Nmark AGV-HPO Galvanometer Nmark AGV-HPO High Accuracy, Open Frame, Thermally Stable Galvo Scanner Highest accuracy scanner available attains singledigit, micron-level accuracy over the field of view Optical feedback technology significantly improves thermal stability Industry-best resolution of >24 bits when used with Aerotech s Nmark GCL controller AGV-HPO galvo scanner offers micron-level accuracy over the field of view. 1 Wide range of apertures and focal lengths, and many choices of mirror surface treatments for a variety of laser wavelengths Open-frame design reduces cost and allows for more flexible laser entry Right side and left side aperture options for side-by-side parallel processing The Ultimate in Accuracy and Stability The highly repeatable and thermally stable feedback sensors used on the AGV-HPO scanner systems can be calibrated down to single-digit, micron-level accuracy over the field of view (see figure below). With the extremely low thermal gain drift performance of the position transducers, complex, high-density laser machining applications that take long periods of time to complete will maintain consistent micron-level feature placement accuracy over the lifetime of the process. Likewise, high throughput applications will maintain consistent part-to-part quality without having to re-calibrate between parts. Integration Flexibility Most scanner control interfaces are on the same surface as the laser input aperture which can create interference problems if the Nmark AGV-HPO provides industry-best micron-level 2D accuracy over the entire field of view. laser beam path approaches the scanner from the top. The AGV- HPO control connections consist of two mm cables terminated in 25-pin D-style connectors. These cables can be oriented in any direction and terminated on the machine to ensure there is no interference with beam delivery. The AGV-HPO is also available with right-side and left-side input apertures for mirror image machine builds or side-by-side scanner mounting with a single laser beam split to source both scanners. Real-Time Process Visibility The location of the AGV mirrors can be captured and analyzed in real time. With direct access to the positions of the scanner, the user no longer has to program delay parameters to compensate for lag and tracking errors in the servo system. The process can be optimized prior to marking the part, saving time and reducing material waste. The state of the laser can also be controlled based on in-position and velocity criteria, further reducing programming complexity. Advanced Programming Features The AGV utilizes all of Aerotech s advanced motion and PSO (Position Synchronized Output) capabilities that have been developed for traditional servo-based laser processing applications. Contouring functions such as Acceleration Limiting can be used to automatically reduce speeds in tight corners or small radii to minimize overshoot. The laser can be triggered based on the position feedback of the mirrors with PSO to ensure consistent spot overlap as the scanner changes speed. Aerotech s Infinite Field of View (IFOV) function seamlessly combines servo and scanner motion to extend the marking capability of the scanner across the entire travel of the servo stages, eliminating stitching errors that can occur in a more traditional move-exposerepeat process. Design Choices The AGV family is available with 10, 14,, and 30 mm input apertures and can be equipped with an F-Theta or telecentric lens directly from Aerotech. Users can also acquire the focusing optic directly from a trusted supplier with Aerotech supplying a spacer ring to ensure that back reflections through the optic do not damage the scanner mirrors. Mirror coatings for a wide range of UV, visible, IR and CO2 wavelengths are supported.
