Lecture 18 SOI Design Power Distribution. Midterm project reports due tomorrow. Please post links on your project web page

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EE241 - Spring 2004 Advanced Digital Integrated Circuits Borivoje Nikolic Lecture 18 SOI Design Power Distribution Announcements Midterm project reports due tomorrow Please post links on your project web page Homework #3 due after the Spring break 2 1

Silicon on Insulator (SOI) References: Chapter 5 by Shahidi, Assaderaghi, Antoniadis K. Bernstein, N.J. Rohrer, SOI Circuit Design Concepts, Kluwer 2000. K. Bernstein, ISSCC 00 SOI Tutorial 2001 Microprocessor Design Workshop, lectures by C.T Chuang and R. Preston Articles from Chandrakasan/Brodersen, IEEE Press 1998. 3 SOI Transistor Bernstein, ISSCC 00 4 2

SOI Devices Partially depleted (PD) Pros: Easier to manufacture (Si thickness) Scalable, tolerance to variations Decoupling V T from Si thickness Cons: Floating body effects: I-V kink, parasitic bipolar effect Fully depleted (FD) Pros: Significantly reduced floating body effects Sharper subthreshold S Cons: V T is a function of the charge in the body varies Manufacturability, compatibility with bulk CMOS 5 Soi Microprocessors Comp. Processor Freq. Technology Comment Source IBM 64b Power4 1.10 GHz PD/SOI 0.08 um Leff, 7LM Cu ISSCC 01 IBM 64b Power4 (Test Chip) 1.00 GHz PD/SOI 0.08 um Leff, 7LM Cu IEDM 99 IBM 64b Power4 1.00 GHz PD/SOI 0.08 um Leff, 7LM Cu Hot Chip 99 EE Times 99 IBM 64b PowerPC 660 MHz PD/SOI 0.08 um Leff, 7LM Cu Migration from 0.12 um Leff ISSCC 00 IBM 64b PowerPC 550 MHz PD/SOI 0.12 um Leff, 6LM Cu Bulk 450 MHz 0.12 um Leff ISSCC 99 IBM 32b PowerPC (PowerPC750) 580 MHz PD/SOI 0.12 um Leff, 6LM Cu Bulk 480 MHz 0.12 um Leff ISSCC 99 Samsung 64b DEC Alpha 600 MHz FD/SOI 0.25 um Lgate, 4LM Al Bulk 433 MHz 0.35 um Lgate ISSCC 99 DEC StrongArm-110 (Core Only) 230 MHz (Tester Limit) PD/SOI 0.35 um 20% Perf. Over Bulk IEDM 97 From C.T. Chuang 6 3

SOI Design Advantages: Less Capacitance (~5-40%) Lower power Reduced effective V T, short channel effects, body effect Layout simplicity (no wells, plugs, ) Disadvantages: History-dependent timing Increased device leakage Body effect issues Self heating Decoupling capacitance 7 SOI Timing Issues µs constants ps constants Courtesy of IEEE Press, New York. 2000 8 4

Floating Body Effects in PD SOI Neither S or D junction biased body floats. Effects: Threshold Variability Kink in output characteristics PD FD 9 Floating Body Effects in PD SOI (cont d) Parasitic Bipolar Transistor 10 5

SOI Circuit Considerations Static circuits history-dependent delay First switch (often slowest) vs. second switch (often fastest) Bernstein, ISSCC 00 11 Initial State Initial input at low nfet V B determined by back-to-back diodes pfet V B at V DD initially pfet V B before input falling transition determined by capacitive coupling Initial input at high nfet V B at GND initially nfet V B before input rising transition determined by capacitive coupling pfet V B determined by back-to-back diodes 12 6

First Two Transitions Courtesy of IEEE Press, New York. 2000 13 History-Dependent Delay Bernstein, ISSCC 00 14 7

History-Dependent Delay 15 History-Dependent Delay Convergence to steady state Noise Margins! 16 8

