KAF-3200E / KAF-3200ME

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KAF- 3200E KAF- 3200ME 2184 (H) x 1472 () Pixel Full-Frame CCD Image Sensor Performance Specification Eastman Kodak Company Image Sensor Solutions Rochester, New York 14650-2010 Revision 1 September 26, 2001

TABLE OF CONTENTS 1.1 Features... 3 1.2 Description... 3 1.3 Image Acquisition... 3 1.4 Charge Transport... 4 1.5 Output Structure... 4 1.6 Dark Reference Pixels... 4 1.7 Transfer Efficiency Test Pixels and Dummy Pixels... 4 2.1 Package Drawing... 5 2.2 Pin Description... 6 3.1 Absolute Maximum Ratings... 7 3.2 DC Operating Conditions... 8 3.3 AC Operating Condition... 9 3.4 AC Timing Conditions... 9 3.5 Clock Timing... 10 4.1 Performance Specifications... 11 4.2 Typical Performance Characteristics... 12 4.3 Cosmetic Classification... 13 5.1 Quality Assurance and Reliability... 14 5.2 Ordering Information... 14 Changes... 15 FIGURES Figure 1 Block Diagram... 3 Figure 2 - Package Drawing... 5 Figure 3 - Package Pin Assignments... 6 Figure 4 Typical Output Structure Load Diagram... 8 Figure 6 Spectral Response... 12 Reference: MTD/PS-0242 2 Revision No. 1

1.1 Features 3.2 Million Pixel Area CCD 2184 H x 1472 Pixels Transparent Gate True Two Phase Technology with and without micro lens (Enhanced Spectral Response) 6.8 x 6.8µm Pixels 14.85mm H x 10.26mm Photosensitive Area 100% Fill Factor High Output Sensitivity (20µ/e-) 78 db Dynamic Range Low Dark Current (<7pA/cm 2 @ 25 o C) 1.2 Description The KAF-3200E is a high performance monochrome area CCD (charge-coupled device) image sensor with 2184H x 1472 photoactive pixels designed for a wide range of image sensing applications in the 0.3nm to 1.0nm wavelength band. Typical applications include military, scientific, and industrial imaging. A 75dB dynamic range is possible operating at room temperature. The sensor is built with a true two-phase CCD technology employing a transparent gate and with micro lenses available. This technology simplifies the support circuits that drive the sensor and reduces the dark current without compromising charge capacity. The transparent gate results in spectral response increased ten times at 400nm, compared to a front side illuminated standard poly silicon gate technology. The micro lenses are an integral part of each pixel and cause most of the light to pass through the transparent gate half of the pixel, further improving the spectral sensitivity. The photoactive area is 14.85mm x 10.26mm and is housed in a 24 pin dual in line (DIP) package with 0.1 pin spacing. The sensor consists of 2254 parallel (vertical) CCD shift registers each 1510 elements long. These registers act as both the photosensitive elements and as the transport circuits that allow the image to be sequentially read out of the sensor. The parallel (vertical) CCD registers transfer the image one line at a time into a single 2267 element (horizontal) CCD shift register. The horizontal register transfers the charge to a single output amplifier. The output amplifier is a two-stage source follower that converts the photo-generated charge to a voltage for each pixel. 4 Dark line = scavanging CCDs to reduce edge artifacts KAF 3200ME Usable Active Image Area 2184(H) x 1472() 6.8 x 6.8 µm pixels φ 1 φ 2 rd φ R dd out ss lg Sub og 34 Dark 3 Invalid 1 active(cte monitor) 8 Invalid 2184 Active Pixels/Line 34 Dark 1 active(cte monitor) 2 Invalid 34 Dark line φ H1 φ H2 Figure 1 Block Diagram Reference: MTD/PS-0242 3 Revision No. 1

