Josephson junction and SQUID based technology

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VTT TECHNICAL RESEARCH CENTRE OF FINLAND LTD Josephson junction and SQUID based technology Cryocourse 2016: Aalto School and Workshop in Cryogenics and Quantum Engineering Juha Hassel 2.10.2016

Outline 1. Josephson junctions and SQUIDs; physics and technology A) Physical models for systems of classical Josephson junctions. B) Junction fabrication technology. 2. Appication examples A) Josephson voltage standards. B) SQUIDs in (bio)magnetometry. C) SQUIDs as low(esh) frequency amplifiers D) SQUIDs as microwave amplifiers E) Rapid single flux quantum logic. 2

1A Physical models for systems of classical Josephson junctions (JJs). JJ: weak link (tunnel barrier) between two superconductors. Fabrication by micro and nanolithographic processes Superconductor 2 Superconductor 1 M. Kiviranta, et al, IEEE Trans. Appl Supercond, in print 3

Josephson junction dynamics [1]: Dynamical quantities phase difference f = d 1 - d 2 and charge Q The system is described by the total energy: I(t) Superconductor 1 +Q d 1 - Q C I c d 2 Superconductor 2 [1] Literature, see e.g. P. Orlando, K. A. Delin, Foundations of Applied Superconductivity T. van Duzer, Principles of Superconducting Devices and Circuits 4

Kinetic energy Potential energy charge ~ momentum voltage ~ speed phase diff. ~ position Capacitance~ mass Current ~ potential tilting 5

Solution of classical Hamiltonian equations of motion => Josephson relations I 2 I 1 I 2 I 1 V=Q/C 6

U ( ) Classical limit (today s subject) The number of energy states corresponding to a potential well minimum large (DE << E J ) Thermal energy corresponding to energy state separation large (kt>>de) Quantum limit (beyond today s scope) Opposite limit: DE >~ E J, kt<<de Single charge dynamics, quantum computing applications Exercise : a) Show that DE << E J implies E J >> E c with E c = e 2 /2C single charge energy. E J DE 7

Building models for the systems of classical Josephson junctions: Write differential forms of Kirchoffs equations supplemented by Josephson relations. Add resistive damping (RCSJ model * ): Josephson relations: I d = C(dV/dt) I J = I c sinf R V= ( 0 /2p)(df/dt) I R = V/R * Resistively and capacitively shunted junction 8

Introducing dimensionless unit system: Avoid redundant degrees of freedom. Basic equation: C I c I(t) R b c > 1 hysteresis 9

SQUID: superconducting loops cut by JJ:s Example: DC SQUID (two identical junctions) Analysis similar to the single JJ though "new physics": relationship between the magnetic flux quantization Consequence of superconductor electrodynamics and requirement of single valuedness of wavefunction phase 10

Dynamical equations of DC SQUID. J. Low Temp. Phys. 76, 287, 1989. 0 External flux 11

1B Junction fabrication technology Industrially, the most established technology is so called Niobium Trilayer technology Nb/Al-AlOx/Nb junction stack grown in-situ. Nb critical temperature Tc~9 K A few nm of Al (Tc ~1 K) superconducting by proximity e.g. at T = 4.2 K In-situ oxcidation of aluminium with controlled exposure to tune the critical current 12

Multilayer structures for flexible designs Superconducting layers for jump wiring, flux coupling, Normal conducting resistive layers for shunts, terminations Insulating layers for capacior dielectrics and insulation Optical lithography and materialselective etching methods for patterning Reactive ion etching in reactive plasma. Wet etching with selected chemicals. Planarisation techniques for enabling smooth surfaces in layer crossings. 13

Resistance (Ohm) Current [ A] 150 mm wafer automated processes. A variety of characterisation methods On-wafer automated probe stations Microscopy (optics, SEM, AFM ). 10 6 100 nm 200 nm 10 4 10 2 10-7 10-6 10-5 JJ dimension (m) Room temperature probed resistances of Josephson junctions showing good yield down to 200 nm. 8 6 4 2 0-2 -4-6 -8-4 -3-2 -1 0 1 2 3 4 Voltage [mv] 4 Kelvin IV of a Josephson junction. Automated (25 wafers) cassette to cassette Nb, NbN and tunnel junction sputter system. 14

