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Proceedings Archive March 6-9, 2016 Hilton Phoenix / Mesa Hotel Mesa, Arizona Archive- Session 8 2016 BiTS Workshop Image: Stiop / Dollarphotoclub

Proceedings Archive Presentation / Copyright Notice The presentations in this publication comprise the pre-workshop Proceedings of the 2016 BiTS Workshop. They reflect the authors opinions and are reproduced here as they are planned to be presented at the 2016 BiTS Workshop. Updates from this version of the papers may occur in the version that is actually presented at the BiTS Workshop. The inclusion of the papers in this publication does not constitute an endorsement by the BiTS Workshop or the sponsors. There is NO copyright protection claimed by this publication. However, each presentation is the work of the authors and their respective companies: as such, it is strongly encouraged that any use reflect proper acknowledgement to the appropriate source. Any questions regarding the use of any materials presented should be directed to the author/s or their companies. The BiTS logo and are trademarks of BiTS Workshop. 2

Session 8 Jason Mroczkowski Session Chair BiTS Workshop 2016 Schedule Solutions Day Wednesday March 9-10:30 am Cell-ebrating Test Too Proceedings Archive "Modeling Socket Thermal Performance Inside a Burn-In Chamber" Jason Cullen Plastronics Rob Caldwell - Delta V Instruments "Established the first WLCSP Testing at Tri-temp for RF and Non-RF Products" Edwin Valderama & Jin Sheng Tan -Intel Technologies "A Silicon Photonics Wafer Probing Test Cell" Roberto Aranzulla, Daniele Sala, Roberto Barbon - ST Microelectronics Giuseppe Astone, Maurizio Rigamonti, Massimo Galli - ST Microelectronics Jean Luc Jeanneau, Dario Adorni, Paul Mooney - Tokyo Electron Hubert Werkmann, Fabio Pizza - Advantest Europe GmbH Jose Moreira, Zhan Zhang - Advantest

Establish WLCSP Testing at Tri-temp for RF and non-rf products Tan Jin Sheng Intel Technology Asia Pte Ltd Edwin Valderama Intel Value Engineering/Technology Conference Ready mm/dd/2014 2016 BiTS Workshop March 6-9, 2016

Background First WLCSP product was a digital product that required ambient temperature test on a V93K tester. A team was formed to figure out how to test a WLCSP package Objectives To enable the first WLCSP test setup To enable WLCSP test for follow-on products across temperature range. Establish WLCSP Testing at Tri-temp for RF and non-rf products 2

The Outcome The team manage to successfully put together the first WLCSP test setup More products follow, each bringing with them their own set of unique challenges Various test cells ranging from non-rf to RF test, from Hot to Cold test, has since been set up Establish WLCSP Testing at Tri-temp for RF and non-rf products 3

Key Aspects 1. Type of Tester and Prober Required 2. Product Test Nature RF or Non-RF Product 3. Testing Temperature 4. Tester-Prober Docking Mechanism 5. Bump/Solder Ball Pitch and Size 6. Bump/Solder Ball Material 7. Contactor Pogo Pin or Probe Needle 8. PCB Warpage during Test 9. Testing Parallelism and Site Layout Establish WLCSP Testing at Tri-temp for RF and non-rf products 4

Homework Carry out market benchmark Analyse paper studies Understand material properties Consider potential mechanical stresses Review past experiments Plan future experiments Establish WLCSP Testing at Tri-temp for RF and non-rf products 5

Studies & Experiments 1. Market Benchmark 2. Pogo Tower Setup vs Direct Docking 3. (V93K) Bridge Beams 4. Effects of Temperature on Hardware 5. Bump/Solder Ball Hardness 6. Probe Needle vs Pogo Pin 7. Hardware Planarity 8. PCB Warpage 9. Optimum Test Site Layout Establish WLCSP Testing at Tri-temp for RF and non-rf products 6

Market Benchmark Approach the hardware vendors and OSATs for common market practices and setup styles Examples of info gathered: Bear resemblance to Wafer Sort process Wafer prober is used Traditional setup with pogo tower and direct docking method are both in used Traditional probe cards and sockets are both in used Establish WLCSP Testing at Tri-temp for RF and non-rf products 7

Pogo Tower Setup vs Direct Docking There are 2 types of setup being used: Pogo Tower Setup Direct Docking Depends on the need and restrictions of each product and tester/prober platform Establish WLCSP Testing at Tri-temp for RF and non-rf products 8

Pogo Tower Setup vs Direct Docking Pogo Tower Setup Pro: - It s more readily available across multiple platform - Well familiar by most production sites Con: - Introduces more variable with more interface layers - Higher overall hardware cost Direct Docking Pro: - Reduces the signal path length, lesser interface connection issues - Lower overall hardware cost Con: - Not (yet) available for every tester platform - Not all production sites are familiar with it Establish WLCSP Testing at Tri-temp for RF and non-rf products 9

