INTRODUCTION We believe that every laboratory working in the field of nanotechnology needs an SEM, therefore we would like to introduce to you our IEM
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2 INTRODUCTION We believe that every laboratory working in the field of nanotechnology needs an SEM, therefore we would like to introduce to you our IEM series of SEM. In short space of time, our device that is the size of an old computer will prove its effectiveness, and will help you achieve a significant step in your research. The advantage of the images obtained by SEM lies in the high magnification factor: you will be able to magnify an image by up to 150,000 times which will enable you to conduct analyses up to a nanoscale using different detectors such as BSE, SE and EDS (X-ray detector). The SEM can be used in many areas and there is no restriction to analyses on samples. Another important factor to purchase our SEM is to avoid waiting the annoying time for obtaining images from a nearby facility, instead of that your images can be available in an unbelievable short time. Our SEMs are easy to operate and your employees or students can use it without any waste of time in a special training. lnovenso Team 2
3 SEM Why? Quick and simple installation and no maintenance needed 1 3 Times More affordable than other SEMs 2 Obtaining results in less than 4 minutes 3 Magnification range: x20 ~ x150, nanometer resolution 5 Easy Navigation with the User-Friendly Software 6 3
4 IEM 10 Magnification Up To x 100,000 Auto Stage: X, Y, T Axis Click & Move Stage Control Auto Function: Filament Memory, Focus, Contrast, Brightness High Definition Image : 5120 X 3840 Pixel Specifications Magnification x20 ~ x100,000 (Efficient: ~x50,000) Acc Voltage 1 ~ 30 kv (1kV increments) Electron Gun Tungsten Filament (W) Detector SE Detector Stage Auto Stage (X: 35mm,Y: 35mm,T: 0 to 45o) Manual Stage (Z: 5 to 50mm) Image Shift X, Y, R(Rotation) Operating System Microsoft Windows 7 Dimensions (mm) 400(W) x 600(L) x 550(H) Dimensions (inch) 15,74(W) x 23,62(L) x 21,65(H) Weight 85(kgs) (lbs) Stage Position Users can easily locate the sample on the stage Auto Focus & Fine Focus Auto focus function makes the operation easier and clearer images can be obtained even at the higher magnifications Click & Move By applying the auto stage, stage is controlled simply with a mouse click Filament Memory Filament s saturation point is automatically stored and activated 4
5 IEM 10+ Magnification Up To x 100,000 Auto Stage: X, Y, T Axis Click & Move Stage Control Auto Function: Filament Memory, Focus, Contrast, Brightness High Definition Image: 5120 X 3840 Pixel Thermo EDS Detector: 133 ev at Mn, B(5) ~ U(92) Specifications Magnification x20 ~ x100,000 (Efficient: ~x50,000) Acc Voltage 1 ~ 30 kv (1kV increments) Electron Gun Tungsten Filament (W) Detector SE and EDS Detectors Stage Auto Stage (X: 35mm,Y: 35mm,T: 0 to 45o) Manual Stage (Z: 5 to 50mm) Image Shift X, Y, R(Rotation) Operating System Microsoft Windows 7 Dimensions (mm) 400(W) x 600(L) x 550(H) Dimensions (inch) 15,74(W) x 23,62(L) x 21,65(H) Weight 95(kgs) - 210(lbs) Rapid EDS Analysis Point and shoot an alysis with NORAN System 7 software uses standardless quantitative analysis to enable rapid identification of various regions within a material. Extracted Linescans Extracted Area Analysis EDS Analysis with NORAN System 7 Spectral Imaging The UltraDry Compact EDS detector provides outstanding elemental mapping within few minutes. With Spectral Imaging, where a full EDS spectrum is stored at every pixel, samples can be analyzed after they have been removed from the microscope. NORAN System 7 tools provide several analytical methods for the best results. 5
