A Micro Scale Measurement by Telecentric Digital-Micro-Imaging Module Coupled with Projection Pattern

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Available online at www.sciencedirect.com Physics Procedia 19 (2011) 265 270 ICOPEN 2011 A Micro Scale Measurement by Telecentric Digital-Micro-Imaging Module Coupled with Projection Pattern Kuo-Cheng Huang a *, Chun-Li Chang b, Wen-Hong Wu b and Chih-Yi Yung c a Division Director, Instrument Technology Research Center, NARL, 20, R&D Rd. VI, Hsinchu Science Park, Hsinchu 300, Taiwan b Associate Researcher, Instrument Technology Research Center, NARL, 20, R&D Rd. VI, Hsinchu Science Park, Hsinchu 300, Taiwan c Manager General, Lomus Technology Company Ltd., 7F, No.8,Wanhe St. Wenshan District, Taipei 100, Taiwan Abstract In general, the applications of telecentric lens can be divided into two major groups, the first one is the telecentric macro lens (TML) commonly used in machine vision inspection and the other one is the telecentric digital-micro-imaging lens (TDMIL), which is a specific magnification of telecentric lens coupled with a pocket digital camera. Due to the limitation of CCD s resolution, the image quality captured by TML cannot meet the biomedical requirement. In order to improve the image quality and the convenience of measurement, the TDMIL can be recommended as a simple instrument to measure the size of an object. However, if the high resolution microscopy image and the minimum total length of TDMIL are required simultaneously, the total magnification of TDMIL system should be less than 5X. This paper presents a micro-scale measurement approach that is performed by the TDMIL coupled with the projection scale pattern, and is easy to get the size of an object. 2011 Published by Elsevier B.V. Open access under CC BY-NC-ND license. Selection and/or peer-review under responsibility of the Organising Committee of the ICOPEN 2011 conference PACS: 42.79.-e; Keywords: telecentric macro lens; pocket digital camera; projection scale pattern 1. Introduction Traditional optical microscopy is used frequently for observation of small objects. In 1990s, several optical companies, Scalar and Moritex in Japan, began to develop the digital microscope. However, the microscope launched by Moritex is a desktop system, so it cannot perform the mobile observation. Therefore, Scalar mainly created the standalone handheld digital microscopes. Due to the higher development cost and the minor image quality, Scalar s products are still unable to meet the biomedical observation and measuring demand of higher image quality. In recent years, along with the first generation of Lomus digital-micro-imaging camera coming out [1], the new generation microscope can be portable and more convenience for recording. Based on pocket camera platform, the digital-micro-imaging camera also has the functions of real-time preview and auto-focusing, so it can see the small things that the human eye cannot see. In 2006, we had developed the digital-micro-imaging camera [2], but it * Corresponding author. Tel.: +0-886-3-5779911; fax: +0-886-3-5773947. E-mail address: huanhkc@itrc.narl.org.tw. 1875-3892 2011 Published by Elsevier B.V. Selection and/or peer-review under responsibility of the Organising Committee of the ICOPEN 2011 conference Open access under CC BY-NC-ND license. doi:10.1016/j.phpro.2011.06.159

266 Kuo-Cheng Huang et al. / Physics Procedia 19 (2011) 265 270 cannot to measure the size of small objects; therefore, the new type of digital-micro-imaging camera is expected to be provided with the function of micro-scale measurement. A telecentric lens would be the key component for the micro-scale measurement of digital-micro-imaging lens. There are many inventions and researches had showed the relationship between the telecentricity and machinevision inspection. In 1878, Ernst Abbe presented the concept of telecentric inspection system. Kharchenko [3] stated a telecentric system with large field of view under monochromatic illumination and the system can be applied to various study fields. Michael [4] presented a telecentric system, which is not widely used in industry, so he tried to specific the definition and application of telecentric system. Until 1996, Guillermo [5] mentioned the application of telecentric lens with 1/2 sensor in machine-vision inspection. Recently, the telecentric system with large fieldof-view (FOV) stared to be discussed and applied to the micro-scale inspection. For example, Norbert [6] successfully applied a Fresnel lens and monochromatic illumination to reduce the cost of large field telecentric system. In additional, based on the aberration theory, Hanxiang [7] illustrated several relationships between main design parameters and performances of large-format telecentric lens. In 2010, we also presented a design and development of telecentric lens module for the wide range of vision inspection system (FOV > 100 mm), and the experiment shows that the distortion can be reduced [9]. In the study, we present a pattern projection for telecentric design of digital-micro-imaging camera, so the magnification of patterned image is independent of working distance during the inspection. The new system comprises a telecentric digital-micro-imaging lens (TDMIL) and a micro-scale projection module, shown in Fig. 1. A micro pattern is projected on the object by way of projection lens and beam splitter, and the scaled image will be captured by pocket camera. In addition, an observer can readily estimate the size of small object form the screen of pocket camera. Furthermore, the scaled image and un-scaled image can be transferred to a specific image with varied patterns by image processing technology. Fig. 1 Schematic of TDMIL module 2. Optical Design of TDMIL Module 2.1. Telecentric Optics A general lens has the characteristic of image, which the distance from the object is the larger; the image focused on detector is the smaller. The geometric disparity of image will be induced in the lens by different observation angle of object. The parallax of geometric image depends on the magnification of optical system; the magnification of objects being far away from lens is smaller, vice versa, the magnification of the objects is larger. However, in the

