Technical Training MS9000.D / VS9000.D

Transcription

1 Technical Training MS9000.D / VS9000.D

2 Frederic Grumbach Jean-Philippe Gachot Field application Engineer Photo Field Application Engineer ISM 2015

3 Technical Training Module 001 Advantage capacitive MEMs vs other technologies

4 ADVANTAGE CAPACITIVE MEMS VS OTHER TECHNOLOGIES 1 Introduction to 2 Introduction to 3 Piezoelectric MEMs Piezoresistive Technology MEMs Technology Introduction to capacitive MEMs Technology Compared The right choice for technology capacitive MEMs Advantage Colibrys MEMs

5 PIEZOELECTRIC DISPLACEMENT ACCELEROMETER: Seismic mass A piezoelectric material is a crystal Applying an electrical field on the crystal generates deformation Piezoelectric element Output Acceleration Acceleration applied on sensor changes crystal deformation. The sensitivity of the sensor is therefore Solid Base given by the piezoelectric coefficients

6 PIEZOELECTRIC + APPLICATIONS ADVANTAGES Very high frequency range High temperature up to 350 C Large measuring range up to 6000g Small dimensions Measure forces, displacement High temperature >120 C DISAVANTAGES Not suitable for measurement in static condition. Poor bias stability over years Operates with the small electric charge, and need high impedance cable for electrical interface. Poor stability in temperature Sensitive to humidity no self-test capabilities

7 PIEZORESISTIVE DISPLACEMENT ACCELEROMETER: Similar to piezoelectric materials A change in mechanical stress results in a change of the materials resistivity. Acceleration Piezoresistor Cantilever SiO 2 Silicon Seismic mass

8 PIEZORESISTIVE APPLICATIONS + ADVANTAGES Very high frequency range High temperature up to 350 C Large measuring range up to 6000g Low hysteresis Small dimensions Measure forces, pressure, displacement High shock, industrial application DISAVANTAGES More complex to use (design, electrical) Poor bias stability over years Poor stability in temperature Very poor non-linearity, low scale-factor (few mv/g) Sensitive to humidity no self-test capabilities

9 CAPACITIVE-BASED DISPLACEMENT ACCELEROMETERS Capacitance is inversely proportional to the distance. If this distance changes due to a movement of the proof mass, the capacitance changes and the change in the electrical potential between the electrodes can be measured Figure 1 Applying a voltage to conductive objects causes positive and negative charges to collect on each object. This creates and electric field in the space between the objects Figure 2 Applying an alternative voltage causes the charges to move back and forth between the objects, creating and alternating current which is detected by the sensor - - L2

10 CAPACITIVE MEMS + APPLICATIONS ADVANTAGES Inertial, Tilt, Vibration High shock, industrial application DISAVANTAGES DC measurement Good stability in temperature Good stability over years Good repeatability Easy to compensate Self test capabilities More complexe to use (design, electrical) Sensitive to electromagnetic field change

11 ACCELEROMETER TECHNOLOGIES COMPARISON Piezoelectric DC measurement Operating Temperature Bandwidth High g measurement rnage Robustness to shock Piezoresistive DC measurement Operating Temperature Bandwidth High g measurement rnage Robustness to shock Bias temperature stability Resolution Bias temperature stability Resolution Sensitivity temperature stability Long term stability Non linearity Sensitivity temperature stability Long term stability Non linearity Capacitive MEMs DC measurement Operating Temperature Bandwidth High g measurement rnage Robustness to shock 0 Bias temperature stability Resolution Sensitivity temperature stability Non linearity Long term stability

12 ACCELEROMETER TECHNOLOGIES COMPARISON DC measurement Bandwidth High g measurement rnage 0.6 Operating Temperature Robustness to shock Piezoelectric Bias temperature stability 0 Resolution Piezoresistive Capacitive Sensitivity temperature stability Non linearity Long term stability

13 CAPACITIVE MEMS FULLFILL MAIN APPLICATION: THE RIGHT CHOICE FOR CAPACITIVE MEMS Application requirement Capacitive -55 Temperature [ C] Acceleration [g] Bandwidth [Hz] Piezzo

