Oriel Flood Exposure Sources

218 Oriel Flood Exposure Sources High intensity outputs CALIBRATION SOURCES Highly uniform, large collimated beams Efficient out of band rejection Timed exposures DEUTERIUM SOURCES ARC SOURCES INCANDESCENT SOURCES MONOCHROMATOR AND SOLAR SIMULATORS PHOTOLITHOGRAPHY 97436 500 W Oriel Flood Exposure Source, 6 x 6 inch Beam Size (9.5 inch high pedestal not shown). We offer 500 and 1000 W Flood Exposure Sources for the near UV (350-450 nm), mid UV (260-320 nm) and deep UV (220-260 nm). NUV is designed to expose most photoresists, MUV is used for polymer cross-linking and novel resists, and DUV for deep ultraviolet studies. Our illuminators irradiate samples from 2.13 x 2.13 inches up to 10 x 10 inches (54x54 to 254x254 mm). Three Spectral Ranges The spectral output of the illuminator is determined by three factors: The type of lamp The dichroic mirror The collimating lens NUV sources run an Hg lamp, use a BK 7 glass lens (which does not transmit below 350 nm), and have the appropriate dichroic mirrors. MUV and DUV sources run an HgXe lamp, use a UV grade fused silica lens (which transmits down to 200 nm), and have the appropriate dichroics. If you need the flexibility to work in all regions, select a DUV source and purchase additional dichroic mirrors for the respective regions. ABSORPTIVE HEAT SINK 45 DICHROIC MIRROR ELLIPSOIDAL REFLECTOR PROPRIETARY BEAM HOMOGENIZER 45 MIRROR COLLIMATING LENS What Makes Up an Oriel Flood Exposure System? Illuminator Housing Fig. 1 shows the beam path of the housing. An efficient ellipsoidal reflector, coated with AlSiO for the NUV or enhanced Rhodium for MUV and DUV systems, collects up to 70% of the arc lamp output. A 45 primary dichroic mirror spectrally reflects the light after passing through a proprietary design beam homogenizer. A shutter may be opened and closed manually with a switch on the housing side panel or via the 68955 Hand-Held Switch. For automated exposure control, we offer the 68951 Digital Exposure Controller or 68945 Digital Timer (see page 207). Upon request, the housing may also be wired to operate the shutter via a computer logic level. Each housing contains three interlock systems. Opening the housing door will trigger an electronic interlock switch to automatically interrupt power to the system. This prevents inadvertent operator exposure to the lamp. A thermal interlock shuts down the system if the temperature exceeds the level for safe operation. A third interlock shuts down the system if the lamp's cooling fan fails. See page 207 for dimensional diagrams of all the illuminator housings. Fig. 1 Optical configuration of 97436 500 W Oriel Flood Exposure Source 6 x 6 Beam Size. Phone: 1-800-222-6440 Fax: 1-949-253-1680

219 Lamp The NUV sources run Hg short arc lamps; these contain a precise amount of mercury and either xenon or argon, which act as a starter gas. Strong mercury lines through the ultraviolet and visible wavelengths dominate their output spectrum. The 365 nm line makes it ideal for use in the NUV. The MUV and DUV sources operate Hg(Xe) short arc lamps, which are similar to Hg lamps but contain more xenon gas than just the starter gas. The additional xenon enhances the short wave UV making it ideal for use below 350 nm. We supply ozone free Hg(Xe) lamps with the NUV and MUV sources, and UV enhanced models for the DUV models. Power Supply Our 69900 Series Power Supplies are ultra stable supplies that send a low level pulse to the ignitor. Once the arc is established, the supply controls the lamp directly. Their highly efficient switch circuitry operates the lamp under extremely tight current control. This results in low ripple and high line voltage regulation. Optional Accessories Digital Exposure Controller and Digital Timer The 68951 is a light intensity controller and digital timer in one. It interfaces with the power supply to provide a constant level of output to within ±1%. The Digital Timer portion of the 68951 (which is also available as a stand alone device under model 68945) controls the split-blade shutter and is recommended for accurate and consistent timed exposures. For complete details on both instruments, refer to page 207. Filters and Filter Mounting Hardware These sources produce a specific broadband spectral output. Optional narrowband filter assemblies enable you to isolate specific, narrowband outputs, such as 365 nm (i-line), and 436 nm (g-line). For 500 W Sources, purchase the 87032 Filter Mount; 1000 W sources include the filter mount. Power Meter and Probes SPECTRAL IRRADIANCE (µw cm nm ) at 50 cm Distance -2-1 Table 1 Probe Specifications 200 180 160 140 120 100 80 60 40 20 0.0 200 300 400 500 600 700 800 900 WAVELENGTH (nm) Fig. 2 Typical output of 6285 500 W Hg Lamp For These Flood Exposure Sources Spectral Region Peak Wavelength Sensitivity Sensor Area (mm) 84416 NUV 320-475 (nm) 400 nm 2,5 x 10-7 to 33 x 33 8,75 x 10-1 84415 NUV 326-401 (nm) 365 nm 5,2 x 10-7 to 33 x 33 1,8 x 10 +0 84414 MUV 185-320 (nm) 280 nm 8,3 x 10-8 to 60 x 43 8,3 x 10-4 84413 DUV 185-320 (nm) 240 nm 8,3 x 10-8 to 60 x 43 8,3 x 10-4 Safety Considerations These sources, particularly the DUV and MUV systems, emit dangerous levels of UV radiation. Always wear protective clothing, gloves and a faceshield when working around these sources (see page 246 for UV safety equipment). CALIBRATION SOURCES DEUTERIUM SOURCES ARC SOURCES INCANDESCENT SOURCES MONOCHROMATOR AND You may wish to monitor the intensity and uniformity of your output beam, especially if you have chosen not to purchase a Digital Exposure Controller. Also, during installation of a new lamp, you should align your lamp for optimal irradiance. In order to do this, you need a power meter and probe for your specific wavelength region, to determine when you have the lamp in the correct position.you may wish to monitor the intensity and uniformity of your output beam, especially if you have chosen not to purchase a Digital Exposure Controller. Also, during installation of a new lamp, you should align your lamp for optimal irradiance. In order to do this, you need a power meter and probe for your specific wavelength region, to determine when you have the lamp in the correct position. SOLAR SIMULATORS PHOTOLITHOGRAPHY Email: sales@newport.com Web: newport.com