Kuo-Cheng Huang et al. / Physics Procedia 19 (2011) 265 270 267 measurement of the size of object by machine vision technology, the parallax will lead to the measurement error. Therefore, the telecentric lens is designed to correct the parallax within a certain measurement range. In the design of telecentric lens, lens group can be applied to correct the parallax within a certain depth of field; therefore, the size of image does not vary with the change of object distance. The telecentric lens cannot increase the DOF of lens, but it is able to remove the parallax. However, the abaxial part of the image will become blurred. There are many optical parameter must be required for the design of telecentric lens, such as working distance (WD), field-of-view (FOV), depth of field (DOF), sensor size, resolution of camera (Rc), and so on (Fig. 1).The telecentric lens has two general parameters; primary magnification and resolution of object. The primary magnification, PMAG, can be expressed as, PMAG = (1) FOV where dccd is the size of CCD and FOV is the field-of-view of telecentric lens. The resolution of object (Ro) is the ability of detail image generation by telecentric lens, and can be computed as following, Rc Ro = PMAG (2) 2.2. Layout of TDMIL and Projection Lens Different from the TML, the TDMIL is a close-up lens in front of a pocket camera. The specifications of pocket camera needs to take into the account of telecentric lens design, so the optical design of TDMIL is more complex and difficult than TML. Therefore, in order to avoid failure in telecentric projection, these specifications should include FOV, focal length (FL), clear aperture (CA), and etc. In addition, the optical magnification and the total length of lens constrains each other, in practical, the maximum magnification must be limited under 5X. Coupled with a proper projection lens, the Lomus 150 X micro imaging lens (Fig. 2) can be modified to the TDMIL. In the beginning of optical design, there are three types of projection lenses would be considered; the first one is the front coupling types, shown in Fig. 3, which a splitter prism will be inserted between TDMIL and pocket camera. However, this design could easily lead to stray light and multiple images into the pocket camera. d CCD Fig. 2 The design of Lomus 150 X micro imaging lens Fig. 3 The front coupling type of TDMIL

268 Kuo-Cheng Huang et al. / Physics Procedia 19 (2011) 265 270 The other design is the inserted coupling type, shown in Fig. 4, which is able to eliminate some of the stray light of projection pattern. However, the inserted splitter prism could easily make this design become very difficult for designer, and it is almost impossible to create a result of telecentric projection. It is very difficult to create a telecentric or no stray light effect in the above types of TDMIL, so we apply a third design (the outside coupling type) to eliminate completely the stray light of projection pattern, shown in Fig. 5. However, it is not easy to clamp and fix these optical components in the outside coupling type of TDMIL, therefore, a good opto-mechanical design and alignment of TDMIL is required. Fig. 4 The inserted coupling type of TDMIL Fig. 5 The outside coupling type of TDMIL 3. Result of TDMIL Design At first, we connect a projection lens and the Lomus 150 X micro imaging lens to form the TDMIL system (Fig. 5), and modify the lens to be required for telecentric projection. From Fig. 6(a), in order to create the telecentric effect of TDMIL, the beam of larger field-of-view cannot be optimized for imaging. Therefore, the STOP of TDMIL shall be moved from the surface 3 to the surface 1, and lens 1 needs be altered for telecentric projection from a convex lens into a concave lens, shown in Fig. 6(b). However, in order to increase the illumination of light and the magnification of TDMIL, the numerical aperture (NA) of TDMIL must be enlarged as shown in Fig. 6(c). From the Fig. 6(c), the beams of larger field-of-view exceed the range of effective diameter of TDMIL, so it is necessary to