14 TECHNOLOGIES 2 CAPACITIVE SENSORS TYPES SURFACE micro-machining BULK micro-machining COLIBRYS IN PLAN DISPLACEMENT Precision gap control 17% Gap of 4 to 6um Mass weight 0.03 to 0.3 miligrams Capacitor 2 to 5 pf OUT OF PLAN DISPLACEMENT Precision gap control 1.5% Gap of 2um Mass weight 5 to 15 milligrams Capacitor 15 to 50 pf Small size 3 axes on one die Rapid etching (low cost) Large noise and low stability Low noise and high stability Large size Only 1 axe on die possible Long etching (high cost)

15 TECHNOLOGIES COLIBRYS SENSORS ADVANTAGE CAPACITIVE COLIBRYS + SFB : SILICON + FUSION BONDING PROCESS Bulk-micromachining Temperature stability, repeatability Own fab + STABILITY + ROBUSTNESS Qualification Quality Perenity ISO 9001, 14001, Qualified in harsh environment Own ASIC Assembly patented Low stress

16 Technical Training Module 002 Introduction to COLIBRYS capacitive sensors

17 INTRODUCTION TO COLIBRYS CAPACITIVE SENSORS 1 Colibrys sensors 2 Colibrys sensors 3 Colibrys sensors presentation performences application and success stories

18 PRESENTATION COLIBRYS SENSORS COLIBRYS SENSORS PRINCIPLE Sensor based on silicon die. Acceleration forces move the silicon mass. The displacement of this mass generates capacitance variation measured by electronic SICS. This SICS converts capacitances variation into voltage value.

19 COLIBRYS PRODUCT PORTFOLIO MS8000 HS8000 MS9000 RS9000 TS High Temperature MS7000 SF2005 VS9000 VS1000 SEISMIC SI1000 to come GS1000

20 PRINTING SIGNIFICATION 100% MEMs sensor are manufactured in Switzerland. 100% parts have final certification performed in Switzerland. SENSORS HAVE 3 INFORMATION: Family VS, MS, RS, HS Package 8 or 9 (LCC48 or 20) Range 1 to 200 g Version Batch Date of manufacture Assembly location Batch number of the year Serial number

21 COLIBRYS SENSORS PERFORMANCES MEMS Fondation Technology for Tomorrow Accurate and Cost Effective Sensor Colibrys 25+ Experience in MEMS Excellence in Inertial Sensor from SAFRAN High Performances High-end Sensors for Harsh Environment and Safety Critical Applications

22 COLIBRYS SENSORS PERFORMANCES: CALIBRATION 3 PARAMETERS ARE CALIBRATED ON PRODUCTION: Non 20 C (Dynamic Calibration) 20 C (Dynamic/Static Calibration) Scale 20 C (Dynamic/Static Calibration) DEFINITION Non-Linearity: The maximum deviation of accelerometer output from the best linear fit over the full operating range. The deviation is expressed as a percent of the full-scale output [%FS]. Bias: the accelerometer output at 0g [mg]. Scale factor sensitivity: The ratio of the change in output to a unit change of input; thus given in [mv/g].

23 COLIBRYS SENSORS PERFORMANCES: SCALE FACTOR Full Scale Range and Scale Factor (Sz) [mv/g] Calibrated at 20 C The Full Scale Range define the maximum acceleration measurable with the sensor The Scale Factor (Sz) define the output voltage relation with acceleration applied on sensor Accelerometer specifications All values are specified at +20º C (+68ºF) and 5.0 VDC supply voltage, unless otherwise stated Units MS9001 MS9002 MS9005 MS9010 MS9030 MS9050 MS9100 MS9200 Full scale range g ±1g ±2g ±5g ±10g ±30g ±50g ±100g ±200g Scale factor sensitivity (K1) mv/g 2000±8 1000±8 400±4 200±2 66.6±1 40±1 20±1 10±1

24 COLIBRYS SENSORS PERFORMANCES: BIAS Bias accuracy [mg] Accelerometer output at 0g It corresponds to an error against a reference considered as perfect 0g Specification is +/-10mV and typical value is +/-6mV This parameter is repeatable. it is very easy to compensate at application level Accelerometer specifications All values are specified at +20º C (+68ºF) and 5.0 VDC supply voltage, unless otherwise stated Units MS9001 MS9002 MS9005 MS9010 MS9030 MS9050 MS9100 MS9200 Full scale range g ±1g ±2g ±5g ±10g ±30g ±50g ±100g ±200g Bias calibration mg <5 <10 <25 <50 <150 <250 <500 <1000