Dynamic Circuits in SOI Dynamic History Bipolar effect Less charge sharing 17 Parasitic Bipolar Dynamic lookahead adder Cumulative Effect of Parasitic Bipolar Current and Propagated Noise Cause Data Corruption after 3rd Stage in The Chain Parasitic Bipolar Current VDD VDD T7 T8 T9 T10 XC0 XPCH PCH C0 T5 T6 xci ci Propagated Noise from ND2 Previous Stage T1 T2 T3 gz gp gg ND1 T0 CLK VDD GND C.T. Chuang (M. Canada et al., ISSCC, 1999) 18 9

Pre-discharging Nodes Intermediate nodes discharged to prevent parasitic bipolar effect Bulk Design SOI Design CLK CLK X X A0 B0 Y OUT A0 B0 Y OUT A1 B1 A1 B1 C.T. Chuang (D. H. Allen et al., ISSCC, 1999) 19 Dynamic Circuit Techniques Conditional Feedback CLK Setup Inputs during Precharge A B FB_L OUT Pre-discharge Intermediate Node Cross-connected Inputs (Stack swizzling) E F F E CLK Re-order Pulldown Tree C.T. Chuang (D. H. Allen et al., ISSCC, 1999) 20 10

Pass-Transistor Logic in SOI Inverter: Keeper: 21 PTL in SOI (Assaderaghi 94): DTMOS Example: V T = 0.4V at 0 V; 0.17V at 0.5 V 22 11

DTMOS Body and gate tied together 23 DTMOS ID vs. VDS for normal and DT operation 24 12

DTMOS Subthreshold currents for SOI NMOS and PMOS transistors with bodies grounded vs. DTMOS 25 Power Distribution Chapter 24, Design and analysis of Power Distribution Networks by Blauuw, Panda and Chaudhury S. Lin, N Chang, ISSCC Microprocessor Design Workshop 2001 26 13

Power Distribution Supply current is brought on chip at specific locations» on the edge for most chips which are peripherally bonded» distributed over the area of the chip for area bonded (C4, solder ball) chips Loads consume this current at different locations on the chip at different times There is often a large parasitic inductance associated with each bond-wire or solder-ball (0.1-10nH) Current is distributed from the bond pads to the loads on thin metal wires» 0.04Ω/ typical Load currents may be very high» average current may be as large as 20A for very hot chips (50W at 2.5V)» peak current may be 4-5x this amount (100A!) L di/dt of bond wire and IR drop across on-chip wires are often a major source of supply noise From [Dally] 27 di/dt Trends di/dt increases roughly as I*f Icc (amp) 1,000.00 100.00 L(di/dt)/Vdd 10.00 P6 Pentium proc 1.00 8086 386 486 8080 286 0.10 8085 4004 8008 0.01 1970 1980 1990 2000 2010 Year 1.E+07 1.E+06 1.E+05 1.E+04 1.E+03 1.E+02 1.E+01 1.E+00 1.E-01 1.E-02 1.E-03 1.E-04 8086 8080 286 8085 4004 8008 386 P6 Pentium proc 486 1970 1980 1990 2000 2010 Year 28 14

Power Distribution Network: Simplified Courtesy of IEEE Press, New York. 2000 29 IR Drop 30 15

Option 1: The Routed Power Network (DSP Processor) Courtesy of IEEE Press, New York. 2000 31 Option 2: The Power Grid Power grid of PPC 750 Courtesy of IEEE Press, New York. 2000 32 16

DEC EV4-3 Metal Layers 3rd coarse and thick metal layer added to the technology for EV4 design Power supplied from two sides of the die via 3rd metal layer 2nd metal layer used to form power grid 90% of 3rd metal layer used for power/clock routing Metal 3 Metal 2 Metal 1 33 DEC EV5-4 Metal Layers 4th coarse and thick metal layer added to the technology for EV5 design Power supplied from four sides of the die Grid strapping done all in coarse metal 90% of 3rd and 4th metals used for power/clock routing Metal 4 Metal 3 Metal 2 Metal 1 34 17

Option 3: Power Planes DEC EV6-6 Metal Layers 2 reference plane metal layers added to the technology for EV6 design Solid planes dedicated to Vdd/Vss Significantly lowers resistance of grid Lowers on-chip inductance RP2/Vdd Metal 4 Metal 3 RP1/Vss Metal 2 Metal 1 35 Power Distribution and Signal Net Inductance L = k.a 36 18