Nmark AGV-HPO SPECIFICATIONS Mechanical Specifications AGV 10HPO AGV 14HPO AGV HPO AGV 30HPO Optical Performance Beam Aperture 10 mm 14 mm mm 30 mm Maximum Scan Angle ± Beam Displacement 13.0 mm 18.0 mm 25.1 mm 35.7 mm Feedback Resolution 0.007 µrad (26 bit) Dither (Min. Incremental Motion) 0.2 µrad rms Accuracy 50 µrad pk pk Repeatability (2) 0.4 µrad rms Gain Error 0.05 mrad Non Linearity 0.005% Dynamic Performance Tracking Error 0 µsec Galvanometer Nmark AGV-HPO Peak Acceleration (3,4) 288,000 m/s 2 224,000 m/s 2 80,000 m/s 2 56,000 m/s 2 Continuous Acceleration (3,5) 75,0 m/s 2 56,000 m/s 2,800 m/s 2 19,0 m/s 2 Positioning Speed (3) 75 m/s 75 m/s 50 m/s m/s Marking Speed (3, 6, 7) 5 m/s 5 m/s 5 m/s 5 m/s Jump & Settle Time, 1 mm Move (3,8) 270 µsec 270 µsec 450 µsec 700 µsec Stability Offset 10 µrad/12 hrs Long Term Drift (2) 15 µrad/24 hrs Gain 10 ppm/24 hrs Offset 10 µrad/ C Thermal Drift Gain 1 ppm/ C Mechanical Specifications Weight 2.3 kg 2.4 kg 2.7 kg 3.1 kg Material Aluminum (Black Anodize and Blue Paint) MTBF (Mean Time Between Failure),000 Hours Notes: 1. All angles are optical unless otherwise specified. 2. After initial 3 hour warm up, ambient temperature variation <±0.5 C. 3. Typical performance with f = 1 mm F Theta objective. 4. Based on maximum rated current of the motor. 5. Based on rated rms current of the motor with WC water cooling option; maximum continuous acceleration is 70% of this value without water cooling. 6. Achievable with <1% velocity error over continuous velocity portion of move. 7. Marking speed is dependent on allowable tracking error. 8. Settled to within 1% of move distance. 9. All specifications are per axis unless otherwise noted. Electrical Specifications AGV 10HPO AGV 14HPO AGV HPO AGV 30HPO Drive System Feedback Maximum Bus Voltage Limit Switches Home Switch Brushless Direct Drive Galvano Motor Noncontact Rotary Encoder ±40 VDC Software Limits Only At Center 2
Nmark AGV-HPO Galvanometer AGV-10HPO-LSE 126 15 49.2 28.5 63.5 7 11 FOR 10 22 105 117 32.6 56 76 95 150 4.8 71 SQR 50 13 50 (-1064-100) OPTICS CONFIGURATION 14.5 28.5 28 3 www.aerotech.com
AGV-10HPO-RSE 63.5 15 28.5 49.2 126 Galvanometer Nmark AGV-HPO 7 4.8 56.6 76 95 150 32 105 117 22 11 FOR 10 71 SQR 50 13 50 (-1064-100) OPTICS CONFIGURATION 28.5 14.5 28 www.aerotech.com 4
Nmark AGV-HPO Galvanometer AGV-14HPO-LSE 125 48.7 27 15 63.5 7 15 FOR 14 22 110 123 32 16.9 76 95 154 5.5 71 SQR 18 55 50 (-1064-170) OPTICS CONFIGURATION 13 27 28 5 www.aerotech.com
AGV-14HPO-RSE 63.5 15 27 48.7 125 Galvanometer Nmark AGV-HPO 5.5 76 16.9 7 32 110 22 15 FOR 14 95 123 154 71 SQR 55 18 50 (-1064-170) OPTICS CONFIGURATION 27 13 28 www.aerotech.com 6
Nmark AGV-HPO Galvanometer AGV-HPO-LSE 126 48.8 25 21 65 21 FOR 33 1 131 49 14 11 75.5 115 87 169 5.5 70 26.3 50.6 25.1 90 65 50.6 26.3 (-1064-255) OPTICS CONFIGURATION 7.5 80 25 35 7 www.aerotech.com
AGV-HPO-RSE 65 21 48.8 126 Galvanometer Nmark AGV-HPO 25 5.5 75.5 87 11 14 49 1 33 21 FOR 169 115 131 70 90 26.3 50.6 50.6 65 25.1 26.3 (-1064-255) OPTICS CONFIGURATION 25 80 7.5 35 www.aerotech.com 8