25 COLIBRYS SENSORS PERFORMANCES: NON-LINEARITY Non-linearity [%] The maximum deviation of accelerometer output from the best linear fit over the full operating range. The deviation is expressed as a percent of the full-scale output [%FS]. It corresponds to an error of scale factor over the full range acceleration Specification is <1% of FS This parameter is measured at 20 C ambient. The temperature has an effect on this parameter and for this reason it is complex to compensate. Accelerometer specifications All values are specified at +20º C (+68ºF) and 5.0 VDC supply voltage, unless otherwise stated Units MS9001 MS9002 MS9005 MS9010 MS9030 MS9050 MS9100 MS9200 Non linearity % of FS max <1 <0.8 <0.8 <0.9 <0.9 <0.9 <1 <1[5] g max. <0.01 <0.02 <0.04 <0.09 <0.27 <0.50 <1 <2[5]

26 COLIBRYS SENSORS PERFORMANCES: BANDWIDTH Bandwidth [Hz] Frequency range from DC to -3dB or -5% It corresponds to the capability to transmit a fast acceleration MS products have >100Hz BW -3dB 100 acceleration wave per second VS product s have >3000Hz BW -3dB 3000 acceleration wave per second Accelerometer specifications All values are specified at +20º C (+68ºF) and 5.0 VDC supply voltage, unless otherwise stated Units MS9001 MS9002 MS9005 MS9010 MS9030 MS9050 MS9100 MS9200 Bandwidth [4] Hz 0 to to to to to to to to 100 Accelerometer specifications All values are specified at +20º C (+68ºF) and 5.0 VDC supply voltage, unless otherwise stated Units VS9002 VS9005 VS9010 VS9030 VS9050 VS9100 VS9200 Bandwidth (-3dB) [3] Hz 0 to to to to to to to 3000

27 COLIBRYS SENSORS PERFORMANCES: TEMPERATURE Temperature coefficient: Influence of temperature on bias and scale factor. Internal temperature sensor is the reference (LM20) Temperature variation acts on material by dilatation or contraction, liquefaction or rigidity etc these variations generate stress on silicon die which modify the bias and scale factor through the ASIC. Parameter repeatable which allow compensation. It is frequently compensated. Accelerometer specifications All values are specified at +20º C (+68ºF) and 5.0 VDC supply voltage, unless otherwise stated Units MS9001 MS9002 MS9005 MS9010 MS9030 MS9050 MS9100 MS9200 Bias temp. coefficient [3] mg/ ºc typ. <0.05 <0.1 <0.25 <0.5 <1.5 <2.5 <5 <10 mg/ ºc max. ±0.2 ±0.4 ±1 ±2 ±6 ±10 ±20 ±40 Scale factor temp.coefficient [3] ppm/ ºc typ min./max. -50/250-50/250-50/250-50/250-50/250-50/250-50/250-50/250

28 COLIBRYS SENSORS PERFORMANCES: NOISE Undesired perturbations in the accelerometer output signal Building vibration, Electrical interferences, Quality of integration Determine the lower acceleration measurable in a system Convention is to express noise in uv/sqrt(hz). The density is noise power/bandwidth. To get voltage units you have to take the square root of both. The square root of power is voltage. Example: 24uV/sqrt(Hz) corresponds to 1Hz, For 1g sensor we have 24/2= 12 ug For 1g sensor specification is < 50ug Accelerometer specifications All values are specified at +20º C (+68ºF) and 5.0 VDC supply voltage, unless otherwise stated Units MS9001 MS9002 MS9005 MS9010 MS9030 MS9050 MS9100 MS9200 Resolution/ Threshold (@ 1Hz) mg max. <0.05 <0.1 <0.25 <0.6 <1.7 <2.8 <5.5 <11 Noise spectral density in band μv/ Hz typ (0;9kHz) max

29 COLIBRYS SENSORS PERFORMANCES: LONG TERM STABILITY Bias Stability [mg] This is the main force of Colibrys sensors Determine the repeatability of the sensor over years and environment Colibrys has spent quite a lot of time to characterize the stability of both the MS8000 and the MS9000. A standard process has been implemented, based on IEEE 528 Initial measurement 100x switch on/off (voltage 1) 50h powered 5V at 20 C (voltage 2) Cold temperature storage (-55 C), not powered, during 72h Hot temperature storage (+85 C), not powered, during 240h Temperature cycling -40 C/+155 C, 10 cycles, not powered Harass, 15 cycles from -55 C to 85 C at 70 C/min, not powered Vibration 20mg rms, random kHz Shock, 1000g, traction Centrifuge 2500g Accelerometer specifications All values are specified at +20º C (+68ºF) and 5.0 VDC supply voltage, unless otherwise stated Units MS9001 MS9002 MS9005 MS9010 MS9030 MS9050 MS9100 MS9200 Only year bias stability@ 6000g[1] mg typ. (max) 0.75 (<2.5) 1.5 (<5) 3.75 (<12.5) 7.5 (<25) 22 (<75) 37.5 (<125) 75 (<250) 150 (<500) Only year bias stability@ 1000g[2] mg typ. (max) 0.15 (<0.75) 0.3 (<1.5) 0.75 (<3.75) 1.5 (<7.5) 4.5 (<22.5) 7.5 (<37.5) 15 (<75) 30 (<150)

