Table of Contents TABLE OF CONTENTS...I TABLE OF FIGURES...III C - QUIKLOOK SETUP...22

Table of Contents TABLE OF CONTENTS...I TABLE OF FIGURES...III A - DISCUSSION...1 B MAIN SETUP...6 B.1 - Setup Dialog...6 B.2 Description...7 B.3 Controls...9 B-4-48-Channel Multiplexer Configuration...12 B.5 - Controls...12 B.6 - Adjusting the Multiplexer Channels and Ports in a Loop...13 B.7 - Discussion...14 B.7 - Controls...14 B.8 - Adjusting PUND Parameters in a Branch Loop...15 B.9 - Controls...16 B.10 - Amplifier Selection...18 B.11 - Sample Identifying Information...19 B.13 - Controls...20 B.14 - Sensor Configuration...20 C - QUIKLOOK SETUP...22 C.1 - Setup Dialog...22 C.2 - Description...23 C.3 - Controls...25 C.4-48-Channel Multiplexer Configuration...27 C.5 - Controls...28 C.6 - Amplifier Selection...29 C.7 - Sample Identifying Information...30 C.8 - Controls...30 C.9 - Sensor Configuration...31 I

D - QUIKLOOK PLOT SETUP...33 D.1 - Setup Dialog...33 D.2 - Description...33 D.3 - Controls...34 E - PUND EXECUTION...35 E.1 - Create a DataSet...37 E.2 - Archive Regraph...39 E.3 - Sensor Data...43 E.4 - Exporting...44 E.5 - Export Setup...58 F - CHANGE AND VERSION RECORD...59 II

Table of Figures Figure A.1 - PUND Waveform. Controlling Parameters VMax, Pulse Width and Pulse Delay are Shown... 2 Figure A.2 - Figure Shows Polarization being Measured with each Pulse... 3 Figure B.1.1 - PUND Task Configuration Dialog.... 6 Figure B.1.2 - PUND Task Configured to Import a PUND-Specific Vision Data File... 7 Figure B.4.1-48-Channel Multiplexer Configuration Subdialog... 12 Figure B.6.1 - Branch Loop Multiplexer Adjustment Configuration Dialog.... 14 Figure B.8.1 - Branch Loop PUND Parameter Adjustment Configuration Dialog... 16 Figure B.10.1 - Internal Amplifier Selection or External Amplifier Configuration... 19 Figure B.11.1 - Sample Documentation Subdialog.... 20 Figure B.14.1 - Sensor Configuration Subdialog... 21 Figure C.1.1 - PUND Task QuikLook Configuration Dialog... 22 Figure C.1.2 - PUND Task QuikLook Configuration Dialog. PUND is Configured to Import a Vision Data File.... 23 Figure C.4.1-48-Channel Multiplexer Configuration Subdialog... 28 Figure C.6.1 - Internal Amplifier Selection or External Amplifier Configuration... 29 Figure C.7.1 - Sample Documentation Subdialog.... 30 Figure C.9.1 - Sensor Configuration Subdialog... 31 Figure D.1.1 - PUND Task QuikLook Plot Configuration Dialog... 33 Figure E.1 - PUND Task QuikLook Measurement Results... 35 Figure E.1.1 - Select a Target DataSet... 37 Figure E.1.2 - Configure the New DataSet... 38 Figure E.1.3 - CTD Renaming Dialog... 38 Figure E.1.4 - New DataSet Created from the QuikLook PUND Task Execution... 39 Figure E.2.1 - Locate and Recall the PUND Task from a DataSet Archive... 40 Figure E.2.2 - PUND Configuration Dialog Recalled from a DataSet Archive... 41 Figure E.2.3 - PUND Plot Configuration Dialog for Data Recalled from a DataSet Archive... 42 Figure E.2.4 - PUND Data Recalled from a DataSet Archive... 43 Figure E.3.1 - PUND Task Data with Sensor Data... 44 Figure E.4.1 - Export Dialog with Printer Configuration Selected... 45 Figure E.4.2 - Standard Windows Printer Configuration Dialog... 45 Figure E.4.3 - Export Dialog with Text Configuration Selected.... 46 Figure E.4.4 - PUND Task Sample Text Export File. Upper Portion.... 47 Figure E.4.5 - PUND Task Sample Text Export File. Lower Portion... 48 Figure E.4.6 - Export Dialog with Excel Configuration Selected.... 49 Figure E.4.7 - PUND Task Sample Excel Export Output. Upper Portion... 50 Figure E.4.8 - PUND Task Sample Excel Export Output. Lower Portion.... 51 Figure E.4.9 - Export Dialog with Word Configuration Selected.... 53 Figure E.4.10 - PUND Task Sample Word Export Output. Upper Portion... 54 III

Figure E.4.11 - PUND Task Sample Word Export Output. Upper Lower Portion.... 55 Figure E.4.12 - Utility of Vision Data File Exporting.... 57 IV

A - Discussion The PUND Task is a Measurement Task that performs a standard ferroelectric memory characterization measurement based on a series of five pulses. The initial pulse is used to preset the sample to the Polarization state opposite the sign of VMax. No measurement is made as the result of this pulse. The second pulse switches the sign of the polarization and measures the amount of polarization switched. After the measurement, the sample is returned to zero volts and allowed to settle so that all non-remanent Polarization switching dissipates. After this period, a second measurement is made at 0.0 volts. The third pulse is a twin of the second, with the same measurements being made. In this case, the sample is not being switched, so that the measured polarization will represent the non- Remanent content of the sample. The fourth and fifth pulses mirror the second and third, switching the sample in the -VMax direction. Both the switching and non-switching measurements are made just as described for pulses two and three. The PUND measurement establishes eight measured parameters, commonly found in the ferroelectric literature. The table shows the characteristics of each of the PUND pulses. The first figure shows the pulse waveform over time. The second figure relates the polarization switching to the application of the pulse voltages. Pulse Voltage Applied Measured Value 1 -V Max None 2 V Max P* 0.0 P* r 3 V Max P^ 0.0 P^r 4 -V Max -P* 0.0 -P* r 5 -V Max -P^ 0.0 -P^r 1

Figure A.1 - PUND Waveform. Controlling Parameters VMax, Pulse Width and Pulse Delay are Shown. 2

Figure A.2 - Figure Shows Polarization being Measured with each Pulse. The PUND Task configuration can be completely specified by providing three parameters. Due to the symmetry of the PUND profile, VMax, Pulse Width (ms) and Pulse Delay (ms) are the only variable parameters associated with the Task. The PUND Task can be configured so that any of these parameters can be adjusted from loop iteration-toiteration when the Task is programmed into a Branch Loop. In this case, the programmed parameter value is used to configure the first iteration's PUND waveform and is used as a basis for computing Task execution. After the first iteration, a parameter is computed before the waveform is constructed by either scaling the previous value by a constant scale factor, or incrementing it by a constant value. For example... or VMax i = VMax (i-1) x Scale Facto VMax Pulse Width j = Pulse Width (j - 1) + Increment Pulse Width 3

A scale factor can be fractional or an increment negative so that a parameter will decrease as iterations proceed. The scale term for VMax can be negative. In this case, the profile will invert from iteration-to-iteration. Pulse Width and Pulse Delay scale factors must be strictly greater than zero. Care must be taken in programming that the combination of the initial parameter value, parameter alteration constant and number of Branch Loop iterations do not combine to create a parameter that attains a value outside the capabilities of the hardware configuration over time. In the example the parameters have their default initial values: VMax = 5.0, Pulse Width = 1.0 ms and Pulse Delay = 1000.0 ms. VMax is adjusted by scaling by a factor of 1.1. Pulse Width increases by 0.2 ms at each iteration. Pulse Delay decreased by 10 ms from loop-to-loop. The table shows the progression of the Task for the first five loops. Iteration VMax Pulse Width (ms) Pulse Delay (ms) 1 5.0 1.0 1000.0 2 5.5 1.2 990.0 3 6.05 1.4 980.0 4 6.65 1.6 970.0 5 7.32 1.8 960.0 This feature is particularly useful when studying the performance of a PUND measured parameter as a function of a configuration parameter - frequently the Pulse Width (ms). By associating the Task with the Pass-Through Filter, one or more measured parameters can be plotted as a function of any of these configuration parameters over the duration of the Branch Loop. This is done by selecting "Single Point" parameter extraction in the Pass-Through Filter and then selecting an X-Axis value of "Pulse Width", "PUND Delay" or "Volts". In addition to the directly-measured PUND parameters ±P*, ±P*r, ±P^ and ±P^r, several additional ferroelectric properties are derived from these measured values. These include Cef - The samples "Effective" Capacitance. This is derived from P* and given by: Capacitance (nf) = (1000 x P* x Area (cm 2 ) ) / VMax. Kef - The sample Dielectric Constant. This is derived from Cef and is given by: (Cef x 1e-9 x Thickness (µm) x 1e-6 ) /(Area (cm2) x 1e-4 x 8.84541878 x 1e-12 ). (8.84541878 x 1e-12 is known as the Free Space Permittivity Constant and is represented by e 0.) DP, DP r, -DP and -DP r - The four P* terms are based on polarization switching and contain both Remanent and non-remanent Polarization components. The four P^ terms are measured during non-switching pulses and contain only non-remanent Polarization. Sub- 4

tracting the P^ term from the P* term results in a measure of Remanent-only Polarization. This is the primary memory characteristic of the ferroelectric sample and is often the target of research. The four terms defined here are four different calculations of the Remanent only and should produce very similar results. These are given, respectively by P* - P^, P* r - P^r, -P* - (-P^) and -P* r - (-P^r). Note that as of Vision Version 4.0.0, an internal reference ferroelectric sample has been added to the Precision Premier II tester and is planned in the Precision LC II tester. The ferroelectric test element includes two switchable capacitors in a single package inserted into a user-accessible connector. A variety of capacitors are available from Radiant Technologies, Inc. and this test element may be easily changed to adjust the type or to replace fatigued samples. Just as with the internal reference capacitor and resistor, the ferroelectric test sample may be switched into the test signal path in parallel with any externally-connected test sample and/or the internal reference capacitor and/or resistor. More information is available in the Version 4.0.0 What's New document, section E.1.8. 5

