License to Speed: Extreme Bandwidth Packaging

Similar documents
Chapter 2 Low-Cost High-Bandwidth Millimeter Wave Leadframe Packages

Development of 100+ GHz High-frequency MicroCoax Wire Bonds

Introduction to On-Wafer Characterization at Microwave Frequencies

A Miniaturized Multi-Channel TR Module Design Based on Silicon Substrate

Managing Complex Impedance, Isolation & Calibration for KGD RF Test Abstract

Chapter 2. Literature Review

A Simplified QFN Package Characterization Technique

MICROELECTRONICS ASSSEMBLY TECHNOLOGIES. The QFN Platform as a Chip Packaging Foundation

Flip-Chip for MM-Wave and Broadband Packaging

High Frequency Single & Multi-chip Modules based on LCP Substrates

The Future of MM-Wave Packaging

ENGAT00000 to ENGAT00010

Microwave Metrology -ECE 684 Spring Lab Exercise T: TRL Calibration and Probe-Based Measurement

Signal Integrity Modeling and Measurement of TSV in 3D IC

ISSCC 2006 / SESSION 10 / mm-wave AND BEYOND / 10.1

Electronic Packaging at Microwave and Millimeter-wave Frequencies Applications, Key Components, Design Issues

Integrated Photonics using the POET Optical InterposerTM Platform

A Broadband GCPW to Stripline Vertical Transition in LTCC

Design Considerations for Highly Integrated 3D SiP for Mobile Applications

3680 Series. Universal Test Fixtures. A Complete Measurement Solution. DC to 60 GHz DC to 20 GHz 3680K DC to 40 GHz 3680V DC to 60 GHz

Extraction of Broadband Error Boxes for Microprobes and Recessed Probe Launches for Measurement of Printed Circuit Board Structures

GaAs MMIC Millimeter Wave Doubler. Description Package Green Status

Application Note 5525

Fan-Out Solutions: Today, Tomorrow the Future Ron Huemoeller

MMIC/RFIC Packaging Challenges Webcast (July 28, AM PST 12PM EST)

Integration Techniques for MMICs and Chip Devices in LTCC Multichip Modules for Radio Frequencies

ON-WAFER CALIBRATION USING SPACE-CONSERVATIVE (SOLT) STANDARDS. M. Imparato, T. Weller and L. Dunleavy

TGP GHz 180 Phase Shifter. Primary Applications. Product Description. Measured Performance

Verification of LRRM Calibrations with Load Inductance Compensation for CPW Measurements on GaAs Substrates

Silicon Interposers enable high performance capacitors

Design and Analysis of Novel Compact Inductor Resonator Filter

RF and Microwave Design Solutions. Bob Alman (707)

A 1.1V 150GHz Amplifier with 8dB Gain and +6dBm Saturated Output Power in Standard Digital 65nm CMOS Using Dummy-Prefilled Microstrip Lines

Aries Kapton CSP socket

77 GHz VCO for Car Radar Systems T625_VCO2_W Preliminary Data Sheet

GaAs MMIC Millimeter Wave Doubler. Description Package Green Status

T est POST OFFICE BOX 1927 CUPERTINO, CA TEL E P H ONE (408) FAX (408) ARIES ELECTRONICS

March 4-7, 2018 Hilton Phoenix / Mesa Hotel Mesa, Arizona Archive

Infinity Probe Mechanical Layout Rules

Gain Slope issues in Microwave modules?

Flexible Hybrid Electronics Fabricated with High-Performance COTS ICs using RTI CircuitFilm TM Technology

MACP Temperature Compensated Directional RMS Power Detector 2-6 GHz Rev. V1 Features Integrated Directional Coupler Low Insertion Loss: 0.15 db

