HITEK POWER OLS10KD SERIES

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10KW HIGH VOLTAGE POWER SUPPLY The HiTek Power OLS10KD series range of high voltage power supplies recognises the requirement for high stability and very low ripple over a wide range of output voltages. This is achieved by combining the high power, 10kW supply with a low power, 1kW supply in the same chassis. The outputs of these are coupled together so that either can be used. For high voltages, usually above 10% of the maximum, the High Energy (HE) supply is used; for voltages below 10% the Low Energy (LE) supply is used. The LE supply has superior ripple and regulation at the lower voltages and maintains this down to a few hundred Volts or less. The OLS10KD series meets the exacting requirements found in electron and ion beam systems, ion implantation and X-ray systems. There are 3 different input voltage variants available to order, the OLS10KD (208VAC), the OLS10KDC (380VAC) and the OLS10KDE (400VAC). Designed using the latest power switching IGBTs to ensure efficient and reliable operation over the full operating range, the Series OLS10KD will give exemplary performance in the most severe of electrical environments. The Series OLS10KD achieves an exceptionally high packing density for high voltage power supplies of this power level, giving 169W/Litre, 2.7W/inch3. The 6U construction allows operation at full power when close-mounted in a standard equipment rack, giving significant savings in rack space in large systems. Many components are common between the HE and LE supplies, minimising the space required for the dual configuration. Featuring HiTek Power s unique Arc Count and Extinguish (ACE) system for managing systems where load arcing is endemic, the Series OLS10KD protects both itself and the load from damage that may be caused by excessive arcing whilst allowing normal operation to continue. PRODUCT HIGHLIGHTS Wide Dynamic range with dual supply configuration Output Voltages from 10kV to 80kV for high range Output Voltages from 1kV to 10kV for low range High Packing Density: 10kW output power in 6U rack mounted chassis Exceptional reliability in severe electrical enviroments High Stability Arc Count and Extinguish (ACE) Full Local & Remote control and monitoring Analogue or RS232 remote control Voltage or current control RoHS compliant to EU Directive 2011/65/EU CE marked for EU LV Directive 2006/95/EC 2018 Advanced Energy Industries, Inc.

ELECTRICAL SPECIFICATIONS Output Power Output Voltage Output Current Input Current Polarity Specification Range Calibration Recovery Time Temperature Coefficient Drift Operating Temperature Storage Temperature Humidity Altitude Installation Category Pollution Degree Usage Metering 10kW for the HE supply and 1kW for the LE supply at full rated output voltage and current Units available with maximum HE output voltages from 10kV to 80kV, and LE output voltages from 1kV to 10kV Up to 1A for 10kV HE & 1kV LE, and 100mA for 80kV HE & 10kV LE (see table) Less than 36A per phase Positive or negative to order. Both HE and LE will be of the same polarity Specifications apply above 5% of rated output voltage for both HE and LE supplies. The output can be controlled down to less than 0.25% of rated output voltage. Calibration between Voltage Demand, Output Voltage and Voltage Monitor ±0.2% of setting or ±0.05% of rating, whichever is greater Less than 200ms to within 0.1% of previous operating level following a short circuit or arc. Maximum overshoot 2% of rated output voltage Less than 100ppm/ C Less than 0.01% per hour after 1 hour s warm up, typically less than 0.02% per 8 hours after 1 hour s warm up, at constant load, line and temperature 0 C to +40 C (32 F to 140 F) -20 C to +70 C (-4 F to 158 F) 80% maximum relative humidity up to 31 C, reducing linearly to 50% at 40 C. Non-condensing (ref BS EN61010-1) Sea level to 2000 metres (6500 feet) II (BS EN61010-1) 2 (BS EN61010-1) Indoor use only Provided as part of an alpha-numeric display. Voltages are displayed with a resolution of better than 0.5% of rated output. Current is displayed with a resolution of better than 1.5% of rated output. Status Indication Protection Arc Count and Extinguish (ACE) Safety Safety Class Equipment Class 1 Voltage and current set values can be displayed by pressing the relevant control potentiometer. Uses the alpha-numeric display to show the reason for any trip condition. The units are fully protected against over voltage, over temperature, fan failure and current limite. Peak arc current is resistively limited to 40A at full HE output voltage. Each time the ACE system detects an arc it blanks the supply off for a brief period to extinguish the arc. The unit is then allowed to recover. If more arcs occur they are counted to determine the arc rate; if this exceeds a safe level the power supply is shut down. The parameters are factory set to 25 arcs in any 5 second period. The Series OLS10KD meets the requirements of the Low Voltage Directive, LVD, 2006/95/EC by complying with BS EN61010-1:2001 when installed as a component part of other equipment. The units are CE marked accordingly. Designed to meet the general requirements of zsemi S2 for electrical safety. 2 advanced-energy.com

