Physics of Semiconductor Devices S. M. SZE Member of the Technical Staff Bell Telephone Laboratories, Incorporated Murray Hill, New Jersey WILEY-INTERSCIENCE A Division of John Wiley & Sons New York London Sydney Toronto
Contents Chapter 1 Introduction 1 1. General Outline 1 2. Classification of Semiconductor Devices 3 3. Specific Remarks 5 PART I SEMICONDUCTOR PHYSICS Chapter 2 Physics and Properties of Semiconductors A Resume 11 1. Introduction 11 2. Crystal Structure 12 3. Energy Bands 17 4. Carrier Concentration at Thermal Equilibrium 25 5. Carrier Transport Phenomena 38 6. Phonon Spectra and Optical, Thermal, and High-Field Properties of Semiconductors 50 7. Basic Equations for Semiconductor Device Operation.... 65 PART II p-n JUNCTION DEVICES Chapter 3 p-n Junction Diodes 77 1. Introduction 77 2. Basic Device Technology 78 xi
xii Contents 3. Depletion Region and Depletion Capacitance 84 4. Current-Voltage Characteristics 96 5. Junction Breakdown 109 6. Transient Behavior and Noise 127 7. Terminal Functions 131 8. Heterojunction 140 Chapter 4 Tunnel Diode and Backward Diode 150 1. Introduction 150 2. Effects of High Doping 151 3. Tunneling Processes 156 4. Excess Current 169 5. Current-Voltage Characteristics Due to Effects of Doping, Temperature, Electron Bombardment, and Pressure.... 172 6. Equivalent Circuit 190 7. Backward Diode 193 Chapter 5 Impact-Avalanche Transit-Time Diodes (IMPATT Diodes) 200 1. Introduction 200 2. Static Characteristics 202 3. Basic Dynamic Characteristics 215 4. Generalized Small-Signal Analysis 221 5. Large-Signal Analysis 234 6. Noise 240 7. Experiments 244 Chapter 6 Junction Transistors 261 1. Introduction 261 2. Static Characteristics 262 3. Microwave Transistor 279 4. Power Transistor 295 5. Switching Transistor 302 6. Unijunction Transistor 310 Chapter 7 p-n-p-n and Junction Field-Effect Devices 319 1. Introduction 319 2. Shockley Diode and Semiconductor-Controlled Rectifier... 320 3. Junction Field-Effect Transistor and Current Limiter.... 340
Contents xiii PART III INTERFACE AND THIN-FILM DEVICES Chapter 8 Metal-Semiconductor Devices 363 1. Introduction 363 2. Schottky Effect 364 3. Energy Band Relation at Metal-Semiconductor Contact... 368 4. Current Transport Theory in Schottky Barriers 378 5. Measurement of Schottky Barrier Height 393 6. Clamped Transistor, Schottky Gate FET, and Metal-Semicondutor IMPATT Diode 410 7. Mott Barrier, Point-Contact Rectifier, and Ohmic Contact.. 414 8. Space-Charge-Limited Diode 417 Chapter 9 Metal-lnsulator-Semiconductor (MIS) Diodes... 425 1. Introduction 425 2. Ideal Metal-lnsulator-Semiconductor (MIS) Diode 426 3. Surface States, Surface Charges, and Space Charges 444 4. Effects of Metal Work Function, Crystal Orientation, Temperature, Illumination, and Radiation on MIS Characteristics 467 5. Surface Varactor, Avalanche, Tunneling, and Electroluminescent MIS Diodes 479 6. Carrier Transport in Insulating Films 492 Chapter 10 IGFET and Related Surface Field Effects 505 1. Introduction 505 2. Surface-Space-Charge Region Under Nonequilibrium Condition 506 3. Channel Conductance 512 4. Basic Device Characteristics 515 5. General Characteristics 524 6. IGFET with Schottky Barrier Contacts for Source and Drain. 546 7. IGFET with a Floating Gate A Memory Device 550 8. Surface Field Effects on p-n Junctions and Metal- Semiconductor Devices 555 Chapter 11 Thin-Film Devices 567 1. Introduction 567 2. Insulated-Gate Thin-Film Transistors (TFT) 568
xiv Contents 3. Hot-Electron Transistors 587 4. Metal-Insulator-Metal Structure 614 PART IV OPTOELECTRONIC DEVICES Chapter 12 Optoelectronic Devices 625 1. Introduction 625 2. Electroluminescent Devices 626 3. Solar Cell 640 4. Photodetectors 653 Chapter 13 Semiconductor Lasers 687 1. Introduction 687 2. Semiconductor Laser Physics 688 3. Junction Lasers 699 4. Heterostructure and Continuous Room-Temperature Operation 723 5. Other Pumping Methods and Laser Materials 725 PART V BULK-EFFECT DEVICES Chapter 14 Bulk-Effect Devices... 731 1. Introduction 731 2. Bulk Differential Negative Resistance 732 3. Ridley-Watkins-Hilsum (RWH) Mechanism 741 4. Gunn Oscillator and Various Modes of Operation 749 5. Associated Bulk-Effect Devices 778 Author Index 789 Subject Index 799