(V93K) Bridge Beams There are 2 types of bridge beams for V93K: RF Bridge Beam Digital Bridge Beam Which one to use? That IS the question! Establish WLCSP Testing at Tri-temp for RF and non-rf products 10

(V93K) Bridge Beams RF Bridge Beam Pro: - Can be used for products with any type of test nature - More spaces for mounting big components Con: - Less rigid to support very high (overall) probe force Digital Bridge Beam Pro: - For products with digital and/or analog test - Much more rigid Con: - Cannot be used for products with RF test - Restricted space for mounting big components Establish WLCSP Testing at Tri-temp for RF and non-rf products 11

Effect of Temperature on Hardware Hot expands, cold contracts! All hardware are affected by testing temperature, especially after prolonged usage Need to ensure all the operating temperature range of hardware used, especially probe needle and pogo pin, are well above the testing temperature range Establish WLCSP Testing at Tri-temp for RF and non-rf products 12

Bump/Solder Ball Hardness To figure out the required probe/contact pin force for the each bump/solder ball material Type Composition Sn Ag Cu Ni Hardness (HVN) SAC387 95.5 3.8 0.7-21.9 SAC259 96.6 2.5 0.9-19.3 SAC219 97 2.1 0.9-17.7 SAC405 (LF31) 95.5 4.0 0.5-17.4 SAC355 96 3.5 0.5-17 SAC305 (LF45) 96.5 3.0 0.5-16.7 SAC205 97.5 2.0 0.5-15.7 SAC255 97 2.5 0.5-15.6 SAC125-0.05Ni (LF35) 98.25 1.2 0.5 0.05 14.9 SAC107 98.3 1.0 0.7-13.8 SAC105 (LF38) 98.5 1.0 0.5-13.3 SAC155 98 1.5 0.5-12.9 Establish WLCSP Testing at Tri-temp for RF and non-rf products 13

Probe Needle vs Pogo Pin Both types are usable, but which one is more suitable for the application? Establish WLCSP Testing at Tri-temp for RF and non-rf products 14

Probe Needle vs Pogo Pin Probe Needle Pro: - Available for very fine pitch application - Easy for probe-pad alignment to probe tip - Better planarity control Con: - Generally more expensive - More troublesome to perform maintenance - Low probe force - Lower overdrive range Pogo Pin Pro: - Generally cheaper - Much easier to perform replacement in production - High contact force - Higher overdrive range Con: - Only available down to certain pitch (for now) - Probe-pad alignment for crown tip is challenging - Harder to control planarity Establish WLCSP Testing at Tri-temp for RF and non-rf products 15

Hardware Planarity It is important for the hardware used to have a good control on the planarity after assembly This is applicable to docking, the board (PCB), the needles/pins in the probe head/socket The higher the planarity variance, the higher the prober overdrive required Risk : Probe card damaged and/or wafer damaged (due to over travel) Probe Card Wafer Establish WLCSP Testing at Tri-temp for RF and non-rf products 16

PCB Warpage Newton s 3 rd Law of Motion : For every action there is an equal and opposite re-action! Reaction Force Force This reaction force is bad! It has the potential to warp/bend the PCB upwards. Establish WLCSP Testing at Tri-temp for RF and non-rf products 17

Solutions: PCB Warpage Thicker PCB and/or more robust reinforced PCB stiffener designed to counter the warpage For V93K, make use of the Bridge Beam with the help of an additional backer Establish WLCSP Testing at Tri-temp for RF and non-rf products 18

Optimum Test Site Layout The optimum test site layout is achieved when the whole wafer goes through testing with the least steps or touchdowns Theoretically, the optimum layout would be a square/rectangular shape without any skip dies 1 2 3 4 1 2 3 4 1 2 3 4 5 6 7 8 But in reality, this is hard to achieve due to the PCB design constraint (traces and components) 1 3 1 3 2 4 2 4 Establish WLCSP Testing at Tri-temp for RF and non-rf products 19 1 2 3 4

Optimum Test Site Layout Fear Not! There are software and services available in the market that can help with this analysis Establish WLCSP Testing at Tri-temp for RF and non-rf products 20

The Final Setup Establish WLCSP Testing at Tri-temp for RF and non-rf products 21

Conclusion Good understanding of WLCSP product test and challenges with proper consideration of key aspects had helped to enable first and subsequent WLCSP test for Intel products. Establish WLCSP Testing at Tri-temp for RF and non-rf products 22

Next Steps To further fine tune the setup to achieve healthy and cost effective manufacturing goal To make the RF Bridge Beam more rigid and universal across product types (on V93K) To improve the planarity control of pogo pins in the socket Establish WLCSP Testing at Tri-temp for RF and non-rf products 23