SGL Series. Single Guide Linear Motor Stage. Zero cogging and backlash ironless linear motor actuator. High speed and high acceleration

Transcription

1 SGL Series Single Guide Linear Motor Stage Direct drive Zero cogging and backlash ironless linear motor actuator High speed and high acceleration Fast response and quick settling time Smooth motion at low speed(low velocity) High Precision 65

2 SGL65 Series AUM1 (Standard Cover) Features Direct drive, zero cogging, zero backlash ironless linear motor Linear encoder options of 5μm, 1μm, 0.5μm and 0.1μm Single size 12 (miniature) linear guidance rails High accelerations (up to 10) and speeds (up to 5m/s) Smooth motion at low speeds (low velocity ripple) Motor Parameter Specifications AUM1-S4 Performance Parameters Unit Series Continuous Force, C N 11.9 Peak Force N 47.6 Motor Constant N/SqRt(W) 3.46 Continuous Power W 11.8 Peak Power W Electrical Cycle mm 21 Max Bus Voltage V 60 Max Coil Temperature C 125 Thermal Dissipation Constant W/ C 0.16 Continuous Current Arms 1.7 Peak Current Arms 6.8 Force Constant N/Arms 7.00 Back EMF Constant Vpeak/(m/s) 5.7 Inductance mh 0.41 Terminal C Ohms 4.10 Electrical Time Constant ms 0.10 Mechanical Parameters Coil g Coil mm 85 Track (per 63 mm) g 149 Magnetic Attraction N (lb) 0 66

3 Dimension Drawing Model Coil (Z) Overall (X) (A) Height Moving (W) (Y) Mounting Mounting Hole Hole (B) ( C ) SGL65 S Bearing Parameters Specifications Unit S4 Maximum bearing load N 530 Recommended row moment Nm 1.92 Recommended pitch moment Nm 17 Recommended yaw moment Nm 17 67

4 ROLL MOMENT YAW MOMENT PITCH MOMENT Performance Parameter Acceleration G 10 Velocity (1µm resolution) 5 (40µm scale pitch and 20MHz counter frequency) Velocity (0.5µm resolution) 2.5 (20µm scale pitch and 20MHz counter frequency) Velocity (0.1µm resolution) Velocity (Analogue) m/s 1.3 (20µm scale pitch and 20MHz counter frequency) 8 (40µm scale pitch and 200kHz input frequency) 4 (20µm scale pitch and 200kHz input frequency) 1 Straightness ±3µm/25mm, NTE±10µm/200mm 1 Flatness ±3µm/25mm, NTE±10µm/200mm Repeatability (1µm resolution) Repeatability (0.5µm resolution) Repeatability (0.1µm resolution) Repeatability (Analogue) µm ±3µm (40µm scale pitch) ±1.5µm (20µm scale pitch) ±1µm(20µm scale pitch) ±5 counts Part Numbering (Rapid Delivery Series) SGL65 Motor (type) Connection Motor Size Hall s Cable (m) AUM1 S S4 NH 3.0, Encoder (type) 1 All measurement taken when module is mounted on a 5 micron flat granite table. 3 M1 Encoder Resolution (micron, μ) For applications that have specific straightness and flatness requirements, precision class (P) is available. Please contact us for more details. 3 With external Micro Photo sensor (Panasonic PM series) Cover (type) S Rail (type) 2 T Example: SGL65-AUM1-S-S4-NH M S-T 68

5 SGL80 Series AUM2 (Standard Cover) Features Direct drive, zero cogging, zero backlash ironless linear motor Linear encoder options of 5μm, 1μm, and 0.1μm Single size 15 linear guidance rails High accelerations (up to 10) and speeds (up to 5m/s) Smooth motion at low speeds (low velocity ripple) Motor Parameter Specifications AUM2-S2 AUM2-S3 AUM2-S4 Performance Parameters Unit Series Parallel Series Parallel Series Parallel Continuous Force, C N Peak Force N Motor Constant N/SqRt(W) Continuous Power W Peak Power W Electrical Cycle mm Max Bus Voltage V Max Coil Temperature C Thermal Dissipation Constant W/ C Continuous Current Arms Peak Current Arms Force Constant N/Arms Back EMF Constant Vpeak/(m/s) Inductance mh Terminal C Ohms Electrical Time Constant ms Mechanical Parameters Coil Kg Coil mm Track (per 120 mm) Kg Magnetic Attraction N (lb) 0 69

