A/ R/L R/S High-Speed Digital Controller - or loops HA Series HA00 HA900 HA0 HA90 General Description he HA series are digital PID controllers with a high speed sampling time of ms (0.0 sec) with high-resolution thermocouple, RD or current voltage input, supplied with parameters settable in /00 sec. A difference between HA00/900 and HA0/90 is in the autotuning. If the process is less than 0 seconds to setpoint, the HA00/900 is best suited with factory default values pre-set for fast process. Applications in RP (Rapid hermal Process), RA (Rapid hermal Anneal) and temperature control of semiconductor manufacturing can be controlled by the HA series. he high speed sampling function also makes it suitable for other applications requiring fast control such as pressure or flow rate. Features Ultra High Speed Sampling 0.0 sec wo Channels in One Controller Ramp / Soak Program Control Cascade Control Power Feed Forward Function Communications Ultra High Speed Sampling 0.0 sec wo Channels in One Controller Dual loop control can be performed with a single controller. All loops operate at 0.0ms sampling time. he HA series digital controller supplies feedback control 0 times in one second. It makes the HA series suitable for any application requiring fast control response and high accuracy. he PID parameters can be set in /00 unit which supports extremely fast and accurate control by the HA series. 00ms sampling controller ( C) ( C) ms sampling controller SCR SCR Controlled object 00 S P 00 S P 00 00 Cascade Control in One Controller sec sec Cascade control can be performed with a single controller. Input type can be specified independently for each channel. Direct Function keys Direct function keys are marked for Auto/anual, Remote /Local, and Run/Stop switching to eliminate error when entering changing patterns. Used and Unused of each function key is also possible. aster input Slave input Auto/anual Remote/Local RU/SOP A/ R/L R/S Control output HA_0E
ISUBISHI POWER SYSE F F F F F OPC-0 High-Speed Digital Controller - or loops HA Series Features Ramp / Soak Program Control he HA Series high speed temperature controller has ulti-memory Area function which stores up to sets of control parameters. Parameters stored in each memory area are the control set value, event set value, PID values, control response, ramp-to-setpoint UP and DOW, soak time, and link area number. < ulti-memory araa > 9 0 Setting value Event setting value Proportional band Integral time Derivative time Control response Setting change rate (Up) Setting change rate (Down) Soak time Link area number Up to -segment ramp/soak control is available by using the memory area function (ramp-to-set point UP and DOW, soak time, link area number). P emp. Area S Area S Area S Communications < Link example of each area > Area soak time Area S changing rate limiter (High) Area soak time Area S changing rate limiter (High) emory area emory area Area S changing rate limiter (Low) Area soak time emory area ime he HA Series incorporates a maximum of two communication ports. he communication method can be selected from serial communication (RS-, RS-A, RS-C) and Open network (Deviceet, Profibus, CC-Link). umerous Inputs and Outputs A maximum of two measuring inputs (one input can be used as a remote setpoint signal) and seven event inputs can be specified. A maximum of five outputs can be specified, and various output functions (control output, analog retransmission, event up to ) can be allocated in output logic operation. Available inputs and outputs depend on the specifications. I easured input (ch) I easured input (ch) or Remote setpoint signal DI to DI Area o. switching DI to DI Area o. switching Run/Stop Auto/anual Remote/Local Sensor power supply output is also available. DC ± % (ax. 0mA) Output from OU. When sensor power supply output is specified, OU and OU can not be added. Suitable for arious