Kuo-Cheng Huang et al. / Physics Procedia 19 (2011) 265 270 269 combine lens 2 and lens 3 into a cemented lens. Finally, the better specification of TDMIL will be found as shown in Fig. 6(d). 4. Experience and Discussion As shown in Fig. 7, a micro scale pattern is able to be projected and overlapped on object by projection lens, which the intensity of scale can be adjusted by 3 watt white LED light. The micro scale pattern comprises a glass plate and a thin sticker of scale pattern. If the transmittance of thin sticker of scale pattern is too low to express the scale clearly, the micro scale pattern can be replaced by a thin glass plate with etched micro scale. In addition, the line width of micro scale can be reduced by projection lens with longer focal length. Figure 8(a) shows the real TDMIL module. Fig. 6 The ray tracing diagrams of TDMIL module Fig. 7 The cross-section diagram of TDMIL module Figure 8(b) shows the real micro image and micro scale pattern captured by TDMIL module The PMAG of TDMIL module is about 1.29, where dccd is 7.75 mm and FOV is 6 mm. From the Eqn. (2), the resolution of camera (Rc) is 3.1 um, so the resolution of object (Ro) can reach 2.4 um by using TDMIL module. For the convenience of sticker s manufacturing, the line width of micro scale expressed in the experiment is about 50 um.

270 Kuo-Cheng Huang et al. / Physics Procedia 19 (2011) 265 270 However, a micro scale of 5 um line width can be created on glass plate by etching, but it is difficult to observe directly the size of object from the screen window of pocket digital camera. Therefore, the line width of micro scale has to be generated to meet the magnification of object. In addition, the micro scale projected on the object can be reduced by projection lens, so the real line width could be larger. Furthermore, if the resolution of microscopy image is higher (i.e. the magnification of TDMIL module would be larger), then the working distance of TDMIL is shorter. So, in practice, the magnification of outside coupling type of TDMIL module should be less than 5X. 5. Conclusion The digital-micro-imaging camera, which comprises a pocket camera and TDMIL module, is a good tool to observe the small things that the human eye cannot see. The TDMIL module can get the microscopy image of object with micro scale, so the biomedical images are able be measured immediately. However, if the high resolution microscopy image and the minimum total length of TDMIL are required simultaneously, the magnification of outside coupling type of TDMIL should be less than 5X. In addition, one observer can use a thin sticker of scale pattern pasted on PMMA diffusion plate to obtain the uniform micro scale pattern. In general, the micro scale pattern and projection lens can be altered to meet the requirement of observer. Fig. 8 (a) The real TDMIL module (b) The real microscopy image and micro scale pattern (2 mm - Surface Mount Device/SMD 0805 Resistant) Acknowledgment This work was supported in part by the Ministry of Economic Affairs, TAIWAN, under SBIR-II Grants 1Z981293. Reference 1. K. C. Huang, F. C. Hsu, C. S. Lee, F. Z. Chen, J. R. Yu and T. S. Liao, Close-up lens with lighting device, Instrument Technology Research Center (Taiwan), Taiwan Patent, No. M288941, Japan Patent, No. 3126595, German Patent, No. 20-2006-012-969.3 (2006). 2.F.C.Hsu,C.S.Lee,K.C.Huang,P.J.Chen,F.Z.ChenandT.S.Liao, Portable digital microscope apparatus, Review of Scientific Instruments 77,116106 (2006). 3. W. Masahiro and K. N. Shree, [Computer Vision ECCV'96], Springer, Cambridge UK, 439-451 (1996). 4. Y. Kharchenko, "Telecentric Optical System", Proc. SPIE 2050, 88-89 (1993). 5. A. P. Michale, "Optical Design and Specification of Telecentric Optical System", Proc. SPIE 3482, 877-886 (1998). 6. B. O. Guillermo, "Telecentric lens for precision machine vision", Proc. SPIE 2730, 440-444 (1996). 7. S Norbert, S. Thomas, "Telecentric large-field lenses using Fresnel optics", Proc. SPIE 4567, 190-198 (2002) 8. B. Hanxiang, P. S. Samuel, "Large-format telecentric lens", Proc. SPIE 6667, 666705-666712 (2007). 9. C. L. Chang, K. C. Huang, W. H. Wu, Y. H. Lin, The design and fabrication of telecentric lens with large field of view, Proc. SPIE 7786, 778612-778616 (2010).