E2V Technologies CCD42-10 Inverted Mode Sensor High Performance AIMO CCD Sensor

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E2V Technologies CCD42-1 Inverted Mode Sensor High Performance AIMO CCD Sensor FEATURES * 248 by 512 Pixel Format * 13.5 mm Square Pixels * Image Area 27.6 x 6.9 mm * Wide Dynamic Range * Symmetrical Anti-static Gate Protection * Advanced Inverted Mode Operation (AIMO) * Anti-blooming Readout Register * Low Noise, High Responsivity Output Amplifier APPLICATIONS * Spectroscopy * Scientific Imaging * TDI Operation INTRODUCTION This version of the CCD42 series of CCD sensors has full-frame architecture. An extremely low noise amplifier makes the device well suited to the most demanding applications, such as spectroscopy. This variant of the CCD42-1 operates in advanced inverted mode (AIMO) for use at Peltier temperatures. E2V Technologies AIMO structures give a 1 times reduction in dark current with minimum reduction in fullwell capacity. The output amplifier is designed to give excellent noise levels at low pixel rates, and can match the noise performance of most conventional scientific CCDs at pixel rates as high as 3 MHz. The readout register has a gate controlled dump drain to allow fast dumping of unwanted data. The register is designed to accommodate four image pixels of charge, and a summing well capable of holding six image pixels is provided. The output amplifier has a feature enabling the responsivity to be reduced to allow the reading of such large charge packets. In common with all other E2V Technologies CCD sensors, the CCD42-1 is available with either a fibre-optic window, a UV sensitive coating or a CsI coating for hard X-ray detection. In addition a high performance electronics drive unit is available to enable the CCD42-1 to be evaluated easily. Designers are advised to consult E2V Technologies should they be considering using CCD sensors in abnormal environments or if they require customised packaging. TYPICAL PERFORMANCE (Low noise mode) Pixel readout frequency..... 2 3 khz Output amplifier sensitivity....... 4.5 mv/e 7 Peak signal........... 1 ke 7 /pixel Dynamic range........ 5 :1 Spectral range....... 42 16 nm Readout noise (at 233 K, 2 khz)..... 2 e 7 rms Q.E. at 7 nm.......... 47 % Peak output voltage........ 75 mv GENERAL DATA Format Image area......... 27.6 x 6.9 mm Active pixels (H)........ 248 (V)......... 515 (usable) Pixel size.......... 13.5 x 13.5 mm Package Package size.......... 32.89 x 2.7 mm Number of pins.............. 2 Inter-pin spacing........... 2.54 mm Inter-row spacing........... 15.24 mm Window material...... quartz or removable glass E2V Technologies Limited, Waterhouse Lane, Chelmsford, Essex CM1 2QU England Telephone: +44 ()1245 493493 Facsimile: +44 ()1245 492492 e-mail: enquiries@e2vtechnologies.com Internet: www.e2vtechnologies.com Holding Company: E2V Holdings Limited E2V Technologies Inc. 4 Westchester Plaza, PO Box 1482, Elmsford, NY1523-1482 USA Telephone: (914) 592-65 Facsimile: (914) 592-5148 e-mail: enquiries@e2vtechnologies.us # E2V Technologies Limited 22 A1A-CCD42-1 Inverted Mode Sensor Issue 4, October 22 527/5631

