1B John D. Cressler, Silicon Earth: Introduction to the Microelectronics and Nanotechnology Revolution, Cambridge University Press, 2009 ( Copyright 2

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Transcription:

1A John D. Cressler, Silicon Earth: Introduction to the Microelectronics and Nanotechnology Revolution, Cambridge University Press, 2009 ( Copyright 2009, All Rights Reserved) John D. Cressler, ECE 3450 1

1B John D. Cressler, Silicon Earth: Introduction to the Microelectronics and Nanotechnology Revolution, Cambridge University Press, 2009 ( Copyright 2009, All Rights Reserved) John D. Cressler, ECE 3450 2

1C John D. Cressler, Silicon Earth: Introduction to the Microelectronics and Nanotechnology Revolution, Cambridge University Press, 2009 ( Copyright 2009, All Rights Reserved) John D. Cressler, ECE 3450 3

1D John D. Cressler, Silicon Earth: Introduction to the Microelectronics and Nanotechnology Revolution, Cambridge University Press, 2009 ( Copyright 2009, All Rights Reserved) John D. Cressler, ECE 3450 4

1E John D. Cressler, Silicon Earth: Introduction to the Microelectronics and Nanotechnology Revolution, Cambridge University Press, 2009 ( Copyright 2009, All Rights Reserved) John D. Cressler, ECE 3450 5

1F n-type p-type John D. Cressler, Silicon Earth: Introduction to the Microelectronics and Nanotechnology Revolution, Cambridge University Press, 2009 ( Copyright 2009, All Rights Reserved) John D. Cressler, ECE 3450 6

1G after Pierret, Semiconductor Device Fundamentals, 1996 John D. Cressler, ECE 3450 7

1H Fermi-Dirac Distribution Function after Pierret, Semiconductor Device Fundamentals, 1996 John D. Cressler, ECE 3450 8

1I after R. Pierret, Advanced Semiconductor Fundamentals, 1987. John D. Cressler, ECE 3450 9

1J after Pierret, Semiconductor Device Fundamentals, 1996 John D. Cressler, ECE 3450 10

1K Chapter 2 Overheads John D. Cressler, Silicon Earth: Introduction to the Microelectronics and Nanotechnology Revolution, Cambridge University Press, 2009 ( Copyright 2009, All Rights Reserved) John D. Cressler, ECE 3450

1L Chapter 2 Overheads John D. Cressler, Silicon Earth: Introduction to the Microelectronics and Nanotechnology Revolution, Cambridge University Press, 2009 ( Copyright 2009, All Rights Reserved) John D. Cressler, ECE 3450

1M Chapter 2 Overheads John D. Cressler, ECE 3450 after Pierret, Semiconductor Device Fundamentals, 1996

1N Chapter 2 Overheads John D. Cressler, Silicon Earth: Introduction to the Microelectronics and Nanotechnology Revolution, Cambridge University Press, 2009 ( Copyright 2009, All Rights Reserved) John D. Cressler, ECE 3450

1O Chapter 2 Overheads John D. Cressler, Silicon Earth: Introduction to the Microelectronics and Nanotechnology Revolution, Cambridge University Press, 2009 ( Copyright 2009, All Rights Reserved) John D. Cressler, ECE 3450

1P after Pierret, Semiconductor Device Fundamentals, 1996 John D. Cressler, ECE 3450 16

1Q John D. Cressler, Silicon Earth: Introduction to the Microelectronics and Nanotechnology Revolution, Cambridge University Press, 2009 ( Copyright 2009, All Rights Reserved) John D. Cressler, ECE 3450

1R Chapter 2 Overheads John D. Cressler, ECE 3450 after Tiwari, Compound Semi. Device Physics, 1992 / after Pierret, Semi. Device Fundamentals, 1996

1S after Pierret, Semiconductor Device Fundamentals, 1996 John D. Cressler, ECE 3450 19

1T GaAs GaN Si after Dr. Alan Doolittle John D. Cressler, ECE 3450 20

1U John D. Cressler, ECE 3450 21

1V John D. Cressler, ECE 3450 22

1W after Pierret, Semiconductor Device Fundamentals, 1996 John D. Cressler, ECE 3450 23

1X Importance of lattice mismatch The lattice constant of the epitaxially grown layer needs to be close to the lattice constant of the substrate wafer. Otherwise the bonds can not stretch far enough and dislocations will result. Epitaxy After Dr. Alan Doolittle John D. Cressler, ECE 3450 24

1Y Chemical Vapor Deposition After Dr. Alan Doolittle John D. Cressler, ECE 3450 25

1Z Commercial Thomas Swan MOCVD Reactor After Dr. Alan Doolittle John D. Cressler, ECE 3450 26

1ZA Commercial Veeco MBE Reactor After Dr. Alan Doolittle John D. Cressler, ECE 3450 27

1ZB John D. Cressler, Silicon Earth: Introduction to the Microelectronics and Nanotechnology Revolution, Cambridge University Press, 2009 ( Copyright 2009, All Rights Reserved) John D. Cressler, ECE3450 28

1ZC John D. Cressler, Silicon Earth: Introduction to the Microelectronics and Nanotechnology Revolution, Cambridge University Press, 2009 ( Copyright 2009, All Rights Reserved) John D. Cressler, ECE 3450 29

1ZD John D. Cressler, Silicon Earth: Introduction to the Microelectronics and Nanotechnology Revolution, Cambridge University Press, 2009 ( Copyright 2009, All Rights Reserved) John D. Cressler, ECE 3450 30

1ZE John D. Cressler, Silicon Earth: Introduction to the Microelectronics and Nanotechnology Revolution, Cambridge University Press, 2009 ( Copyright 2009, All Rights Reserved) John D. Cressler, ECE 3450 31

1ZF John D. Cressler, Silicon Earth: Introduction to the Microelectronics and Nanotechnology Revolution, Cambridge University Press, 2009 ( Copyright 2009, All Rights Reserved) John D. Cressler, ECE 3450 32