Task Name: PUND Version 4.0.0 Last Task Update: 19 June 2007 In QuikLook Menu: Yes Folder: Hardware Subfolder: Measurement Subsubfolder: Pulse Window Name: PUND Setup Known Bugs: None B Main Setup B.1 - Setup Dialog Figure B.1.1 - PUND Task Configuration Dialog. 6

Figure B.1.2 - PUND Task Configured to Import a PUND- Specific Vision Data File. B.2 Description The main configuration dialog, shown in Figure B.1.1, is used to completely specify the operational parameters and experimental information to be used when the PUND Task is inserted into a Test Definition. The upper left and central portion of the dialog sets PUND configuration parameters and information that is key to Task operation. In the upper right corner, tester Drive and Return signals can be routed through accessory 48-Channel Multiplexer channels if the instrument is attached to a tester port. The left-central section of the dialog contains a series of five buttons added as of Version 4.0.0. These access subdialogs that are discussed below on this page. Central on the dialog are two check boxes that allow high precision internal reference elements to be switched into the measurement signal path for signal verification. Elements include a 1.0 nf Capacitor and a 2.5 M-Ω Resistor. Systems will be upgraded to include a ferroelectric sample in the future. Elements are switched in parallel, so that, if a sample is attached, a parallel measurement will be made with the internal sample. 7

The right-central portion of the dialog includes a switch that allows amplification of the return signal to be made automatically or selected manually from the list box. If Automatic Amplification is selected, the measurement is made repeatedly and the amplification level adjusted until the signal is within the measurable range. This is a convenient option and is the default. However, if the researcher requires the measurement to be made on a virgin sample, this option is unacceptable since repeated PUND waveforms are applied before the sample is measured. In that case, it may be necessary to sacrifice a sample to determine the proper amplification level to set manually. The lower portion of the dialog includes the standard Help/OK/Cancel button suite and a Comments box that allows a detailed description of the use of the PUND Task. A text control is also placed here to identify the Task Version and data of latest update. The following controls have been added as of Version 3.1.0. o Custom Amp - This radio button has been added to the External Amplifier list. This control allows the user to attach an existing amplifier (not provided by Radiant Technologies) to the experiment. The user must provide RTI the amplifier specifications such as voltage range, gain factor and maximum rise time. RTI will then provide the user with an identifying module that will allow the amplifier to be connected to the HVI. o Sensor Impedance - This is added to the suite of Sensor controls. This control specifies an integer output impedance of the instrument attached to the Sensor port. The sensor output impedance in series with the Precision input impedance (currently about 4 k-ω) make a voltage divider that distorts the measured voltage by: Measured = Actual x 4k / (4k + Sensor Impedance). If the sensor output impedance is large with respect to the 4k input impedance, the distortion will be significant. This control accepts a value that is used to correct this distortion. o Start with Last Amp Level - When Auto Amplification is checked, the system will begin to search for the correct amplification level by using the value specified in the Amp Level control, even though the control is disabled. Checking this new control will force the search to start at the amplification level that was established by the last executed Measurement Task. In Version 4.0.0 controls to set sample information, to select and configure the amplifier to use and to enable and configure sensor capture have been moved to subdialogs accessed through button controls. These displaced controls are controls that are usually ei- 8

ther uncommonly used or set once in a Test Definition and not reset. Moving them to subdialogs reduces the clutter and confusing appearance of the PUND configuration dialog. Multiplexer and PUND parameter Branch Loop adjustment configuration are now also accessed through buttons rather than by clumsily switching check boxes. The check boxes remain to indicate if adjustment is enabled. With the release of Version 4.0.0, a new exporting option has been introduced. Once a PUND Task has been executed - either in QuikLook or in a DataSet - it can have its configuration parameters and data exported to a Vision data file. Subsequent PUND Tasks can be configured to read from the data file in lieu of making a new measurement. This feature allows data taken from diverse places including QuikLook and multiple DataSets to be imported into other DataSets, where Filters can then be applied as though the Task were taking new data. Configuration of the PUND Task to import Vision Data File data is shown in Figure B.1.2, above. For details, see the exporting tutorial. A third internal reference (ferroelectric) sample has been added to the Precision Premier II tester and is planned in the Precision LC II tester. The ferroelectric test element includes two switchable capacitors in a single package inserted into a user-accessible connector. A variety of capacitors are available from Radiant Technologies, Inc. and this test element may be easily changed to adjust the type or to replace fatigued samples. Two Capacitors are available for switching, labeled Cap A and Cap B. The capacitors may be switched individually or in parallel. Cap A Enable and Cap B Enable controls are activated when the internal ferroelectric capacitor is enabled. Just as with the internal reference capacitor and resistor, the ferroelectric test sample may be switched into the test signal path in parallel with any externally-connected test sample and/or the internal reference capacitor and/or resistor. More information is available in the Version 4.0.0 What's New page. Note that the control is not shown in the Figures. B.3 Controls Name Type Default Description PUND Task Text Name PUND-# This serves as a root identifier for this instance of the PUND Task. The Task will be identified with this value in the Editor and the Current Test Definition (CTD). Executed Tasks will be displayed and stored with this name with a. and an execution number appended to it. Each new instance of a PUND Task within the Editor should have a unique Task Name assigned. 30-character limit Volts Real 5.0 The sign and magnitude of the voltage to be applied during the Pulse. ±10,000 Volts maximum. Maximum is dictated by the selection in Voltage Range. Pulse Delay Real 1000.0 In milliseconds. The delay at 0.0 Volts between each of the PUND pulses. This zero-volt measurements (±P*r and ±P^r) are made after this delay. The purpose of the delay is to allow non-remanent switching Polarization to settle before the measurement is made. Sufficient delay should be programmed to 9

allow this polarization to settle. Pulse Width Real 1.0 In milliseconds. The delay between the start of the rise of the each of the PUND pulses and the measurement of the Polarization at the pulse top. The pulse begins to fall to zero volts after this delay. Area Real 1e-4 In cm 2. The surface area of the ferroelectric sample electrode. This value is used in calculating the measured Polarization. Thickness Real 0.3 In µm. The depth of the ferroelectric material in the sample. Set Sample Info Button Unpressed Clicking this button opens a subdialog in which sample identifying information can be entered. Set Multiplexer Button Unpressed Clicking this button opens a subdialog that allows Drive and Return signal multiplexer channels and ports to be specified for one or two attached 48-channel multiplexers. This is discussed in detail below. If Branch Loop adjustment is enabled in the subdialog, Adjust Mux in a Loop will be checked when the dialog is closed. Otherwise it will be unchecked. Adjust Mux in a Loop Check Box Unchecked Read-only. This control indicates that the Task has been configured to switch Drive and Return signals between multiplexer ports and channels, from iteration-to-iteration, if the Task is programmed into a Branch Loop and if one or two 48- channel accessory multiplexers is/are connected to the tester. The status of this control is adjusted using Set Adjust Mux. Set Sensor Button Unpressed This button opens a subdialog in which the signal-capture of the Sensor port can be enabled and configured or disabled. The status of the Sensor port is reflected in the Sensor Enable control. Sensor Enable Set Adjust Parameters Adjust Parameters in a Loop Check Box Button Check Box Unchecked Boolean - This control is disabled and is an indicator only - Indicates if the capture of the Sensor port signal is enabled (control is checked) or disabled (control is unchecked). Unpressed Clicking this button opens a subdialog in which the Task can be configured to adjust PUND Delay, Pulse Width and VMax values, from iteration-to-iteration, if the Task is programmed into a Branch Loop. The subdialog is described in detail below. Unchecked Read-only. This control indicates that the Task has been configured to adjust one or more of the parameters for one or more of the enabled pulses, from iteration-to-iteration, if the Task is programmed into a Branch Loop. The status of this control is adjusted using Set Adjust Params. Set Amplifier Button Unpressed Clicking this button opens a subdialog in which the Task can be set either to generate its drive signal from the internal ±100.0-Volt (±10.0-Volt, in some systems) amplifier or from an external High Voltage Amplifier (HVA) connect to the system through and accessory High Voltage Interface (HVI). If an HVA is selected, the tester port and HVI channel are specified. The subdialog is described in detail below. Amplifier Text Internal Read-Only. Indicates if the measurement is to be made using the internal (low-voltage) amplifier ("Internal") or an external High Voltage Amplifier (HVA) connect to the system through and accessory High Voltage Interface (HVI) ("High Voltage"). The text in this control is adjusted using Set Amplifier. 10

