voltage signal is applied to a piezoactuator, the actual position stepwidth can be influenced by a lot of internal and external parameters acting onto the actuator, so that in the first instant, the relationship between voltage and the induced motion can only roughly be predicted. This can be easily demonstrated by applying a series of random voltage steps to a piezoactuator (Fig. 1) or by running a cycle over a distinct voltage range producing the wellknown hysteresis loop. displacement (normalized) 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 0.1 Hysteresis 0.0-0.1-1 0.0 1 2 3 4 5 V input voltage Fig.1 Open loop correlation of piezo actuator s position and driving voltage for a sequence of random voltage steps. Additionally the usual hysteresis cycle for a continuous full scale voltage variation is shown. The randomly generated sequence of points is filling up the area envelopped by the hysteresis cycle. When a distinct piezo voltage level is accessed from randomly distributed starting points of the actuator, the incertainty in the final position is roughly equivalent the intersect of the hysteresis field with the voltage level. So the incertainty in open loop piezo positioning in random access operation can be up to 10% to 15% of the actually applied total piezo actuator range. (In fig.1 the characteristic of a low voltage actuator PSt 150 is shown equivalent a full output voltage range 30 V thru +150 V. The hysteresis intersect (position incertainty) for 2.5 V input signal at open loop operation is indicated. How can this seemingly contradiction to ultraprecise positioning be overcome: By feedback controlled closed loop positioning: The PosiCon System 3

Basics of closed loop operation: The actuator produces only a motion, but does obviously not contain inherently a precise information about the exact position. To get this information about the actual position, the actuator must be combined with a suitable kind of position sensitive effect or sensor. Suitable means: sufficiently high in accuracy, repeatability, linearity. By a feedback control logic, the real position of the actuator is permanently compared with the wanted position, defined by the magnitude of the input signal. When there is a difference between wanted (reference) and real position, the feedback control cancels it immediately out (closed actuatorsensor loop operation) and the systems settles at the perfect position. Fig. 2 Relation stroke reference input voltage to a piezomechanical system in A open loop operation (by standard amplifier or PosiCon in feedback off mode) Result: typical piezoactuator nonlinear hysteresis characteristic. Hysteresis about 15 % B closed loop operation of a PosiCon system together with an actuator with position sensor Result: linear characteristic with a residual hysteresis: order of magnitude 0.1 % of actuators maximum stroke What are the advantages of the feedback controlled PosiCon system Piezoactuators stroke is measured by a position sensor (strain gage) applied directly onto the piezostack inside the casing: Hereby the sensor detects all internal and external effects influencing the strain status of the stack: The result is a highly linear and reproducible motion of the actuator according the input reference signal (elimination of piezomaterials creep, hysteresis, nonlinearity). automatic selfcompensation for varying load forces, potentially changing the strain of a piezo stack: the PosiCon system shows virtually infinite stiffness (no change of strain under varying forces). Special thermally compensated strain gages are used which compensate even for a potential thermal expansion of the actuator. Fig. 3: Variety of piezoactuating components with surface mounted strain gauges 4

The PosiCon Philosophy The PosiCon.an piezo positioning system is a complete system comprising all necessary electronic subsystems for closed loop piezo actuator control (Fig. 4): position sensor signal amplifier stage feedback control logic piezo voltage amplifier (SVR type standard) Plug and play : Connect your piezo actuator and its position sensor to the PosiCon.an unit and put in your position control signal: that s all Technical details: General: For feedback/closed loop operation, the piezo actuator must accept the voltage range of the PosiCon.an device and show option position sensor (see actuator s data sheet) Fig. 4 Modul Structure of the PosiCon feedback control unit The PosiCon.an feeback controllers use analog feedback strategy. The standard versions use SVR high voltage output stages to supply the piezo actuators (see general catalog electronic supplies ) A wide range of positioning applications using even mid-sized actuators are covered with respect to precision and response time. The SVR amplifier stages provide semi-bipolar operation for largest stroke and feature lowest noise for highly stable positions together with a smooth reaction characteristic of the positioning system. Dual use: The PosiCon.an devices can be used in closed loop or open loop mode. The mode selection is done simply by a switch on the front panel. For multichannel devices, each channel can be set individually. In the open loop mode the PosiCon.an acts as simple piezo amplifier as described in catalog Electronic supplies for Piezomechanics. Position information is provided even in the open loop mode (see Display and Monitor ) Repeatability, Sensitivity Precision means the tolerance range for hitting a wanted position upon application of the equivalent input signal. A, for random access addressing of a position, the PosiConsystem can show a repetition tolerance of about +/ 1. A 50 mm actuator can be operated within a +/ 50 nanometer tolerance field (residual hysteresis) B, the repeatability is still better for cyclic motion profiles C, the minimum resolvable relative shift in position is about 5 nm in the closed loop mode. Fig. 5: Functional block diagram of a PosiCon system Response time The closed loop response time of a feedback system is defined as the settling time when a new position is addressed. With a well adjusted control loop and sufficient high output power, the settling time can be shorter than 10 msec. The response time depends to some extent on the capacitance of the actuator and can further be affected by external influences too e.g. by changing the mass load of an actuator or Stroke, forces and stiffness A closed loop systems shows virtually infinitely high stiffness: a change of force load does not change actuator s position. On the other hand: As shown in the brochure Piezomechanics: An Introduction chapter 1.3 piezo actuators show full stroke only, when there is no or neglectable change of the axial force balance acting on the piezo actuator. When axial forces are varying during piezo actuator s action, then the stroke is reduced. The fundamental limit of PosiCon.an is reached when the blocking force is applied: In the closed loop mode the PosiCon.an is encountering for the potential compression by applying the maximum voltage. No further change of stroke is possible. 5