Nmark AGV-HPO Galvanometer AGV-30HPO-LSE 143 54.3 30 21 75 31 FOR 30 33 49 145 155 14 11 93 102 130 191 5.5 95 SQR. 90 (8) PLACES 33.5 35.7 58 117.5 58 80 65 33.5 (-1064-255) OPTICS CONFIGURATION 12.5 90 30 35 9 www.aerotech.com
AGV-30HPO-RSE 75 21 30 54.3 143 Galvanometer Nmark AGV-HPO 14 5.5 191 93 102 130 11 49 33 145 155 31 FOR 30 95 SQR. (8) PLACES 33.5 90 58 35.7 117.5 80 58 33.5 65 (-1064-255) OPTICS CONFIGURATION 30 90 12.5 35 www.aerotech.com 10
Nmark AGV-HPO ORDERING INFORMATION Ordering Example Nmark AGV-HPO Galvanometer AGV 14HPO RSE 1064 100 Series Beam Entry Orientation Optic Configuration AGV 10HPO AGV 14HPO AGV HPO AGV 30HPO RSE LSE CO2 DS 1552 1064 1030 532 515 355 343 1064/532/355 1030/515/343 355 53T 343 53T 1064 100 532 100 CO2 100T 1552 100T 1064 100T 1030 100T 532 100T 515 100T 355 100T CO2 1 1064 1 532 1 355 1 1064 163 1552 163T 1064 163T 1030 163T 532 163T 515 163T 355 163T 343 163T 1064 170 532 170 1064 0 CO2 255 1064 255 532 255 355 255 343 255 1064 500 AGV-HPO Series Galvanometer Scanner AGV-10HPO 2-axis open-frame galvanometer scanner with 10 mm diameter beam aperture and integral high-precision feedback AGV-14HPO 2-axis open-frame galvanometer scanner with 14 mm diameter beam aperture and integral high-precision feedback AGV-HPO 2-axis open frame galvanometer scanner with mm diameter beam aperture and integral high-precision feedback AGV-30HPO 2-axis open frame galvanometer scanner with 30 mm diameter beam aperture and integral high-precision feedback Beam Entry Orientation -RSE Right-side laser beam entry (standard) -LSE Left-side laser beam entry 11 www.aerotech.com
Nmark AGV-HPO ORDERING INFORMATION Optics Configuration (Partial listing. Please consult Aerotech for other supported wavelengths and lens combinations.) No Lens Options, F Theta Not Included Option AGV 10HPO AGV 14HPO AGV HPO AGV 30HPO CO2 Mirrors for 10.6 µm wavelength; no focal lens DS Durable silver coated mirrors; 450 nm 10.6 µm wavelength; limited operating power; no focal lens 1552 Mirrors for 1552 nm wavelength; no focal lens 1064 Mirrors for 1064 nm wavelength; no focal lens 1030 Mirrors for 1030 nm wavelength; no focal lens 532 Mirrors for 532 nm wavelength; no focal lens 515 Mirrors for 515 nm wavelength; no focal lens 355 Mirrors for 355 nm wavelength; no focal lens 343 Mirrors for 343 nm wavelength; no focal lens 1064/532/355 Mirrors for 1064, 532, and 355 nm wavelengths; no focal lens 1030/515/343 Mirrors for 1030, 515, and 343 nm wavelengths; no focal lens Notes: 1. Custom coatings available. Contact factory for details. 2. DS option only available with AGV 10HPO RSE. 3. 1064 option not available with AGV 30HPO LSE. 4. 343 and 1030/515/343 options not available with LSE. 5. AGV HPO LSE only available with CO2, 1064, and 532 options. Galvanometer Nmark AGV-HPO F Theta Included Options (1,2) 355 53T Option AGV 10HPO AGV 14HPO AGV HPO AGV 30HPO 53 mm Focal Length 17.2 x 17.2 mm FOV 343 53T 1064 100 (3) 66.9 x 66.9 mm FOV Non 532 100 (3) 57.2 x 57.2 mm FOV Non 53 mm Focal Length 8.2 x 8.2 mm FOV 343 nm Wavelength 53 mm Focal Length 8.0 x 8.0 mm FOV 37.0 x 37.0 mm FOV Non CO2 100T 1552 100T 1064 100T (3) 1030 100T 532 100T (3) 515 100T 1552 nm Wavelength 55.2 x 55.2 mm FOV 69.8 x 69.8 mm FOV 1030 nm Wavelength.6 x.6 mm FOV 64.6 x 64.6 mm FOV 515 nm Wavelength.4 x.4 mm FOV 1552 nm Wavelength 49.4 x 49.4 mm FOV 61.6 x 61.6 mm FOV 1030 nm Wavelength 34.8 x 34.8 mm FOV 57.0 x 57.0 mm FOV 515 nm Wavelength 34.6 x 34.6 mm FOV 10.6 µm Wavelength 38.6 x 38.6 mm FOV 44.0 x 44.0 mm FOV www.aerotech.com 12