Enable Ref. Cap Enable Ref. Resistor Enable Ref. Ferroelectric (Not Shown in the Figures Above) Cap A Enable Cap B Enable (Not Yet Shown in The Figures Above) Auto Amplification Start with Last Amp Level Check Box Check Box Boolean Check Box Check Box Unchecked Two independently switchable internal test sample of known value are built into the Precision tester. These are arranged in parallel and may be switched into the drive/return test loop in any order. If a sample is attached to the external DRIVE and RETURN BNCs these will be added in parallel to the sample. Unchecked A third internal reference (ferroelectric) sample has been added to the Precision Premier II tester and is planned in the Precision LC II tester. The ferroelectric test element includes two switchable capacitors in a single package inserted into a useraccessible connector. A variety of capacitors are available from Radiant Technologies, Inc. and this test element may be easily changed to adjust the type or to replace fatigued samples. Just as with the internal reference capacitor and resistor, the ferroelectric test sample may be switched into the test signal path in parallel with any externally-connected test sample and/or the internal reference capacitor and/or resistor. More information is available in the Version 4.0.0 What's New page. Checking this control enables Cap A Enable and Cap B Enable. Otherwise those controls are disabled. Unchecked When the internal reference ferroelectric is selected, these controls are activated to allow the user to select the capacitor to be measured. Cap A, Cap B or both may be selected. When both are selected, the capacitors are measured in parallel. Both may also be disabled, though this has little practical value. Checked Tells the tester to automatically adjust the sample return signal gain to an acceptable level. This is done by repeatedly measuring the sample using the configured conditions and adjusting Checked the gain. See the discussion under Description above. This control was added as of Version 3.1.0. This control is disabled if Auto Amplification is not selected. Amp Level List Variable If Auto Amplification is disabled, this control is used to select the amplification level to be used by the hardware to make the measurement. Read Data From Vision File Check Box Unchecked Checking this box instructs the PUND Task to read its data in from a file specified in File Name rather than making a measurement. The file is a binary Vision Data File in PUNDspecific format. If this control is unchecked, File Name and Browse to File are hidden. If the control is checked, File Name and Browse to File are shown and all controls except Task Name and Comments are disabled. That is because the controlled values will be read in from the input file. If the control is checked, Browse to File must be used to locate and identify an PUND-formatted Vision Data File. File Name Text Read-only. This control shows the file path and file name of the PUND-formatted Vision Data File to be read for measured data and configuration parameters on Task execution. The control is updated using Browse to File. This control is hidden if Read Data From Vision File is unchecked. Browse to File Button Unpressed Clicking on this button opens a standard Windows browser dialog that must be used to locate and identify a PUNDformatted Vision Data File. By default, the browser filters for 11

*.vis files, although the file may have any name and extension. Once identified, the file path and file name are displayed in File Name. This control is hidden if Read Data From Vision File is unchecked. Comments Text A string of up to 511 characters to be written at the user s discretion. Intended to allow a detailed description of the design decision to include the PUND Task. Help Button Unpressed Read this Help page. OK Button Unpressed Accept the configured PUND values Cancel Button Unpressed Do not add the PUND task to the list in the Editor B-4-48-Channel Multiplexer Configuration With the release of Version 4.0.0, the 48-channel multiplexer Drive and Return Port and Channel controls have been moved to a subdialog to reduce clutter and confusion on the main dialog. The subdialog is accessed through the Set Multiplexer button on the main dialog. A Set Mux Adjust button on the subdialog opens a subsubdialog to configure the adjustment of Drive and Return Port and Channels settings in a Branch Loop as described in the next section. The status of Branch Loop adjustment is reflected in the readonly Adjust Mux in a Branch Loop check box on the subdialog. Figure B.4.1-48-Channel Multiplexer Configuration Subdialog. B.5 - Controls Name Type Default Description Drive/Return Integer 0/0 0-48. One or two 48-channel mulitplexers may be connected to the Channel Precision tester using DB-25 connectors on the rear of the unit (limit one for the Precision LC). These accessories allow up to 95 samples (with a single common return) to be connected to the tester. These controls designate the channel to apply the drive signal to and to receive the return signal from. Values of 0 through 48 may be entered. A value 12

Drive/Return Port of 0 indicates that no multiplexer is present or that it should not be selected. In this case, the signal will be routed through the normal BNC connector on the tester front panel. Setting a non-zero value in Drive Channel and/or Return Channel enables Drive Port and/or Return Port and sets the value in the control(s) to a default of '1'. Setting '0' in Drive Channel and/or Return Channel disables Drive Port and/or Return Port and sets the value in the control(s) to a default of '0'. Integer 0/0 0-2 (0-1 for the Precision LC tester). The DB-25 connector on the rear of the Precision Tester to which is connected the multiplexer to be used for the Drive/Return Signal. These controls are disabled and forced to a value of '0' if the Drive/Return Channel controls are set to '0'. Otherwise they will be enabled and initially set to a default value of '1'. A value of '0' in this control indicates that no multiplexer is to be used. Adjust Mux Button Unpressed Clicking this button opens a subdialog that allows Drive and Return signal multiplexer channels and ports to be specified for each iteration, up to fifteen iterations, in a Branch Loop. This is discussed in detail below. If Branch Loop adjustment is enabled, Adjust Mux in a Loop will be checked when the dialog is closed. Otherwise it will be unchecked. Adjust Mux in a Loop Help OK Cancel Check Box Unchecked This control is disabled and used solely to indicate if the Task is configured to adjust multiplexer signal channels and ports in a Branch Loop. Button Unpressed Read this Help page. Button Unpressed Accept the configured 48-channel multiplexer configuration. Button Unpressed Close the dialog. Make no changes to the 48-channel multiplexer configuration. B.6 - Adjusting the Multiplexer Channels and Ports in a Loop 13

Figure B.6.1 - Branch Loop Multiplexer Adjustment Configuration Dialog. B.7 - Discussion Checking the Adjust Mux in a Loop control allows the PUND Task to change the Multiplexer channels provided it is located within a Branch Loop. This, in turn, allows multiple capacitors to be fully measured automatically without reconfiguring the program or adjusting hardware. When the control is checked, the dialog in Figure B.6.1 appears, allowing up to fifteen loop cycles to be independently programmed. (Loop cycles exceeding fifteen will repeat the channel sequencing.) In the example samples 1 through 4 have their Drive Signal Connected to a common multiplexer attached to DB-25 port 1. Sample 5 is connected to a separate mux attached to Port 2. Return signals for samples 1, 2 and 5 are common and connected to the same channel (2) of the mux at port 1. Samples 3 and 4 also have common return signals connected to channel 2 of the second multiplexer at port 2. B.7 - Controls Name Type Default Description Loop Count Integer 0 0-15. Indicates the number of unique Drive and Return Channel and Port sequences to be iterated. The value entered here enables or dis- 14

ables the Drive Channel n, Drive Port n, Return Channel n and Return Port n controls depending on n and the Loop Count selected. Drive Channel n Integer 0 The Drive Channel on the multiplexer to be enabled when the Branch Loop iteration mod n = 0. This control is disabled unless Loop Count >= n. Drive Port n Integer 0 The DB-25 connector on the rear of the Precision tester to which the multiplexer is connected whose channel is to be attached to the Drive Signal when the Branch Loop iteration mod n = 0. This control is disabled unless Loop Count >= n. Return Channel n Integer 0 The Return Channel on the multiplexer to be enabled when the Branch Loop iteration mod n = 0. This control is disabled unless Loop Count >= n. Return Port n Integer 0 The DB-25 connector on the rear of the Precision tester to which the multiplexer is connected whose channel is to be attached to the Return Signal when the Branch Loop iteration mod n = 0. This control is disabled unless Loop Count >= n. Help Okay Cancel Button Unpressed Call up a dialog-specific help page. Button Unpressed Accept the programmed values and enable the Branch Loop update. Button Unpressed Close the dialog and disable the Branch Loop update. B.8 - Adjusting PUND Parameters in a Branch Loop If the PUND Task is programmed into a Branch Loop, the Task Pulse Width, Pulse Delay and Volts parameters may be sequentially altered from one loop iteration to the next. The parameters are independently controlled. The initial configured values, Pulse Width, Pulse Delay and Volts, programmed in the main dialog are used as the PUND control values for the first loop iteration. These are also used as reference values from which to compute the values to be used in subsequent loop iterations. The parameter value to be used in any specific iteration is the previous value altered by either applying a constant scale factor or adding a constant increment. Scale factors can be fractional or increment can be negative so that subsequent iterations sequentially reduce the value. The Volts scale factor can also be negative, providing a PUND waveform that alternates between positive switching and negative switching. Of course, the Pulse Width and Pulse Delay scale factor must be strictly greater than 0.0. or Value i = Value (i-1) x Scale Factor Value i = Value (i-1) + Increment Great care must be taken by the programmer that the combination of initial parameter value, adjustment value and number of Branch Loops will not cause the current value to cross into a value range that lie outside the capabilities of the hardware configuration as the Branch Looping progresses. The dialog below shows the configuration of the parameter adjustment to produce the example on the Discussion page. 15

