External Cavity Diode Laser Tuned with Silicon MEMS

External Cavity Diode Laser Tuned with Silicon MEMS

MEMS-Tunable External Cavity Diode Laser Lenses Laser Output Diffraction Grating AR-coated FP Diode Silicon Mirror 3 mm Balanced MEMS Actuator

iolon Microactuators MEMS Technology Electrostatic comb drive actuator fabricated in single-crystal silicon by Deep Reactive Ion Etching (DRIE). High aspect ratio of combs provides high outof-plane stiffness and high actuator force. Lithographically fabricated Si mirror attached to flexural rotary suspensions is rotated by applying up to 140 V to the comb drive. Reliable and Robust Devices Single-crystal Si flexure, no touching or rubbing parts = no material fatigue > 80 billion device cycles with zero failures Fast, durable, low-cost

Integrated Laser, Wavelength Locker, & Shutter Grating External Cavity Laser Laser Lenses Diode Mounted on a common TE cooler in an 18 pin hermetic package Wavelength Locker PM Fiber Pigtail Silicon Mirror MEMS Actuator Isolator Beam Splitter Shutter/ VOA

Tunable Laser Servo Block Diagram SERVO CONTROL HARDWARE SHUTTER CONTROL WAVELENGTH CONTROL MEMS MIRROR PHASE CONTROL PHASE ADJUSTER POWER CONTROL LASER DIODE MEMS SHUTTER TUNED LASER OUTPUT OPTICAL MONITORS POWER MONITOR PHASE MONITOR WAVELENGTH MONITOR TEMP CONTROL WAVELENGTH LOCKER THERMISTOR T.E. COOLER

10 ms Wavelength Tuning and Locking Across 100 Channels at 25 GHz 190.975 THz 10 ms 188.500 THz Coarse Wavelength Monitor (Linear Filter) Fine Wavelength Monitor (Etalon) Power Monitor Cavity Length Adjust Time (ms) See Paper MF61

200 Channels at 25 GHz, L-band >20 mw Output Power Optical Power (dbm) 10 0-10 -20-30 -40 Optical Power (dbm) 10 0-10 -20-30 -40-50 188.75 188.8 188.85 188.9 188.95 189-50 186.5 187 187.5 188 188.5 189 189.5 190 190.5 191 191.5 1607.5 nm Frequency (THz) 1565.7 nm

Optical Performance: Power, SMSR, SSE 40 mw (+16 dbm) Fiber Output Power Optical Power (dbm) 20 10 0-10 -20-30 -40-50 55 db SMSR = 55 db +16 dbm Optical Power (dbm) -60 191.30 191.32 191.34 191.36 191.38 191.40 Frequency (THz) 20 10 0-10 -20-30 -40-50 SSE = -54 dbc/nm (0.1 nm RBW) +16 dbm -60 189 190 191 192 193 Frequency (THz)

Optical Performance: Linewidth Instantaneous Linewidth ~ 125 khz from phase noise spectrum Time-Averaged Linewidth ~ 2 MHz due to low-frequency actuator motion SBS Suppression Linewidth ~ 200MHz using 200 khz current dither Spectral Density (Hz 2 /Hz) 10 12 10 9 10 6 10 3 Frequency Deviation Spectrum Relative RF Power (db) -20-30 -40-50 -60-70 -20-30 -40-50 -60 3 µs 25 µs 0 5 10 15 20 10 4 10 5 10 6 10 7 Frequency (Hz) -80 0 20 40 60 80 100 Frequency (MHz)

System Performance, MEM-ECL vs. DFB Nearly identical BER and transmitted eye diagrams in a 500 km amplified link at 40 Gb/s Data courtesy of Lucent Technologies Similar DFB-like eye diagrams and BER seen at: 2.5 Gb/s 10 Gb/s 40 Gb/s Link lengths up to 3000 km

Environmental Stability and Reliability Wavelength Tuning Temperature Cycling Accelerated Aging 13.2 Power (dbm) 13.1 13.0 12.9 12.8 1.0 Sequential locking to 100 channels Random locking to 100 channels Locked to single channel at 70 C Power Variation < ± 0.1 db Frequency Deviation (GHz) 0.5 0.0-0.5 Frequency Error < ± 0.5 GHz -1.0 187 188 189 190 191 Laser Frequency (THz) -10 0 10 2030 40 50 60 70 0 1000 2000 3000 Case Temperature (C) Time (hours)