Nmark AGV-HPO ORDERING INFORMATION Nmark AGV-HPO Galvanometer F Theta Included Options (1,2) (Continued) 355 100T Option AGV 10HPO AGV 14HPO AGV HPO AGV 30HPO 51.6 x 51.6 mm FOV CO2 1 1064 1 1 mm Focal Length (3) 107.6 x 107.6 mm FOV Non 532 1 1 mm Focal Length (3) 107.0 x 107.0 mm FOV Non 355 1 1 mm Focal Length 92.4 x 92.4 mm FOV Non 1 mm Focal Length 78.4 x 78.4 mm FOV Non 1 mm Focal Length 77.2 X 77.2 mm FOV Non 1064 163 (3) 1552 163T 1064 163T 1030 163T 532 163T 515 163T 355 163T 1552 nm Wavelength 93.8 x 93.8 mm FOV 92.0 x 92.0 mm FOV 1030 nm Wavelength 92.0 x 92.0 mm FOV 79.6 x 79.6 mm FOV 515 nm Wavelength 79.2 x 79.2 mm FOV 80.8 x 80.8 mm FOV 343 163T 1064 170 (3) 532 170 (3) 10.6 µm Wavelength 1 mm Focal Length 76.0 x 76.0 mm FOV Non 1552 nm Wavelength 87.2 x 87.2 mm FOV 85.2 x 85.2 mm FOV 1030 nm Wavelength 85.0 x 85.0 mm FOV 66.0 x 66.0 mm FOV 515 nm Wavelength 65.8 x 65.8 mm FOV 74.6 x 74.6 mm FOV 343 nm Wavelength 74.0 x 74.0 mm FOV 170 mm Focal Length 110.8 x 110.8 mm FOV Non 170 mm Focal Length 103.8 x 103.8 mm FOV Non 72.4 x 72.4 mm FOV Non 71.6 x 71.6 mm FOV 1064 0 (3) CO2 255 10.6 µm Wavelength 163.8 x 163.8 mm FOV Non 0 mm Focal Length 68.0 x 68.0 mm FOV Non 10.6 µm Wavelength 104.4 x 104.4 mm FOV Non 13 www.aerotech.com
Nmark AGV-HPO ORDERING INFORMATION F Theta Included Options (1,2) (Continued) Option AGV 10HPO AGV 14HPO AGV HPO AGV 30HPO 1064 255 (3) 532 255 (3) 355 255 143 x 143 mm FOV Non 343 255 119.4 x 119.4 mm FOV Non 343 nm Wavelength 118.4 x 118.4 mm FOV Non 154.2 x 154.2 mm FOV Non 148.0 x 148.0 mm FOV Non 1064 500 91.6 x 91.6 mm FOV Non 500 mm Focal Length 233.2 x 233.2 mm FOV Non Galvanometer Nmark AGV-HPO Notes: 1. Input beam diameter is assumed to be equal to scan head entrance aperture at 1/e 2 Gaussian profile. 2. Reported field size is minimum achievable based on zero beam vignetting. 3. F Theta lens is not recommended for use with short pulse lasers (ps and fs pulse durations). Please consult factory for lens options that are compatible with short pulse lasers. 4. Custom coatings available. Contact factory for details. 5. 1064 nm wavelength options not available with AGV 30HPO LSE. 6. 343 nm wavelength options not available with LSE. Lens Mounting Adapters (order as separate line item) LM10HP-XXX Lens mount adapter for AGV-10HP and AGV-10HPO; standard versions support the lens configurations offered by Aerotech; custom versions available on request LM14HP-XXX Lens mount adapter for AGV-14HP and AGV-14HPO; standard versions support the lens configurations offered by Aerotech; custom versions available on request LMHP-XXX Lens mount adapter for AGV-HP and AGV-HPO; standard versions support the lens configurations offered by Aerotech; custom versions available on request LM30HP-XXX Lens mount adapter for AGV-30HP and AGV-30HPO; standard versions support the lens configurations offered by Aerotech; custom versions available on request www.aerotech.com 14