ELECTRICAL SPECIFICATIONS (CONTINUED) Cooling The unit utilises forced air cooling. Air is drawn in via the front panel louvered opening and through side panel vents. Ensure that within the rack there is a free air opening with a minimum effective area of 195cm2 directly in front of the unit front panel louvre. An additional free air opening with a minimum effective area of 195cm2 is required for the side vents. Air flow from this additional free air opening to the side vents of the power converter must not be restricted. The expected air flow for each opening is approximately 50 Litres per second. The maximum temperature of the air entering the unit must not exceed 40 C. The unit can dissipate up to 2kW, therefore provision must be made to extract the exhaust air from the rack in order to prevent possible overheating. EMC1 RoHS EN55022 class B for conducted and radiated emissions EN61000-4-2 ESD - levels ±4kV contact, 8kV air discharge EN61000-4-4 fast transients on mains input - levels ±2kV EN61000-4-5 surges - levels ±2kV line to earth, ±1kV line to line EN61000-4-8 magnetic fields - levels 30A/m at 50/60Hz EN61000-4-11 voltage dips, interruptions The Series OLS10KD meets the requirements of EU Directive 2002/95/EC on the Restriction of use of Certain Hazardous Substances in electrical and electronic equipment (RoHS). Input Voltage OLS10KD OLS10KDC OLS10KDE 208VAC ±10% (187VAC to 229VAC) 47-63Hz 3 phase plus protective earth 380VAC ±10% (342VAC to 418VAC) 47-63Hz 3 phase plus protective earth 400VAC ±10% (360VAC to 440VAC) 47-63Hz 3 phase plus protective earth Voltage Ripple (High and Low Range) Voltage Mode Current Mode Less than 0.05% of rated voltage +2V, peak to peak or less than 0.01% of rated voltage +1V, rms Less than 0.5% of rated voltage peak to peak or less than 0.1% of rated voltage rms Voltage Regulation (High and Low Range) Line Load Less than 0.05% +0.5V change in output voltage for a 10% change in line voltage Less than 0.05% +0.5V change in output voltage for 0 to 100% change in load current Current Regulation (High and Low Range) Line Load Less than 0.5% of rated current for a ±10% change in line voltage Less than 0.5% of rated current for 0 to 100% change in output voltage 1 The Series OLS10KD is intended for installation as a component of a system and is designed to meet these requirements. The unit will not trip and recovers to normal operation after a disturbance as defined in SEMI F47-0706. The EMC performance of the power supply can only be fully assessed when installed within, and as part of, the final system. advanced-energy.com 3

OVER 80kV 613.5 [24.15 in] (NTS) UP TO 80kV 515.5 [20.30 in] 265.9 [10.469 in] HITEK POWER OLS10KD SERIES MECHANICAL SPECIFICATIONS Dimensions Weight Connections Mains Safety Earth HV Output Front panel See outline drawings 45kg (99 lb) All connections are mounted on the rear panel Harting HAN C, 3m cable provided M6 stud Proprietary coaxial connector. 3m cable provided Stoving enamel trimite full gloss S60/9 colour blue RAL5011 as standard Blank front panel available to order (see below) 482.6 [19.00 in] AIRFLOW (80kV negative) (60kV negative) EARTH STUD MAINS INPUT Drawing dimensions are in mm (inches) Design developments may result in specification changes 429.8 [16.92 in] USER INTERFACE H.V. OUTPUT 4 advanced-energy.com