Process Control Using industry standard DC inputs (current and voltage), the HA Series can be used in process control applications including pressure, flow rate and levels. Autotuning Event types : Deviation high, Deviation low Deviation high/low, Band Process high, Process low Set value high, Set value low LBA (Assignable to event outputs and.) DO Control output (ch) Analog retransmission DO Control output (ch) Analog retransmission D0 Event, Heater break alarm Analog retransmission DO Event,,, Heater break alarm DO Event, FAIL he Autotuning used on HA00/900 is suitable for a control system with a fast response. PID values can also be manually adjusted so that they may be further optimized for the processes. Just for your information, this Autotuning is performs well for control systems in which temperature rises up to the set point in 0 seconds or faster. If the application is slower (e.g. minutes to reach the set point), HA0/90 are recommended. Serial communications (ODBUS RKC standard) Open network (CC-Link) HA_0E
High-Speed Digital Controller - or loops HA Series Specifications Input umber of inputs points (I to I) Isolated between each channel nd input (I) can be used as a remote input Cascade connection available Input Universal input a) Low voltage input group hermocouple : K, J, R, S, B, E,, (JIS/IEC) PLII (BS), WRe/WRe (AS) Influence of external resistance : Approx. 0.μ/Ω Input break action : Up-scale / Down-scale (Selectable) RD : Pt00 (JIS/IEC), JPt00 (JIS) Influence of input lead resistance : Approx. 0.0[ C/Ω] of reading aximum 0Ω per wire Input break action : Up-scale Low voltage : 0 to DC, 0 to 00m DC, 0 to 0m DC Input break action : Up-scale / Down-scale (Selectable) Current : to 0mA DC, 0 to 0mA DC Input break action : Uncertain (indicates a value around 0mA) b) High voltage input group High voltage : 0 to DC, to DC, 0 to 0 DC Input break action : Uncertain (indicates a value around 0) Sampling ime 0.0 sec Input Digital Filter 0.0 to 0.00 sec (OFF when 0 is set.) P Bias -span to +span P Ratio 0.00 to.00 Square Root Extraction Equation : P = Ö (Input value x P ratio + P bias) Low level cut OFF : 0.00 to.00% of span Performance easuring Accuracy a) hermocouple ype : K, J,, E, PLII Less than -00 C (- F) : ±.0 C (±. F) -00 to 00 C (- to 9 F) : ±0. C (±0.9 F) ore than 00 C (9 F) : ±(0.% of Reading + digit) ype :, S, R, WRe/WRe Less than -00 C (- F) : ±.0 C (±. F) -00 to 000 C (- to F) : ±.0 C (±. F) ore than 000 C ( F) : ±(0.% of Reading + digit) ype : B Less than 00 C ( F) : ±0.0 C (± F) 00 to 000 C ( to F) :.0 C (. F) ore than 000 C ( F) : ±(0.% of Reading + digit) Cold junction temperature compensation error ±.0 C (. F) [at C± C (. F±. F)] Within ±. C (±. F) [Between 0 and 0 C ( to F)] b) RD Less than 00 C (9 F) : ±0. C (±0. F) ore than 00 C (9 F) : ±(0.% of Reading + digit) c) DC voltage and DC current ±(0.% of span) Insulation Resistance ore than 0Ω (00 DC) between measured terminals and ground ore than 0Ω (00 DC) between power terminals and ground Dielectric Strength 000 AC for one minute between measured terminals and ground 00 AC for one minute between power terminals and ground Control Control ethod a) Brilliant PID control with enhanced autotuning. Available for reverse and direct action. b) Position proportioning control. a) or b) is selectable. ajor Setting Range Set value : Proportional band : input) Integral time : Output Same as input range. 0 to input span (emperature input) 0.0 to 000.0% of span (oltage, Current 0.00 to 0.00sec. or 0.0 to 00.0sec. (selectable) Derivative time : 0.00 to 0.00sec. or 0.0 to 00.0sec. (selectable) Control response : Slow, edium, Fast Output limiter : -.0 to +0.0% (High/Low individual setting) Output change rate limiter : 0.0 to 00.0%/sec. (Up/Down individual setting) Proportional cycle time : 0. to 00.0 sec. emory area : sets otor alve Control (position proportioning control type only) Input resistance (feedback resistance) : Ω as standard POS sampling cycle : 0.0 sec. eutral zone : 0. to 0.0% (output), resolution 0.