PERFORMANCE Min Typical Max Peak charge storage (see note 1) 8k 1k e 7 /pixel Peak output voltage (unbinned) 45 mv Dark signal at 293 K (see note 2) 1 2 e 7 /pixel/s Charge transfer efficiency (see note 3): parallel serial Output amplifier sensitivity: low noise mode high signal mode Readout noise at 253 K (see note 4): low noise mode high signal mode 3. 99.9999 99.9993 4.5 1.5 2 6 6. 4 % % mv/e 7 mv/e 7 rms e 7 /pixel rms e 7 /pixel Readout frequency (see note 5) 2 3 khz Dark signal non-uniformity at 293 K (std. deviation) 2 4 e 7 /pixel/s Binned column dark signal non-uniformity at 293 K (std. deviation) 3 6 e 7 /pixel/s Output node capacity relative to image section: low noise mode high signal mode ELECTRICAL INTERFACE CHARACTERISTICS Electrode capacitances (measured at mid-clock level): Min Typical Max I1/I1 interphase 5 nf R1/R1 interphase 8 pf I1/SS 15 nf R1/SS 15 pf Output impedance 35 O 1.5 6. NOTES 1. Signal level at which resolution begins to degrade. 2. Measured between 253 K and 293 K and V SS +9.5 V. Dark signal at any temperature T (kelvin) may be estimated from: Q d /Q d = 1.14 x 1 6 T 3 e 798/T where Q d is the dark current at 293 K. Note that this is typical performance and some variation may be seen between devices. Below 23 K additional dark current components with a weaker temperature dependence may become significant. 3. CCD characterisation measurements made using charge generated by X-ray photons of known energy. 4. Measured using a dual-slope integrator technique (i.e. correlated double sampling) with a 1 ms integration period. 5. Readout above 3 khz can be achieved but performance to the parameters given cannot be guaranteed. CCD42-1 Inverted Mode Sensor, page 2 # E2V Technologies

BLEMISH SPECIFICATION Traps Pixels where charge is temporarily held. Traps are counted if they have a capacity greater than 2 e 7 at 253 K. Slipped columns Are counted if they have an amplitude greater than 2 e 7. Black spots Are counted when they have a responsivity of less than 9% of the local mean signal illuminated at approximately half saturation. White spots Are counted when they have a generation rate 1 times the specified maximum dark signal generation rate at 293 K (measured between 233 and 273 K). The typical temperature dependence of white spot blemishes is different from that of the average dark signal and is given by: Q d /Q d = 122T 3 e 764/T White column Black column Spikes A column which contains at least 9 white defects. A column which contains at least 9 black defects. Are measured with the image fully binned into the register. Level 1 spikes are those above 2 ke 7 /column. Level 2 spikes are those above 8 ke 7 /column at 2 8C. GRADE 1 2 Column defects: black or slipped white Black spots 2 4 1 Traps 42 e 7 1 2 5 White spots 1 2 3 Level 1 spikes 1 15 25 Level 2 spikes 3 4 6 Note The effect of temperature on defects is that traps will be observed less at higher temperatures but more may appear below 233 K. The amplitude of white spots and columns will decrease rapidly with temperature. 1 6 # E2V Technologies CCD42-1 Inverted Mode Sensor, page 3

TYPICAL OUTPUT CIRCUIT NOISE (Measured using clamp and sample) 15 7639 NOISE EQUIVALENT SIGNAL (e r.m.s.) 1 5 1k 5k 1k 5k 1M 5M FREQUENCY (Hz) TYPICAL SPECTRAL RESPONSE (At 72 8C, no window) 5 698 45 4 35 3 QUANTUM EFFICIENCY (%) 25 2 15 1 5 4 5 6 7 8 9 1 11 WAVELENGTH (nm) TYPICAL VARIATION OF DARK SIGNAL WITH SUBSTRATE VOLTAGE 1 5 7863 DARK SIGNAL AT 293 K (e 7 /pixel/s) 1 4 1 3 TYPICAL RANGE 1 2 1 2 3 4 5 6 7 8 9 1 11 SUBSTRATE VOLTAGE (V) CCD42-1 Inverted Mode Sensor, page 4 # E2V Technologies

