High QE, Thinned Backside-Illuminated, 3e- RoN, Fast 700fps, 1760x1760 Pixels Wave-Front Sensor Imager with Highly Parallel Readout

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High QE, Thinned Backside-Illuminated, 3e- RoN, Fast 700fps, 1760x1760 Pixels Wave-Front Sensor Imager with Highly Parallel Readout Mark Downing, Dietrich Baade, Norbert Hubin, Olaf Iwert, Javier Reyes European Southern Observatory ESO (http://www.eso.org) Martin Fryer, Paul Jorden, Andrew Walker, Andrew Pike, Paul Jerram, Jerome Pratlong e2v technologies ltd (http://www.e2vtechnologies.com) Bart Dierickx, Benoit Dupont, Arnaud Defernez Caeleste, Antwerp, Belgium (http://www.caeleste.be) Philippe Feautrier Domaine Universitaire LOAG (http://www-laog.obs.ujf-grenoble.fr/jra2) Jean-Luc Gach, Philippe Balard Laboratoire d'astrophysique de Marseille LAM (http://www.lam.oamp.fr) 1

Outline ESO and European Extremely Large Telescope E-ELT Wavefront Sensing and Adaptive Optics Specifications of the E-ELT WFS Results of the Technology Demonstrator, the TVP WFS Architecture and Design The massive parallel data problem Solution - balanced clock tree of 88 LVDS channels 2

Who is ESO? European Organization 15 member states: Germany, France, Italy, Switzerland, Netherlands, Belgium, Portugal, Denmark, Sweden, UK, Finland, Spain, and Czech Republic, Austria, Brazil Goal to provide astronomers with state-ofthe-art observational facilities Operates 3 sites in Chile Two optical observatories Paranal (2600m) La Silla (2400m) One submillimeter Chajnantor (5000m) 3

Paranal Very Large Telescope Chile VLT consists of four 8.2 m Telescopes Flagship facility of European ground-based astronomy. Most productive individual ground-based astronomical facility. 4

Our Next Challenge European Extremely Large Telescope (E-ELT) E-ELT - a 39.5 m diameter, fully Adaptive Optics telescope. The E-ELT will be the largest optical/near-infrared telescope in the world (its mirror diameter will be almost half the length of a football field). Construction planned to begin next year; design complete and accepted Cerro Armazones Cerro Paranal E-ELT The Mark World s Downing Largest Eye Toulouse on the Sky 00.00.2009 5

Wavefront sensors WFS adaptor Some instruments also contain WFS WFS adaptor detectors Deformable Mirror WFS arms (contain WFS detectors) Instruments 6

Adaptive Optics (AO) - removing the twinkle of the stars Deformable mirror compensates the distorted wavefront, achieving diffractionlimited resolution 4 1 Wavefronts from astronomical objects are distorted by the Earth s atmosphere, reducing the spatial resolution of large telescopes to that of a 10 cm telescope OFF 3 Control System computes commands for the deformable mirror(s) 2 Wavefront Sensor measures deviation of wavefront from a flat (undistorted) wave ON 7

Large Visible AO WFS Detector needed to sample the spot elongation Sodium layer T ~ 10km Sodium Laser Guide Stars Frame rate ~1 kframe/sec require bright guide stars With natural guide stars only 1% of the sky is accessible Sodium layer at 80-90 km altitude can be stimulated by Laser to produce artificial guide stars anywhere on the sky LLT Pupil plane Detector plane Distance from launch site H ~ 80km Predicted spot elongation pattern 8

¼ WFS image Natural Guide Star: 84x84 subapertures of 8x8 pixels NGSD Laser Guide Star: 84x84 subapertures of 20x20 pixels LGSD 9

ELT WFS DETECTOR Multi-phase plan to progressively retire risk Design Study 2007 2008 2009 2010 2011 2012 2013 2014 2015 2016 2017 Design Study Retire Pixel Risks 2018 Technology Validation Technology Demonstrators Natural Guide Star Detector NGSD Retire Architecture/ Process Risks Full size device meeting all specs. Development Laser Guide Star Detector LGSD Testing/ Acceptance Authorize Production Testing Engineering exercise Testing Authorize Production Production Phase 30 NGSD Science Devices NGSD Production LGSD Production 30 LGSD Science Devices 10