INTERFACE Remote Control Interface Connections: The Series OLS10KD is fitted with an analogue remote control interface as standard, control is via a 25-way D-type connector. Analogue Remote Control 25-way female D-type connector: V STATUS INDICATOR 1 14 HV OUTPUT CURRENT MONITOR I STATUS INDICATOR 2 15 HV OFF INDICATOR HV OUTPUT VOLTAGE MONITOR 3 16 REMOTE INDICATOR FAULT INDICATOR 4 17 ARC MONITOR INDICATOR LOCAL INDICATOR 5 18 +10V REFERENCE VOLTAGE HV ON INDICATOR 6 19 NO CONNECTION VOLTAGE DEMAND MONITOR 7 20 NO CONNECTION HV ON/OFF CONTROL Lo 8 21 HV ENABLE Lo HV ON/OFF CONTROL Hi 9 22 HV ENABLE Hi VOLTAGE DEMAND Hi 10 23 CURRENT DEMAND Lo VOLTAGE DEMAND Lo 11 24 CURRENT DEMAND Hi 0V 12 25 NO CONNECTION MONITOR 0V 13 l All indicators logical indicators are open collector are open outputs collector rated outputs a rated at 16V (max) in the off state. An internal 100Ω resistor is connected in series with the open collector transistor. The pull down voltage is 0.9V plus the internal resistor drop. All analogue Voltage and Current Monitors are 0V to +10V ±0.5% ±20mV, with respect to pin 13, representing 0 to rated output. Signal impedance is less than 100Ω and minimum external load resistance is 2kΩ. All analogue Voltage and Current Inputs are 0V to +10V on the Hi input with respect to the Lo input representing 0V to rated output ±0.2% of setting ±0.1% of rating. Input impedance is greater than 50kΩ. Digital RS232 Remote Control 9-way male D-type connector: NO CONNECTION 1 6 NO CONNECTION TXD TRANSMIT DATA 2 7 NO CONNECTION RXD RECEIVE DATA 3 8 NO CONNECTION NO CONNECTION 4 9 NO CONNECTION SIGNAL GROUND 5 The Series OLS10KD is configured as a DCE device. To connect to a PC or other DTE device, use a pin-pin DB9 female to male serial cable. The communication is set to 9,600 Baud, one start bit, one stop bit and no parity. The connector shell can be connected to earth and cable screen. A comprehensive set of commands is available for the control and monitoring of the power supply. advanced-energy.com 5

ORDERING INFORMATION Model 208VAC Input Voltage Model 380VAC Input Voltage Model 400VAC Input Voltage HE Output Voltage LE Output Voltage Output Current OLS10KD-1031 OLS10KDC-1031 OLS10KDE-1031 10kV 1kV 1A OLS10KD-2031 OLS10KDC-2031 OLS10KDE-2031 20kV 2kV 500mA OLS10KD-3031 OLS10KDC-3031 OLS10KDE-3031 30kV 3kV 333mA OLS10KD-4031 OLS10KDC-4031 OLS10KDE-4031 40kV 4kV 250mA OLS10KD-5031 OLS10KDC-5031 OLS10KDE-5031 50kV 5kV 200mA OLS10KD-6031 OLS10KDC-6031 OLS10KDE-6031 60kV 6kV 166mA OLS10KD-8031 OLS10KDC-8031 OLS10KDE-8031 80kV 8kV 125mA 1 Please add the required suffixed to the part number: P Positive polarity N Negative polarity B Blank front panel (remote control only) C RS232 control interface eg OLS10KD-203PBC for a 20kV positive polarity unit with no display or front panels with an RS232 interface. For voltages not listed above, please contact our sales team. See Series OLS10K for a single output voltage range that can be paralleled to give 20kW. See separate datasheet. Other voltages and combinations are available to special order. 6 advanced-energy.com

ABOUT ADVANCED ENERGY Since 1981, Advanced Energy (AE) has perfected how power performs for its customers. For both end users and OEMs, AE s comprehensive portfolio of standard and custom high voltage components precisely match system specifications to deliver unparalleled energy, quality, and performance. Through close customer collaboration, design expertise, application insight, and world-class support, AE creates successful partnerships and enables customers to push the boundaries of innovation and stay ahead of evolving market needs. PRECISION POWER PERFORMANCE CAUTION: High Voltage Read and understand all documentation before you install, operate, or maintain Advanced Energy high voltage power supplies. Follow all safety instructions and precautions to protect against property damage and serious or possibly fatal bodily injury. Never defeat safety interlocks or grounds. For international contact information, visit advanced-energy.com. HVSales@aei.com +1.970.221.0108 Specifications are subject to change without notice. Not responsible for errors or omissions. 2018 Advanced Energy Industries, Inc. All rights reserved. Advanced Energy, AE, and HiTek Power are U.S. trademarks of Advanced Energy Industries, Inc. ENG-HV-OLS10KD-231-01 6.18