March 5-8, 2017 Hilton Phoenix / Mesa Hotel Mesa, Arizona Archive Session 8

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March 5-8, 2017 Hilton Phoenix / Mesa Hotel Mesa, Arizona Archive Session 8 2017 BiTS Workshop Image: tonda / istock

Copyright Notice The presentation(s)/poster(s) in this publication comprise the Proceedings of the 2017 BiTS Workshop. The content reflects the opinion of the authors and their respective companies. They are reproduced here as they were presented at the 2017 BiTS Workshop. This version of the presentation or poster may differ from the version that was distributed in hardcopy & softcopy form at the 2017 BiTS Workshop. The inclusion of the presentations/posters in this publication does not constitute an endorsement by BiTS Workshop or the workshop s sponsors. There is NO copyright protection claimed on the presentation/poster content by BiTS Workshop. However, each presentation/poster is the work of the authors and their respective companies: as such, it is strongly encouraged that any use reflect proper acknowledgement to the appropriate source. Any questions regarding the use of any materials presented should be directed to the author(s) or their companies. The BiTS logo and are trademarks of BiTS Workshop. All rights reserved.

Session 8 Hongjun Yao Session Chair BiTS Workshop 2017 Schedule Solutions Day Wednesday March 8-10:30 am Contact Frequency " Small Form Factor Cantilever Concepts for High Performance Analog / RF Applications" Gerhard Gschwendtberger Cohu "MRC (MEMS Rubber Contact) Socket Bump Particle Structure & Performance Analysis" BoHyun Kim, Dave Oh, Justin Yun - TSE Co., Ltd "Flat Probe Technology For High Frequency Test" Jason Mroczkowski, Nadia Steckler - Xcerra

Flat Probe Technology for RF Test Jason Mroczkowski Nadia Steckler Xcerra Corporation Conference Ready mm/dd/2014 BiTS Workshop March 5-8, 2017

Agenda RF Appliction Requirements History of Flat probe tech Factors that impact Probe RF performance RF Design of Flat probe tech Radial vs Flat Probe Measurements Application Results using Flat Probes Future Direction of Flat Probe technology 5

RF Market Drivers Demand for instantaneous data transfer is driving high frequency, high bandwidth RF devices Applications WiGig, 5G, Auto Radar, High- Speed Networking Devices RF Transceivers, Power Amplifiers, Low Noise Amplifiers, RF Switches, SERDES, etc. 5G Backhaul Auto Radar 802.11AD (WiGig) 6

RF Contact Requirements Low loss (>40GHz) High isolation (>60dB) Low inductance (<0.1nH) Matched impedance (50Ω+/- 5%) Low cost of test 7

Gemini BiTS Workshop 2007 Performance 8

H-Pin BiTS Workshop 2008 Performance and Cost 9

Stamped Probe BiTS Workshop 2012 High Volume 10

Flat Probes Many Flat probe options available today Are they a fad or do they truly add value? First lets look at what impacts probe performance Then we ll look at specific radial and flat probe characteristics VS. 11

Factors effecting Spring Probe RF Performance Length (Major) Cross section (Major) Material (Minor) Tip design (Minor) Force (Minor) 12

Factors Effecting Probe RF Performance Length of probe Inverse relationship to bandwidth 1.5mm 3mm 5mm 13

Factors Effecting Probe Performance Diameter of probe At native pitches GSG of Radial probes is near 50 Ohms Flat probes have smaller effective diameter than radial probes Flat probes have higher impedance than Radial Probes of the same diameter 14

RF Factors - Skin Effect Skin effect concentrates current on surface nearest return path Radial Flat Round Solid Surface Simple electrical model External Spring Complex electrical model Smaller effective diameter 15

Factors Effecting Flat Probe RF Performance Must short the spring to ensure consistent RF performance More windings shorted = better performance Minimum 3 contacts required for good RF correlation 1 contact 2 contacts 3 contacts 4 contacts 5 contacts 6 contacts 7 contacts 8 contacts 9 contacts 10 contacts 16

Various Flat Probe Simulation Results Results show very different performance depending on cross section and length Sim Probe 1 Sim Probe 2 Sim Probe 3 Sim Probe 4 S12 GS (-1dB) 2.4 GHz 2.0 GHz >40 GHz 2.4 GHz S12 GSG (-1dB) 17.4 GHz 4.2 GHz 25.0 GHz 4.9 GHz Sim Probe 1 Sim Probe 2 Sim Probe 3 Sim Probe 4 Sim Probe 1 Sim Probe 2 Sim Probe 3 Sim Probe 4 Flat probe RF performance is impacted by multiple design variables Sim Probe 2 Sim Probe 4 Sim Probe 1 Sim Probe 3 17

Factors effecting Contact Resistance Stability Length (Minor) Cross section (Major) Material (Minor) Tip design (Major) Force (Major) 18

Factors impacting Contact Resistance Radial Internal surfaces require plating specification Make/Break Barrel plating process causes layering Barrel plunger contact 1 or 2 points Radial Probe Flat Flat external plating surfaces Large contact surface between top and bottom plungers Improved biasing Flat Probe 19

Worst Flat Probe Cross-Section Design Bad Good Best 20

Short Single ended spring probe Consistent high bandwidth Low Force Contact resistance instability Radial Probe 1 Probe Characteristics Pitch 0.5mm Diameter 0.38mm Length 1.7mm Force 15g 21

Radial Probe 2 Standard single ended spring probe Average length Consistent bandwidth to 20GHz Contact resistance instability Probe Characteristics Pitch 0.5mm Diameter 0.3mm Length 3mm Force 30g 22

Long double ended spring probe High Impedance mismatch 15Ghz Bandwidth Contact resistance instability No internal bias Probe Characteristics Pitch 0.5mm Diameter 0.3mm Length 6mm Force 32g Radial Probe 3 23

Long Flat Probe for WLCSP applications Spring is DC and RF Path Poor RF performance of spring inductor Probe Characteristics Pitch 0.2mm Diameter 0.1mm Length 7mm Force 6g Flat Probe 1 24

Standard double ended probe length Small Plungers Flat Probe 2 Inconsistent spring contact causes resonance above 7GHz Probe Characteristics Pitch 0.4mm Diameter 0.33mm Length 5mm Force 25g 25

Standard single ended probe length Consistent resistance Minor spring resonance @17Ghz Flat Probe 3 Probe Characteristics Pitch 0.5mm Diameter 0.3mm Length 3mm Force 25g 26

Short Probe Large Plungers Consistent spring contact no resonances Consistent and low resistance Probe Characteristics Pitch 0.4mm Diameter 0.29mm Length 1.5mm Force 17g Flat Probe 4 - ACE 27

Application Feedback - ACE 28

Customer Feedback - ACE Flat has Lower Current Consumption Flat Standard Deviation is Less Flat results in higher Gain Flat adds 2% Power Added Efficiency Flat Current Consumption Radial Gain Power Added Efficiency Flat Performance Wins! 29

Conclusion You can in fact use Flat Probes for RF applications Flat Probes offer High Performance and Low Cost of Test Flat Probes For RF applications need to be designed and fabricated with care to avoid spring resonances 30

Flat Probe Roadmap: Atlas, ACE, Nexus 0.3mm Probe Pitch Length Bandwidth 0.2mm 4mm 25GHz Pitch Length Bandwidth 0.3mm 3.5mm 24GHz Pitch Length Bandwidth 0.3mm 1.6mm 33GHz 31