Figure B.8.1 - Branch Loop PUND Parameter Adjustment Configuration Dialog. B.9 - Controls Name Type Default Description Adjust Pulse Check Unchecked Enables the adjustment of the PUND Pulse Width in a Branch Loop. Width (ms) Box When this control is checked, Adjust by Scaling and Adjust by Incrementing are enabled. Scale Factor or Increment (ms) are enabled when this control is checked and depending on the state of Adjust by Scaling and Adjust by Incrementing. Unchecking this control disables all associated Adjust by Scaling Check Box controls. Checked When Adjust Pulse Width is enabled, selecting this control will cause the Pulse Width to update in a Branch Loop by scaling it by Scale Factor. This control is enabled when Adjust Volts is enabled, and selecting it enables Scale Factor. Checking this control unchecks Adjust by Incrementing and disables Increment (ms). This control is disabled if Adjust 16

Adjust by Incrementing Check Box Pulse Width is unchecked. Unchecked When Adjust Pulse Width is enabled, selecting this control will cause the voltage to update in a Branch Loop by incrementing it by Increment (ms). This control is enabled when Adjust Pulse Width is enabled, and selecting it enables Increment (ms). Checking this control unchecks Adjust by Scaling and disables Scale Factor. This control is disabled if Adjust Pulse Width is unchecked. Scale Factor Real 1.0 This control is enabled when both Adjust Pulse Width and Adjust by Scaling are checked. Otherwise it is disabled. This control is used to specify the value by which the previous Branch Loop iteration Pulse Width will be scaled to determine the voltage of the current iteration. This value must be strictly greater than 0.0. Increment (ms) Adjust Delay (ms) Adjust by Scaling Adjust by Incrementing Real 0.0 This control is enabled when both Adjust Pulse Width and Adjust by Incrementing are checked. Otherwise it is disabled. This control is used to specify the value by which the previous Branch Loop iteration Pulse Width will be incremented to determine the voltage of the current iteration. This value is unrestricted. Check Box Check Box Check Box Unchecked Enables the adjustment of the PUND zero-volt, between-pulse delay in a Branch Loop. When this control is checked, Adjust by Scaling and Adjust by Incrementing are enabled. Scale Factor or Increment (ms) are enabled when this control is checked and depending on the state of Adjust by Scaling and Adjust by Incrementing. Unchecking this control disables all associated controls. Checked When Adjust Delay is enabled, selecting this control will cause the zerovolt between-pulse delay to update in a Branch Loop by scaling it by Scale Factor. This control is enabled when Adjust Delay is enabled, and selecting it enables Scale Factor. Checking this control unchecks Adjust by Incrementing and disables Increment (ms). This control is disabled if Adjust Delay is unchecked. Unchecked When Adjust Delay is enabled, selecting this control will cause the zerovolt between-pulse delay to update in a Branch Loop by incrementing it by Increment (ms). This control is enabled when Adjust Delay is enabled, and selecting it enables Increment (ms). Checking this control unchecks Adjust by Scaling and disables Scale Factor. This control is disabled if Adjust Delay is unchecked. Scale Factor Real 1.0 This control is enabled when both Adjust Delay and Adjust by Scaling are checked. Otherwise it is disabled. This control is used to specify the value by which the previous Branch Loop iteration zero-volt between-pulse delay will be scaled to determine the voltage of the current iteration. This value must be strictly greater than 0.0. Increment (ms) Real 0.0 This control is enabled when both Adjust Delay and Adjust by Incrementing are checked. Otherwise it is disabled. This control is used to specify the value by which the previous Branch Loop iteration zero-volt, between-pulse delay will be incremented to determine the voltage of the current iteration. This value is unrestricted. Adjust Check Unchecked Enables the adjustment of the PUND Voltage in a Branch Loop. When VMax Box this control is checked, Adjust by Scaling and Adjust by Incrementing are enabled. Scale Factor or Increment (Volts) are enabled when this control is checked and depending on the state of Adjust by Scaling and Adjust by Incrementing. Unchecking this control disables all associated controls. Adjust by Check Checked When Adjust VMax is enabled, selecting this control will cause the volt- 17

Scaling Box age to update in a Branch Loop by scaling it by Scale Factor. This control is enabled when Adjust VMax is enabled, and selecting it enables Scale Factor. Checking this control unchecks Adjust by Incrementing and disables Increment (Volts). This control is disabled if Adjust VMax is unchecked. Adjust by Incrementing Check Box Unchecked When Adjust VMax is enabled, selecting this control will cause the voltage to update in a Branch Loop by incrementing it by Increment (Volts). This control is enabled when Adjust VMax is enabled, and selecting it enables Increment (Volts). Checking this control unchecks Adjust by Scaling and disables Scale Factor. This control is disabled if Adjust VMax is unchecked. Scale Factor Real 1.0 This control is enabled when both Adjust VMax and Adjust by Scaling are checked. Otherwise it is disabled. This control is used to specify the value by which the previous Branch Loop iteration Pulse Volts will be scaled to determine the voltage of the current iteration. This value is unrestricted. Increment (Volts) Help OK Cancel Real 0.0 This control is enabled when both Adjust VMax and Adjust by Incrementing are checked. Otherwise it is disabled. This control is used to specify the value by which the previous Branch Loop iteration Pulse Volts will be incremented to determine the voltage of the current iteration. This value is unrestricted. Button Unpressed Read these Help pages. Button Unpressed Accept the configured values and close the dialog. Button Unpressed Close the dialog. Do not accept any changes to configured values. B.10 - Amplifier Selection Selecting either the internal ±100 Volt amplifier (±10 Volts for some Precision LC models) or an external High Voltage Amplifier (HVA) connected to the tester through a High Voltage Interface (HVI) is accomplished by clicking Set Amplifier, opening the subdialog of Figure B.10.1. The "Internal" amplifier is set by default. In Version 4.0.0 High Voltage configuration has been simplified by allowing only two amplifier selections - "Internal Amplifier" or "External Amplifier". "Internal Amplifier" refers to the ±100.0-Volt amplifier (±10.0 Volts in some LC models) that the Precision Tester can produce with no externally-attached accessories. "External Amplifier" refers to any amplifier connected to the Precision Tester through an HVI. The type of external amplifier is no longer specified. The software recognizes the type of amplifier through the ID module that accompanies the delivery of the High Voltage accessories. With an "External Amplifier" specified, the user must choose an HVI Comm Port ('1' or '2' for the Precision Premier or Workstation, '1' for the Precision LC) and an HVI Channel ('1' or '2' for the 10 kv HVI, '1' for the 4 kv unit). 18

Figure B.10.1 - Internal Amplifier Selection or External Amplifier Configuration. Name Type Default Description Internal Radio Selected Selecting this control instructs Vision to use the Tester's internal amplifier to generate a signal of up to ±100.0 Volts. HVI Comm Port and Amplifier Button HVI External Amplifier HVI Comm Port HVI Channel Radio Button Channel will be forced to values of '0' and disabled. Unselected Selecting this control instructs Vision to use an external High Voltage Amplifier (HVA), connected to the tester through a High Voltage Interface (HVI). Voltages of up to ±10,000 Volts can be switched to the sample HVI Comm Port and HVI Channel will be set to default values of '1' and enabled. Integer 0/1 0, 1 or 2. This is the DB-25 connector at the rear of the tester to which the external HVI is connected. For Precision Workstations and Premiers, this may take a value of '1' or '2', allowing two HVIs to be connected and switched in software. Precision LCs have only a single comm port, selected by '1'. A '0' indicates that the signal is to be taken from the Tester's internal amplifier. If Internal Amplifier is selected, this control is forced to '0' and disabled. If External Amplifier is selected, this control is set to '1' by default and enabled. Integer 0/1 0, 1 or 2. This is the channel at the rear of the HVI to which the HVAs connected. For 10 kv HVIs, this may take a value of '1' or '2', allowing two HVAs to be connected and switched in software. 4 kv HVIs have only a single channel, selected by '1'. A '0' indicates that the signal is to be taken from the Tester's internal amplifier. If Internal Amplifier is selected, this control is forced to '0' and disabled. If External Amplifier is selected, this control is set to '1' by default and enabled. B.11 - Sample Identifying Information Clicking Set Sample Info opens a subdialog in which several sample identifying parameters may be configured. The purpose is strictly for documentation and most identifiers are not generic enough to apply to all cases. 19

