New High Power Semiconductors: High Voltage IGBTs and GCTs

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New High Power Semiconductors: High Voltage IGBTs and s Eric R. Motto*, M. Yamamoto** * Powerex Inc., Youngwood, Pennsylvania, USA ** Mitsubishi Electric, Power Device Division, Fukuoka, Japan Abstract: Ultra high power, high voltage, power electronics is on the verge of a new era. Two new power semiconductor technologies, the high voltage IGBT and the (Gate Commutated Thyristor) are improving the performance, simplifying the design and increasing the reliability of applications ranging from 100's of KVA to many MVA. This paper will discuss the characteristics and application considerations of these revolutionary new technologies. 1. Introduction In recent years, the performance of industrial power electronics for line voltages up to 600VAC has advanced rapidly. Initially, improvements were made possible by the development of high current isolated base darlington transistor modules. More recently, stunning improvements in IGBT technology has driven performance to new levels while substantially reducing cost. Over the same period, ultra high power, high voltage, applications advanced relatively slowly following fairly predictable improvements in GTO and high voltage thyristor technology. This paper presents two promising new power device technologies, the high voltage IGBT, and the (Gate Commutated Thyristor) that have been developed for these applications. Both devices seek to replace the venerable GTO by offering snubberless turn-off capability and higher operating frequencies. The performance and application considerations that determine which technology is best for a given application will be presented. 2. Applications The following discussion will focus on power semiconductor devices for applications operating at output power levels in excess of 100kVA. Generally speaking these applications are more specialized and considerably less common than lower power applications. Some of the most well known applications include: Propulsion inverters for mass transit and locomotives, high power industrial drives for steel and paper mills, and utility power conditioning, including static VAR compensation and flexible AC transmission. In these applications, limited power device capabilities often force the use of circuit topologies such as cycloconverters and current source inverters that have limited performance. Many of these applications could benefit in terms of efficiency and control accuracy through the use of a voltage source topology. In applications operating from AC line voltages of 600VAC and less, IGBTs with blocking voltage ratings of up to 1400V have provided an efficient low cost means of constructing high performance voltage source inverters. In higher voltage applications GTOs (Gate Turn-Off thyristors) have been used but their limited switching frequency of 300Hz or so, offers little advantage when compared to other circuit topologies. Clearly, a higher performance, high power semiconductor device is needed. Today, newly commercialized high voltage IGBTs with blocking voltages to 3300V and s with blocking voltages to 6000V have been developed to address these requirements.

3. The HVIGBT Figure 1: IGBT Chip Structure The HVIGBT (High Voltage IGBT) module is a logical extension of the technology used in conventional IGBTs. Several technical challenges had to be overcome in order for these devices to attain the desired characteristics. First, an IGBT chip with high blocking voltage, reasonably low on state voltage, and sufficiently wide safe operating area had to be developed. In lower voltage devices, a buffer layer structure (a.k.a. PT-Punch Through) similar to a PIN diode (figure 1a) was found to be optimally effective for this purpose. The buffer layer in these devices was formed as part of the epitaxial silicon wafer. Adapting this structure to a high voltage device requires a very thick epitaxial layer which presents serious cost and yield problems. One way around this problem is to use an NPT (Non Punch-Through) structure (figure 1b) for the device. The NPT structure does not have a buffer layer and is relatively easy to adapt to higher blocking voltage. Unfortunately, this approach requires a very thick n - drift layer to prevent excessive leakage current at elevated temperatures. The thick high resistivity n - layer causes a significant increase in on state voltage (V CE(sat) ). In spite of this drawback, at least one manufacturer has adopted this approach. A better solution, developed by Powerex/Mitsubishi, is to use a specially processed FZ (Float Zone) silicon wafer with a diffused buffer layer. The much thinner n - drift layer of this structure yields a substantially lower V CE(sat) compared to the NPT approach. In addition, by utilizing proton beam irradiation to optimize the carrier lifetime in the buffer layer, a significant reduction in turn off switching losses was obtained. A comparison of NPT versus PT 3300V, 1200A devices is shown in figure 2. The second major challenge was achieving the required 6000VRMS base plate isolation without a significant degradation of thermal performance. By adopting DBC substrate patterns with rounded corners and increased edge margins it was found that the 0.635mm thick aluminum nitride ceramic used in conventional modules could support the required voltage. In order to insure the reliability of this high voltage insulation, it was necessary to carefully examine corona inception and extinction. Voids in the solder and bubbles in the gel were identified as sources of partial discharge (corona). To improve these areas the gel potting and soldering processes were moved to a low pressure atmosphere. The result, is voidless solder and bubble free gel. By using this process the Configuration V CE(sat) (V) 8 7 6 5 4 3 2 1 Table 1: HVIGBT Modules Current (A) a. PT IGBT b. NPT IGBT Poly-Si Gate Emitter Poly-Si Gate Electrode n - drift region V GE= 15V T j= 125C n + buffer layer p + anode Collector Electrode Figure 2: HVIGBT On-State Voltage Saturation voltage characteristic 1200A, 3300V IGBTs 0 0 0.2 0.4 0.6 0.8 1.0 1.2 I C (ka) Circuit Voltage 400 600 800 1200 1700V CM600DY-34H Dual 2500V CM400DY-50H 3300V CM400DY-66H 1700V CM800HA-34H CM1200HA-34H NPT Single 2500V CM800HA-50H CM800HB-50H* 3300V CM800HA-66H CM800HB-66H* Chopper 1700V CM600E2Y-34H PT n - drift region CM1200HA-50H CM1200HB-50H* CM1200HA-66H CM1200HB-66H*