TYPICAL VARIATION OF DARK SIGNAL WITH TEMPERATURE 1 4 7864 1 3 1 2 1 DARK SIGNAL (e 7 /pixel/s) 1 1 71 1 72 74 72 2 4 PACKAGE TEMPERATURE (8C) DEVICE SCHEMATIC 786 5 BLANK ELEMENTS SG DD 1SW SS RD OD OS OG2 OG1 2 19 18 17 16 15 14 13 12 11 SUB 5 BLANK ELEMENTS READOUT REGISTER IMAGE SECTION 248 x 515 ACTIVE ELEMENTS TOP VIEW 1 2 3 4 5 6 7 8 9 1 I13 I12 I11 SS 1R R13 R12 R11 DG # E2V Technologies CCD42-1 Inverted Mode Sensor, page 5

CONNECTIONS, TYPICAL VOLTAGES AND ABSOLUTE MAXIMUM RATINGS PULSE AMPLITUDE OR DC LEVEL (V) (see note 6) MAXIMUM RATINGS PIN REF DESCRIPTION Min Typical Max with respect to V SS 1 No connection 2 I13 Image section, phase 3 (clock pulse) 1 12 15 +2 V 3 I12 Image section, phase 2 (clock pulse) 1 12 15 +2 V 4 I11 Image section, phase 1 (clock pulse) 1 12 15 +2 V 5 SS Substrate 8 9.5 11 6 1R Output reset pulse 8 12 15 +2 V 7 R13 Readout register, phase 3 (clock pulse) 8 1 12 +2 V 8 R12 Readout register, phase 2 (clock pulse) 8 1 12 +2 V 9 R11 Readout register, phase 1 (clock pulse) 8 1 12 +2 V 1 DG Dump gate (see note 7) 11 OG1 Output gate 1 2 3 4 12 OG2 Output gate 2 (see note 8) OG1+1 V +2 V 13 OS Output transistor source see note 9 7.3 to +25 V 14 OD Output drain 27 29 32 7.3 to +25 V 15 RD Reset transistor drain 15 17 19 7.3 to +25 V 16 SS Substrate 8 9.5 11 17 1SW Summing well (see note 1) 8 12 15 18 DD Diode drain 2 24 25 7.3 to +25 V 19 SG Spare gates V SS +19 +2 V 2 No connection If all voltages are set to the typical values, operation at or close to specification should be obtained. Some adjustment within the minimum maximum range specified may be required to optimise performance. Voltage between pairs of pins: OS to OD + 15 V. Maximum current through any source or drain pin: 1 ma. OUTPUT CIRCUIT 12 1SW OG1 OG2 1R RD I13 OD 7641 OS OUTPUT EXTERNAL LOAD LS(SS) V NOTES 6. Readout register clock pulse low levels + 1 V; other clock low levels +.5 V. 7. Non-charge dumping level shown. For charge dumping, DG should be pulsed to 12 + 2V. 8. Use OG2 = OG1 + 1 V for normal, low noise mode, or 2 V for low responsivity, high signal mode. 9. Not critical; can be a 15mAconstant current source, or 5 1 ko resistor. 1. For normal operation, the summing well should be clocked as R13. 11. The amplifier has a DC restoration circuit, which is activated internally whenever I13 is pulsed high. CCD42-1 Inverted Mode Sensor, page 6 # E2V Technologies

FRAME READOUT TIMING DIAGRAM I11 CHARGE COLLECTION PERIOD READOUT PERIOD 5515 CYCLES SEE DETAIL OF LINE TRANSFER 7861 I12 I13 R11 SEE DETAIL OF OUTPUT CLOCKING R12 R13 1R OUTPUT SWEEPOUT FIRST VALID DATA DETAIL OF LINE TRANSFER t wi 7132A I11 1 / 3 T i t oi t li I12 t oi t li I13 t dri T i t dir R11 R12 R13 1R # E2V Technologies CCD42-1 Inverted Mode Sensor, page 7

