Color Chart for Thermally Grown SiO 2 Color Chart Table for thermally grown silicon dioxide films observed perpendicularly under daylight fluorescent lighting. Copyright 1964 by International Business Machines Corporation; reprinted from Volume V INTRODUCTION TO MICROELECTRONIC FABRICATION Film Thickness (µm) Color and Comments 0.05 Tan 0.07 Brown 0.10 Dark violet to red violet 0.12 Royal Blue 0.15 Light blue to metallic blue 0.17 Metallic to very light yellow green 0.20 Light gold to yellow; slightly metallic 0.22 Gold with slight yellow orange 0.25 Orange to melon 0.27 Red violet 0.30 Blue to violet blue 0.31 Blue 0.32 Blue to blue green 0.34 Light green 0.35 Green to yellow green 0.36 Yellow green 0.37 Green yellow 0.39 Yellow 0.41 Light orange 0.42 Carnation pink 0.44 Violet red 0.46 Red violet 0.47 Violet 0.48 Blue violet 0.49 Blue 0.50 Blue green 0.52 Green (broad) 0.54 Yellow green 0.56 Green yellow 0.57 Yellow to "yellowish" (not yellow but is in the position where yellow is to be expected; at times appears to be light creamy gray or metallic)
0.58 Light orange or yellow to pink borderline 0.60 Carnation pink 0.63 Violet red 0.68 Bluish" (not blue but borderline between violet and blue green; appears more like a mixture between violet red and blue green and looks grayish) 0.72 Blue green to green (quite broad) 0.77 "Yellowish" 0.80 Orange (rather broad for orange) 0.82 Salmon 0.85 Dull, light red violet 0.86 Violet 0.87 Blue violet 0.89 Blue 0.92 Blue green 0.95 Dull yellow green 0.97 Yellow to "yellowish" 0.99 Orange 1.00 Carnation pink 1.02 Violet red 1.05 Red violet 1.06 Violet 1.07 Blue violet 1.10 Green 1.11 Yellow green 1.12 Green 1.18 Violet 1.19 Red Violet 1.21 Violet red 1.24 Carnation pink to salmon 1.25 Orange 1.28 Yellowish" 1.32 Sky blue to green blue 1.40 Orange 1.45 Violet 1.46 Blue violet 1.50 Blue 1.54 Dull yellow green
ECE344: Fabweb 3/23/08 4:35 PM GT7 COLOR CHART FOR SiO2 Film Thickness(Å) Color of Film 500 tan 700 brown 1000 dark violet to red violet 1200 royal blue 1500 light blue to metallic blue 1700 metallic to very light yellow-green 2000 light gold or yellow - slightly metallic 2200 gold with slight yellow-orange 2500 orange to melon 2700 red-violet 3000 blue to violet-blue 3100 blue 3200 blue to blue-green 3400 light green 3500 green to yellow-green 3600 yellow-green 3700 green-yellow 3900 yellow 4100 light orange 4200 carnation pink 4400 violet-red 4600 red-violet 4700 violet 4800 blue-violet 4900 blue 5000 blue-green 5200 green 5400 yellow-green 5600 green-yellow 5700 yellow to yellowish (at times appears light gray or metallic) 5800 light orange or yellow to pink 6000 carnation pink http://fabweb.ece.uiuc.edu:2001/lab/index.htm?page=/lab/gt/gt7.asp Page 1 of 2
ECE344: Fabweb 3/23/08 4:35 PM 6300 violet-red 6800 bluish (appears between violet-red and blue-green - overall looks grayish 7200 blue-green to green 7700 yellowish 8000 orange 8200 salmon 8500 dull light red-violet 8600 violet 8700 blue-violet 8900 blue 9200 blue-green 9500 dull yellow-green 9700 yellow to yellowish 9900 orange Note the cyclical reappearance of the colors as thickness increases. For example, compare 1000,2700, 4600, and 6300Å. The equation which shows this cyclical pattern in SiO2 is: Where l = wavelength t = oxide thickness k = 0, 1, 2,... ECE344: Theory and Fabrication of Integrated Circuits Electrical and Computer Engineering University of Illinois - Urbana/Champaign http://fabweb.ece.uiuc.edu:2001/lab/index.htm?page=/lab/gt/gt7.asp Page 2 of 2
Si3N4 color chart for LPCVD grown silicon nitride, MEMS Foundry, sputte D, bipolar wafer foundry services, thin film vacuum deposition services 3/23/08 4:33 PM Si3N4 Color Chart for LPCVD grown silicon nitride MEMS Foundry Nitride Thickness COLOR COLOR CODE COLOR NAME [Å] 375 D2B48C Tan 562.5 A52A2A Brown 750 B32F79 Dark Violet to red violet 937.5 2E73F3 Royal blue 1125 ADD8E6 Light blue to metallic blue 1312.5 D9ECB3 Metallic to very light yellow-green 1500 F9F9C8 Light gold or yellow slightly metallic 1687.5 DAA520 Gold with slight yellow-orange 1875 F6853D Orange to Melon 2062.5 B32F79 Red-Violet 2250 5D3694 Blue to violet-blue 2325 0000FF Blue 2437.5 0083AE Blue to blue-green 2587.5 00FF00 Light green 2625 84D82E Green to yellow-green 2737.5 84C82E Yellow-green 2812.5 E2DE2B Green-yellow 2925 FFFF00 Yellow. 