2A Josephson voltage standards Under RF bias i(t) = i 0 + i 1 sin(wt) In a desirable mode, during one pump period the phase propagates over integer n minima of washboard potential Average voltage accross the junction then V = n 0 f Criterion for clean phase locking is that the tunnel element is effectively biased by RF voltage Zi 1 Sufficiently small shunt impedance Z I c i(t) = i 0 + i 1 sin(wt) Z U( ) 2 0-2 -4-6 -8-10 -12 0 I/I c = 0 I/I c = 0.5 I/I c = 1.1 5 10 15 20 15

V = n 0 f depends only on constants of nature and the frequency f Frequency f can be accurately produced by an atomic clock Operates as an exact voltage reference Today the practical realisation of the unit of Voltage in all national standards laboratories Practical realisation Voltage produced by a single junction small (typical frequencies 10-80 GHz, 0 = 2.07 Vs voltage from tens to hundreds of microvolts In practice voltage levels from 1 V to 10 V needed arrays of 2000-20000 JJ:s needed 16

Example: A voltage standard designed and fabricated by VTT 2x3577 JJ:s, driven at about 70 GHz Produces a maximum voltage of about 1.7 V JJ 20 mm 17

Physical structure of the chip 1. Top view (micro photograph) 2. Cross section 70 GHz propagation 18

Parts of the measurement setup: Cryoprobe with E-band waveguide (in pieces) Tubes for DC wiring Waveguide Chip carrier Magnetic shield 19

3577 junctions irradiated with 75 GHz J. Hassel, et al., IEEE Trans. Appl. Supercond. 17, 930, 2007. 20

I [ma] Types of Josephson voltage arrays "Conventional" arrays based on unshunted Superconductor - Insulator - Superconductor junctions Extremely large b c slow, hysteretic IV curves Used as primary DC references Not useful in AC metrology I 0.0 (a) 0 f 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 U [V] "Programmable" arrays (e.g. those presented earlier) Dissipation added to junctions Either by external shunts (as in previous slides) Or by making a intrinsically dissipative tunnel barrier e.g. Superconductor - Normal conductor - Superconductor junctions Small b c Fast, nonhysteretic 1.2 1.0 0.8 0.6 0.4 0.2 0.0-0.2-0.2 0.0 0.2 0.4 0.6 U [V] 0 f 0.8 1.0 1.2 21

AC generation by programmable arrays Method developed by VTT and MIKES: switch JVS between steps +n and -n extract the fundamental Fourier component of the square wave compare to the source being calibrated J. Nissilä, et al., IEEE Trans. Instrum. Meas. 54, 636, 2005. 22

2B SQUIDs in (bio)magnetometry Autonomous SQUID as magnetometer? Stability/noise optimization: Nonhysteretic JJ behavior b c <~ 1 Single-valued flux behavior b L ~ 1 Sensitivity fundamentally limited by the noise from the shunt resistors. 23

Noise from resistive source Energy resolution: minimum detectable magnetic field energy within a SQUID loop. Thermally-limited energy resolution (from simulations) =12k B T Flux noise L n = 2L SQ SQ C Quantum-limited ħ j Typical parameters limit detection area Junction technology => I c ~ 50 µa, C ~ 2 pf b L ~ 1 => L SQ ~ 7 Ph L SQ ~ µ 0 d => SQUID loop dimension ~ 5 µm Flux noise n ~ 10-7 0 /Hz 1/2 Magnetic field noise S 1/2 B = n /d 2 ~ 8 pt/hz 1/2 Not good enough 24

Typical magnetometer configuration Magnetic field from e.g. brain converted to a flux on a SQUID loop For optimal field-to-flux conversion a matching circuit used Flux transformer Signal coil SQUID loop (d~2 um) Large area (d ~ 2 cm) pickup coil L p L in For a SQUID with given energy resolution the magnetic field resolution improves: 25