1.3 Image Acquisition An electronic representation of an image is formed when incident photons falling on the sensor plane create electron-hole pairs within the sensor. These photon-induced electrons are collected locally by the formation of potential wells at each pixel site. The number of electrons collected is linearly dependent on light level and exposure time and non-linearly dependent on wavelength. When the pixel's capacity is reached, excess electrons will leak into the adjacent pixels within the same column. This is termed blooming. During the integration period, the φ 1 and φ 2 register clocks are held at a constant (low) level. See Figure 5. - Timing Diagrams. 1.4 Charge Transport Referring again to Fig.-ure 5 - Timing Diagrams, the integrated charge from each photogate is transported to the output using a two step process. Each line (row) of charge is first transported from the vertical CCDs to the horizontal CCD register using the φ 1 and φ 2 register clocks. The horizontal CCD is presented a new line on the falling edge of φ 1 while φ H2 is held high. The horizontal CCDs then transport each line, pixel by pixel, to the output structure by alternately clocking the φ H1 and φ H2 pins in a complementary fashion. On each falling edge of φ H1 a new charge packet is transferred onto a floating diffusion and sensed by the output amplifier. 1.5 Output Structure Charge presented to the floating diffusion (FD) is converted into a voltage and current amplified in order to drive off-chip loads. The resulting voltage change seen at the output is linearly related to the amount of charge placed on FD. Once the signal has been sampled by the system electronics, the reset gate ( φ R) is clocked to remove the signal and FD is reset to the potential applied by RD. More signal at the floating diffusion reduces the voltage seen at the output pin. In order to activate the output structure, an off-chip load must be added to the out pin of the device - see Figure 4. 1.6 Dark Reference Pixels At the beginning of each line are 34 light shielded pixels. There is also 34 full dark line at the start of every frame and 4 full dark line at the end of each frame. Under normal circumstances, these pixels do not respond to light. However, dark reference pixels in close proximity to an active pixel, (including the 2 full dark lines and one column at end of each line), can scavenge signal depending on light intensity and wavelength and therefore will not represent the true dark signal. 1.7 Transfer Efficiency Test Pixels and Dummy Pixels At the beginning of each line and at the end of each line are extra horizontal CCD pixels. These are a combination of pixels that are not associated with any vertical CCD register and two that are associated with extra photoactive vertical CCDs. These are provided to give an accurate photosensitive signal that can be used to monitor the charge transfer efficiency in the serial (horizontal) register. They are arranged as follows beginning with the first pixel in each line = 8 dark, inactive pixels = 1 photoactive = 3 inactive pixels = 34 dark reference pixels = 2184 photoactive pixels = 34 dark pixels = 1 photo active pixel = 1 inactive pixels Reference: MTD/PS-0242 4 Revision No. 1

2.1 Package Drawing KAF-3200ME Figure 2 - Package Drawing Reference: MTD/PS-0242 5 Revision No. 1

2.2 Pin Description Pin Symbol Description Pin Symbol Description 1 OG Output Gate 12, 13, SUB Substrate (Ground) 14 2 OUT ideo Output 15, 16, φ 1 ertical CCD Clock - Phase 1 21, 22 3 DD Amplifier Supply 17, 18, φ 2 ertical CCD Clock - Phase 2 19, 20 4 RD Reset Drain 23 Guard Guard Ring 5 φr Reset Clock 24 N/C No Connection (open pin) 6 SS Amplifier Supply Return 7 φ H1 Horizontal CCD Clock - Phase 1 8 φ H2 Horizontal CCD Clock - Phase 2 9, 10, 11 N/C No connection (open pin) OG 1 Pin 1 24 N/C OUT 2 Pixel 1,1 23 GUARD DD 3 22 φ 1 RD 4 21 φ 1 φr 5 20 φ 2 SS 6 19 φ 2 φ H1 7 18 φ 2 φ H2 8 17 φ 2 N/C 9 16 φ 1 N/C 10 15 φ 1 N/C 11 14 SUB SUB 12 13 SUB Figure 3 - Package Pin Assignments Note: The KAF-3200E is designed to be compatible with the KAF-1602 and KAF-0401 series of Image sensors. The exception is the addition of two new sub connections on pins 12 and 13. Reference: MTD/PS-0242 6 Revision No. 1

3.1 Absolute Maximum Ratings Description Symbol Min. Max. Units Notes Diode Pin oltages diode 0 20 1, 2 Gate Pin oltages - Type 1 gate1-16 16 1, 3 Gate Pin oltages - Type 2 gate2 0 16 1, 4 Inter-Gate oltages g-g 16 5 Output Bias Current Iout -10 ma 6 Output Load Capacitance Cload 15 pf 6 Storage Temperature T 100 o C Humidity RH 5 90 % 7 Notes: 1. Referenced to pin sub. 2. Includes pins: RD, dd, ss, out. 3. Includes pins: φ1, φ2, φh1, φh2. 4. Includes pins: og, lg., φr 5. oltage difference between overlapping gates. Includes: φ1 to φ2, φh1 to φh2, φ2 to φh1, φh2 to og. 6. Avoid shorting output pins to ground or any low impedance source during operation. 7. T=25 C. Excessive humidity will degrade MTTF. CAUTION: This device contains limited protection against Electrostatic Discharge (ESD). Devices should be handled in accordance to strict ESD procedures for Class 0 (HBM) devices. Reference: MTD/PS-0242 7 Revision No. 1