6 IEM 11 High Quality Images (5nm resolution) Magnification Up To 150,000x Easy Navigation with the Navigation Mode Precise Control with a Joystick and the Driving Mode Combined SE and BSE Images Low Energy Consumption Intuitive User Interface Specifications Magnification x20 ~ x100,000 (Efficient: ~x50,000) Acc Voltage 1 ~ 30 kv (1kV increments) Electron Gun Tungsten Filament (W) Detector SE Detector Stage Auto Stage (X: 35mmY: 35mm,T: 0 to 45o) Manual Stage (Z: 5 to 50mm) Image Shift X, Y, R(Rotation) Operating System Microsoft Windows 7 Dimensions (mm) 400(W) x 600(L) x 550(H) Dimensions (inch) 15,74(W) x 23,62(L) x 21,65(H) Weight 85(kgs) - 187(lbs) SE: Composition Material: Alloy Metal BSE: Topography Material: Alloy Metal Removable BSE Detector By applying 4-channel BSE detector, composition and topography functions are available. These functions are optional and can be opted out. 6
7 IEM 11 Low Voltage Analysis Information on the morphology of a sample can be obtained with voltage ranging from 1 to 30kV. ACC.Voltage: 20kV / SE Image / Mag: x50,000 ACC.Voltage : 5 kv / SE Image / Mag: x50,000 Move "Left" Focus "-" Focus "+" Move "Up" Move "Right" Low Magnification High Magnification Driving Mode 2-axes stage motion, magnification, and focus can be easily motorized and controlled with a joystick. Move "Down" Combined Signaling SE and BSE can be detected separately and together. ACC.Voltage: 20kV Material: Alloy Metal SE + BSE Image Highest Resolution Provides high quality images (5nm resolution, Max accelerating voltage: 30kV) ACC. Voltage : 30kV / SE Image / Mag : x100,000 Driving Mode By loading seven samples simultaneously into a multi holder, samples can be easily located with the help of a mini map, sample area, and a live display. 7
8 IEM 11+ High Quality Images (5nm resolution) Magnification Up To 150,000x Easy Navigation with the Navigation Mode Precise Control with a Joystick and the Driving Mode Combined SE and BSE Images Low Energy Consumption Intuitive User Interface Oxford:130eV at Mnk, C(6) ~ U(92) / EDAX:133eV at Mnk, Be(4) ~ U(92) Specifications Magnification Acc Voltage Electron Gun Detector EDS EDS x20 ~ x150,000 (Efficient: ~x80,000) 1 ~ 30kV (1kV increments) Tungsten Filament (W) SE and BSE Detectors Oxford:130eV at Mnk, C(6) ~ U(92) EDAX:133eV at Mnk, Be(4) ~ U(92) Image Shift Auto Stage (X: 35mm, Y: 35mm, T: 0 to 45o) Manual Stage (Z: 5 to 50mm) Operating System Microsoft Windows 7 Dimensions (mm) 400(W) x 600(L) x 550(H) Dimensions (inch) 15,74(W) x 23,62(L) x 21,65(H) Weight 95(kgs)- 210(lbs) Brand: Oxford Tru-Q Analysis Engine: Accurate Result By Multi Algorithm Multilingual Operation Fast & Easy Analysis With Flow Chart Style Menu Diverse Element Analysis Functions: Point & ID, Line Scan, Mapping, Line Overlap & Background Correction Quantitative Mapping (QuantLineScan, QuantMap) Brand: EDAX Highest Performance SDD Sensor Size: 30mm2 High Quality Light Element Analysis: Be(4) ~ Am(95) Diverse Element Analysis Functions: Point&ID Line Scan, Mapping 8
9 IEM 11+ Oxford - Report & Data Save Various report templates are provided. Users can generate a report with the Report Generate function. Data can be saved, copied, printed, and ed directly. - Available in Various Languages The program is offered in various languages including English, Japanese, Chinese simplified, Russian, French, Korean and Portuguese. - -LineScan Linescan determines elemental concentration variations along a line defined by the users. Linescans are corrected for peak overlaps and any false variations due to X-ray background. - Point & ID Spectrum that shows elemental composition can be acquired from multiple points and areas. EDAX Outstanding Light Element Performance Silicon nitride window improves performance for light elements at low energies. EDS Reporting The TEAMTM EDS Smart Data Management system for SEM achieves new levels of ease and flexibility with simplified file management and dynamic reporting. Fast, Efficient Results for Industrial Needs All results can be reviewed anytime. Spectrum, microelement detection, quantitative mapping are construed accurately. 9