B.13 - Controls Figure B.11.1 - Sample Documentation Subdialog. Name Type Default Description Sample Name Text "" 24 Characters Maximum. A unique description of the sample being measured Lot ID Text "" 12 Characters Maximum. A unique description of the the lot from which the sample under test is taken. Wafer ID Text "" 12 Characters Maximum. A unique description of the the wafer from which the sample under test is taken. Die Row Integer 0 The vertical location on the wafer of the sample under test. May be negative. Die Column Integer 0 The horizontal location on the wafer of the sample under test. May be negative. Capacitor Number Integer 0 Serial identifier of the capacitor being tested. OK Button Unpressed Accept the entered values. Cancel Button Unpressed Close the dialog. Do not adjust the sample information. B.14 - Sensor Configuration Clicking Set Sensor opens a subdialog that allows voltages at the external SENSOR port to be acquired along with the measured data. The SENSOR data can be linearly scaled and offset to convert them from a voltage to a meaningful value. Inputting the known output impedance of the device attached to the sensor helps correct for small errors in the measured value. The sensor data can be labeled for identification. As shown on the dialog, the derived sensor value is given by: 20

Sensor Data = Sensed Voltage x Sensor Scale (Tester Input Impedance + Sensor Impedance) / Tester Input Impedance + Offset (2) The results of enabling or disabling the Sensor data will be displayed in the Sensor Enabled control on the main dialog when the subdialog is closed. Figure B.14.1 - Sensor Configuration Subdialog. Name Type Default Description Sensor Check Unchecked Checking this control tells the software to capture the voltage signal attached to the SENSOR port simultaneously with the measured data. The Enable Box signal will be scaled and offset using equation (2). Checking this box enables Sensor Scale, Sensor Offset, Sensor Impedance and Sensor La- Sensor Scale Sensor Offset Sensor Impedance Sensor Label Cancel OK bel. Real 1.0 Checking Sensor Enable enables this control. Otherwise it is disabled. The value in this control will be used as a scale factor to linearly convert the measured sensor signal to a physical value in accordance with equation (2). Real 0.0 Checking Sensor Enable enables this control. Otherwise it is disabled. The value in this control will be used as an offset value to linearly convert the measured sensor signal to a physical value in accordance with equation (2). Integer 50 Checking Sensor Enable enables this control. Otherwise it is disabled. The value in this control will be used as a corrective term to adjust the measured voltage in accordance with equation (2). Text Box "" Checking Sensor Enable enables this control. Otherwise it is disabled. This value is used to identify the converted SENSOR signal when the sensor data are displayed. Button Unpressed Close the dialog. Discard any changes made in the Sensor configuration. Button Unpressed Close the dialog. Make the indicated changes in the Sensor configuration. 21

C - QuikLook Setup Task Name: PUND Version: 4.0.0 Last Task Update: 19 June 2007 In QuikLook Menu: Yes Folder: Hardware Subfolder: Measurement Subsubfolder: Pulse Window Name: PUND QuikLook::PUND QuikLook Setup Change Record: Go to Change Record Known Bugs: None User Variables Added: Go to List C.1 - Setup Dialog Figure C.1.1 - PUND Task QuikLook Configuration Dialog. 22

Figure C.1.2 - PUND Task QuikLook Configuration Dialog. PUND is Configured to Import a Vision Data File. C.2 - Description The main configuration dialog, shown in Figure C.1.1, is used to completely specify the operational parameters and experimental information to be used when the PUND Task is inserted into a Test Definition. The upper left and central portion of the dialog sets PUND configuration parameters and information that is key to Task operation. In the upper right corner, tester Drive and Return signals can be routed through accessory 48-Channel Multiplexer channels if the instrument is attached to a tester port. The left-central section of the dialog contains a series of three buttons added as of Version 4.0.0. These access subdialogs that are discussed below on this page. Central on the dialog are two check boxes that allow high precision internal reference elements to be switched into the measurement signal path for signal verification. Elements include a 1.0 nf Capacitor and a 2.5 M-Ω Resistor. Systems will be upgraded to include a ferroelectric sample in the future. Elements are switched in parallel, so that, if a sample is attached, a parallel measurement will be made with the internal sample. The right-central portion of the dialog includes a switch that allows amplification of the return signal to be made automatically or selected manually from the list box. If Automatic Amplification is selected, the measurement is made repeatedly and the amplifica- 23

tion level adjusted until the signal is within the measurable range. This is a convenient option and is the default. However, if the researcher requires the measurement to be made on a virgin sample, this option is unacceptable since repeated PUND waveforms are applied before the sample is measured. In that case, it may be necessary to sacrifice a sample to determine the proper amplification level to set manually. The lower portion of the dialog includes the standard Help/OK/Cancel button suite. A text control is also placed here to identify the Task Version and data of latest update. The following controls have been added as of Version 3.1.0. Custom Amp - This radio button has been added to the External Amplifier list. This control allows the user to attach an existing amplifier (not provided by Radiant Technologies) to the experiment. The user must provide RTI the amplifier specifications such as voltage range, gain factor and maximum rise time. RTI will then provide the user with an identifying module that will allow the amplifier to be connected to the HVI. Sensor Impedance - This is added to the suite of Sensor controls. This control specifies an integer output impedance of the instrument attached to the Sensor port. The sensor output impedance in series with the Precision input impedance (currently about 4 k-ω) make a voltage divider that distorts the measured voltage by: Measured = Actual x 4k / (4k + Sensor Impedance). If the sensor output impedance is large with respect to the 4k input impedance, the distortion will be significant. This control accepts a value that is used to correct this distortion. Start with Last Amp Level - When Auto Amplification is checked, the system will begin to search for the correct amplification level by using the value specified in the Amp Level control, even though the control is disabled. Checking this new control will force the search to start at the amplification level that was established by the last executed Measurement Task. In Version 4.0.0 controls to set sample information, to select and configure the amplifier to use and to enable and configure sensor capture have been moved to subdialogs accessed through button controls. These displaced controls are controls that are usually either uncommonly used or set once in a Test Definition and not reset. Moving them to subdialogs reduces the clutter and confusing appearance of the PUND configuration dialog. With the release of Version 4.0.0, a new exporting option has been introduced. Once a 24

PUND Task has been executed - either in QuikLook or in a DataSet - it can have its configuration parameters and data exported to a Vision data file. Subsequent PUND Tasks can be configured to read from the data file in lieu of making a new measurement. This feature allows data taken from diverse places including QuikLook and multiple DataSets to be imported into other DataSets, where Filters can then be applied as though the Task were taking new data. Configuration of the PUND Task to import Vision Data File data is shown in Figure C.1.2, above. For details, see the exporting tutorial. A third internal reference (ferroelectric) sample has been added to the Precision Premier II tester and is planned in the Precision LC II tester. The ferroelectric test element includes two switchable capacitors in a single package inserted into a user-accessible connector. A variety of capacitors are available from Radiant Technologies, Inc. and this test element may be easily changed to adjust the type or to replace fatigued samples. Two Capacitors are available for switching, labeled Cap A and Cap B. The capacitors may be switched individually or in parallel. Cap A Enable and Cap B Enable controls are activated when the internal ferroelectric capacitor is enabled. Just as with the internal reference capacitor and resistor, the ferroelectric test sample may be switched into the test signal path in parallel with any externally-connected test sample and/or the internal reference capacitor and/or resistor. More information is available in the Version 4.0.0 What's New page. Note that the control is not shown in the Figures. C.3 - Controls Name Type Default Description PUND Task Name Text PUND-# This serves as a root identifier for this instance of the PUND Task. The Task will be identified with this value in the Editor and the Current Test Definition (CTD). Executed Tasks will be displayed and stored with this name with a. and an execution number appended to it. Each new instance of a PUND Task within the Editor should have a unique Task Name assigned. 30-character limit Volts Real 5.0 The sign and magnitude of the voltage to be applied during the Pulse. ±10,000 Volts maximum. Maximum is dictated by the selection in Voltage Range. Pulse Delay Real 1000.0 In milliseconds. The delay at 0.0 Volts between each of the PUND pulses. This zero-volt measurements (±P*r and ±P^r) are made after this delay. The purpose of the delay is to allow non-remanent switching Polarization to settle before the measurement is made. Sufficient delay should be programmed to allow this polarization to settle. Pulse Width Real 1.0 In milliseconds. The delay between the start of the rise of the each of the PUND pulses and the measurement of the Polarization at the pulse top. The pulse begins to fall to zero volts after this delay. Area (cm2) Real 1e-4 In cm 2. The surface area of the ferroelectric sample electrode. This value is used in calculating the measured Polarization. Thickness (µm) Real 0.3 In µm. The depth of the ferroelectric material in the sample. 25