220 Ordering Information CALIBRATION SOURCES DEUTERIUM SOURCES ARC SOURCES INCANDESCENT SOURCES Flood Exposure Sources Beam Size Lamp Type in. (mm) 500 W Hg 2.13 x 2.13 (54 x 54) 4.25 x 4.25 (108 x 108) 6.0 x 6.0 (152 x 152) 8.0 x 8.0 (203 x 203) 500 W Hg(Xe) 2.13 x 2.13 (54 x 54) 4.25 x 4.25 (108 x 108) 6.0 x 6.0 (152 x 152) 8.0 x 8.0 (203 x 203) 1000 W Hg(Xe) 2.13 x 2.13 (54 x 54) 4.25 x 4.25 (108 x 108) 6.0 x 6.0 (152 x 152) 8.0 x 8.0 (203 x 203) 10.0 x 10.0 (254 x 254) Note: These figures are nominal. They are based on integrated spectral radiometric measurements of similar sources. These do not necessarily correspond with measurements by various broadband instruments with varying spectral response. Beam Uniformity: ± 5% over the specified area. This is measured at a plane at the recommended working distance from the collimating lens. Uniformity will degrade somewhat at other distances. Replacement Lamps Collimation Angle Working Distance in. (mm) Spectral Region 220-260 nm 260-320 nm 350-450 nm Typical Output Typical Output Typical Output ± 4.6 2 (51) 266 mw cm -2 97434 ± 2.6 3 (76) 76 mw cm -2 97435 ± 1.8 4 (101) 38 mw cm -2 97436 ± 1.4 5.5 (140) 22 mw cm -2 97437 ± 4.6 2 (51) 28 mw cm -2 97530 121 mw cm -2 97531 ± 2.6 3 (76) 8 mw cm -2 97532 35 mw cm -2 97533 ± 1.8 4 (101) 4 mw cm -2 97534 17 mw cm -2 97535 ± 1.4 5.5 (140) 3 mw cm -2 97536 9 mw cm -2 97537 ± 6.6 2 (51) 59 mw cm -2 92511 224 mw cm -2 92512 305 mw cm -2 92510 ± 3.8 3 (76) 17 mw cm -2 92521 64 mw cm -2 92522 87 mw cm -2 92520 ± 2.5 4 (101) 8,4 mw cm -2 92531 34 mw cm -2 92532 43 mw cm -2 92530 ± 2.0 5.5 (140) 4,9 mw cm -2 92541 18 mw cm -2 92542 25 mw cm -2 92540 ± 1.6 7 (178) 3,5 mw cm -2 92551 12 mw cm -2 92552 17 mw cm -2 92550 Availability Guaranteed on select items @ newport.com Meter MONOCHROMATOR AND SOLAR SIMULATORS PHOTOLITHOGRAPHY Lamp Type 6285 500 W Hg 66142 500 W Hg(Xe) 6293 1000 W Hg(Xe) 6295NS 1000 W Hg(Xe), OF Calibrated Probes Spectral Range Peak Wavelength 320-475 nm 400 nm 84416 326-401 nm 365 nm 84415 185-320 nm 280 nm 84414 185-320 nm 240 nm 84413 Description 84410 Power Meter Accessories For 500 W sources, you will also need the 87032 Filter Mounting Assembly; 1000 W sources include a filter mount. Description 87032 Filter Mount Assembly (for 500 W Flood Exposure Sources) 87038 g-line (436 nm) 87066 i-line (365 nm) 82000 Flood Source 1 Year Extended Care Plan 68951 Digital Exposure Controller 68945 Digital Timer 68955 Remote Switch Phone: 1-800-222-6440 Fax: 1-949-253-1680