HVIGBT module s isolation is able to meet the IEC 1287 partial discharge standard and has corona inception and extinction voltages of more than 3000V at 10pC. A family of HVIGBT modules has been developed using these new technologies. The new family of devices is shown in table 1. A photograph of a HVIGBT module is shown in figure 3. In general, the new high voltage IGBTs have the same application advantages that have made IGBT modules the device of choice in lower voltage industrial applications. The gate drive requirements are essentially the same except that greater isolation in the power supplies and control signals is needed. The HVIGBT has a robust switching SOA that allows snubberless switching. Like lower voltage devices, the HVIGBT module includes a reverse connected fast/soft recovery free wheel diode. Figure 3: HVIGBT Module Figure 4: HVIGBT -vs- On-State Voltage 8 7 V GE = 15V T j = 125C On-State voltage characteristic 4. The Even with the development of HVIGBTs, it is usually recognized that thyristor (latching) devices often have a better trade-off between on state losses and blocking voltage. This improved trade-off can be especially important in very high voltage applications. A comparison of this characteristic is shown in figure 4. Unfortunately, as we will see later, this improved trade-off inevitably comes with a sacrifice of dynamic control. The (Gate Commutated Thyristor) is a new thyristor device that is similar to a GTO. The goal of the is to reduce the cost and complexity of the gate drive and snubbers required in GTO applications. The idea behind the is to commutate the entire cathode current to the gate at turn off. By doing this a smooth transition from SCR (latching operation) to transistor operation can be achieved. In conventional GTOs, the unstable transition at turn off necessitates the use of large dv/dt snubbers. The key to the is its gate driver and package design. In order to obtain snubberless turn-off capability, the driver must V CE(sat) (V) 6 5 4 3 2 1 CM1200HB-66H 0 0 0.2 0.4 0.6 0.8 1.0 1.2 I C (ka) FGC4000BX-90DS Figure 5: FGC4000BX-90DS with GU-C40 Gate Driver

abruptly divert the entire cathode current to the Figure 6: Turn-Off Waveform gate. The speed at which the main current transfers to the gate (di GQ /dt) has been shown to be directly related to the peak snubberless turn off capability of the. To achieve high di GQ /dt a special ring gate package and low inductance gate driver were developed. A photograph of the Powerex/Mitsubishi GU-C40 gate driver and a FGC4000BX-90DS, 4000A, 4500V is shown in figure 5. An exclusive, proprietary, circuit design allows the GU-C40 to deliver a di GQ /dt in excess of 7000A/µs. When used with the FGC4000BX-90DS snubberless turn-off of 6000A has been demonstrated. Figure 6 shows a 4000A snubberless turn-off waveform. The low inductance package and driver also achieves a more uniform turn-on which allows a greater di/dt and a corresponding size reduction of the required di/dt limiting inductor. It should be noted that in theory any GTO can be operated at unity turn-off gain and achieve snubberless turn-off capability. The present however, is a highly optimized device. By taking the hard drive conditions as a given the designers were able to achieve substantial reductions in turn-off losses and on state voltage. 5. Application Considerations The HVIGBT and have both been shown to have advantages over GTOs in high power voltage source inverter applications. Which technology is best? If state of the art examples of each technology are compared, it is possible to make a case for either of them. The deciding factor appears to be the requirements of the end application. A. Power Circuit Topology Figure 7: Voltage Source Inverter Phase Leg Comparison GTO HVIGBT L L/2