6 Dimensional Drawing Model SGL 80 Coil (Z) Overall (X) (A) Height Moving S S S (W) (Y) Mountin g Hole (B) Mountin g Hole (C)

7 Bearing Parameters Specifications Unit S2 S3 S4 Maximum bearing load N Recommended row moment Nm Recommended pitch moment Nm Recommended yaw moment Nm Performance Parameter Acceleration G 10 Velocity(1μm resolution) 5 (40µm scale pitch and 20MHz counter frequency) Velocity(0.5μm resolution) 2.5 (20µm scale pitch and 20MHz counter frequency) Velocity(0.1μm resolution) Velocity(Analogue) m/s 1.3 (20µm scale pitch and 20MHz counter frequency) 8 (40µm scale pitch and 200kHz input frequency) 4 (20µm scale pitch and 200kHz input frequency) 3 Straightness ±3µm/25mm, NTE±10µm/300mm 3 Flatness ±3µm/25mm, NTE±10µm/300mm Repeatability(1μm resolution) Repeatability(0.5μm resolution) Repeatability(0.1μm resolution) Repeatability(Analogue) μm ±3µm (40µm scale pitch) ±1.5µm (20µm scale pitch) ±1µm(20µm scale pitch) ±5 counts Part Numbering (Rapid Delivery Series) SGL 80 Hall Cable Encoder Resolution Cover Motor Connection Sensor Encoder Rail Motor Size (type) (m) (type) (micron, μ) (type) (type) AUM2 P,S S2,S3,S4 K H9D R22, R41, 4 R10 0.1, 1.0, 5.0 S 2 T 1. For customized stroke length (up to 2.7m), please contact us. 2. For applications that have specific straightness and flatness requirements, precision class (P) is available. Please contact us for more details. 3. All measurement taken when module is mounted on a 5micron flat granite table. 4. Available for 1um only. Example: SGL80-AUM2-S-S2-K-H9D R S-T 71

8 SGL100 Series AUM3 (Standard Cover) Features Direct drive, zero cogging, zero backlash ironless linear motor Linear encoder options of 5μm, 1μm, and 0.1μm Single size 15 linear guidance rails High accelerations (up to 10) and speeds (up to 5m/s) Smooth motion at low speeds (low velocity ripple) Motor Parameter Specifications AUM3-S2 AUM3-S3 AUM3-S4 Performance Parameters Unit Series Parallel Series Parallel Series Parallel Continuous Force, C N Peak Force N Motor Constant N/SqRt(W) Continuous Power W Peak Power W Electrical Cycle mm Max Bus Voltage V Max Coil Temperature C Thermal Dissipation Constant W/ C Continuous Current Arms Peak Current Arms Force Constant N/Arms Back EMF Constant Vpeak/(m/s) Inductance mh Terminal C Ohms Electrical Time Constant ms Mechanical Parameters Coil Kg Coil mm Track (per 120 mm) Kg 1.00 Magnetic Attraction N (lb) 0 72

9 Dimensional Drawing Model SGL100 Coil (Z) Overall (X) (A) Height Moving S S (W) (Y) Mounting Mounting Hole Hole (B) (C) S