GaAs MMIC Non-Linear Transmission Line. Description Package Green Status

Design and Modeling of Through-Silicon Vias for 3D Integration

Introduction: Planar Transmission Lines

CHX2090-QDG RoHS COMPLIANT

Aries QFP microstrip socket

Optically reconfigurable balanced dipole antenna

Features. Preliminary. = +25 C, IF = 1 GHz, LO = +13 dbm*

AIAA AIAA

HA4600. Features. 480MHz, SOT-23, Video Buffer with Output Disable. Applications. Pinouts. Ordering Information. Truth Table

insert link to the published version of your paper

Advanced High-Density Interconnection Technology

Measured Fixtured Data Bias: 40mA Isolation (db)

Considerations in High-Speed High Performance Die-Package-Board Co-Design. Jenny Jiang Altera Packaging Department October 2014

High Power RF MEMS Switch Technology

SHELLCASE-TYPE WAFER-LEVEL PACKAGING SOLUTIONS: RF CHARACTERIZATION AND MODELING

Signal Integrity Design of TSV-Based 3D IC

Features. = +25 C, Vdd = 5V, Vgg1 = Vgg2 = Open

MMIC 2-18GHz 90 Splitter / Combiner. Green Status. Refer to our website for a list of definitions for terminology presented in this table.

Wafer-scale 3D integration of silicon-on-insulator RF amplifiers

10 GHz to 20 GHz, GaAs, MMIC, Double Balanced Mixer HMC554ALC3B

Compact Distributed Phase Shifters at X-Band Using BST

2-4GHz Driver. GaAs Monolithic Microwave IC in SMD leadless package

MMIC GHz Quadrature Hybrid

Laminate Based Fan-Out Embedded Die Technologies: The Other Option

The Design Challenge to Integrate High Performance Organic Packaging into High End ASIC Strategic Space Based Applications.

450mm and Moore s Law Advanced Packaging Challenges and the Impact of 3D

400 MHz to 4000 MHz Low Noise Amplifier ADL5523

DC - 20 GHz Discrete power phemt

Trends in RF/Microwave & High Speed Digital and their effect on PCB Technology Requirements

Advanced Transmission Lines. Transmission Line 1

INVENTION DISCLOSURE- ELECTRONICS SUBJECT MATTER IMPEDANCE MATCHING ANTENNA-INTEGRATED HIGH-EFFICIENCY ENERGY HARVESTING CIRCUIT

Custom Interconnects Fuzz Button with Hardhat Test Socket/Interposer 1.00 mm pitch

ENGDA Wideband Distributed Amplifier, DIE, 0.8 to 20 GHz ENGDA Features. Typical Applications. Description. Functional Block Diagram

Design of Compact Stacked-Patch Antennas in LTCC multilayer packaging modules for Wireless Applications

3D and Aerosol Printed Conductor Dielectric Full- 3D RF Metamaterials

Data Sheet. VMMK GHz Variable Gain Amplifier in SMT Package. Features. Description. Specifications (6 GHz, Vdd = 5 V, Zin = Zout = 50 Ω)

GaAs, phemt, MMIC, Single Positive Supply, DC to 7.5 GHz, 1 W Power Amplifier HMC637BPM5E

Physical RF Circuit Techniques and Their Implications on Future Power Module and Power Electronic Design

Source: Nanju Na Jean Audet David R Stauffer IBM Systems and Technology Group

High Isolation GaAs MMIC Doubler

Data Sheet. VMMK GHz E-pHEMT Wideband Amplifier in Wafer Level Package. Description. Features. Specifications (6GHz, 5V, 25mA Typ.

Manufacture and Performance of a Z-interconnect HDI Circuit Card Abstract Introduction

This is the accepted version of a paper presented at 2018 IEEE/MTT-S International Microwave Symposium - IMS, Philadelphia, PA, June 2018.