Figure 7 shows one arm of a single level voltage source inverter constructed using GTOs, s, and HVIGBTs. At first glance there does not appear to be much difference between the GTO and circuit. However, in actual applications the difference is significant. The uses a voltage clamp circuit instead of an RCD snubber because it is not necessary to limit the dv/dt at turn off. The clamp circuit is typically smaller and considerably lower loss than the GTO s dv/dt snubbers. In addition, the has higher turn-on di/dt capability. This makes it possible to significantly reduce the size of the di/dt snubber reactor and its associated losses. These circuit changes combined with the s inherently lower turn-off losses permit a significant increase in operating frequency. While GTOs are typically limited to switching frequencies of a few hundred Hertz in most applications, the can be operated at frequencies greater than 1kHz. Clearly, the HVIGBT topology is simplest of all. The reason is that unlike the GTO and, the IGBT can control the turn on di/dt. This eliminates the need for a di/dt snubber. If low inductance laminated buswork is used, it is possible to operate the HVIGBT without any additional snubbers or clamping circuits. However, using the power device to control the di/dt results in substantially higher turn-on losses. These losses could be reduced by adding a di/dt snubber. In this case, the IGBT and power circuits would be virtually identical. I G 200A 100A 10A -10A 1000A 2000A I GQ=I T Figure 8: HVIGBT and Gate Drive Current Turn-On HVIGBT On-State Turn-Off t: 2µs/div HVIGBT Table 2: Typical Gate Drive Characteristics Characteristic GTO HVIGBT Turn-On Peak current (A) 25 200 15 Duration (µs) 10 5 1.5 On -State Current (A) 10 10 0 Turn-Off Peak Current (A) 850 4000 15 Duration (µs) 30 2 1.5 Total Charge (mc) 20 9 0.01 Total Power (W) 300W 150W 1W B. Gate Drive Figure 8 shows a comparison of the typical gate drive current required for the and HVIGBT. Table 2 shows typical gate driver characteristics. The requires an initial high current pulse to bring the entire device area into full conduction. For the 4000A, this current pulse is typically 200A for about 5µs. In order to achieve the data sheet turn-on di/dt rating of 1000A/µs this pulse must be applied at a rate of at least 100A/µs. At first, this may sound difficult, but it is relatively easy compared to turn off. During steady on state operation, a continuous current of at least the devices I GT rating must be applied to insure that the device s entire area stays fully on. For the 4000A, a continuous current of about 10A is required in the on state. At turn-off a reverse current pulse equal to the device s main current must be applied. For full rated snubberless turn-off capability, the Table 3: Gate Trigger Current Characteristic Conditions FGC4000BX-90DS Manufacturer A Required Based on maximum 10A 3.3A Continuous On-Current I GT at 10C I GT (A) T j=25c 1.2 0.15 T j=115c 0.15 0.02