10 Bearing Parameters Specifications Unit S2 S3 S4 Maximum bearing load N Recommended row moment Nm Recommended pitch moment Nm Recommended yaw moment Nm Performance Parameter Acceleration G 10 Velocity(1μm resolution) 5 (40µm scale pitch and 20MHz counter frequency) Velocity(0.5μm resolution) 2.5 (20µm scale pitch and 20MHz counter frequency) Velocity(0.1μm resolution) Velocity(Analogue) m/s 1.3 (20µm scale pitch and 20MHz counter frequency) 8 (40µm scale pitch and 200kHz input frequency) 4 (20µm scale pitch and 200kHz input frequency) 3 Straightness ±3µm/25mm, NTE±10µm/300mm 3 Flatness ±3µm/25mm, NTE±10µm/300mm Repeatability(1μm resolution) Repeatability(0.5μm resolution) Repeatability(0.1μm resolution) Repeatability(Analogue) μm ±3µm (40µm scale pitch) ±1.5µm (20µm scale pitch) ±1µm(20µm scale pitch) ±5 counts Part Numbering (Rapid Delivery Series) SGL 100 Hall Cable Encoder Resolution Cover Motor Connection Sensor Encoder Rail Motor Size (type) (m) (type) (micron, μ) (type) (type) AUM3 P,S S2,S3,S4 J,K H9D R22, R41, 4 R10 0.1, 1.0, 5.0 S 2 T 1. For customized stroke length (up to 2.7m), please contact us. 2. For applications that have specific straightness and flatness requirements, precision class (P) is available. Please contact us for more details. 3. All measurement taken when module is mounted on a 5micron flat granite table. 4. Available for 1um only. Example: SGL100-AUM3-S-S2-K-H9D R S-T 74

11 SGL120 Series AUM4 (Standard Cover) Features Direct drive, zero cogging, zero backlash ironless linear motor Linear encoder options of 5μm, 1μm, and 0.1μm Single size 15 linear guidance rails High accelerations (up to 10) and speeds (up to 5m/s) Smooth motion at low speeds (low velocity ripple) Motor Parameter Specifications AUM4-S2 AUM4-S3 AUM4-S4 Performance Parameters Unit Series Parallel Series Parallel Series Parallel Continuous Force, C N Peak Force N Motor Constant N/SqRt(W) Continuous Power W Peak Power W Electrical Cycle mm Max Bus Voltage V Max Coil Temperature C Thermal Dissipation Constant W/ C Continuous Current Arms Peak Current Arms Force Constant N/Arms Back EMF Constant Vpeak/(m/s) Inductance mh Terminal C Ohms Electrical Time Constant ms Mechanical Parameters Coil Kg Coil mm Track (per 120 mm) Kg 1.77 Magnetic Attraction N (lb) 0 75

12 Dimensional Drawing Model SGL120 Coil (Z) Overall (X) (A) Height Moving S S S (W) (Y) Mounting Hole (B) Mountin g Hole (C)

13 Bearing Parameters Specifications Unit S2 S3 S4 Maximum bearing load N Recommended row moment Nm Recommended pitch moment Nm Recommended yaw moment Nm Performance Parameter Acceleration G 10 Velocity(1μm resolution) 5 (40µm scale pitch and 20MHz counter frequency) Velocity(0.5μm resolution) 2.5 (20µm scale pitch and 20MHz counter frequency) Velocity(0.1μm resolution) Velocity(Analogue) m/s 1.3 (20µm scale pitch and 20MHz counter frequency) 8 (40µm scale pitch and 200kHz input frequency) 4 (20µm scale pitch and 200kHz input frequency) 3 Straightness ±3µm/25mm, NTE±10µm/300mm 3 Flatness ±3µm/25mm, NTE±10µm/300mm Repeatability(1μm resolution) Repeatability(0.5μm resolution) Repeatability(0.1μm resolution) Repeatability(Analogue) Part Numbering (Rapid Delivery Series) μm ±3µm (40µm scale pitch) ±1.5µm (20µm scale pitch) ±1µm(20µm scale pitch) ±5 counts SGL 120 Hall Cable Encoder Resolution Cover Motor Connection Sensor Encoder Rail Motor Size (type) (m) (type) (micron, μ) (type) (type) AUM4 P,S S2,S3,S4 J,K H9D R22, R41, 4 R10 0.1, 1.0, 5.0 S 2 T 1. For customized stroke length (up to 2.7m), please contact us. 2. For applications that have specific straightness and flatness requirements, precision class (P) is available. Please contact us for more details. 3. All measurement taken when module is mounted on a 5micron flat granite table. 4. Available for 1um only. Example: SGL120-AUM4-S-S2-J-H9D R S-T 77