% Output : Relay output otor rotating speed : Suitable for??? to??? sec. (full open to full close) When motor valve control is used, neither heater break alarm nor power feed forward function is available. ain Output umber of output : Output function : Up to points (OU to OU) OU, : Control output OU : Event output or analog retransmission output Output type : Relay output : Form A contact, 0 AC A (resistive load) oltage pulse output : 0/ DC (Load resistance : ore than 00Ω) Current output : to 0mA DC, 0 to 0mA DC (Load resistance : Less than 00Ω) Continuous voltage output : 0 to DC, to DC, 0 to 0 DC (Load resistance : ore than kω) SSR (riac) output (Rated current : 0.A) Sub Output umber of output : Up to points (OU, OU) Output function : Event output Output type : Relay output : Form A contact, 0 AC A (resistive load) Sensor Power Supply Output DC ± % (ax. 0mA) Output from OU. When sensor power supply output is specified, OU and OU can not be added. Event (Alarm) Output umber of Event Outputs Up to points (Event to ) Alarms ype : Deviation High, Low, High/Low, Band, Process High, Low Set value High, Low 0 to input span Differential gap : Heater Break Alarm (For single phase) C type : CL--P-(0A), CL--S-0L-(00A) Display range : 0.0 to 00.0A Accuracy : ± % of input value or ± A (whichever is larger) Control Loop Break Alarm (LBA) LBA time setting : 0. to 00 sec. (OFF by setting zero) LBA deadband : 0 to input span Output Assignable to main output (OU) or sub output (OU to ). Other Functions HOLD action (alid for deviation/band/p alarms only) Selection of event action for input abnormality. HA_0E
High-Speed Digital Controller - or loops HA Series Specifications on-isolated Remote Setpoint Input Only available in a channel control type. Input a) 0 to DC, 0 to 00m DC, 0 to 0m DC b) 0 to DC, to DC, 0 to 0 DC c) to 0mA DC, 0 to 0mA DC Accuracy 0.% of span Event Input umber of Inputs Up to points Input Rating on-voltage contact input Functions a) b) Run/Stop switching c) Remote/Local switching d) Auto/anual switching Event input logic selection functional allocation table DI DI DI DI DI DI DI ( to ) Area set Run/Stop Auto/anual ( to ) Area set Run/Stop Remote/Local ( to ) Area set Remote/Local Auto/anual ( to ) Area set Run/Stop Remote/Local Auto/anual ( to ) Area set Remote/Local ( to ) Area set Auto/anual Analog Retransmission Output umber of Outputs Up to points Functions are assignable to OU to OU. Output types a) easured value (P) b) Deviation (D) c) Set value (S) d) anipulated output value () Communications umber of communications : points Communication method : CO: RS-, RS-C CO: RS-C, RS-, RS-A CC-Link Communication speed : Protocol : 00, 900, 900, 00 BPS ASI X.(9). A ODBUS Bit format Start bit : Data bit : or For ODBUS bit only Parity bit : Without, Odd or Even Stop bit : or Communication code : ASCII(JIS) -bit code aximum connection : RS-, RS-A : ( Address can be set from 0 to 99.) RS-C : Waterproof/Dustproof General Specifications Supply oltage a) 90 to AC (Including supply voltage variation) [Rating : 00 to 0 AC] (0/0Hz common) b). to. AC (Including supply voltage variation) [Rating : AC] (0/0Hz common) c). to. DC (Ripple rate 0% p-p or less) [Rating:DC] Power Consumption HA00 : Less than.a for AC type (at 0 AC) Less than.0a for AC type Less than 0mA for DC type HA900 : Less than.0a for AC type (at 0 AC) Less than.0a for AC type Less than 0mA for DC type Power Failure Effect ot affected by power failure shorter than 0msec, otherwise reset to the initial state. (HO or COLD start is selectable.) Self-Diagnostic Function CPU power check, Adjustment data check, EEPRO check, RA check, etc.. Operating Environments : -0 to 0 C [ to F] to 9% RH. Absolute humidity : AX. W.C 9g/m dry air at 0.kPa. emory Backup : Backed up by non-volatile memory. umber of writing : Approx. 