Overview. Charge-coupled Devices. MOS capacitor. Charge-coupled devices. Charge-coupled devices:

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Overview Charge-coupled Devices Charge-coupled devices: MOS capacitors Charge transfer Architectures Color Limitations 1 2 Charge-coupled devices MOS capacitor The most popular image recording technology for 3D photography is the charge-coupled device (CCD). Image is readily digitized CCD cells respond linearly to irradiance But, camera makers often re-map the values to correct for TV monitor gamma or to behave like film Available at low cost Key elements: Photodetector Charge transfer mechanism A MOS capacitor can do both of these Negative gate voltage: Majority carriers (holes) plentiful, and the gate behaves like a capacitor that stores positive charge near the oxide. 3 4

MOS capacitor in deep depletion MOS capacitor in weak inversion Positive gate voltage: No minority carriers (electrons) to balance the voltage. Holes are repelled, leaving negative charged ions in the depletion region. Voltage drop in the silicon is like an empty bucket waiting to be filled by electrons. Bucket depth is proportional to applied voltage. Positive gate voltage + new electrons: Electrons are made available through a process such as photoelectric generation of hole-electron pairs. Electrons in the depletion region move to the oxide surface. The addition of electrons is equivalent to filling the bucket. 5 6 Photo-conversion Depletion regions in semiconductors collecting electrons and holes: Charge transfer By manipulating voltages of neighboring cells, we can move a bucket of charge one gate to the right. A diode has an inherent depletion region without applying a voltage. Can be used as a photodiode. When a MOS capacitor is biased into depletion, it can collect charge generated by photons. 7 8

Three-phase clocking system With three gates, we can move disjoint charge packets along a linear array of CCD s. One cell Four-phase clocking system Four gates requires more space than three, but the charge capacity is greater. One cell Since all charge must be able to fit in one bucket, gate usage withing a cell is 33%. Here, all charge must fit into two buckets, giving a gate usage of 50%. 9 10 Two-phase clocking system Linear array sensors By varying gate structure, it is possible to use two gates per cell: One cell (a) Linear imager The efficiency is down to 25%, but by narrowing horizontal thickness of the blocking portion (left side) of each gate, it is possible to get ~40%. (b) Bilinear imager (c) Qudralinear imager 11 12

Full frame CCD Frame transfer (FT) CCD Q: What shortcoming(s) does this design have? Q: What shortcoming(s) does this design have? 13 14 Interline transfer (IT) CCD Frame interline transfer (FIT) CCD s covered MOS gate photodiode Q: What shortcoming(s) does this design have? Q: What shortcoming(s) does this design have? 15 16

A closer look... Interlacing Frame transfer CCD Interlaced Interline transfer CCD (SEM photograph) Progressive 17 18 Interlacing (cont d) Spectral response Typical spectral response of a linear MOS CCD imager: By manipulating gate voltages, we can redefine cells. In the FT CCD above, positive voltages define the charge collecting regions. By shifting positive voltages, the cells shift vertically. Note the strong response in the infrared. An infrared filter ( hot mirror ) is typically necessary. 19 20

Color filters Single chip color filters Two capture color, different wavelength filters can be placed on the photodectors. The filters can be distributed over a chip in several ways. Q: What is a shortcoming of a single chip color filter? 21 22 3-chip color cameras Limitations of CCD s Smear vs. aliasing Blooming Diffusion Transfer efficiency Noise Dynamic range 23 24

Blooming Example: smear and blooming Blooming Over-exposure causes charges to leak into neighboring cells. Can be reduced with anti-blooming technology. 25 26 Diffusion Noise Here is a diagram of the CCD sensing process: Q: What kind of noise sources might you expect? Electrons generated outside the depletion region may wander into neighboring cells. 27 28

Dark current and photon shot noise Electron-hole pairs are generated according to: where: n t I I = irradiance of the light t INT = integration time They are also generated due to thermal agitation, yielding a dark current : n t T e dark photon INT INT 2 E / kt Dark current and photon shot noise The electron generation process is a discrete counting process with unknown arrival times. Such processes are described by Poisson statistics. For a variable X obeying Poisson statistics: σ 2 = µ Q: How should noise vary over an image? Q: What happens to signal-to-noise (SNR) as signal increases? where: T = temperature K = Boltzmann s constant E = energy constant that depends on materials 29 30 Shot noise example Bibliography Holst, G., CCD Arrays Cameras and Displays, SPIE Optical Engineering Press, Bellingham, Washington, 1998. Muller, R. and Kamins, T. Device Electronics for Integrated Circuits, 2nd Edition. John Wiley and Sons, New York, 1986. Theuwissen, A. Solid-State Imaging with Charge-Coupled Devices. Kluwer Academic Publishers, Boston, 1995. Original image Variance (x32) 31 32