FE-SEM SU-8020 Operating manual (Preliminary version)
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1 FE-SEM SU-8020 Operating manual (Preliminary version) 2016/04/11 Seimitsu Bunseki sitsu lab.
2 Starting up 1.Turn on the Display switch. Windows OS is starting up 2. Select the user SU Click the PC-SEM icon. Usually, PC-SEM software starts automatically. 4. Press the Enter. SEM software will start. 2
3 Flashing 1. If the flashing message is displayed, you operate the under procedure. 2. Click the HV display area. (Black area) 3. Click the Flashing bottom. 4. Check the Intensity is 2, Click the Execute bottom. 5. Applied about 30 ua current to electron gun. 6. About the 30 min waiting for stabilizing the electron gun. 3
4 Sample preparation 1. Mount the samples on the each stabs. 2. Set the stabs to the sample holder. 3. Adjust the stabs to the proper height. 4. Tighten the screw. 5. Adjust the sample holder to the proper height using the height gauge. Adjust the height so that the highest point of the sample holder is the same as the bottom of the height gauge. Sample holder(al) bottom Stab (brass) Height gauge Height gauge 15mmφ stab (brass) Sample holder (Al) screw 4
5 Sample loading 1 (Confirm the exchange position) 1. Confirm the accelerating voltage is off. 2. Confirm the the Home lamp indicator is green, X=0.0 mm, Y=0.0 mm and Z=8.0 mm on the display. ( Exchange position ) 3. Press the Air switch on the Intro chamber control panel. Intro chamber control panel. 5
6 Sample loading 2 1. If the buzzer sounded, pull the Intro chamber. 2. Push the specimen exchange rod slightly to unlock it. 3. Set the sample holder ahead of the rod and turn lock. 4. Pull the rod back and make sure it is locked. 5. Push the Intro chamber back and press the EVAC switch on the panel. Intro Specimen exchange rod UNLOCK LOCK 6
7 Sample loading 3 1. Wait until vacuum in the intro chamber is improved enough. 2. The EVAC lamp is lit and the buzzer sounded. 3. Press the OPEN switch on the panel. 4. If the buzzer sounded, confirm the gate valve is opened. 5. Push in the rod and set the sample holder in to the stage by sliding it along the guide rails. 6. Confirm the XC lamp is blue. 7. Turn the rod clockwise to UNLOCK. 8. Pull out the rod fully. 9. Press the CLOSE switch. OPEN XC lamp CLOSE EVAC 7
8 Setting of Accelerating Voltage and Emission Current HV display 1. Click the HV display on the PC. 2. Select voltage and current in the pull-down menu. 3. Press the ON. Accelerati ng Voltage Emission Current Initial Conditions Vacc 15 kv Ie 10 µa Stage X=0.0, Y= 0.0, Z= 8.0 Probe Current Norm Cond. Lens 5.0 W.D. 8.0 mm Mode TV1 8
9 Operation for image observation 1 (positioning) 1. Click the H/L to select the low magnification mode. 2. Use the minimum magnification and make sure that you can see your samples. 3. Click the ABC (Auto Brightness Control) to adjust the image brightness. 4. Adjust the focus using the focus knob (Coarse) on the control panel. 5. Move the stage by trackball. Magnification display Control Panel Focus knob Magnification knob Coarse 9
10 Operation for image observation 2 (Hi mag.) 1. Once you have identified the area of interest, switch to the high magnification mode by clicking on the H/L button. 2. Click the ABC (Auto Brightness Control) to adjust the image brightness. 3. Adjust the focus using the focus knob (fine) on the control panel. Magnification display Control Panel Focus knob Magnification knob Fine 10
11 Beam alignment 1. Perform the following alignment when you change the accelerating voltage and operation mode. 2. Click the B Align button and open the Alignment window. 3. A circular image will appear and make adjustments with alignment knobs on the control panel so that the circular image appears in the center of the screen. Beam alignment screen Alignment menu 11
12 Aperture alignment 1. Set the magnification over x20.0k and position a point of interest in the center of the display. 2. Focus the image. 3. Select the Aperture Align. button in the Alignment menu. 4. Make the adjustments using the X and Y knobs on the control panel so that the wobbling motion of the image is minimized. 5. Select Off button. X,Y Knobs Alignment menu 12
13 Stigma Alignment Stigma alignment is necessary to minimize the image drift. 1. Set the magnification over x20.0 k and position a point of interest in the center of the display. 2. Focus the image. 3. Select the Stigma Align. X in the Alignment menu and make adjustments by using stigma/alignment X or Y knobs so that the wobbling motion of the image is minimized. Repeat the same for the Y direction. Under-fucus Best Focus Over Focus STIGMA/ALIGNMENT X Y Stretching Stretching 13
14 Capture Setup 1. Click the black triangle above the capture button. Open the Capture Setup window. 2. Select the Mode. ( TV, Fast and Slow/CS ) 3. Select Resolution (image size) and Speed (scan speed) by using pull-down menu. 4. Click the OK button to set the conditions. Initial conditions Mode Slow scan Resolution pixels Speed 20 sec 14
15 Capturing and saving images 1. Press the Capture button on the main window. The image stored in the Capture Box window. The image is not saved until you click the Save button on the Capture Box window. 2. Select the images (turn to yellow). All of the images are selected by clicking the All button. 3. Click the Save button, open the Image save window. 4. Select the folder and image type. And Enter the image name. 5. Press the Save button on the Image save window, images are saved. Capture Capture Box window 15
16 Sample exchange1 1. Decrease to minimum the magnification. 2. Click the Home button in the main window. The sample stage is moved to the exchange position. 3. Confirm the Home lamp is green, X= 0.0, Y=0.0 and Z= Turn the high voltage off. (click the OFF button) 5. Push the OPEN button on the Intro panel. 16
17 Sample exchange 2 1. If buzzer sounded, open the gate valves. 2. Confirm the gate valve is opened. Push the rod in the fully. 3. Confirm the XC lamp is blue. 4. Turn the rod counterclockwise to LOCK. 5. Pull out the rod fully. 6. Push the CLOSE switch to close the gate valve. Intro chamber exchange rod UNLOCK LOCK 17
18 Sample exchange 3 1. If buzzer sounded, confirm the gate valve is closed. 2. Press the AIR switch. 3. If buzzer sounded, pull the intro chamber. 4. Wear gloves to handle the holder. 5. Push the specimen exchange rod slightly to unlock it. 6. Release the sample holder of the rod. 7. Pull the rod back and make sure it is locked. 8. Push the Intro chamber back and press the EVAC switch on the panel. OPEN AIR XC CLOSE EVAC 18
19 Daily Shutdown 1. Confirm the EVAC lump is lit. 2. Delete the images in the Capture box. 3. Save the image files from SEM-PC to your mobile storage (USB memory and HDD). 4. Reset the conditions to initial conditions. 5. Fill the log book with your entry (Labo name, your name, HV, Ie, and sample name). Last user 1. Close the PC-SEM software 2. Close the Windows. 19
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