30 Application and some success stories «Our equipment requires the most reliable sensors. Colibrys MEMS are doing the perfect job, on Earth and into space.» Controlled Dynamics Inc.

31 ACCELERATION Inertial Navigation System MS9000P / RS9000 MAKE AIRPLANES FLY «We integrate Colibrys accelerometers in DAL A certified equipment» ACCELERATION Damping & Stabilisation MS9000

32 INERTIAL APPLICATION Sudden or gradual change of velocity All MS, HS product family Military / Aerospace Missiles (short, medium, tactical), guided munitions Fixed wings and helicopters Unmanned aerial vehicles (UAVs), unmanned land systems Submarines, submersibles Industrial GPS backup Robotic control Acceleration measurement on trains Height control of magneto-levitation Energy Underground directional drilling, MWD

33 EXPLORE THE WORLD «Colibrys tilt sensors make drilling equipment more rugged, accurate and reliable for an improved cost of operation» ACCELERATION Directional Drilling TS8000

34 TILT APPLICATION Earth gravity acts on sensors and allows angle measurement. Acceleration is between 0g and +/-1g Low range MS family Military / Aerospace Helmet mount systems Missile launch angular measurement Fire control platform stabilization Laser range finding, north finding Platform stabilization (antenna, camera, turret ) Industrial Tilting trains Platform stabilization Table stabilization Energy Down borehole drilling LWD (logging while drilling) Survey

35 VIBRATION Bogie Monitoring VS9000 BUILD SAFER TRAINS «Colibrys vibration sensors are integrated in monitoring equipment to prevent human and mechanical failures»

36 VIBRATION APPLICATION Frequency observation is an indication of any mechanical change VS product family Military / Aerospace Pre-flight and wind tunnel testing Transportation monitoring of military equipment Anti-vibration measurement in helicopters Preventive maintenance, structure health monitoring Industrial Auto-crash testing Train comfort and safety monitoring Bogie monitoring Medical applications Energy Pipeline monitoring Flow control

37 ACCELEROMETER FOR INERTIAL MEASUREMENT - AERO/DEF MARKET From Colibrys product qualified for high accurate Inertial Measurement Unit IMU Customer: AIS/BF Goodrich Program/Application: NLAW / Navigation system for Missile Anti Tank Colibrys Product Inertial Measurement Unit - IMU Missile Anti Tank NLAW Program MS 9000.D Colibrys inside

38 ACCELEROMETER FOR INERTIAL MEASUREMENT - AERO/DEF MARKET Colibrys product qualified for High End INS & AHRS for Aerospace / Ground / Marine Customer: SBG SYSTEMS Program/Application: Colibrys Product Inertial Measurement Unit - IMU Helicopter Navigation AHRS - APIRS MS 9000.D Colibrys inside

39 ACCELEROMETER FOR INERTIAL MEASUREMENT - AERO/DEF MARKET Colibrys Product MS9001.D INS & AHRS Navigation System Aero / Ground / Marine Colibrys inside Colibrys product qualified for Attitude Heading Reference System AHRS Customer: Sagem DS Program/Application: APIRS / Navigation system for Helicopters & Aircraft

40 INERTIAL PRODUCTS FOR INDUSTRIAL APPLICATIONS Colibrys product qualified for Attitude Heading Reference System AHRS Customer: WeControl (Surveycopter) Program/Application: WePilot 1000 / Navigation system for UAV Colibrys Product MS9000.D Inertial Measurement Unit - IMU Navigation System for industrial Colibrys inside

41 ACCELEROMETER FOR TILT MEASUREMENT - AERO/DEF MARKET o Colibrys product qualified for Digital Magnetic Compass Customer: Vectronix Program/Application: DMC / Binocular Colibrys Product Digital Compass Binocular MS 9000.D Colibrys inside

42 Technical Training Module 003 Basic integration of sensors

43 BASIC INTEGRATION OF SENSORS 1 Basic electrical 2 Mechanical 3 integration in precaution system Colibrys support

44 BASIC ELECTRICAL INTEGRATION IN SYSTEM Electrical integration Sensor integration Application The sensor integration involves an electronic design and a mechanical aspect. The electronic design is mainly viewed as 2 stages which are the sensors with basic required elements and the application oriented to one of domain TILT, INERTIAL, VIBRATION. The mechanical aspect is about handling to assure performance and reliability of the sensor.