Set Multiplexer Set Sample Info Set Sensor Sensor Enable Button Unpressed This control opens a subdialog in which one the DRIVE and RETURN signal channels and ports can be specified for switching to one or two connected 48-channel multiplexers. The subdialog is described in detail below. Button Unpressed Clicking this button opens a subdialog in which sample identifying information can be entered Button Unpressed This button opens a subdialog in which the signal-capture of the Sensor port can be enabled and configured or disabled. The status of the Sensor port is reflected in the Sensor Enable control. Check Box Unchecked Boolean - This control is disabled and is an indicator only - Indicates if the capture of the Sensor port signal is enabled (control is checked) or disabled (control is unchecked). Set Amplifier Button Unpressed Clicking this button opens a subdialog in which the Task can be set either to generate its drive signal from the internal ±100.0-Volt (±10.0-Volt, in some systems) amplifier or from an external High Voltage Amplifier (HVA) connect to the system through and accessory High Voltage Interface (HVI). If an HVA is selected, the tester port and HVI channel are specified. The subdialog is described in detail below. Amplifier Text "Internal" Read-Only. Indicates if the measurement is to be made using the internal (low-voltage) amplifier ("Internal") or an external High Voltage Amplifier (HVA) connect to the system through and accessory High Voltage Interface (HVI) ("High Voltage"). The text in this control is adjusted using Set Amplifier. Enable Ref. Cap Enable Ref. Resistor Box Enable Ref. Ferroelectric (Not Shown in the Figures Above) Cap A Enable Cap B Enable (Not Yet Shown in The Figures Above) Read Data from Vision File Check Box Unchecked Two independently-switchable internal test sample of known value are built into the Precision tester. These are arranged in parallel and may be switched into the drive/return test loop in any order. If a sample is attached to the external Drive and Return BNCs these will be added in parallel to the sample. Unchecked A third internal reference (ferroelectric) sample has been added to the Precision Premier II tester and is planned in the Precision LC II tester. The ferroelectric test element includes two switchable capacitors in a single package inserted into a useraccessible connector. A variety of capacitors are available from Radiant Technologies, Inc. and this test element may be easily changed to adjust the type or to replace fatigued samples. Just as with the internal reference capacitor and resistor, the ferroelectric test sample may be switched into the test signal path in parallel with any externally-connected test sample and/or the internal reference capacitor and/or resistor. More information is available in the Version 4.0.0 What's New page. Checking this control enables Cap A Enable and Cap B Enable. Otherwise those controls are disabled. Boolean Unchecked When the internal reference ferroelectric is selected, these controls are activated to allow the user to select the capacitor to be measured. Cap A, Cap B or both may be selected. When both are selected, the capacitors are measured in parallel. Both may also be disabled, though this has little practical value. Check Box Unchecked Checking this box instructs the PUND Task to read its data in from a file specified in File Name rather than making a meas- 26

urement. The file is a binary Vision Data File in PUNDspecific format. If this control is unchecked, File Name and Browse to File are hidden. If the control is checked, File Name and Browse to File are shown and all controls except Task Name and Comments are disabled. That is because the controlled values will be read in from the input file. If the control is checked, Browse to File must be used to locate and identify an PUND-formatted Vision Data File. File Name Text "" Read-only. This control shows the file path and file name of the PUND-formatted Vision Data File to be read for measured data and configuration parameters on Task execution. The control is updated using Browse to File. This control is hidden if Read Data From Vision File is unchecked. Browse to File Button Unpressed Clicking on this button opens a standard Windows browser dialog that must be used to locate and identify a PUNDformatted Vision Data File. By default, the browser filters for *.vis files, although the file may have any name and extension. Once identified, the file path and file name are displayed in File Name. This control is hidden if Read Data From Vision File is unchecked. HVI Channel Integer 0 0-2. Selects the channel on the HVI to which is connected the High Voltage Amplifier (HVA) that is to be used to make the measurement. This control is disabled if the "Internal" amplifier is selected in the Voltage Range radio buttons. Otherwise it Auto Amplification Start with Last Amp Level Check Box Check Box is enabled. 0 indicates that no HVI is to be selected. Checked Tells the tester to automatically adjust the sample return signal gain to an acceptable level. This is done by repeatedly measuring the sample using the configured conditions and adjusting the gain. Enabling this control disables Amp. Level and enables Start with last Amp Level. Checked See the discussion under Description above. This control was added as of Version 3.1.0. This control is disabled if Auto Amplification is not selected. Amp. Level List Variable If Auto Amplification is disabled, this control is used to select the amplification level to be used by the hardware to make the measurement. Help OK Cancel Button Unpressed Read this Help page. Button Unpressed Accept the configured PUND values Button Unpressed Do not add the PUND task to the list in the Editor C.4-48-Channel Multiplexer Configuration With the release of Version 4.0.0, the 48-channel multiplexer Drive and Return Port and Channel controls have been moved to a subdialog to reduce clutter and confusion on the main dialog. The subdialog is accessed through the Set Multiplexer button on the main dialog. The Set Mux Adjust button on the subdialog is disabled in QuikLook. Adjust Mux in a Branch Loop is also disabled and fixed at unchecked. 27

Figure C.4.1-48-Channel Multiplexer Configuration Subdialog. C.5 - Controls Name Type Default Description Drive/Return Integer 0/0 0-48. One or two 48-channel mulitplexers may be connected to the Precision tester using DB-25 connectors on the rear of the unit (limit one Channel for the Precision LC). These accessories allow up to 95 samples (with a single common return) to be connected to the tester. These controls designate the channel to apply the drive signal to and to receive the return signal from. Values of 0 through 48 may be entered. A value of 0 indicates that no multiplexer is present or that it should not be selected. In this case, the signal will be routed through the normal BNC connector on the tester front panel. Setting a non-zero value in Drive Channel and/or Return Channel enables Drive Port and/or Return Port and sets the value in the control(s) to a default of '1'. Setting '0' in Drive Channel and/or Return Channel disables Drive Port and/or Return Port and sets the value in the control(s) to a default of '0'. Drive/Return Integer 0/0 0-2 (0-1 for the Precision LC tester). The DB-25 connector on the rear Port of the Precision Tester to which is connected the multiplexer to be used for the Drive/Return Signal. These controls are disabled and forced to a value of '0' if the Drive/Return Channel controls are set to '0'. Otherwise they will be enabled and initially set to a default value of '1'. A value of '0' in this control indicates that no multiplexer is to be used. Adjust Mux Button Unpressed This control is disabled in QuikLook. Adjust Mux Check Unchecked This control is fixed at unchecked in QuikLook. in a Loop Box Help Button Unpressed Read this Help page. OK Cancel Button Unpressed Accept the configured 48-channel multiplexer configuration. Button Unpressed Close the dialog. Make no changes to the 48-channel multiplexer configuration. 28

C.6 - Amplifier Selection Selecting either the internal ±100 Volt amplifier (±10 Volts for some Precision LC models) or an external High Voltage Amplifier (HVA) connected to the tester through a High Voltage Interface (HVI) is accomplished by clicking Set Amplifier, opening the subdialog of Figure C.6.1. The "Internal" amplifier is set by default. In Version 4.0.0 High Voltage configuration has been simplified by allowing only two amplifier selections - "Internal Amplifier" or "External Amplifier". "Internal Amplifier" refers to the ±100.0-Volt amplifier (±10.0 Volts in some LC models) that the Precision Tester can produce with no externally-attached accessories. "External Amplifier" refers to any amplifier connected to the Precision Tester through an HVI. The type of external amplifier is no longer specified. The software recognizes the type of amplifier through the ID module that accompanies the delivery of the High Voltage accessories. With an "External Amplifier" specified, the user must choose an HVI Comm Port ('1' or '2' for the Precision Premier or Workstation, '1' for the Precision LC) and an HVI Channel ('1' or '2' for the 10 kv HVI, '1' for the 4 kv unit). Figure C.6.1 - Internal Amplifier Selection or External Amplifier Configuration. Name Type Default Description Internal Radio Amplifier Button Selected Selecting this control instructs Vision to use the Tester's internal amplifier to generate a signal of up to ±100.0 Volts. HVI Comm Port and HVI Channel will be forced to values of '0' and disabled. External Radio Unselected Selecting this control instructs Vision to use an external High Voltage Amplifier Button Amplifier (HVA), connected to the tester through a High Voltage Interface (HVI). Voltages of up to ±10,000 Volts can be switched to the sample HVI Comm Port and HVI Channel will be set to default values of '1' and enabled. HVI Integer 0/1 0, 1 or 2. This is the DB-25 connector at the rear of the tester to which the Comm external HVI is connected. For Precision Workstations and Premiers, this Port may take a value of '1' or '2', allowing two HVIs to be connected and switched in software. Precision LCs have only a single comm port, selected by '1'. A '0' indicates that the signal is to be taken from the Tester's 29

