Hartmann wavefront sensing Beamline alignment
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1 Hartmann wavefront sensing Beamline alignment Guillaume Dovillaire SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 1
2 SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 2
3 Metrology : Off-line metrology EUREKA Eurostar project SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 6
4 Off-line metrology Optical head at BNL 1.5 meter long mirrors 50 nrad rms accuracy / 1.2mm resolution HFM and VFM configuration mirror down to 1.5m of radius of curvature 2D slopes maps, height SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 7
5 Flat mirror characterization Mirror flipped and data flipped Mirror shifted SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 8
6 Slope error in µrad Flat mirror characterization Zeiss Silicon mirror on 115mm : R=47km, slopes=0.15 µrad rms Radii of curvature are =43.4km, 43.5km and 56.5km Max difference to average is 3.6 E /m (280km) On 90mm, differences are below 60 nrad rms A --> B B --> A B --> A Offset Gantry Mirror coordinate in mm SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 9
7 Toroidal mirror characterization From A to B From B to A and data flipped 7.02 nm rms 0.45 µrad rms 7.51 nm rms 0.46 µrad rms 1.39 nm rms 0.1 µrad rms SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 10
8 EUV wavefront sensors The Hartmann sensor SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 11
9 The wavefront Geometrical approach: surface orthogonal to all rays Collimated beam Flat wavefront No aberration Diverging beam Spherical wavefront No aberration Beam Distorted wavefront Some aberrations SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 12
10 The wavefront Diffraction approach: surface defined by phase = constant U r ( r) ( ) a( r). e i Amplitude ( r) Phase 2 ( r) In radian In micron In wave SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 13
11 The wavefront : The Zernike base SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 14
12 Hartmann wavefront sensors Holes are small enough to create diffraction on the CCD Holes pitch is large enough to avoid crosstalk SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 16
13 Hartmann wavefront sensors : slopes integration How calculating the wavefront knowing the slopes? Wave-front estimation from wave-front slope measurements W.H. Southwell, JOSA Vol70, No 8, Août 1980 x x x x S i1, j Si, j i 1, j i, j 2 Pitch hole «Successive Over relaxation method» ) Err (, Pj, ( m 1) ( m) ( m j, k j, k j, k k ) SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 18
14 Hartmann wavefront sensors Raw signal on the CCD sensor Measured intensity profile U r ( r) ( ) a( r). e i Measured wavefront SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 19
15 HASO EUV EUV 4 to 40nm /75 rms accuracy 72x72 holes SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 21
16 Beam lines alignment SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 22
17 Idea 1 : I understand the wave front I measure Astigmatism The benders of my KB do not focus in the same plane Coma One of my KB bender is not optimized My ellipsoid is not aligned Something I don t know SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 23
18 At- alignement of a Kirkpatrick-Baez optics FERMI : KB alignement at 32nm FERMI : Giovanni de Ninno, Lorenzo Raimondi, LOA : Philippe Zeitoun Best wavefront (/4 rms) Intensity map D.L.: 5.5 x 6.2 µm x 5.9 µm x 6.0 µm 2 SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 24
19 Idea 2 : I want an automatic alignement SLS : automatic control of a KB at 3.5 kev SOLEIL : Mourad Idir Pascal Mercère Pierre Lagarde SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 25
20 Derivative of Fluorescence Derivative of Fluorescence Wavefront correction in the tender X-Rays Before correction After correction 7.7 nm rms 30.9 nm PV 0.8 nm rms 4.6 nm PV 2700 Knife Edge Scan of Horizontal X-ray beam at LUCIA 2000 Knife Edge Scan of Vertical X-ray beam at LUCIA FWHM = 2.55 µm Derivative of Knife Edge Data Gauss Fit FWHM = 2.40 µm Derivative of Knife Edge Data Gauss Fit Horizontal Position (µm) Vertical Position (µm) SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 26
21 Idea 3: Coupling wavefront measurements and optics simulation software SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 28
22 Example in visible : telescope alignment Tzec Maun Foundation 1m diameter telescope Modified Cassegrain type SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 29
23 The simulation tool: Zemax Expected performances /100 rms WFE Diffraction limited PSF SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 30
24 The measurment tool : HASO4 BB Measured performances /10 rms WFE The coma aberration reduces the images contrast SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 31
25 The measurement is set in the model The wavefront aberrations are defined by the Zernike coefficients and included in the simulation software SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 32
26 The optimization process Secondary mirror position is variable SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 33
27 The result The secondary mirror must be shifted and tilted to remove the measured aberration. Just grab the screwdriver SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 34
28 Conclusion SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 35
29 SOS Trieste October 4th, 2016 G. Dovillaire M COM PPT GD 36
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