![Ionization Current Au (Standard) 50mm[Dia] AC110-240V, 50 / 60Hz,](/docs-images/94/121756971/images/10-2.jpg "50W (Except Rotary Pump) Oxford:130eV at Mnk, C(6) ~ U(92)")
10 Options Ion Coater Simple Operation Compact Rotary Pump Suitable for Metal Targets (Au,Pt,Pd,Cr,Pt-Pd,Cu,Ni) Target Target Size Power Ionization Current Au (Standard) 50mm[Dia] AC V, 50 / 60Hz, 50W (Except Rotary Pump) Oxford:130eV at Mnk, C(6) ~ U(92) EDAX:133eV at Mnk, Be(4) ~ U(92) Chamber Size Dimension (mm) Dimension (inch) 100(mm)[Dia] 420(W)x220(D)x230(H) 15,74(W)x 8,66(D)x 9,05(H) Cool Stage Suitable for Liquid or Biological Samples Cool Stage Temperature: -25oC to 50oC Temperature Resolution: ±0.1oC Temperature Accuracy: ±1oC Specimen Holder Size: 18(mm)[Dia]- 0,70(inch) [Dia] Vacuum Feed Through Flange Onion Skin without Cool Stage Onion Skin with Cool Stage 10
11 Options Low Vacuum System -High Vacuum SE Image -Low Vacuum BSE Image Suitable for Non-Conductive Samples BSE Required Coating Not Required Vacuum Condition: 100pa to 1pa BSE Detector BSE Detector -SE Image of Film Surface 4 Channel Solid State Type: 4 Segment Excellent Composition and Topography Functions Combined SE and BSE Images Synergistic Use of BSE Detector and LV Mode -BSE Image of Film Surface 11
12 Applications Automotive Iron Plate Glass Filter Tire Semiconductor Chip Layer Package Material PCB Si Wafer Chemical ZrO2 Package Material Fiber Silver 12
13 Applications Materials Wire Alloy Metal Drill AI Deposition Bioengineering Bacteria Fungus Coffee Implant Construction Paint Water Filter Wood Stone Wood 13
14 Comparison Table Items/Model IEM - 11 IEM IEM - 10 IEM Resolution SE 5.0nm at 30kV 20nm at 30kV Magnification x20 ~ x150,000 x20 ~ x100,000 Efficient Magnification Acceleration Voltage Vacuum Mode ~ x80,000 ~ x50,000 1 ~ 30 kv High Vacuum Low Vacuum (Optional) - EDS Maximum Specimen Size External (Optional) Integrated (Standard) External (Optional) 60 (mm) - 2,36 (inch) in diameter Integrated (Standard) Stage 3-Axes Motorized X 0~35(mm) - 1,37(inch) Y 0~35(mm) - 1,37(inch) T 0~45 (mm) - 1,77(inch) Z 5~50(mm) (Manual) R 360o (Raster) Observation Area Maximum Height 40(mm) - 1,57(inch) in diameter 45(mm) - 1,77(inch) Electron Gun Pre-centered Cartridge Source Tungsten Detector BSE(Standard) SE BSE(Optional) 14
15 Comparison Table Mouse Control Keyboard Joystick - Auto Focus Auto lmage Adjustment Auto Brightness & Contrast Auto Filament Auto Start Navigation View Special Multi Holder Measurement Tool Remote Control Special Features Signal Mixing (SE+BSE) Dual Display(SE/BSE) BSE(Compo,Topo) Line Profile Image Process Measurement Tool - Remote Control EDS - EDS - - Options - BSED Low Vacuum Cool Stage 15
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Quick and simple installation and no maintenance needed. 3 Times More affordable Than a normal SEM. Obtaining results in less than 4 minutes
INTRODUCTION We believe that every laboratory working in the field of nanotechnology needs an SEM, therefore we would like to introduce to you our IEM series of SEM. In short space of time, our device
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