3.2 DC Operating Conditions Description Symbol Min. Nom. Max. Units Max DC Notes Current (ma) Reset Drain RD 11 12 12.25 0.01 Output Amplifier Return SS 2.5 3.0 3.2-0.5 Output Amplifier Supply DD 14.5 15 15.25 Iout Substrate SUB 0 0 0 0.01 Output Gate OG 4.75 5 5.5 0.01 Guard GUARD 9 10 12 ideo Output Current Iout -5-10 ma - 1 Notes: 1. An output load sink must be applied to out to activate output amplifier - see Figure below. +15 0.1uF out ~5ma 2N3904 or equivalent 140 Ω 1k Ω Buffered Output Figure 4 Typical Output Structure Load Diagram For operation of up to 10 MHz\ The value of R1 depends on the desired output current according the following formula: R1 = 0.7 / Iout The optimal output current depends on the capacitance that needs to be driven by the amplifier and the bandwidth required. 5mA is recommended for capacitance of 12pF and pixel rates up to 15MHz. Reference: MTD/PS-0242 8 Revision No. 1

3.3 AC Operating Condition Description Symbol Level Min. Nom. Max. Units Effective Capacitance ertical CCD Clock - Phase 1 φ1 Low High -10.0 0.0-8.5 2.0-8.5 3.0 50 nf (all φ1 pins) ertical CCD Clock - Phase 2 φ2 Low High -10.0 0.0-8.5 2.0-8.5 3.0 50 nf (all φ2 pins) Horizontal CCD Clock - Phase 1 φh1 Low High -3.0 7.0 150 pf Horizontal CCD Clock - Phase 2 φh2 Low High Reset Clock φr Low High Notes: 1. All pins draw less than 10uA DC current. 3.4 AC Timing Conditions -3.5 φh1 Low + 10-3.5 φh1 Low + 10 3.0 10.0-3.0 7.0 4.0 11.0-2 φh1 Low + 10-2 φh1 Low + 10 4.25 11.25 150 pf 5pF Description Symbol Min. Nom. Max. Units Notes φh1, φh2 Clock Frequency f H 10 12 MHz 1, 2, 3 Pixel Period te 67 100 ns φh1, φh2 Setup Time tφhs 0.5 1 us φ1, φ2 Clock Pulse Width tφ 4 5 us 2 Reset Clock Pulse Width tφr 5 20 ns 4 Readout Time t readout 252.5 366.3 ms 5 Integration Time t int 6 Line Time t line 167.2 242.6 us 7 Notes: 1. 50% duty cycle values. 2. CTE may degrade above the nominal frequency. 3. Rise and fall times (10/90% levels) should be limited to 5-10% of clock period. Cross-over of register clocks should be between 40-60% of amplitude. 4 φr should be clocked continuously. 5. t readout = ( 1510 * t line ) 6. Integration time is user specified. Longer integration times will degrade noise performance due to dark field pattern and shot noise. 7. t line = ( 3* tφ ) + tφ HS + ( 2267 * te ) + te Reference: MTD/PS-0242 9 Revision No. 1

3.5 Clock Timing Frame Timing φ1 tint treadout 1 Frame = 1510 Lines Line 1 2 1509 1510 φ2 φh1 φh2 Line Timing Detail Pixel Timing Detail tφ tφr φ1 φr φ2 1 line tφ φh1 te 1 count φh1 tφhs te φh2 φh2 pix φr 2267 counts out sat dark odc sub Line Content 1-12 13-46 47-2230 2231-2264 2265-2267 sat dark pix odc sub Saturated pixel video output signal ideo output signal in no light situation, not zero due to Jdark Pixel video output signal level, more electrons =more negative* ideo level offset with respect to vsub Analog Ground Photoactive Pixels Dummy Pixels * See Image Aquisition section (page 4) Dark Reference Pixels Figure 5 - Timing Diagrams Note : The KAF-3200E was designed to be compatible with the KAF-1602 and KAF-0401 series of image sensors. Please note that the polarities of the two-phase clocks have been swapped on the KAF-3200E compared to the KAF-1602 and KAF-0401. Reference: MTD/PS-0242 10 Revision No. 1