Functional elements (see front-page) Offset PosiCon.an unit show an offset potentiometer per channel for manual setting of a DC-input signal level. According the dual use philosophy of the PosiCon.an system, the function of Offset is twofold: Closed loop operation: A manual setting of the position can be done. The position varies linearely with Offset, no hysteresis and creep. Variations in position by varying load forces are compensated for automatically. The offset setting is superimposed to external signals, applied to PosiCon.an s inputs. Open loop operation A manual setting of the output piezo voltage can be done. The position of the actuator varies with Offset resulting in the normal open loop behaviour with hysteresis and creep. The offset setting is superimposed to external signals. LC-displays for individual mm and Volt reading per channel Each channel of the PosiCon.an is provided with a double LCD read out both for stroke and piezo voltage. Even when the system is running open loop, you get information about position. Zero-setting: The starting point of piezo actuator s action can depend on various side conditions like mounting forces, preloading etc. To get a reasonable position read-out, each channel for the PosiCon can be set to zero individually by a potentiometer in the front panel. Gain factor: The amplifier gain factor of each channel of the PosiCon can be set individually by a switch to accept alternatively 5V or 10 V input signal for full stroke action. Open/closed loop selector switch Feedback Each channel of the PosiCon can be selected by a switch for open loop or closed loop operation. In the open loop mode, the PosiCon behaves like a normal piezo amplifier. Position detection remains active, so position information is provided via LC-Display and Monitor. Monitor Via BNC connectors on front and rear panel, analog signals are provided as real time information for position and piezovoltage for each channel individually. Piezovoltage is reduced by a factor 1:1000. Position is represented as a 5 V swing equivalent full stroke. Piezovoltage output: The connecting system is BNC for 150 V / 500 V devices LEMO 0S.250 or 1000 V devices Optionally, other connecting systems like LEMO 00 250 are available. Output voltage ranges for standard PosiCon.an devices. The standard PosiCon.an incorporates SVR amplifier stages as described in catalog Electronic supplies. The unique feature is the semibipolar voltage range resulting in a 20 % to 30 % increase of piezo actuator stroke compared to unipolar devices. PosiCon.an 150: 30 V thru +150 V / max. current: 60 ma PosiCon.an 500: 100 V thru +500 V / max. current: 15 ma PosiCon.an 1000: 200 V thru +1000 V / max. current: 8 ma Optional High Power PosiCons: To drive large piezo actuators with high dynamics the power requirements may exceed the range of the standard PosiCons. Optionally High Power PosiCons can be offered on the base of high power amplifier stages LE150/025 LE430/015 LE150/100 LE150/200 LE1000 Calibration: Calibration is only necessary to set the position read outs of the PosiCon.an ( mm -LCD and Monitor ) to the actuator performance. Calibration is done at PIEZOMECHANIK factory and is valid for the distinct actuator-posicon combination. Uncalibrated systems work in closed loop feedback mode too (compensation for hysteresis, creep etc.), only the position read outs are not valid. Available configurations, ordering information The standard PosiCon.an systems are offered in single and triple channel arrangements. e.g. PosiCon.an 150/1 or PosiCon.an 150/3. High power PosiCons are usually delivered as single channel devices. On request other configurations are offered. Sensor input: The PosiCon.an unit requires a signal from a 4-element Wheatstone bridge for input. This sensing element is usually applied to the piezo actuator (Option: position detection). But the sensor can be attached to an external mechanism too, where the piezo actuator s motion leads to an equivalent deformation (e.g. hinges of flex stages). The electrical connecting system is 4-pole LEMO 0S.304 6

Piezomechanik s product range Piezo stack and ring actuators: low voltage and high voltage types high dynamic elements for adaptive structure control rapid valve switching cryo applications down to the sub-kelvin level very long stroke high load elements high temperature applications (up to 200 C) UHV application Space applications Special designed elements Bipolar actuators Analog / switching amplifiers Voltage controller type +150 / +200 V: up to 50 Amperes peak +500 V: up to 20 Amperes peak +1000 V: up to 15 Amperes peak semibipolar supplies for widest range piezo-deflection Current and charge controlling amplifiers: for open loop linear and hysteresis free high dynamic operation of piezo actuators low and high voltage / low and high power versions available High power, electronic pulsers: pulse powers up to 500 KiloWatts low and high voltage versions Constant current pulsers for charge control piezo-driving strategy e.g. in highest speed / high power valve and fuel injection control 7

Piezomechanik Dr. Lutz Pickelmann GmbH Berg-am-Laim-Str. 64 D-81673 Munich Phone ++ 49/ 89 / 4 3155 83 Fax ++ 49/89/4 31 6412 e-mail: info@piezomechanik.com http://www.piezomechanik.com Stand: Januar 2004