OPEN 221 Oriel Flood Exposure Sources Drawings Here we show dimensional drawings of the Flood Exposure Sources described on the previous page. 2.13X2.13 INCH SYSTEMS 4.25X4.25 INCH SYSTEMS 25.36 (644) 9.50 9.00 (229) OPEN OPEN 6.25 (159) 18.66 (474) 6X6 INCH SYSTEMS 21.93 (557) 8.70 (221) 11.91 (303) 7.73 (196) 7.76 1.25 MIN. 2.50 MAX. 27.41 (696) 9.50 9.00 (229) OPEN 8.41 (214) 29.56 (751) 21.95 (558) 12.0 SLOTS 8X8 INCH SYSTEMS 2.00 MIN. 9.37 (238) 4.00 MAX. 12.19 (310) CALIBRATION SOURCES DEUTERIUM SOURCES ARC SOURCES INCANDESCENT SOURCES MONOCHROMATOR AND 29.23 (742) 0.281 (7.13) DIA. 8.33 (212) 9.0 (229) 9.50 Fig. 3 Dimensional diagram of 500 W Flood Exposure Housings. 3.00 MIN. 11.23 5.50 (285) MAX. 33.22 (844) 6.36 (162) 8.75 (222) Email: sales@newport.com Web: newport.com 8.06 (205) 12.0 4.0 MIN. 12.0 7.0 MAX. SOLAR SIMULATORS PHOTOLITHOGRAPHY

OPEN 222 CALIBRATION SOURCES DEUTERIUM SOURCES G 12.31 (313) 10.6 (269) 0 F A 12.75 (324) 11.90 (302) B E ( ) C D 1000 W SYSTEMS BEAM SIZES 2X2 4X4 A 26.20 (665) 29.83 (758) B 7.25 (184) 10.88 (276) C 7.25 (184) 8.50 (216) D 6 (281) 8.12 (206) E MIN. MAX. 1.25 (32) 2.0 (51) 2.0 (51) 4.0 (102) F 8.87 (225) 10.99 G 20.5 (521) 19.0 (483) ARC SOURCES 6x6 INCH HOUSING INCANDESCENT SOURCES 10.63 (270) 35.46 (901) 16.50 (419) MONOCHROMATOR AND 19.0 (482) OPEN 11.50 (292) SOLAR SIMULATORS PHOTOLITHOGRAPHY 12.31 (313) Fig. 4 Dimensional diagram of 2 x 2 to 6 x 6 inch 1000 W Flood Exposure Housings. 15.37 (390) ** 12.00 12.75 (324) SLOTS 3.00 MIN. 5.50 MAX * 7.34 (186) Phone: 1-800-222-6440 Fax: 1-949-253-1680

OPEN OPEN 223 10.50 (267) 8x8 INCH HOUSING 38.34 (974) 19.13 (486) 20.38 (518) 32.19 (818) 10.50 (267) 15.50 (394) 12.00 16.26 (413) 12.00 ** 10x10 INCH HOUSING 47.33 (1202) 14.00 (356) * THE DISTANCE FROM THE VERTEX OF THE LENS TO THE. ** THE DISTANCE FROM THE CENTER OF THE BEAM PATH TO THE CENTER OF THE HOLE. 18.50 (470) 15.50 (394) 4.00 MIN. 7.00 MAX. * CALIBRATION SOURCES DEUTERIUM SOURCES ARC SOURCES INCANDESCENT SOURCES MONOCHROMATOR AND 16.0 (406) SLOTS 12.0 18.0 (457) 15.6 (396) 8.16 (207) ** 5.00 MIN. 8.50 MAX. * 9.5 18.0 (457) SOLAR SIMULATORS PHOTOLITHOGRAPHY Fig. 5 Dimensional diagram of 8 x 8 and 10 x 10 inch 1000 W Flood Exposure Housings. Email: sales@newport.com Web: newport.com See our website WEB for more info