Specifications of the ELT WFS Physical characteristics Pixel array (includes dark reference pixels) Stitched design for two versions: Natural Guide Star Detector NGSD - 880x840 pixels then Laser Guide Star Detector LGSD - 1760x1760 pixels Technology Thinned backside illuminated CMOS 0.18µm Pixel pitch 24µm Pixel topology Array architecture Shutter 4T pinned photodiode pixel 84x84 time coherent sub arrays of 20x20 pixels - LGSD image area size of 4x4cm Rolling shutter in chunks of 20 rows synchronous detection within a sub-array. 11

Specifications of the ELT WFS Performance Responsivity Pixel full well Q FW 4000 e- 100 to 160 µv/electron Read noise including ADC < 3.0 e - RMS QE QE above 90% over the visible range BackSide Illumination (BSI) Image lag < 0.1 % MTF ideal and symmetric in X and Y by design 12

Block Diagram of Full Size Device LVDS Digital Interface Highly integrated Control Logic Y-addressing Control Logic Multiplexer/serializer 1000s single slope ADCs Analog processing 1680x1680 pixels Up to 84x84 Sub-apertures each 20x20 pixels Analog processing 1000s single slope ADCs Control Logic Y-addressing Control Logic All analog processing on-chip: correlated double sampling (CDS), programmable gain, ADCs Many rows processed in parallel to slow the read out per pixel and beat down the noise. trade study showed 20-40 to be the optimum number Fast digital serial interface to outside world power consumption similar to high speed drivers to transport the analog signal off chip better guarantee of achieving and maintaining low noise performance Multiplexer/serializer Natural Guide Star Detector (NGSD) scaled down demonstrator ~ ¼ of full size no stitching LVDS Digital Interface 13

Specifications of the ELT WFS Read out Number of rows read in parallel 40 (LGSD) or 20 (NGSD) rows in parallel Number of ADC s Number of parallel LVDS channels Serial LVDS channel bit rate Frame rate Power dissipation (spec) Actual LVDS driver dissipation per channel 40x1760 (LGSD) or 20x880 (NGSD) 22 (NGSD) or 88 (LGSD) 210 Mb/s baseline, up to 420 Mb/s (desired) 700 fps up to 1000 fps with degraded performance 2 to 3 Gpixel/s = 20 to 30 Gb/s over 88 parallel LVDS channels Maximum 5W, including the 88 LVDS drivers 6.0 mw @ at maximum data rate. 4.5 mw in sub-lvds 14

Demonstrated performance on Technology Validator - TVP In a nutshell All features of NGSD/LGSD 60x60 pixels, Same pixel and ADC driving 1200 (60x20) column ramp ADCs > 700 frames/sec To optimize the pixel: transfer gate and transistor geometries were varied in 12 pixel variants threshold voltage of nmos transistors was varied Implants to improve image lag were varied 15

Demonstrated performance on Technology Validator - TVP Key performances have been validated < 3.0e- RMS Full well 4000...8000 e- Conversion gains 100...160 µv/e- Image Lag < 0.1 % Best pixel and implants found to go forward to next phase, NGSD Not tested in TVP: Massive parallelism Array of LVDS IO Back Side Thinning & Back Side Illumination 16

Pixel designed for best centroiding performances, TCAD simulations Y / center X 17

LGSD/NGSD Stitching Plan 1 of 88 readout channel 18

One readout channel (of 88) 40 Columns of ADCs = 2 sub-arrays 20 rows of ADCs 110MHz Double Data Rate 19

How to drive 210 MHz over 4cm? Fast clock Reference case for speed and skew Skew>2ns Fast clock Fast clock R/2 C/2 Speed~ *4 Skew~ /4 20

Fast clock R/4 C/4(?) skew~ 1/16 Fast clock R/8(?) C/8(?) skew~ 1/64 21

Fast clock 1/4 3/4 Fast clock R/4 C/4 skew~ 1/16 Fast clock 1/4 3/4 Fast clock R/8(?) C/8(?) skew~ 1/64 22

How to implement this when stitching? Fast clock 1/4 3/4 Primary clock line Secondary clock line Fast clock 23

Summary Preparation work for our next challenge, the E-ELT, is well under way. ESO has formed a good partnership with e2v and Caeleste. Multi-phase, progressive risk reduction development plan should guarantee that devices are available on-time that meet specifications. Measured results from the TVP have clearly validated the CMOS imager approach. The best pixel design that meets the requirements has been found to go forward to the next phase, the NGSD. The next phase, the NGSD, starts in January 2012. 24

Thank You This work has been "partially funded by the OPTICON-JRA2 project of the European Commission FP7 programme, under Grant Agreement number 226604" 25