B. MR-J3 Linear Servomotors

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SERVOMOTORS AN AMPLIFIERS. MR-J3 Linear Servomotors LM-H2 Linear Servomotor Selection LM-H2P - M- Rated Thrust 06 60N 12 120N 24 240N 36 360N 48 480N 72 720N 6 60N A 2m s 128 mm 4 0 -H2 1A-06 -H2 2A-12 -H2 2-24 -H2 2C-36 -H2 2-48 -H2 3A-24 -H2 3-48 -H2 3C-72 -H2 3-6 LM-H2S 0- - (Secondary side: Magnet) 4 0 -H2 10-288 -H2 10-384 -H2 10-480 -H2 10-768 -H2 20-288 -H2 20-384 -H2 20-480 -H2 20-768 -H2 330-288 -H2 30-384 -H2 30-480 -H2 30-768 C 224 mm 320 mm 416 mm Width (Nominal imension) 1 50 mm 2 70 mm 3 110 mm 288 288 mm 384 384 mm 480 480 mm 768 768 mm Width (Nominal imension) 1 42 mm 2 65 mm 3 105 mm LM-F Linear Servomotor Selection LM-FP - M- 2m s H 20 mm 530 mm 770 mm 1010 mm Width (Nominal imension) 2 120 mm 4 200 mm 5 240 mm Rated Thrust Self-Cooling Liquid Cooling 06 300N 600N 12 600N 1200N 18 00N 1800N 24 1200N 2400N 36 1800N 3600N 48 2400N 4800N 60 3000N 6000N LM-FS 0- - (Secondary side: Magnet) Width (Nominal imension) 2 120 mm 4 200 mm 5 240 mm 480 480 mm 576 576 mm 1

LM-U2 (Medium Thrust) Linear Servomotor Selection LM-U2P - M- LM-U2S 0- - (Secondary side: Magnet) 2m s Rated Thrust 05 50N 07 75N 10 100N 15 150N 22 225N 0 0-2 A-05-2 A-10-2 A -15-2 -07-2 -15-2 -22 0 0-2 A0-240 - 2 A0-300 - 2 A0-420 - 2 0-240 - 2 0-300 - 2 0-420 130 mm 250 mm 370 mm 240 240 mm 300 300 mm 420 420 mm Width (Nominal imension) A Width (Nominal imension) 66.5 mm A 62 mm 82 mm 86.5 mm LM-U2 (Large Thrust) Linear Servomotor Selection LM-U2P2 - M- M 2m/s Rated Thrust 40 400N 60 600N 80 800N 2SS0 LM-U2P2-40M LM-U2P2C-60M LM-U2P2-80M C 286 mm 406 mm 526 mm LM-U2S20- - (Secondary side: Magnet) 300 300 mm 480 480 mm 2SS0 LM-U2S20-300 LM-U2S20-480 Mitsubishi Electric Automation Servomotors and Amplifiers 2

SERVOMOTORS AN AMPLIFIERS Servomotor Types Motor Series LM-H2 Series aminated ore o ded resin otor oi Thrust Range (N) 100 1000 10000 150 2400 (se-ooin) aimum 60 960 T e motor onsists o t e primar side ( aminated ore motor oi ) and t e se ondar side (permanent ma nets mountin p ate). T e primar side as s ots on t e aminated ore. T e motor oi is ound on t is aminated ore and t e entire se tion is mo ded resin. T e se ondar side as at permanent ma - nets positioned and i ed on t e mountin pate. T e entire se tion is moded resin. Core Type LM-F Series iquid- oo in pipe aminated ore ermanent ma net ountin p ate o ded resin Applications emi ondu tor mountin s stem a er eanin s stem C assem s stem (mu ti- ead use) 300 1800 18000 3000 (se-ooin) ( iquid- oo in ) aimum 600 6000 T e t rust o ume ratio an e in reased a o in spa e-sa in s. (Hi t rust densit ) T e attra tion or e un tions as t e pre- oad on t e uide a o in i -ri idit to e attained. T e asi stru ture is t e same as t e -H2 series. Ho e er - series as a iquid- oo in pipe in t e primar side to suppress eat eneration. ir u atin oo in iquid at 5 iter min t e ontinuous t rust an e t i e as mu as t at o se - oo in. otor oi ermanent ma net ountin p ate Applications NC ma ine too s ateria and in Coreless Type LM-U2 Series ountin p ate o ded resin otor oi ermanent ma net 150 3200 (se-ooin) aimum 50 800 Applications reen printin s stem annin e posure s stem nspe tion s stem T e motor onsists o t e primar side (motor oi ) and t e se ondar side (permanent ma nets mountin p ate). T e primar side does not a e a aminated ore. T e motor oi is a urate positioned on t e ase and mo ded resin. n t e se ondar side permanent ma nets are a urate positioned and i ed to a e ea ot er in a -s aped i e mountin p ate. peed u tuations are er sma due to e imination o ma neti attra tion or e and o in. T e uide i e an e e tended as t ere is no attra tion or e. 3