Balanced MEMS Actuator Mechanically balanced actuator is resistant to shock and vibration. Pivoting lever is balance mechanism; similar to a see-saw. Force Force Mass 1 Mass 2 Mirror Motor Servo system actively controls laser to ITU wavelength to further reduce shock and vibration sensitivity. Lasers exhibit < 2.5 GHz wavelength error with a 35 g half-sine shock. Card slams and fan tray insertions produce up to 20 g shock to an operating line card. GR468 does not specify operating shock.

Shock and Vibration Immunity Acceleration (g) 20 10 0-10 20-30 Typical Card Slam Card slam produces up to 20 g shock to an operating line card Acceleration (g) Frequency Error (GHz) 0-10 -20-30 -40 2 1 0-1 -2 35 g Shock Frequency error < 1 GHz with 35 g half-sine shock Frequency Error < 1 GHz 0 1 2 3 4 5 6 7 8 9 10 Time (ms)

Laser Module Power Dissipation Power Dissipation (Watts) 5 4 3 2 1 0-10 0 10 20 30 40 50 60 70 Case Temperature (C) Measured Power Dissipation for 20 mw output at Vcc = 3.3V is: 1.75 W at 25 C 4.4 W at 70 C Power dissipation is nearly constant over 5 THz tuning range (no channel-to-channel variation)

iolon Tunable Laser Summary C-band or L-band Tuning Range up to 44 nm 25 GHz or 50 GHz Channels Integrated Wavelength Locker Tuning Time < 15 ms Power Dissipation < 4.4 W at 70 C Butterfly and control electronics with 40-pin serial connector in 70 50 13mm module. Compliant with OIF (Optical Internetworking Forum) and Tunable Laser MSA (Multi-Source Agreement) between iolon, Bookham, GTRAN, Intel, QDI, Santur, and Vitesse. Telcordia Qualified Output Power up to 40 mw Power Variation < ± 0.25 db Frequency Error < ± 1 GHz SMSR > 50 db Linewidth < 200 khz Dither for SBS Suppression RIN < -145 db/hz to 22 GHz Dark Tuning

2.5 Gb/s Directly Modulated Tunable Laser Transmitter Direct modulation at 2.5 Gb/s using a low-capacitance laser diode in the ECL provides a cost-effective widely tunable transmitter for metro applications. < 2 db transmission penalty over 250 km at 2.5 Gb/s Dynamic chirp is 5X lower than standard DFB due to the free-space cavity length of the ECL. Laser chip length is only 20% of total cavity length.

10G Long Reach LiNbO 3 Transponder 300 pin MSA Compliant Tunable laser supplied by iolon 9.953 Gb/s Serial Transmit Data Driver Modulator Bias- Control Circuit Tunable Laser CMU Mux 16:1 µ-controller FIFO Jitter Filter Rate Adjust 16 X 6YY* Mb/s TxREFCLK 155.52 or 622.08MHz RxREFCLK 9.953 Gb/s Serial Receive Data TIA PA CDR DeMux 1:16 16 X 6YY* Mb/s Full band wavelength (40 nm) tunability C and L Bands

Tunable Lasers for Optical Networks Tunable lasers are network-ready Match performance of fixed-wavelength DFBs Meet reliability criteria for 99.999% network deployment Supplied by multiple vendors under multi-source agreements Replacement of fixed-wavelength lasers with tunables is economically justified today Costs of tunable transmitters are increasingly competitive with costs of fixed-wavelength transmitters In legacy fixed-wavelength networks, for the cost savings of inventory reduction and sparing. In new wavelength-agile optical networks that provide for bandwidth re-provisioning, streamlining of traffic patterns, and new services, creating lower operating costs and higher revenues.

Thank You For more information Demos: iolon # 4312 Optium # 6114 OIF # 7620 Fiberbyte # 7356 Luna # 4212 Papers: MF61 Tunable Laser Frequency and Mode Control TuN2 - Tunable Filter