4.1 Performance Specifications All values measured at 25 C, and nominal operating conditions. These parameters exclude defective pixels. Description Symbol Min. Nom. Max. Units Notes Saturation Signal ertical CCD capacity Horizontal CCD capacity Output Node capacity Red Quantum Efficiency (λ=650nm) Green Quantum Efficiency (λ=550nm) Blue Quantum Efficiency (λ=450nm) Blue Quantum Efficiency (λ=400nm) Nsat 50000 100000 100000 Rr Rg Rb Rb(400) 60 46 32 28 55000 110000 110000 120000 65 52 40 32 70 57 44 37 electrons / pixel Photoresponse Non-Linearity PRNL 1 2 % 2 Photoresponse Non-Uniformity PRNU 1 3 % 3 Dark Signal Jdark 15 6 30 10 electrons / pixel / sec pa/cm 2 4 25 C Dark Signal Doubling Temperature 5 6 7 o C Dark Signal Non-Uniformity DSNU 15 30 electrons / pixel / sec 5 Dynamic Range DR 72 77 db 6 Charge Transfer Efficiency CTE 0.99997 0.99999 Output Amplifier DC Offset odc RD - 2 RD - 1 RD 7 Output Amplifier Bandwidth f -3dB 45 Mhz 8 Output Amplifier Sensitivity out/ne~ 18 20 u/e~ Output Amplifier output Impedance Zout 175 200 250 Ohms Noise Floor ne~ 7 12 electrons 9 % % % % 1 Notes: 1. For pixel binning applications, electron capacity up to 150,000 can be achieved with modified CCD inputs. Each sensor may have to be optimized individually for these applications. Some performance parameters may be compromised to achieve the largest signals. 2. Worst-case deviation from straight line fit, between 2% and 90% of Nsat. 3. One Sigma deviation of a 128x128 sample when CCD illuminated uniformly. 4. Average of all pixels with no illumination at 25 o C. 5. Average dark signal of any of 11 x 8 blocks within the sensor. (each block is 128 x 128 pixels) 6. 20log ( Nsat / ne~) at nominal operating frequency and 25 o C. 7. ideo level offset with respect to ground 8. Last output amplifier stage only. Assumes 10pF off-chip load.. 9. Output noise at -10 o C, 1MHz operating frequency (15MHz bandwidth), and tint = 0 (excluding dark signal). Reference: MTD/PS-0242 11 Revision No. 1

4.2 Typical Performance Characteristics KAF-3200ME Spectral Response 1.0 0.8 QE 0.6 0.4 no cover glass with cover glass Series3 without microlens 0.2 0.0 200 300 400 500 600 700 800 900 1000 1100 Wavelength (nm) Figure 6 Spectral Response Reference: MTD/PS-0242 12 Revision No. 1

4.3 Cosmetic Classification Defect tests performed at T=25 o C Class Point Defects Cluster Defects Column Total Zone A Total Zone A Total Zone A C1 <5 <2 0 0 0 0 C2 <10 <5 <4 <2 0 0 1,1472 2184,1472 320,1256 1864,1256 Zone A 320,216 1864,216 1,1 2184,1 Zone A = Central 1544H x 1040 Region Point Defect Cluster Defect Column Defect Neighboring pixels Defect Separation DARK: A pixel which deviates by more than 6% from neighboring pixels when illuminated to 70% of saturation, OR BRIGHT: A Pixel with dark current > 5000 e/pixel/sec at 25C. A grouping of not more than 5 adjacent point defects 1) A grouping of >5 contiguous point defects along a single column, 2) A column containing a pixel with dark current > 12,000e/pixel/sec (bright column) 3) A column that does not meet the minimum vertical CCD charge capacity (low charge capacity column) 4) A column which loses more than 250 e under 2Ke illumination.(trap defect)) The surrounding 128 x 128 pixels or ±64 columns/rows. Column and cluster defects are separated by no less than two (2) pixels in any direction (excluding single pixel defects). Reference: MTD/PS-0242 13 Revision No. 1

5.1 Quality Assurance and Reliability 5.1.1 Quality Strategy: All devices will conform to the specifications stated in this document. This is accomplished through a combination of statistical process control and inspection at key points of the production process. 5.1.2 Replacement: All devices are warranted against failure in accordance with the terms of Terms of Sale. 5.1.3 Cleanliness: Devices are shipped free of contamination, scratches, etc. that would cause a visible defect. 5.1.4 ESD Precautions: Devices are shipped in a static-safe container and should only be handled at static-safe workstations. 5.1.5 Reliability: Information concerning the quality assurance and reliability testing procedures and results are available from the Image Sensor Solutions and can be supplied upon request. 5.1.6 Test Data Retention: Devices have an identifying number of traceable to a test data file. Test data is kept for a period of 2 years after date of shipment. 5.2 Ordering Information Address all inquiries and purchase orders to: Image Sensor Solutions Eastman Kodak Company Rochester, New York 14650-2010 Phone: (716) 722-4385 Fax: (716) 477-4947 E-Mail: Imagers@Kodak.com Web: www.kodak.com/go/imagers Kodak reserves the right to change any information contained herein without notice. All information furnished by Kodak is believed to be accurate. WARNING: LIFE SUPPORT APPLICATIONS POLICY Kodak image sensors are not authorized for and should not be used within Life Support Systems without the specific written consent of the Eastman Kodak Company. Product warranty is limited to replacement of defective components and does not cover injury or property or other consequential damages. Reference: MTD/PS-0242 14 Revision No. 1

Changes: Revision Number Changes 0 Originally KAF-3200E, Revision No. 0. 1 Microlens version added. Updated clock voltages, replaced spectral response with micro lens version. Added description of micro lens enhanced response. Removed grades 0 and 3. Reference: MTD/PS-0242 15 Revision No. 1