Ways of doing the inductance transformation Washer Intermediate transformer Multiloop Several loops in parallel to drop the inductance as seen by the junctions Array SQUID Multiloop Washer Washer + intermediate transformer SQUID array 26

Considerations about magnetometer SQUID design Input transformers tend to generate parasitic resonances in the circuitry: Autonomous SQUID model no longer strictly valid. Handling (damping) the resonances needed in practical SQUID designs. Autonomous SQUID Ideal mpedance environment Z = ωl 27

Considerations about magnetometer SQUID design Input transformers tend to generate parasitic resonances in the circuitry: Autonomous SQUID model no longer strictly valid. Handling (damping) the resonances needed in practical SQUID designs. First order problem: input circuit resonates. not anymore just ωl Z = ωl 28

Considerations about magnetometer SQUID design Input transformers tend to generate parasitic resonances in the circuitry: Autonomous SQUID model no longer strictly valid. Handling (damping) the resonances needed in practical SQUID designs. Real-life situation: input resonates like hell! nothing even close to Z = ωl Model for Z (between A and ground), 29

Considerations about magnetometer SQUID design Input transformers tend to generate parasitic resonances in the circuitry: Autonomous SQUID model no longer strictly valid. Handling (damping) the resonances needed in practical SQUID designs. Real-life situation: input resonates like hell! J. Luomahaara, Masters Thesis, Aalto Univ. 2009. nothing even close to Z = ωl Model for Z (between A and ground), Simulated Z. 30

Considerations about magnetometer SQUID design Input transformers tend to generate parasitic resonances in the circuitry: Autonomous SQUID model no longer strictly valid. Handling (damping) the resonances needed in practical SQUID designs. Try to damp the resonant structure! OK, at least something like Z = ωl again Model for Z (between A and ground), Simulated Z. 31

Electronics for reading out the SQUIDs? Problem 1: The linearity of the SQUID is limited Solution: Flux-locked loop to linearize the response Problem 2: sensitivity of commercial room temperature amplifiers is not sufficient for reading out the Solutions: local feedback based readout methods (see below). 32

Magnetoencephalography Direct recording of magnetic signature of neuronal activity of brain Applications: Presurgical mapping (epilepsy, brain tumours). Fundamental studies of cognition. A few hundred sensor channels. Sensitivity requirement ~ft/hz 1/2 Noise/signal levels in MEG system [Courtesy of prof. Lauri Parkkonen, Aalto Univ]. 33

Sensor data from MEG systems Magnetic field after visual stimulus at t = 0 for a human subject 34

MRI: Detecting Larmor preseccion Ultra-low-field magnetic resonance imaging (ULF-MRI) Conventional MRI at 1.5 3 T fields (~100 MHz Larmor frequency) SQUID-based systems demonstrated in a few locations European MEGMRI collaboration demonstrated integration of commercial MEG system and ULF-MRI modality. P. Vesanen et al., Magn. Reson. Med. 69, 1795, 2013. 35

2C SQUIDs as low(esh) frequency amplifiers Low/intermediate frequency applications General about amplifiers: The performance of amplifier is chacaterised by: A) Its optimal noise temperature B) Its noise matching resistance And the frequency dependencies of these. A measure of goodness of an amplifier is its impedance dependent noise temperature. The last approximation valid for SQUIDs at low f (very low optimum noise matching resistance R opt ) SQUID is intrinsically good for reading out very low impedance sources 36

Example: superconducting transition edge sensors (TESs) Superconducting films biased to transition => R d ~ 1 mw Applications in astronomical imaging (X-ray, THz). Advanced Telescope for High- Energy Astrophysics (ATHENA) X-ray Integral Field Unit (X-IFU) Mikko Kiviranta, Advanced seminar, Heidelberg 12.6.2015 37