Reference Plane Example Simulation Methodology Extract Inductance & Resistance versus Frequency Model Skin Effect Both Vertically and Horizontally Construct Time-Domain SPICE Model and Simulate with SPICE Use FF Devices, High Vdd & Low Temperature to Aggravate Inductive Effects RP2 RP2 Metal 4 Metal 4 Metal 3 Metal 3 Metal 2 Metal 1 RP1 Metal 2 Metal 1 Substrate Metal 3 Victims Substrate 37 Reference Plane Example (continued) M3 Victim M3 Victim M3 Aggressors M3 Aggressors M1 Aggressors M1 Aggressors 1.0 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9 2.0 1.0 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9 2.0 Time (ns) Time (ns) RP2 Only RP1 & RP2 38 19

Power Distribution Network Design Methodology PPC 750 Early Analysis (before actual circuit implementation) Assumes uniform current distribution Max drop: 156 mv Courtesy of IEEE Press, New York. 2000 39 Power Distribution Network Design Methodology PPC 750 After floorplanning. Estimates of current of each block. Power density uniform over block Max drop: 172 mv 40 20

Power Distribution Network Design Methodology PPC 750 After layout. RC network extracted. Gates modeled as time-varying current sources Max drop: 170 mv 41 Power Distribution Analysis Tools Before After Requires fast and accurate peak current prediction Heavily influenced by packaging technology Source: Cadence 42 21

Dealing with Ldi/dt Decoupling Capacitors Board wiring Bonding wire SUPPLY C d CHIP Decoupling capacitor Decoupling capacitors are added: on the board (right under the supply pins) on the chip (under the supply straps, near large buffers) 43 Impact of Bypass Cap 44 22

On-Chip Bypass Capacitors Much of the difference between peak and average current may be supplied by local, on-chip bypass (decoupling) capacitors Bypass capacitors are also critical in mitigating the effects of the supply bond-wire inductance Decoupling is done by all the devices, N-wells, and specific capacitors Capacitors need fuses to prevent manufacturing shorts, sizing for limited oscillations. 45 3x Reduction in Peak Current J (A/mm 2 ) 0.3 0.1 2 Q = 3 Q C = V 2 0 0 Capacitor must supply this charge 1 2 3 t (ns) 2 9 ( 0.3A/mm )( 1 10 )( 0.5) 67pC/mm = 0.25V 2 = 267pF/mm = 67pC/mm 2 2 46 23

EV4 EV5 EV6 Decoupling Capacitor Ratios total effective switching capacitance = 12.5nF 128nF of de-coupling capacitance de-coupling/switching capacitance ~ 10x 13.9nF of switching capacitance 160nF of de-coupling capacitance 34nF of effective switching capacitance 320nF of de-coupling capacitance -- not enough! 47 EV6 Decoupling Capacitance Design for DIdd= 25 A @ Vdd = 2.2 V, f = 600 MHz 0.32-µF of on-chip de-coupling capacitance was added Under major busses and around major gridded clock drivers Occupies 15-20% of die area 1-µF 2-cm 2 Wirebond Attached Chip Capacitor (WACC) significantly increases Near-Chip de-coupling 160 Vdd/Vss bondwire pairs on the WACC minimize inductance 48 24

EV6 WACC 389 Signal - 198 VDD/VSS Pins 389 Signal Bondwires 395 VDD/VSS Bondwires 320 VDD/VSS Bondwires WACC Microprocessor Heat Slug 587 IPGA 49 WACC Assembly Gieseke, ISSCC 97 50 25

Flip-Chip Solutions Intel Pentium 4 51 Challenge Resonance frequency of LC power distribution network (f = 1/(2p(LC) 0.5 )) used to be above clock frequency But LC of network is going down Clock frequency going up Impact of clock gating Solutions 52 26

Grid Resonance Resonant frequency of power network Processor with 330 MHz Clock Courtesy of IEEE Press, New York. 2000 53 PPC750 Comparison between R, RC, and RLC analysis 54 27

AC Impedance IBM POWER 4 FPU Tantalums electrolytics Card ceramics Module Chip Weekly, EPEP 03 55 28