LM-H2 Linear Motor Specifications Linear Servomotor Model LM-H2 Compatible Amplifier Model MR-J3- P1A-06M- 4SS0 40- RJ004U500 P2A-12M- 40- RJ004U501 P2-24M- 70- RJ004U502 P2C-36M- 200- RJ004U503 P2-48M- 200- RJ004U504 P3A-24M- 70- RJ004U505 P3-48M- 200- RJ004U506 P3C-72M- 350- RJ004U507 Power Facility Capacity (kva) 0.9 0.9 1.3 3.5 3.5 1.3 3.5 5.5 7.5 Cooling Method Thrust Self-cooling (N) 60 120 240 360 480 240 480 720 960 Maximum (N) 150 300 600 900 1200 600 1200 1800 2400 (m/s) (*1) 2.0 Magnetic Attraction Force (N) 500 1000 1900 2700 3500 2000 3700 5300 7000 Weight kg (lb) P3-96M- 500- RJ004U508 Primary Side (Coil) 0.9 (2.0) 1.4 (3.1) 2.5 (5.6) 3.6 (8.0) 4.7 (11) 2.4 (5.3) 4.3 (9.5) 6.2 (14) 8.1 (18) Secondary Side (Magnet) 288mm / piece: 0.6 (1.4) 384mm / piece: 0.8 (1.8) 480mm / piece: 1.0 (2.2) 768mm / piece: 1.6 (3.6) 288mm / piece: 1.1 (2.5) 384mm / piece: 1.4 (3.1) 480mm / piece: 1.8 (4.0) 768mm / piece: 2.9 (6.4) 288mm / piece: 3.2 (7.1) 384mm / piece: 4.3 (9.5) 480mm / piece: 5.3 (12) 768mm / piece: 8.5 (19) Secondary Side Model LM-H2 S10-_-4SS0 S20-_-1S20 S30-_- Recommended Load / Motor Mass Ratio Maximum of 30 times the mass of the linear servomotor s primary side Open (protection level: IP00) Environment Ambient Temperature Ambient Humidity Atmosphere Vibration Elevation 0 to 40 C (32 to 104 F) (non-freezing), storage: -15 to 70 C (5 to 158 F) (non-freezing) 80% RH maximum (non-condensing), storage: 90% RH maximum (non-condensing) Indoors (no direct sunlight); no corrosive gas, inflammable gas, oil mist or dust 49m/s² maximum 1000m or less above sea level Notes: 1. The linear servomotor s maximum speed or linear encoder s rated speed, whichever is smaller, is the upper limit value of the linear servomotor s speed. Mitsubishi Electric Automation Servomotors and Amplifiers 4

SERVOMOTORS AN AMPLIFIERS LM-F Series Linear Motor Specifications Linear Servomotor Model LM-F P2-06M- P2-12M- P2F-18M- P4-12M- P4-24M- P4F-36M- P4H-48M- P5H-60M- (*2) Compatible Self-Cooling 200RJ004U518 500RJ004U520 700RJ004U522 500RJ004U524 700RJ004U526 11KRJ004U528 15KRJ004U530 22K4RJ004U532 Amplifier MR-J3 Liquid-Cooling 200RJ004U519 500RJ004U521 700RJ004U523 500RJ004U525 700-RJ004U527 11KRJ004U529 15KRJ004U531 22K4RJ004U533 Power Facility Capacity (kva) 3.5 5.5 10 7.5 18 18 18 22 Cooling Method Self-cooling or liquid-cooling (Self-Cooling) (N) 300 600 900 600 1200 1800 2400 3000 (Liquid-Cooling) 600 1200 1800 1200 2400 3600 4800 6000 (N) Maximum (N) 1800 3600 5400 3600 7200 10800 14400 18000 Thrust (m/s) (*1) 2.0 Magnetic Attraction Force (N) 4500 9000 13500 9000 18000 27000 36000 45000 Weight kg (lb) Primary Side (coil) 9 (20) 18 (40) 27 (60) 14 (31) 28 (62) 42 (93) 56 (125) 67 (150) Secondary Side (Magnet) 480mm / piece: 7.1 (16) 576mm / piece: 9.0 (20) 480mm / piece: 13.5 (30) 576mm / piece: 16.0 (36) 480mm / piece: 20.0 (44) 576mm / piece: 26.0 (58) Secondary Side Model LM-F S20-_- S40-_- S50-_- Recommended Load / Motor Mass Ratio Maximum of 15 times the mass of the linear servomotor s primary side Open (protection level: IP00) Ambient Temperature 0 to 40 C (32 to 104 F) (non-freezing), storage: -15 to 70 C (5 to 158 F) (non-freezing) Ambient Humidity 80% RH maximum (non-condensing), storage: 90% RH maximum (non-condensing) Environment Atmosphere Vibration Elevation Indoors (no direct sunlight); no corrosive gas, inflammable gas, oil mist or dust 49m/s² maximum 1000m or less above sea level Notes: 1. The linear servomotor s maximum speed or linear encoder s rated speed, whichever is smaller, is the upper limit value of the linear servomotor s speed. 2. Use 400VAC rated servo amplifier. 5