00,000 times et Weight HA00 : Approx. 0g HA900 : Approx. 0g External Dimensions (W x H x D) HA00 : x 9 x 00mm HA900 : 9 x 9 x 00mm Compliance with Standards CE ark UL/cUL Recognized RC ark Event output logic selection functional allocation table OU OU OU OU OU CH control HBA (Energized) output HBA (Energized) Event (Energized) Event (Energized) Event (Energized) Event (Energized) CH control HBA (De-energized) Event (De-energized) output HBA (De-energized) Event (De-energized) Event (De-energized) Event (De-energized) Event (Energized) CH control Event (Energized) output HBA (Energized) Event (Energized) Event (Energized) FAIL (De-energized) HBA (Energized) Event (De-nergized) CH control Event (De-nergized) output HBA (De-energized) Event (De-energized) Event (De-energized) FAIL (De-energized) HBA (De-energized) CH control CH control Event (Energized) Event (Energized) Event (Energized) output output HBA (Energized) HBA (Energized) Event (Energized) CH control CH control Event (De-energized) Event (De-energized) Event (De-energized) output output HBA (De-energized) HBA (De-energized) Event (De-energized) Event (Energized) CH control CH control Event (Energized) output output HBA (Energized) Event (Energized) Event (Energized) HBA (Energized) Event (De-nergized) CH control CH control Event (De-nergized) output output HBA (De-energized) Event (De-energized) Event (De-energized) HBA (De-energized) Event (Energized) CH control CH control 0 output output (OPE) (CLOSE) CH control CH control output output (OPE) (CLOSE) Event (Energized) HBA (Energized) HBA (Energized) Event (De-nergized) Event (De-nergized) Event (Energized) Event (Energized) HBA (De-energized) Event (De-energized) Event (De-energized) HBA (De-energized) CH control Event (Energized) Event (Energized) output Event (Energized) HBA (Energized) HBA (Energized) Event (Energized) * An output logic becomes OR output when two or more output functions are assigned to one output. * When three analog outputs are selected, tha analog outputs are automatically assigned to OU through OU and it has priority over the output logic selection. Waterproof/dustproof protection : IP Waterproof/dustproof protection only effective from the front in panel mounted installations. HA_0E
odel High-Speed Digital Controller - or loops HA Series odel and Suffix Code channel control type Specifications Input (I : o input) on isolated type remote set value Output Power supply Output Output, (OU, : Sub output) Event input to C input, Power feed forward (PFF) input, Feedback resistance Communication or Event input to Output * ot isolated from OU. ot supplied RS-C (ASI/RKC standard) RS- (ASI/RKC standard) RS- (ODBUS) RS-C (ODBUS) Event input : DI and DI odel and Suffix Code HA00 ( x 9mm / DI size) HA900 (9 x 9mm / DI size) HA0 ( x 9mm / DI size) HA90 (9 x 9mm / DI size) See Input and Range code table ot supplied 0 See Remote input code table oltage pulse output : 0/ DC DC voltage : 0 to DC voltage : 0 to 0 DC voltage : to DC current : 0 to 0mA DC current : to 0mA SSR (riac) output o output from OU oltage pulse output : 0/ DC DC voltage : 0 to DC voltage : 0 to 0 DC voltage : to DC current : 0 to 0mA DC current : to 0mA SSR (riac) output AC/DC 00 to 0 AC o output from OU oltage pulse output : 0/ DC DC voltage : 0 to DC voltage : 0 to 0 DC voltage : to DC current : 0 to 0mA DC current : to 0mA SSR (riac) output Sensor power supply output (Output and can not added) o outputs from OU and OU OU :, o output from OU OU and OU : ot supplied Event input : points (DI to DI) ot supplied C input point (CL--P-) C input point (CL--S-0L-) C input points (CL--P-) C input points (CL--S-0L-) PFF input (Within transformer 00 to 0 AC type) PFF input (Within transformer 00 to 0 AC type) C input point (CL--P-) + PFF input (Within transformer 00 to 0 AC type) C input point (CL--P-) + PFF