45 BASIC ELECTRICAL INTEGRATION IN SYSTEM Electrical integration Power COLIBRYS Accelerometer Low pass FILTER Application 1- Power must be very stable and low noise 2- Sensors requires 3 capacitors 1uF X7R 3- filter to be inserted with the cutting frequency as low as possible in accordance with application.

46 COLIBRYS PRODUCT ELECTRICAL INTEGRATION IN SYSTEM Why a low pass filter on Vout? Switched capacitors introduce spikes on output voltage as presented on the next graph: + No spikes using VS1000.A Temperature sensor is LM20 and manufacturer preconizes applying one low pass filter to reduce noise on Vo.

47 BASIC ELECTRICAL INTEGRATION IN SYSTEM Electrical integration INERTIAL or TILT Low bandwidth ( ~ 100Hz) Temperature compensation Non-linearity compensation 1 Power 2 COLIBRYS Accelerometer 3 Low pass FILTER 3 ADC 4 Processing 4- Digitalization frequency must be at least 4 times the cutting frequency value of filter. Due to ratiometry, the ADC must be ratiometric too. 5- Processing in view to apply treatment of information like compensation

48 BASIC ELECTRICAL INTEGRATION IN SYSTEM Electrical integration VIBRATION High bandwidth (few khz) Frequency domain (FFT) 1 Power 2 COLIBRYS Accelerometer 3 Low pass FILTER 3 ADC 4 Processing 4- Digitalization frequency must be at least 4 times the cutting frequency value of filter. Due to ratiometry, the ADC must be ratiometric too. 5- Processing in view to apply treatment of information like FFT

49 BASIC ELECTRICAL INTEGRATION IN SYSTEM Mechanical integration ESD protection while handling MS9000.D and VS9000.D family is certified compliant with ESD standards: EIA / JESD22-A114-E, ESD - Association STM , MIL STD 883F, AEC-Q Rev D The qualification procedure was done with the Human body model according to Mil 883E Method, Jedec JESD22-A114E & A115A, ESD Association, STM , ESD-Association STM , AEC-Q100 standards. Tests qualifications were done in collaboration with SERMA TECHNOLOGIES Laboratory according to two severity level: ESD Waveform HBM with short kV & -2.0kV ESD Waveform HBM with 500 Ohms resistor kV & -4.0kV Always handle parts with ESD protection

50 MECHANICAL PRECAUTION Glass frit fragility Seal glass assures good hermetic sealing of the product. However this glass is relatively fragile to impact or thermal shock. Many sources of handling are able to damage this sealing material. 100% of parts are fine and gross leak tested at COLIBRYS. Any loose of hermetic sealing involve bad bias stability.

51 MECHANICAL INTEGRATION ESTIMATED PEAK ACCELERATION LEVELS AT VARIOUS DROP HEIGHT AND PULSE WIDTH Pulse width msec inch For example: A drop of 48 inches (i.e meters) with a pulse width of 0.13msec generates a peak acceleration level of 6200g.

52 COLIBRYS SUPPORT EMEA Sales Bahram Arbab Sales Colibrys (SWITZERLAND) Ltd Avenue des Sciences Yverdon-les-Bains Switzerland World Wide Frederic Grumbach Field application Engineer Colibrys (SWITZERLAND) Ltd Avenue des Sciences Yverdon-les-Bains Switzerland North America Sales Darron Collins Colibrys (SWITZERLAND) Ltd 2802 SAFRAN Dr Grand Prairie, TX USA China Bryan HE SAFRAN SHANGHAI Building A-4, 1528 Gu Mei Road, Xu Hui District, Shanghai, , China 8081 World Wide Jean-Philipe Gachot Field Application Engineer Colibrys (SWITZERLAND) Ltd Avenue des Sciences Yverdon-les-Bains Switzerland

53 Thank you for your attention