LM-U2 Series Linear Motor Specifications Linear Servomotor Model PA-05M-0SS0 PA-10M-0SS0 PAF-15M-0SS0 P-07M- P-15M- PF-22M- P2-40M-2SS0 P2C-60M-2SS0 P2-80M-2SS0 LM-U2 Compatible Amplifier MR-J3-20- 40-40- 20-60- 70-200- 350-500- RJ004U512 RJ004U513 RJ004U514 RJ004U515 RJ004U516 RJ004U517 RJ004U509 RJ004U510 RJ004U511 Power Facility Capacity (kva) 0.5 0.9 0.9 0.5 1.0 1.3 3.5 5.5 7.5 Cooling Method Thrust Self-cooling (N) 50 100 150 75 150 225 400 600 800 Maximum (N) 150 300 450 225 450 675 1600 2400 3200 (m/s) (*1) 2.0 Magnetic Attraction Force (N) 0 Primary Side (Coil) 0.3 (0.67) 0.6 (1.4) 0.8 (1.8) 0.4 (0.89) 0.8 (1.8) 1.1 (2.5) 2.9 (6.4) 4.2 (9.3) 5.5 (13) Weight kg (lb) Secondary Side (Magnet) Secondary Side Model LM-U2 Recommended Load / Motor Mass Ratio Environment Ambient Temperature Ambient Humidity Atmosphere Vibration Elevation 240mm / piece: 2.0 (4.4) 300mm / piece: 2.5 (5.6) 420mm / piece: 3.5 (7.8) 240mm / piece: 2.6 (5.8) 300mm / piece: 3.2 (7.1) 420mm / piece: 4.5 (10) SA0-_-0SS0 S0-_- S20-_-2SS0 Maximum of 30 times the mass of the linear servomotor s primary side Open (protection level: IP00) 0 to 40 C (32 to 104 F) (non-freezing), storage: -15 to 70 C (5 to 158 F) (non-freezing) 80% RH maximum (non-condensing), storage: 90% RH maximum (non-condensing) Indoors (no direct sunlight); no corrosive gas, inflammable gas, oil mist or dust 49m/s² maximum 1000m or less above sea level Notes: 1. The linear servomotor s maximum speed or linear encoder s rated speed, whichever is smaller, is the upper limit value of the linear servomotor s speed. 300mm / piece: 9.6 (22) 480mm / piece: 15.3 (34) Mitsubishi Electric Automation Servomotors and Amplifiers 6

SERVOMOTORS AN AMPLIFIERS C. Linear Encoder Compatible Linear Encoders (*1, *2) Linear Encoder Type Manufacturer Model Resolution Mitsubishi Serial Interface Compatible AZ Phase ifferential Output Type (*5) Absolute Type Incremental Type Incremental Type Mitutoyo Corporation Heidenhain Corporation Sony Manufacturing Systems Corporation Renishaw Inc. Heidenhain Corporation Not designated - Rated Speed (*3) Effective Measurement Length (Maximum) 3000mm AT343A 2.0m/s 0.05μm AT543A-SC 2.5m/s 2200mm ST741A 0.5μm 4.0m/s 6000mm ST743A (*7) 0.1μm LC491M 2.0m/s 2040mm 0.05μm/ 0.01μm LC192M 3.0m/s 4240mm SL710+PL101-R/RH +MJ830 or MJ831 0.2μm (*4) 6.4m/s 3000mm SH13 +MJ830 or MJ831 0.005μm (*4) 1.4m/s 1240mm RGH26P 5μm 4.0m/s RGH26Q 1μm 3.2m/s 70000mm RGH26R 0.5μm 1.6m/s LIA485+APE391M LIA487+APE391M 0.005μm (20/4096μm) Within tolerable resolution range (*6) 4.0m/s epends on linear encoder 30040mm 6040mm epends on linear encoder Communication Method 2-wire type 4-wire type 2-wire type 4-wire type ifferential 3-pair type Position System Absolute Incremental Notes: 1. Consult with the relevant linear encoder manufacturer for details on the linear encoder s working environment and specifications. 2. The linear servomotor generates heat. Take the linear encoder s working environment temperature into consideration when configuring the system. 3. The indicated values are the linear encoder s rated speed when used in combination with the Mitsubishi linear compatible servo amplifier. The values may differ from each manufacturer s specifications. The linear servomotor s maximum speed or linear encoder s rated speed, whichever is smaller, is the upper limit value of the linear servomotor s speed. 4. The resolution varies according to the setting value of the interpolator, MJ830/MJ831 manufactured by Sony Manufacturing Systems Corporation. Set the resolution between the minimum resolution and 5mm. 5. Output the A-phase, -phase and Z-phase signals in the differential line driver. The phase difference of A-phase pulse and -phase pulse, and the width of Z-phase pulse must be 200ns or wider. Home position return is not possible with a linear encoder which is not equipped with a Z-phase. 6. The tolerable resolution range is 0.005 to 5mm. Select the linear encoder within this range. 7. Servo amplifier with software version A1 or above is compatible with this linear scale. LA LAR Phase difference 200ns or more L LR 1 Z phase pulse... 200ns or more LZ LZR 7