HVI Channel internal amplifier. If Internal Amplifier is selected, this control is forced to '0' and disabled. If External Amplifier is selected, this control is set to '1' by default and enabled. Integer 0/1 0, 1 or 2. This is the channel at the rear of the HVI to which the HVAs connected. For 10 kv HVIs, this may take a value of '1' or '2', allowing two HVAs to be connected and switched in software. 4 kv HVIs have only a single channel, selected by '1'. A '0' indicates that the signal is to be taken from the Tester's internal amplifier. If Internal Amplifier is selected, this control is forced to '0' and disabled. If External Amplifier is selected, this control is set to '1' by default and enabled. C.7 - Sample Identifying Information Clicking Set Sample Info opens a subdialog in which several sample identifying parameters may be configured. The purpose is strictly for documentation and most identifiers are not generic enough to apply to all cases. C.8 - Controls Figure C.7.1 - Sample Documentation Subdialog. Name Type Default Description Sample Name Text "" 24 Characters Maximum. A unique description of the sample being measured Lot ID Text "" 12 Characters Maximum. A unique description of the the lot from which the sample under test is taken. Wafer ID Text "" 12 Characters Maximum. A unique description of the the wafer from which the sample under test is taken. Die Row Integer 0 The vertical location on the wafer of the sample under test. May be negative. Die Column Integer 0 The horizontal location on the wafer of the sample under test. May be negative. 30

Capacitor Number OK Cancel Integer 0 Serial identifier of the capacitor being tested. Button Unpressed Accept the entered values. Button Unpressed Close the dialog. Do not adjust the sample information. C.9 - Sensor Configuration Clicking Set Sensor opens a subdialog that allows voltages at the external SENSOR port to be acquired along with the measured data. The SENSOR data can be linearly scaled and offset to convert them from a voltage to a meaningful value. Inputting the known output impedance of the device attached to the sensor helps correct for small errors in the measured value. The sensor data can be labeled for identification. As shown on the dialog, the derived sensor value is given by: Sensor Data = Sensed Voltage x Sensor Scale (Tester Input Impedance + Sensor Impedance) / Tester Input Impedance + Offset (2) The results of enabling or disabling the Sensor data will be displayed in the Sensor Enabled control on the main dialog when the subdialog is closed. Figure C.9.1 - Sensor Configuration Subdialog. Sensor Scale Sensor Offset Name Type Default Description Sensor Check Unchecked Checking this control tells the software to capture the voltage signal attached to the SENSOR port simultaneously with the measured data. The Enable Box signal will be scaled and offset using equation (2). Checking this box enables Sensor Scale, Sensor Offset, Sensor Impedance and Sensor Label. Real 1.0 Checking Sensor Enable enables this control. Otherwise it is disabled. The value in this control will be used as a scale factor to linearly convert the measured sensor signal to a physical value in accordance with equation (2). Real 0.0 Checking Sensor Enable enables this control. Otherwise it is disabled. The value in this control will be used as an offset value to linearly convert the 31

Sensor Impedance Sensor Label Cancel OK measured sensor signal to a physical value in accordance with equation (2). Integer 50 Checking Sensor Enable enables this control. Otherwise it is disabled. The value in this control will be used as a corrective term to adjust the measured voltage in accordance with equation (2). Text Box "" Checking Sensor Enable enables this control. Otherwise it is disabled. This value is used to identify the converted SENSOR signal when the sensor data are displayed. Button Unpressed Close the dialog. Discard any changes made in the Sensor configuration. Button Unpressed Close the dialog. Make the indicated changes in the Sensor configuration. 32

D - QuikLook Plot Setup Task Name: PUND Version: 4.0.0 Last Task Update: 12 May 2007 In QuikLook Menu: Yes Folder: Hardware Subfolder: Measurement Subsubfolder: Pulse Window Name: PUND QuikLook::PUND Plot Setup Change Record: Go to Change Record Known Bugs: None User Variables Added: Go to List D.1 - Setup Dialog Figure D.1.1 - PUND Task QuikLook Plot Configuration Dialog. D.2 - Description The plot setup page is used to configure the appearance of the plotted data that result 33

from a QuikLook measurement. Plot title, subtitle and axis labels will appear directly on the plot surface relative to the charted data. A user self-prompt will allow additional labeling that appears above the plot. The prompt may have a single User Variable appended to it. A Data Label will appear on the plot in association with the data line color and type and symbol to distinguish the PUND data from other plotted data. Other plotted data will appear if the sensor port is enabled during the execution. The Sensor data has its own label already associated with it. Comments are provided in this dialog to allow a detailed description of the intent of the measurement. D.3 - Controls Name Type Default Description Plot Title Text 60 characters maximum. User provides a description of the data being plotted. Text appears centered above the plotted data. Plot Subtitle Text "" 60 characters maximum. User provides refinement to the description of the data being plotted. Text appears centered above the plotted data, immediately below Plot Title. Plot X Axis Label Plot Y Axis Label Data Label User Self- Prompt Parameter to Append to Prompt Text "Pulse Top/Pulse Bottom Sequence" Text "Polarization (µc/cm2)" 60 characters maximum. User provides a description of the independent variable being plotted. Text appears centered below the X- Axis. PUND X-Axis values have no real significance. 60 characters maximum. User provides a description of the measured variables being plotted. Text appears vertically along the Y- Axis. Text "Pulse Data" 32 characters maximum. Label to appear on the plot to identify the PUND data trace, when a sensor trace is also present. Label will be associated with the data trace line type and color and symbol. Text "" 60 characters maximum. An additional label provided by the user that appears on the dialog above the plot area. This string may have a single User Variable, identified in Parameter to Append to Prompt, appended to it. This label can be used to examine an experimental characteristic, parameter or result. List Box <<None>> The control is used to select the User Variable to append to the User Self-Prompt on the results dialog. Comments Text A string of up to 511 characters to be written at the user s discretion. Intended to allow a detailed description of the design decision to include the PUND Task. Help OK Cancel Button Unpressed Read this Help page. Button Unpressed Accept the configured PUND values Button Unpressed Do not add the PUND task to the list in the Editor 34

E - PUND Execution As with most Measurement Tasks, executing the PUND Task in a Test Definition causes the Task, along with its measured data, to be written to the Archive of the DataSet in which it was executed. The data can then be recalled from the Archive, for display and review, as described below. Data are not displayed by the Task during execution, though they may be displayed by associating the Task with one or more Filter Tasks. However, the Task may also be executed independent of any DataSet by selecting it from the Quik- Look menu. This provides for immediate and independent Task configuration and execution. In the case of QuikLook execution, the acquired data are immediately displayed in a Results dialog as shown in Figure E.1. Figure E.1 - PUND Task QuikLook Measurement Results. Most of the controls of the Results Dialog are informational and set as read-only. Central 35

to the dialog are the plotted data. The plot includes titles and labels as specified in the Plot Setup dialog. Above the plot is a Prompt string that may have a User Variable appended to it. To the left is information regarding the configuration of the measurement. To the upper right are the actual measured values. This includes a control labeled Cef (nf). This is an Effective Capacitance computed from P* and given by... Cef (nf) = ( 1000 x Area (cm 2 ) x P* (µc/cm 2 ) ) / ( VMax - Delay Volts ) The sample dielectric constant, given as Kef is also presented in this area. Kef is derived from Cef by... Kef = (Cef x 1e-9 x Thickness (µm) x 1e-6 ) /(Area (cm 2 ) x 1e-4 x 8.84541878 x 1e-12 ) Also displayed are four different representations of remanent Polarization, known as P. Delta P = P* - P^ Delta Pr = P*r - P^r -Delta P = -P* - (-P^) -Delta Pr = -P*r - (-P^r) To the lower left is a series of check boxes that indicate the status of the measurement. An operational check box, Create a DataSet, is available to store the data into a Vision format as described below. An Export button can be used to move the data into formats external to Vision as described under Exporting. When measured data are read, eight values - ±P*, ±P*r, ±P^ and ±P^r - are captured by the Task. There is no independent (X-Axis) value against which to plot these values. Instead a synthetic plot is created by assigning the measured value to two fixed values as defined in the table below. Fixed X values overlap so that two data endpoints are presented at the same X point. This extends the measured values over the plot. Since the PUND values are measured in sequence, this representation crudely simulates plotting the values as a function of time. The results are as shown in the figure above. Real measured data will have much the same appearance, changing only in the plotted values. Measured Value X Start Point X End Point P* 1.0 2.0 P*r 2.0 3.0 P^ 3.0 4.0 P^r 4.0 5.0 -P* 5.0 6.0 -P*r 6.0 7.0 -P^ 7.0 8.0 -P^r 8.0 9.0 36