input (Within transformer 00 to 0 AC type) C input point (CL--S-0L-) + PFF input (Within transformer 00 to 0 AC type) C input point (CL--S-0L-) + PFF input (Within transformer 00 to 0 AC type) Feedback resistance input ot supplied RS-C (ASI/RKC standard) RS-A (ASI/RKC standard) Communication RS- (ASI/RKC standard) RS- (ODBUS) RS-A (ODBUS) RS-C (ODBUS) CC-Link Waterproof/Dustproof ot supplied Waterproof/Dustproof protection Body color White Black Instrument version ersion symbol Only OU can be used for control outputs. (Only OU and OU can be used for position proportioning control.) Event (alarm) outputs, heater break alarm outputs are assignable to OU - OU. Analog output (P, S, etc) are assignable to OU - OU. Caution If two isolated analog outputs are required, use OU (or OU) and OU. OU and OU are not isolated. o use as a position proportioning controller, two or more outputs must be supplied. If heater break alarm is assigned to event function, current transformer (sold separately) is required. Autotuning he Autotuning used on HA00/900 is suitable for a control system with a fast response. PID values can also be manually adjusted so that they may be further optimized for the processes. Just for your information, this Autotuning is performs well for control systems in which temperature rises up to the set point in 0 seconds or faster. If the application is slower (e.g. minutes to reach the set point), HA0/90 are recommended. P PS U F D C A Y HA_0E
High-Speed Digital Controller - or loops HA Series odel Body color odel and Suffix Code channel control type Specifications Input (I : o input) Input (I : o input) Output Power supply Output Output, (OU, : Sub output) Event input to C input, Power feed forward (PFF) input, Feedback resistance Communication or Event input to Communication Waterproof/Dustproof Instrument version Output * ot isolated from OU. ot supplied RS-C (ASI/RKC standard) RS- (ASI/RKC standard) RS- (ODBUS) RS-C (ODBUS) Event input : DI and DI ot supplied RS-C (ASI/RKC standard) RS-A (ASI/RKC standard) RS- (ASI/RKC standard) RS- (ODBUS) RS-A (ODBUS) RS-C (ODBUS) CC-Link ot supplied Waterproof/Dustproof protection White Black ersion symbol odel and Suffix Code HA00 ( x 9mm / DI size) HA900 (9 x 9mm / DI size) HA0 ( x 9mm / DI size) HA90 (9 x 9mm / DI size) See Input and Range code table See Input and Range code table oltage pulse output : 0/ DC DC voltage : 0 to DC voltage : 0 to 0 DC voltage : to DC current : 0 to 0mA DC current : to 0mA SSR (riac) output o output from OU oltage pulse output : 0/ DC DC voltage : 0 to DC voltage : 0 to 0 DC voltage : to DC current : 0 to 0mA DC current : to 0mA SSR (riac) output AC/DC 00 to 0 AC o output from OU oltage pulse output : 0/ DC DC voltage : 0 to DC voltage : 0 to 0 DC voltage : to DC current : 0 to 0mA DC current : to 0mA SSR (riac) output Sensor power supply output (Output and can not added) o outputs from OU and OU OU :, o output from OU OU and OU : ot supplied Event input : points (DI to DI) ot supplied C input point (CL--P-) C input point (CL--S-0L-) C input points (CL--P-) C input points (CL--S-0L-) PFF input (Within transformer 00 to 0 AC type) PFF input (Within transformer 00 to 0 AC type) C input point (CL--P-) + PFF input (Within transformer 00 to 0 AC type) C input point (CL--P-) + PFF input (Within transformer 00 to 0 AC type) C input point (CL--S-0L-) + PFF input (Within transformer 00 to 0 AC type) C input point (CL--S-0L-) + PFF input (Within transformer 00 to 0 AC type) Feedback resistance input P P S U F D C A Y Only OU and OU can be used for control outputs. Event (alarm) outputs, heater break alarm outputs are assignable to OU - OU. Analog output (P, S, etc) are assignable to OU - OU. Caution If two isolated analog outputs are required, use OU (or OU) and OU. OU and OU are not isolated. o use as a position proportioning controller, two or more outputs must be supplied. If heater break alarm is assigned to event function, current transformer (sold separately) is required. Autotuning he Autotuning used on HA00/900 is suitable for a control system with a fast response. PID values can also be manually adjusted so that they may be further optimized for the processes. Just for your information, this Autotuning is performs well for control systems in which temperature rises up to the set point in 0 seconds or faster. If the application is slower (e.g. minutes to reach the set point), HA0/90 are recommended. HA_0E