3090 FFB500 Light orange 3195 FA7FC1 Carnation pink 3322.5 E82362 Violet-red 3487.5 B32F79 Red-violet 3570 EE82EE Violet 3600 5D3694 Blue Violet 3697.5 0000FF Blue 3765 008080 Blue-green 3900 008846 Green (Broad) 4050 9ACD32 Yellow-green 4200 ADFF2F Green-yellow 4305 FFFFD2 Yellow to Yellowish (not yellow but is in the position where yellow is to be expected. At times is appears to be light creamy gray or metallic) 4357.5 FFDE93 Light orange or yellow to pink borderline 4500 FA7FC1 Carnation pink 4725 EE82EE Violet-red 5100 AE82FF Bluish (Not blue but borderline between violet and blue-green. It appears more like a Mixture between violet-red and blue-green and over-all looks grayish. 5400 00A080 Blue-green to green (quite broad) 5775 FFFF8C Yellowish 6000 FFA500 Orange (rather broad for orange) 6150 FA8072 Salmon 6375 B32F79 Dull, light red-violet 6490 EE82EE Violet 6525 5D3694 Blue-violet 6675 0000FF Blue 6900 0083AE Blue-green 7125 84C82E Dull yellow-green 7225 FFFF00 Yellow to Yellowish 7425 F3770C Orange 7500 FA7FC1 Carnation Pink 7650 E82362 Violet-red 7575 B32F79 Red-violet 7950 EE82EE Violet 8025 5D3694 Blue-violet 8250 008846 Green 8325 84C82E Yellow-green 8400 008846 Green 8850 EE82EE Violet 8925 B32F79 Red-violet 9075 E82362 Violet-red 9300 FA7FA1 Carnation Pink-Salmon 9375 FFA500 Orange 9600 FFFF00 Yellowish 9900 47B0E3 Sky blue to green-blue 10500 FFA500 Orange 10875 EE82EE Violet 10950 5D3694 Blue-violet 11550 84C82E Dull Yellow-green Home> Last updated: October 08, 2006 MEMS FOUNDRY 2968 Scott Blvd. Santa Clara, CA 95054-3322 USA Tel:(408)986-8026 Fax:(408)-850-1910 MEMS FOUNDRY 1990-2008 MEMS FOUNDRY All rights reserved. No material from this site may be used or reproduced without permission. http://www.mems-foundry.com/appnotes/si3n4_color_chart_lpcvd_silicon_nitride.htm Page 1 of 1
SiO2 color chart for thermally grown silicon dioxide, HTE Labs, sputter &D, bipolar wafer foundry services, thin film vacuum deposition services 3/23/08 4:31 PM SiO2 Color Chart for thermally grown silicon dioxide HTE Labs Oxide Thickness COLOR COLOR CODE Color and Comments [Å] 500 D2B48C Tan 750 A52A2A Brown 1000 B32F79 Dark Violet to red violet 1250 2E73F3 Royal blue 1500 ADD8E6 Light blue to metallic blue 1750 D9ECB3 Metallic to very light yellow-green 2000 F9F9C8 Light gold or yellow slightly metallic 2250 DAA520 Gold with slight yellow-orange 2500 F6853D Orange to Melon 2750 B32F79 Red-Violet 3000 5D3694 Blue to violet-blue 3100 0000FF Blue 3250 0083AE Blue to blue-green 3450 00FF00 Light green 3500 84D82E Green to yellow-green 3650 84C82E Yellow-green 3750 E2DE2B Green-yellow 3900 FFFF00 Yellow. 4120 FFB500 Light orange 4260 FA7FC1 Carnation pink 4430 E82362 Violet-red 4650 B32F79 Red-violet 4760 EE82EE Violet 4800 5D3694 Blue Violet 4930 0000FF Blue 5020 008080 Blue-green 5200 008846 Green (Broad) 5400 9ACD32 Yellow-green 5600 ADFF2F Green-yellow 5740 Yellow to Yellowish (not yellow but is in the position where yellow is to be FFFFD2 expected. At times is appears to be light creamy gray or metallic) 5850 FFDE93 Light orange or yellow to pink borderline 6000 FA7FC1 Carnation pink 6300 EE82EE Violet-red 6800 Bluish (Not blue but borderline between violet and blue-green. It appears more AE82FF like a Mixture between violet-red and blue-green and over-all looks grayish) 7200 00A080 Blue-green to green (quite broad) 7700 FFFF8C Yellowish 8000 FFA500 Orange (rather broad for orange) 8200 FA8072 Salmon 8500 B32F79 Dull, light red-violet 8600 EE82EE Violet 8700 5D3694 Blue-violet 8900 0000FF Blue 9200 0083AE Blue-green 9500 84C82E Dull yellow-green 9700 FFFF00 Yellow to Yellowish 9900 F3770C Orange 10000 FA7FC1 Carnation Pink 10200 E82362 Violet-red 10500 B32F79 Red-violet 10600 EE82EE Violet 10700 5D3694 Blue-violet 11000 008846 Green 11100 84C82E Yellow-green 11200 008846 Green 11800 EE82EE Violet 11900 B32F79 Red-violet 12100 E82362 Violet-red 12400 FA7FA1 Carnation Pink-Salmon 12500 FFA500 Orange 12800 FFFF00 Yellowish 13200 47B0E3 Sky blue to green-blue 14000 FFA500 Orange 14500 EE82EE Violet 14500 5D3694 Blue-violet 15000 0000FF Blue 15100 84C82E Dull Yellow-green Home> Last updated: May 26, 2007 HTE LABS 2968 Scott Blvd. Santa Clara, CA 95054-3322 USA Tel:(408)986-8026 Fax:(408)986-8027 HTE LABS 1990-2005 HTE LABS All rights reserved. No material from this site may be used or reproduced without permission. http://www.htelabs.com/appnotes/sio2_color_chart_thermal_silicon_dioxide.htm Page 1 of 1