E.1 - Create a DataSet A QuikLook Task execution is intended to provide a rapid sampling of the test device and is not intended to save data. This is emphasized by the fact that the QuikLook measurement lies outside the DataSet and Archiving structure of Vision. However once data are acquired, there are two mechanisms by which they may be stored. The first is to export the data out of the Vision program as discussed below. The second method is to maintain the data within the Vision program by moving them into a DataSet Archive. This process begins with the data displayed in the Response Dialog as shown in Figure E.1. Once OK is clicked, the dialog will close and the data will be lost. However, if Create a DataSet is checked before closing the dialog, the process of saving the QuikLookmeasured data to a DataSet Archive will begin. With the check box checked, once OK is clicked, the Results Dialog will close and a dialog will appear that allows the user to select the target DataSet. The target may either be an existing DataSet that is open and whose tab is showing in the DataSet Explorer or a new DataSet may be created. Figure E.1.1 - Select a Target DataSet. If a new DataSet is selected, the New DataSet dialog will appear. 37

Figure E.1.2 - Configure the New DataSet. The DataSet is assigned a name and a file name and path. Experimenter's initials are also required. Comments are optionally assigned to the DataSet. The process can be halted at this time by clicking Cancel. In that case the data will be permanently lost. On clicking OK, the DataSet will be created. The PUND Task, configured as it was in the QuikLook setup dialog, will become the sole entry in the Current Test Definition. Regardless of the target DataSet, a CTD naming dialog will appear to allow the Test Definition to be immediately renamed. Figure E.1.3 - CTD Renaming Dialog. The DataSet will contain an Archive with a single Executed Test Definition. The ETD will be named as the CTD and will contain the single PUND Task. The Task will be configured as it was for the QuikLook execution and will contain the data measured by that 38

execution. Configuration and data can be verified by performing an Archive Regraph as described in the next section. Figure E.1.4 - New DataSet Created from the QuikLook PUND Task Execution. E.2 - Archive Regraph Once the PUND Task has been executed and written to a DataSet Archive (either by executing a Test Definition or by creating a DataSet from a QuikLook execution), it can be recalled to allow both the Task configuration and the measured data to be reviewed. From the DataSet Explorer, double-click the desired DataSet to open it and create a DataSet tab in the Explorer. 39

Figure E.2.1 - Locate and Recall the PUND Task from a Data- Set Archive. Open the DataSet Archive. Open the desired ETD and its "Experiment Data" folder. Double-click the desired Task. The QuikLook configuration dialog will appear. 40

Figure E.2.2 - PUND Configuration Dialog Recalled from a DataSet Archive. Most of the controls of the dialog are disabled. They are presented here for configuration review. Set Sample Info, Set Adjust Mux, Set Sensor, Set Adjust Params and Set Amplifier buttons are enabled to allow the subdialogs to be viewed for their configuration. These dialogs will have all controls disabled. Help is available and Cancel/Plot will eliminate the dialog and continue the regraph process. Once the configuration dialog has closed an intermediate dialog will appear that can be used to set or reset plot titles, prompt values and parameters to append to the prompt. This dialog is a duplicate of the QuikLook Plot Setup dialog and, if the DataSet was created from a QuikLook measurement, the dialog will show the titles as they were configured in QuikLook. 41

Figure E.2.3 - PUND Plot Configuration Dialog for Data Recalled from a DataSet Archive. Clicking Plot causes the QuikLook Results Dialog to appear. The dialog will show the data as they were measured and stored in the Archive. The dialog is identical to the Results Dialog that appears as the result of a QuikLook execution, except that the Create a DataSet control is disabled. The Export button is enabled to allow data to be sent to a format outside of Vision as discussed in the next section. 42

Figure E.2.4 - PUND Data Recalled from a DataSet Archive. E.3 - Sensor Data Externally-supplied voltages present at the SENSOR port on the tester's rear panel can be sampled simultaneously with the various PUND pulse top and pulse bottom measurements. The purpose is generic. Any voltage in the range ±10.0 Volts can be measured. The voltage might represent the output of any sort of instrument such as a digital thermometer, light intensity meter, displacement or force meter and so on. The captured voltage is passed through a linear transform of the form: Displayed value = m x SENSOR Voltage + b where m and b are specified by the user when the sensor capture is enabled. In the example of Figure E.3.1, the SENSOR data represent 10 x Drive Voltage + 100. 43

E.4 - Exporting Figure E.3.1 - PUND Task Data with Sensor Data. In order to allow data to be exported from the QuikLook measurement or and Archive Regraph, an Export button appears on the data results dialog. Clicking the button produces a subdialog that allows printer configuration. Data can be exported to one of four targets. Dialog appearance depends on the selected target. Printer - This is the default selection. Pre-formatted text is sent to the printer attached to the Precision Tester (Workstation and Premier testers) or the tester host computer (all others) when the configuration dialog is closed. As of version 4.0.0, Line Spacing, Left Margin and Tab Spacing controls are shown on the dialog when "Print" is selected in Select Option. These allow text horizontal and vertical placement to be adjusted, through trial-and-error, for the particular printer. 44

Figure E.4.1 - Export Dialog with Printer Configuration Selected. Figure E.4.2 - Standard Windows Printer Configuration Dialog. 45

Text File - Selecting this option enables the Browse for File Name button. Clicking this button will open a standard browser dialog in which a file name and path must be selected. If the file already exists, the output will be appended to existing text. An output file name must be specified for this export. The figures show a partial sample of the text export from a file generated using the data shown in Figure E.3.1. Figure E.4.3 - Export Dialog with Text Configuration Selected. 46

Figure E.4.4 - PUND Task Sample Text Export File. Upper Portion. 47

Figure E.4.5 - PUND Task Sample Text Export File. Lower Portion. Excel - Selecting this option enables the Browse for File Name button. Clicking this button will open a standard browser dialog in which a file name and path may be selected. Specifying a file name is optional. However, if specified, a unique file name/file path must be created or an overwrite situation will occur. Data are not appended to existing files. When the configuration dialog is closed, the Excel program will be started and a spread sheet created. When Excel is closed, the data will be written to the specified file name, or the user will be prompted to save if the file is not specified. Programmatic techniques for producing Excel '97 files were provided by Lacoude and Ketema 2. Office '97 or Office 2000 must be loaded for this option. Office is not provided as standard with the tester or Vision software. Utilities to write to Office 2003 or Office XP are not yet available. The figures show a sample of the Excel export file. Office 2000 exporting has been added as of Version 4.0.0. 48

Figure E.4.6 - Export Dialog with Excel Configuration Selected. 49

Figure E.4.7 - PUND Task Sample Excel Export Output. Upper Portion. 50

Figure E.4.8 - PUND Task Sample Excel Export Output. Lower Portion. 51

Word - Selecting this option enables the Browse for File Name button. Clicking this button will open a standard browser dialog in which a file name and path may be selected. Specifying a file name is optional. The Word program will be opened and written when the regraph dialogs have been closed. If a new file name is specified, the document will be saved immediately. Word export to Office '97 depends on two template files - "Template.doc" and "Template2.doc"- located in "D:\DataSets" (C:\DataSets for the Precision LC tester family.). These are blank Word files. Template.doc is in portrait orientation with tabs at 1", 2.5", and 4". Template2.doc is in landscape orientation with tabs at 1", 2.5", 4" and 6". Both pages are set to Times New Roman 12 pt font. Word export output is formatted to align properly with these settings. Care must be taken not to overwrite the templates. If no file name is specified, the user will be prompted to save the documents when closed. If the documents are saved, the template file will be overwritten. In this event, the file should be renamed appropriately and a new template file created with the specifications given above. Exporting to Word 2000 does not depend on the template files. Office '97 or Office 2000 must be loaded for this option. Office is not provided with the tester or Vision software. Utilities to write to Office 2003 or Office XP are not yet available. The Word export option has been added as of Version 3.1.0. Office 2000 exporting is available as of Version 4.0.0. The Header Only option appears when Word selected. Checking this control (default) suppresses the point-by-point output of measured data. This eliminates many pages of document that simply reflect columns of numbers, greatly reducing document size and clutter. The sample figures show the output with Header Only unchecked. 52

Figure E.4.9 - Export Dialog with Word Configuration Selected. 53

Figure E.4.10 - PUND Task Sample Word Export Output. Upper Portion. 54

Figure E.4.11 - PUND Task Sample Word Export Output. Upper Lower Portion. 55

Vision Data File - In this option, added as of Version 4.0.0., the Task configuration parameters and measured data are written to a formatted binary file. Subsequent instances of the Simple Pulse Task can be configured to import the data from the file, on execution, rather than making a new measurement. In this way, data can be moved from one DataSet to another where they can be grouped with other data and filtered. This utility is demonstrated in Figure E.4.12. Selecting this option enables the Browse for File Name button. Clicking this button will open a standard browser dialog in which a file name and path may be selected. Specifying a file name is required. 56

Figure E.4.12 - Utility of Vision Data File Exporting. 57