Designing Cost Competitive E-band Radio Front-ends

23-26GHz Reflective SP4T Switch. GaAs Monolithic Microwave IC in SMD leadless package

TGV2204-FC. 19 GHz VCO with Prescaler. Key Features. Measured Performance. Primary Applications Automotive Radar. Product Description

SMA Self-Fixture End Launch Connectors

Near Millimeter-Wave Building Blocks Based on Novel Coaxial to SIW Transition

3D/SiP Advanced Packaging Symposium Session II: Wafer Level Integration & Processing April 29, 2008 Durham, NC

MACP Temperature Compensated Directional RMS Power Detector GHz Rev. V1 Features Functional Schematic Description Pin Configuration 3

AV3672 Series Vector Network Analyzer

Enabling Parallel Testing at Sort for High Power Products

SPECIFICATION. Patent Pending. 2.4/5.8GHz Embedded Flexible Antenna 3 ports for ac applications

CHA2069-QDG RoHS COMPLIANT

High Performance Microwave Probes for RF probing

Packaging Roadmap: The impact of miniaturization. Bob Pfahl, inemi Celestica-iNEMI Technology Forum May 15, 2007

Up to 6 GHz Low Noise Silicon Bipolar Transistor Chip. Technical Data AT-41400

Cu 0.37 Brass Cu 0.37 Brass

Transcription:

License to Speed: Extreme Bandwidth Packaging Sean S. Cahill VP, Technology BridgeWave Communications Santa Clara, California, USA BridgeWave Communications Specializing in 60-90 GHz Providing a wireless fiber substitute 80% of all 2008 U.S. & U.K. FCC 70/80 GHz registrations Corporate Headquarters: Santa Clara, CA Extensive product line Pioneered many firsts in this space Sales in Americas, EMEA, Asia/Pacific 2 www.cpmt.org/scv 1

Chosen by Service Providers Municipalities Enterprise Government Healthcare Education Introduction What is the problem? Moore s Law => frequency and bandwidth Interconnects limit performance No existing solution Why microcoax? With increasing frequency, simple unshielded wires look less like pipes routing information, and more and more like antennas Shielded interconnects increase Bandwidth Noise immunity Isolation Signal Integrity www.cpmt.org/scv 2

What is MicroCoax? Wirebonding based approach to producing highperformance interconnects with over 110GHz of bandwidth typical impedance of 50Ω What is magic about 50Ω? Historical optimization Geometric mean is approximately 50Ω Vast majority of MMICs have this impedance value www.cpmt.org/scv 3

MicroCoaxial Interconnect Characterization MicroCoaxial Through s fabricated 500 µm Micro-coax through under test at probe station Ranging in length from 500 µm to 5 mm Longer and shorter are possible 15-25 µm wirebond cores 75-100 µm total diameter Polymer, ceramic, & metal based substrates MS, CPW, waveguide and leadframe I/O s MicroCoax Performance Excellent Insertion loss 0.75 db over 2.2 mm 0.34 db/mm and even less at lower frequencies Data includes Substrate-to-MicroCoax transitions Return loss <-25 db over 0-50 GHz band S11 at center of Smith chart shows good ~50Ω characteristic across all frequencies Measurement courtesy Motorola Embedded Systems www.cpmt.org/scv 4

MicroCoax Characterization Cross Talk Cross Talk structure fabricated Two parallel MicroCoax wirebonds terminated to 50Ω load Center-to-center MicroCoax spacing 160 microns Cross Talk - Measurements Isolation: From coax-to-coax & through the substrate 0-18 GHz better than noise floor of VNA (better than 70 db) >18 GHz, diminishes due to dielectric substrate modes Better than 40 db from 18-50 GHz Better than 30 db from 50-100GHz with proper dielectric substrate design Cross-talk investigation structure -1 is 162 μm pitch -2 is 187 μm pitch -3 is 213 μm pitch Isolation [db] 0-10 -20-30 -40-50 -60-70 -80 S11 isolation improvement 50 60 70 80 90 100 Frequency [Ghz] S21_metal fill 01 metal fill; thru cut into substrate filled with metal www.cpmt.org/scv 5

Test Structure Process Flow Process Variation Does center conductor offset produce performance impact? 40% offset only produces 10% impedance change 10% offset => 0.6% www.cpmt.org/scv 6

Packaging for MMW Current Approach BridgeWave Solution QFN Advantages Low cost Best thermal performance High I/O density Low NRE Stacked die / SIP capable EVOLUTION Open Cavity Enhanced Bandwidth MicroCoax www.cpmt.org/scv 7