Characteristic V TM/V CE(sat) (V) Max E off (J/P) Typical Conditions Table 4: Loss Characteristics FGC4000BX-90DS I T(AV)=1200A, V DRM=4500V HVIGBT CM1200HB-66H I C=1200A, V CES=3300V I=1200A, T j=125c 2.6 5.1 Inductive load Snubberless I=1200A, V DC=1650V T j=125c 2.5 1.2 driver must be able to supply a 4000A pulse applied at a rate of 6000A/µs. This requires a large number of paralleled low voltage MOSFETs and a bank of electrolytic capacitors. The Powerex/Mitsubishi GU- C40 gate driver s output MOSFET has an effective R DS(on) of less than 300µΩ and its output capacitor is 40,000µF. The MOSFETs and capacitors are arranged on a multi-layer PCB to form a low inductance parallel plate structure with an effective inductance to the gate of around 3nH. The HVIGBT s gate drive is basically the same as lower voltage IGBTs. The gate of the HVIGBT is similar to a capacitor. To turn the device on and off, the capacitor must be charged and discharged. Like lower voltage IGBTs, the recommended turn-on voltage is 15V. In the off state a reverse bias of - 10V to -15V should be applied to maintain good noise immunity. The recommended series gate resistance (R G ) for the CM1200HB-66H, 1200A, 3300V HVIGBT module is 1.6Ω. With a gate voltage swing of 30V the maximum drive current is about 19A. Clearly, HVIGBT gate drive is simpler and requires less power than gate drive. One of the most significant contributions to the higher power requirements of the gate drive is the need for continuous current in the on state. This current can be reduced if the is designed with a lower gate trigger current. This approach has been adopted by at least one manufacturer. The problem that arises with this approach is that off-state noise immunity is degraded. Table 3 shows that the low trigger current device may be turned on with as little at 20mA at elevated junction temperature. C. Losses Table 4 Summarizes the key loss characteristics of the HVIGBT and. This comparison is not a particularly good one because these devices are not of the same rating. As expected, the has a clear advantage in conduction losses while the IGBT has a clear advantage in turn-off losses. Turn-on losses can not be compared because the normal circuit topology for these devices is different (see A above). If a di/dt limiting turn-on snubber were used with both devices the turn-on losses would be about the same. D. Reliability By itself, the s simpler monolithic design is likely to be more reliable than the relatively complex multi-chip HVIGBT module. In addition, the s pressure contact (a.k.a. hockey puck ) design has well known advantages in terms of thermal cycle capability. On the other hand, the HVIGBT has a simpler, lower power gate drive, and does not require the array of external clamp and snubber devices that are needed with the. Furthermore, the HVIGBT module does not require the precision mechanical clamping assembly that is needed with large hockey puck devices. Clearly, reliability will be driven by the requirements of the end application and the system design. In any case, both devices have been shown to have reliability advantages over the GTO s that they are intended to replace. 6. Conclusion Figure 9 shows today s concept of the appropriate application range for HVIGBTs and s. The s GTO like structure is expected to be relatively easy to adapt to higher voltages and currents.

Figure 9: Proposed Application Range of HVIGBT and AC Line VRMS 6.6kV 4.16kV 2.4kV 690 575 480 240 120 Conventional IGBT HVIGB 10 100 1000 10,000 Current ARMS Six thousand volt s with snubberless turn-off capability in excess of 4000A have been demonstrated and will soon be commercially available. In addition, the s small turn off delay and fail short characteristics make it desirable for series connected applications. In particular, ultra high power electric utility applications are now being considered. The HVIGBT appears to be best suited for the lower end of high power applications. In these applications, the HVIGBT offers increased performance and greatly simplifies design and assembly. Research on both the HVIGBT and continues. Future breakthroughs from both the device and system perspective are likely to alter the form of figure 10. 7. References 1. Satoh, et. al., "6kV/4kA Gate Commutated Turn-off Thyristor with Operation DC Voltage at 3.6kV", ISPSD 1998 2. Takata, et. al., "Snubberless Turn-off Capability of Four-inch 4.5kV Thyristor", ISPSD 1998 3. Kurachi, et. al., " Thyristor A Novel Approach to High Power Conversion", PCIM Inter 1998 4. Yamamoto, et. al., " Thyristor and Gate Drive Circuit", PESC 1998 5. Satoh et. al., "A New High Power Device (Gate Commutated Turn-off) Thyristor", EPE 1997 6. Matushita, et.al, "Tail-Current-Less 4.5kV Switching Device Realizing High Frequency Operation", ISPSD 1997 7. Yamashita, et. al. A Relation Between Dynamic Saturation Characteristics and Tail Current of Non- Punchthrough IGBT IEEE IAS Conference, October 1996 8. Mochizuki, et. al. Examination of Punch-Through IGBT for High Voltage and High Current Applications, ISPSD, May 1997 9. Ishii, et. al. A New High Power, High Voltage IGBT, PCIM Europe, May 1997 10. Donlon, et. al. A New Gate Commutated Turn-Off Thyristor and Companion Diode For High Power Applications IEEE IAS Conference October 1998