For larger impedeance applications: Intrinsic current sensitivity (and thus the noise temperature) can (in principle indefinitely) improved by adding turns to input transofrmer. Optimal for reading out low-impedance sources. Large impedance sources require large input transformers (in analogy to magnetometer inductance matching) 1284:2 transformer configuration aimed for metrology applications. This one optimises to about ~ 100 kw at 1 K operating temperature, but needs ~100 m of thin film line! J. Luomahaara, et al., Supercond. Sci. Technol. 25, 035006, 2012. Input referred current noise measured with the transformer/squid entity. J. Luomahaara, et al., IEEE Trans. Appl. Supercond 25, 1601705, 2013. 38

2D SQUIDs as microwave amplifiers Josephson junction is a current or flux tunable inductor => Parametric amplification (believe Sorin covered a lot of this on Friday) P. Lähteenmäki, et al., J. Low Temp. Phys. 175, 868, 2014. 39

Rd > 0 Intrinsic dynamic resistance R d of JJ negative Leads to hysteretic characteristics Overdamped JJ -> positive dynamic impedance, stable system. Remove damping in LC centered band: Instability ( negative Q osillations). Couple to external circuitry as below Stability restored. In signal band stability restoration leads to the gain in the LC centered band! Rd < 0 2.9 GHz Noise and gain calibration: Experimental T n = (220 ± 70) mk = (1.6 ± 0.5)hf. V. Vesterinen, et al., Sci. Rep. 2, 276, 2012. 40

2E Rapid single flux quantum logic Previous applications rely on SQUID dynamics at finite voltage dynamics Flux quanta flowing continuously RSFQ technology is based on single 2p phase rotations to produce logic operations Aim here understanding of basic Josephson dynamics used in RSFQ RSFQ microprosessor with ~22 000 JJs [M. Tanka, et. al, Supercond. Sci. Technol. 20, 2007]. 41

Introduction of phase rotation dynamics: a simple DC SQUID ring biased to a current below I c Force left junction switch Case 1: b L < 1 Second junction switches too No flux stored in the ring Remains in "False" state Demo APLAC 7.90 User: VTT Microsensing Mar 13 2006 300.00u 2.00 Volt Flux 220.00u 1.00 140.00u 60.00u -20.00u 0.000 125.000p 250.000p 375.000p -2.00 500.000p t/s V(N1) V(N2) Flux N1 0.00-1.00 N2 Case 2: b L > 1 Second junction does not switch Flux quantum stored in the ring Switches to "True" state Demo APLAC 7.90 User: VTT Microsensing Mar 13 2006 700.00u 2.00 Volt Flux 522.00u 1.00 344.00u 0.00 166.00u -1.00-12.00u -2.00 0.000 125.000p 250.000p 375.000p 500.000p t/s V(N1) V(N2) Flux 42

RSFQ technology uses this type of JJ/SQUID switching dynamics to construct logical operations A general RSFQ cell consists of a clock input, signal inputs and outputs If a flux quantum approaches to signal input between clock pulses it means, that the input is set to logical "True", if not it is set to "False" The ending clock pulse sends or does not send an output pulse depending on the result of the logical function the cell realises T. van Duzer, Principles of Superconducting Devices and Circuits. 43

Basic functionalities of RSFQ (1): Propagation Pulses are propagated in Josephson transmission lines with soliton dynamics: I b L sfq JTL APLAC 7.90 User: VTT Microsensing Oct 05 2005 120.00u 86.25u 52.50u 18.75u -15.00u 0.000 375.000p 750.000p 1.125n 1.500n t/s x1 x1 x1 x1 x1 x1 x1 x1 44

Basic functionalities of RSFQ (2): Storage The flux quanta are temporarily stored as persistent current in certain SQUID loops Selection Switching conditional to whether a given SQUID loop has flux quantum stored (persistent current) or not. J. Hassel, et. al., New J. Phys. 9, 158, 2007. 45

An example cell: OR gate T. van Duzer, Principles of Superconducting Devices and Circuits. 46

Summary Josephson dynamics simple but very versatile Phase locked Josephson oscillation => voltage metrology Flux/field controlled phase propagation Magnetometry, current amplifier Tunable/nonlinear inductance, negative resistance Parametric amplification Controlled single phase rotations Ultrafast logic 47