High-Speed Digital Controller - or loops HA Series Range and Input able Remote Signal Code able hermocouple, RD, Low voltage and Current group ot isolated from the o. input [I] Input Code Range Resolution Input type Code K K -00 C - 0 F 0 0m DC J J -00 00 C - 9 F Low voltage group 0 00m DC G -00 00 C - F 0 DC E E -00 000 C - F 0 DC PLII A 0 90 C F C, 0. C, F, 0. F High voltage group 0 0 DC 0 00 C F (Selectable) DC S S -0 C - F 0 0mA DC Current group R R -0 C - F 0mA DC Y WRe/WRe W 0 00 C F B B 0 00 C F Pt00 ( wire) -00 0 C - F D C, 0. C, 0.0 C JPt00 ( wire) -00 00 C - F F, 0. F, 0.0 F Pt00 ( wire) -00 0 C - F C (Selectable) JPt00 ( wire) -00 00 C - F 0 0m DC 0 00m DC -9999 99999, 0., 0.0, 0.00, 0.000 0 DC (Programmable) (Programmable) 0 0mA DC 0mA DC High voltage group 0 DC 0 0 DC DC -9999 99999 (Programmable), 0., 0.0, 0.00, 0.000 (Programmable) Power Feedback ransformer (for Power Feed Forward Input) Supplied when power feed forward function is specified. When ordering transformer for replacement, please specify one of the following model codes : Specification odel Code 00 to 0 AC type PF 0 00 to 0 AC type PF 0 ax.0 9 ±0. (Unit : mm) ounting dimension 9 ±0. ax. ax. - 0 ± Current ransformer (C) Sold separately. ame Current transformer for heater break alarm Range 0 0A 0 00A odel Code CL--P- CL--S-0L- (Unit : mm) CL--P- Approx.0. CL--S-0L- Approx.00 0 φ. φ Depth 0. 0 0 0 HA_0E
High-Speed Digital Controller - or loops HA Series External Dimensions and Rear erminals HA900, HA90 Unit : mm 9 0 9. +0. 9 0 9 0 9 0 9 0 9 0 9 9. 0. +0. 0 9 0 9 0 0. () * 00 Panel cutout (Panel thickness must be between to 0mm) * IP waterproof/dustproof protection is molded into case and can not be added in the field. HA00, HA0. +0. 0 9 0 9 0 9 0 9 9. 0. 0 9 +0. 0 0. () * 00 Panel cutout (Panel thickness must be between to 0mm) * IP waterproof/dustproof protection is molded into case and can not be added in the field. o Description o o Description o Description L + 9 SG SG SG (A) CO (B) * SG SG 00-0 AC (A) Communication * AC DC Power supply /R (A) SD ()RS- - (A) DI 0 /R (A) SD ()RS-C /R (B) RD Communication () () Event input to (B) /R (B) RD DI (B) * 9 Relay contact Output (OU) () RS-A () () on-voltage contact input O output () RS- R (A) CO CO 0 (A) OPE(B) (C) () RS-C (A) C,C input * (O) C C (B) Feedback * 9 R (B) () (W) resistance input Relay contact Output (OU) C PFF O output CO (-) (C) C input + CLOSE 0 * (C) Power feed forward input ot used Output (OU) DI + + () * on isolated type o. Input (I ) 9 remote input (A) A (B) * O () oltage pulse/current/ + (A) channel type oltage output DI - - () SSR (riac) output on-voltage Event input o. Input (I) + 0 - + B + () () () () () Sensor power supply output contact input () to on-isolated type 9 Output (OU) DI o. Input (I ) remote input + * B () A' ()- ()- () - O (B) channel type () oltage pulse/current/ DI 0 oltage output o. Input (I ) () () - () () SSR (riac) output A o. Input (I) + A o. Input(I ) CO (-) + Output (OU) 9 * () hermocouple + B + + B + () on-voltage ()- RD ( or wire) O () oltage pulse/current/ DI contact input Event input ()- RD ( wire) - oltage output 0 B B () () () () oltage/current () SSR (riac) output - - - () ()- () () ()- () - * Functions (A) to (C) and types () to () must be specified when instrument is ordered as change can not be made in the field. : Option * HA_0E