MicroCoax Package Process - Open Cavity QFN package with high frequency I/O design - Apply conductive die-attach adhesive Benefits Impedance matched Exceeds 50 GHz Metallic Thermal dissipation Integral shielding Low-cost Materials Processes Pick-and-place high volume compatible Low capital costs Standard processes Flexible, low design NRE MicroCoax Package Process Benefits - Accurate placement of active and passive components - Wirebonding Impedance matched Exceeds 50 GHz Metallic Thermal dissipation Shielding Chip scale Low-cost Materials Processes Pick-and-place compatible Low capital costs Standard processes Flexible, low design NRE www.cpmt.org/scv 8

MicroCoax Package Process Benefits - Apply Conformal Coating Impedance matched Exceeds 50 GHz Metallic Thermal dissipation Shielding Chip scale Low-cost Materials Processes Pick-and-place compatible Low capital costs Standard processes Flexible, low design NRE MicroCoax Package Process Benefits - Laser via for I/O ground and die ground - Gentle plasma clean Impedance matched Exceeds 50 GHz Metallic Thermal dissipation Shielding Chip scale Low-cost Materials Processes Pick-and-place compatible Low capital costs Standard processes Flexible, low design NRE www.cpmt.org/scv 9

MicroCoax Package Process Benefits - Conformal deposition of metal - Plate 3-5 microns additional metal Impedance matched Exceeds 50 GHz Metallic Thermal dissipation Shielding Chip scale Low-cost Materials Processes Pick-and-place compatible Low capital costs Standard processes Flexible, low design NRE Coaxial Interconnect in QFN Open Cavity QFN 5x5 mm JEDEC compliant form factor 4 high-frequency ports / 8 low-frequency ports 0.7mil core coaxial interconnect 4+ mm long port-to-port through www.cpmt.org/scv 10

V-band Test Fixture 4 Wiltron - Model 3680V Universal Test Fixture 4 I/O s consist of V connectors Package Test Configuration Bottom of package Closed Open Test fixture jaws Package in fixture www.cpmt.org/scv 11

QFN Measured Performance Back to back port measurement Pkg I/O => 4+ mm coax => Pkg I/O (i.e. 2x path of single pkg port) Reference plane at external v-connectors of fixture (i.e., test fixture included in measurements) Two package design variants Loss [db] 0-5 -10-15 -20-25 -30-35 -40 0 10 20 30 40 50 Freq [GHz] S21_pkg04S S11_pkg04S S21_pkg11N S11_pkg11N QFN Implementation Design/Modeling Ground-breaking performance to 80+GHz QFN Measurement -Two ports back-to-back -Excellent to 50+ GHz Estimated for single port www.cpmt.org/scv 12

Packaged MMIC Essentially lossless packaging of UMS CHA 2069 18-31 GHz MMIC Measured (yellow) vs. wafer probe data (dots) from manufacturer Early roll-off due to lack of expected 0.2 nh inductance at each I/O port Coaxes don t have lumped inductance of a wirebond MMIC s are designed to compensate for the expected inductance Selective removal of upper ground plane using 3D lithography and plating Commercial offering vs. MicroCoaxQFN QDG package data assumes reference plane immediately external to package and excludes connectors or board transmission lines mqfn package data includes connectors and board transmission lines www.cpmt.org/scv 13

Digital Evaluation Test Performed by SytheSys Research Where does MicroCoax play? Trends / Projections Moore s law drive to higher frequency/bandwidth MicroCoax 100 Cruise Control / Collision Avoidance Radars MMW Transceivers Frequency (GHz) 10 1 General Digital Semiconductor Analog Semiconductor MMW Comm microprocessors Opto 10/40G Communication Semiconductor Test Signal Integrity www.cpmt.org/scv 14

Conclusion National Science Foundation Phase I and II SBIR grants The Nation s venture capital arm Any Questions? Sean S. Cahill VP, Technology seanc@bridgewave.com Eric A. Sanjuan Manager, Advanced Tech. erics@bridgewave.com BridgeWave Communications Santa Clara, CA 95054 USA www.cpmt.org/scv 15