By: Louise Brown, PhD, Advanced Engineered Materials Group, National Physical Laboratory.

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NPL The Olympus LEXT - A highly flexible tool Confocal Metrology at the NPL By: Louise Brown, PhD, Advanced Engineered Materials Group, National Physical Laboratory. www.npl.co.uk louise.brown@npl.co.uk The National Physical Laboratory (NPL) is the UK s national measurement institute. NPL underpins the national measurement system, ensuring consistency and traceability of measurements throughout the UK. NPL s Advanced Engineered Materials group assess a wide range of materials using sophisticated imaging techniques from optical microscopes through to electron and scanned probe microscopy. Introduction At the NPL, the Olympus LEXT OLS3100 has been used to assess and measure a wide variety of materials surfaces and artefacts from the nano up to the macro scale. The LEXT is a confocal laser scanning microscope which has helped in the assessment of materials surfaces as it provides 3- D images and has measurement capability. Previously at NPL, conventional optical and 3-D microscopy and scanning electron microscopy were used for imaging, but these did not possess the improved resolution and 3-D capability offered by the LEXT. Conventional techniques are still used today but the LEXT offers complementary measurements to be made quickly and easily. Methods 1

The LEXT Advantage Many of our samples would normally require a scanning electron microscope (SEM) to produce an image of suitable resolution. However, using an SEM requires additional preparation of the sample before an image can be captured. This may include coating the specimen to prevent charging, mounting onto a conductive plate and placing in the SEM. These problems are not an issue using the LEXT as the specimen is placed directly onto the stage with no sample preparation required. As there is no vacuum involved, pump down time is not an issue and larger specimens can be imaged. The images can then be captured as a 3-D data set and measurements taken immediately. Further information from the scan can be obtained at a later date if required from the saved 3-D data set without the need for re-scanning. The variety of measurements includes depth, width, surface area, volume and roughness. Until now these measurements have not been easy to make. The software produces clear images and the true colour contrast allows the user to easily identify areas of the specimen. Results Finding Graphene The high resolution of the LEXT allows nano-sized objects to be imaged as shown in figure 1. This image shows graphene flakes (sp 2 bonded carbon atoms) on a substrate. These flakes are usually observed using an atomic force microscope (AFM). However, finding these flakes can be a timely process, unlike the LEXT, which takes literally minutes to identify the required region. These flakes can then be imaged and measurements taken. Measuring Hardness 2

The LEXT is extremely useful for determining the hardness of materials by more accurately measuring the impression left by an indentation than can be made using an optical microscope. The indentation is usually made with a Vickers indenter (pyramidal in shape) and the hardness calculated by measuring the diagonals of the indent. For very hard materials, such as WC-Co hard-metals with typical indent diagonals of 100 µm, errors in the region of ± 2 µm can cause a large uncertainty in the calculated hardness value. Measurements made using the LEXT are easier and produce a more accurate value due to the high lateral resolution of the microscope. Indentations often produce pile up around the edges which have not been clear to see until now, see figure 2. This image shows the pile up around the outside of the indentation. The indentation is a plastic deformation process, however, over time there is a small amount of elastic recovery which is clear from the profile of the indentation, see figure 3. One would assume that the sides of the indentation would be straight from the geometry of the indenter, however, it is clear to see that the sides actually bow out due to stress relaxation over time. The 3-D visualisation of the indentation allows a quick assessment of the integrity of the indenter as testing of these materials will cause damage to the tip over time. Rockwell is another indentation technique used to measure the hardness of materials. This uses a spherical shaped indenter and hardness is determined from the depth of penetration. This technique has been used for assessing the adherence of coatings to substrates. Figure 4 shows a Rockwell indentation made on a coated substrate. The indent is visible in the top right corner and it is clear to see from the 3-D colour height map where the coating has delaminated. Measuring Scratches Scratch testing is a technique which allows the mechanical properties of a material to be determined from a carefully controlled scratch under a 3

specific load and distance. The scratch is made using an indenter tip of well defined shape. After measurement of a scratch using the LEXT, it was found that the scratch cross section profile was uneven. Imaging of the indenter using the LEXT showed that part of the tip had sheered, see figure 5, leading to an uneven wear scar. Scratch testing can also be used for assessing the wear resistance of coatings. Figure 6 shows a scratch on a coated surface. The 3-D height map shows clearly where the pile up is around the end of the scratch. Imaging scratches in transparent materials is extremely difficult using conventional optical microscopy due to the non-reflective surface and subsurface reflections. The scratch can be perfectly imaged and much more detail can be obtained using the LEXT as this is a confocal microscope and does not suffer the same limitations as conventional light microscopy when examining this type of surface. The profile obtained from the scratch provides detailed information, see figure 7, volume can also be measured. Nano Indentation Nano indentation, like other indentation techniques, is used to assess the mechanical properties of surfaces, coatings and thin films on a small scale. Care has to be taken to ensure that the tip is clean before indentations are made. Until now, an SEM has been used for routine tip inspection. However, the LEXT can be used for quick examination of indenter tips to check the geometry and ensure they are clean. This saves time and also produces a 3-D image of the tip. An example of a tip imaged using the LEXT is shown in figure 8 which clearly shows there is dirt at the tip of the indenter. Discussion 4

The LEXT has been used to assess a wide variety of samples and artefacts with good results which has enabled NPL to extend our imaging and measurement capability. Due to the continually changing demands and new challenges of industry, we are constantly assessing the capability of the LEXT. As there is no sample preparation required, the LEXT enables us to quickly inspect a wide range of materials which would not always be possible to image using alternative techniques. Images: Image 1 3D height map of pile up around a scratch as visualised on an Olympus LEXT 3D. (Crown copyright 2008) Image 2 Image 3 Graphene Flakes as visualised on an Olympus LEXT 3D. (Crown copyright 2008) Pile Up Around a Vickers Indentation as visualised on an Olympus LEXT 3D. (Crown copyright 2008) 5

Image 4 Image 5 Profile of Vickers Indentation as visualised 3D height map of a Rockwell indentation as on an Olympus LEXT 3D. (Crown copyright visualised on an Olympus LEXT 3D. (Crown 2008) copyright 2008) Image 6 Image 7 Sheared Indenter Tip as visualised on an LEXT image of a scratch on glass as visualised Olympus LEXT 3D. (Crown copyright 2008) on an Olympus LEXT 3D. (Crown copyright 2008) Image 8 Nano Indenter Tip as visualised on an Olympus LEXT 3D. (Crown copyright 2008) Glossary Graphene flakes one-atom-thick planar sheets of sp 2 - bonded carbon atoms that are densely packed in a honeycomb crystal lattice Hardness refers to various properties of matter in the solid phase that give it high resistance to various kinds of shape change when force is applied. Contents Abstract: At the NPL, the Olympus LEXT OLS3100 has been used to assess and measure a wide variety of materials surfaces and artefacts from the nano up to the macro scale. Previously at NPL, conventional optical and 3-D microscopy and scanning electron microscopy were used for 6

imaging, but these did not possess the improved resolution and 3-D capability offered by the LEXT. Conventional techniques are still used today but the LEXT offers complementary measurements to be made quickly and easily. Please contact: OLYMPUS LIFE SCIENCE EUROPA GMBH Microscopy Esther Ahrent Department Manager Marketing Communication Tel: +49 40 2 37 73-5426 Fax: +49 40 2 37 73-4647 E-mail: microscopy@olympus-europa.com www.microscopy.olympus.eu 7