DETAIL OF OUTPUT CLOCKING 7133A R11 T r t or R12 R13 t wx t dx 1R OUTPUT VALID SIGNAL OUTPUT OS RESET FEEDTHROUGH LINE OUTPUT FORMAT 7862 5 BLANK 5 BLANK 248 ACTIVE OUTPUTS CLOCK TIMING REQUIREMENTS Symbol Description Min Typical Max T i Image clock period 15 3 see note 12 ms t wi Image clock pulse width 7 15 see note 12 ms t ri Image clock pulse rise time (1 to 9%).5 2.5t oi ms t fi Image clock pulse fall time (1 to 9%) t ri 2.5t oi ms t oi Image clock pulse overlap 3 5.2T i ms t li Image clock pulse, two phase low 3 5.2T i ms t dir Delay time, I1 stop to R1 start 3 5 see note 12 ms t dri Delay time, R1 stop to I1 start 1 2 see note 12 ms T r Output register clock cycle period 333 see note 13 see note 12 ns t rr Clock pulse rise time (1 to 9%) 5.1T r.3t r ns t fr Clock pulse fall time (1 to 9%) t rr.1t r.3t r ns t or Clock pulse overlap 2.5t rr.1t r ns t wx Reset pulse width 3.1T r.2t r ns t rx,t fx Reset pulse rise and fall times 2.5t rr.2t r ns t dx Delay time, 1R low to R13 low 3.5T r.8t r ns NOTES 12. No maximum other than that necessary to achieve an acceptable dark signal at the longer readout times. 13. As set by the readout period. CCD42-1 Inverted Mode Sensor, page 8 # E2V Technologies

OUTLINE (All dimensions without limits are nominal) A 7927 M 2 11 CENTRE LINE OF PACKAGE D F N C B E 1 1 CENTRE LINE OF IMAGING AREA IMAGING AREA COVERGLASS SEE NOTE L Outline Note PIN 1 H J G The device is normally supplied with a temporary glass window for protection purposes. It can also be supplied with a fixed, quartz or fibre-optic window where required. K Ref Millimetres A 32.89 +.38 B 2.7 +.25 C 6.9 D 3.3 +.33 E 15.24 +.25 F.254 +.51 7.25 G 5.2 H.46 +.5 J 2.54 +.13 K 22.86 +.13 L 1.65 +.56 M 27.6 N.8 # E2V Technologies CCD42-1 Inverted Mode Sensor, page 9

ORDERING INFORMATION Options include: * Temporary Quartz Window * Permanent Quartz Window * Temporary Glass Window For further information on the performance of these and other options, please contact E2V Technologies. HANDLING CCD SENSORS CCD sensors, in common with most high performance MOS IC devices, are static sensitive. In certain cases a discharge of static electricity may destroy or irreversibly degrade the device. Accordingly, full antistatic handling precautions should be taken whenever using a CCD sensor or module. These include:- * Working at a fully grounded workbench * Operator wearing a grounded wrist strap * All receiving socket pins to be positively grounded * Unattended CCDs should not be left out of their conducting foam or socket. Evidence of incorrect handling will invalidate the warranty. All devices are provided with internal protection circuits to the gate electrodes (pins 2, 3, 4, 6, 7, 8, 9, 12, 19) but not to the other pins. HIGH ENERGY RADIATION Device parameters may begin to change if subject to an ionising dose of greater than 1 4 rads. Certain characterisation data are held at E2V Technologies. Users planning to use CCDs in a high radiation environment are advised to contact E2V Technologies. TEMPERATURE LIMITS Min Typical Max Storage....... 73 373 K Operating...... 73 233 323 K Operation or storage in humid conditions may give rise to ice on the sensor surface on cooling, causing irreversible damage. Device heating/cooling....... 5 K/min max Whilst E2V Technologies has taken care to ensure the accuracy of the information contained herein it accepts no responsibility for the consequences of any use thereof and also reserves the right to change the specification of goods without notice. E2V Technologies accepts no liability beyond that set out in its standard conditions of sale in respect of infringement of third party patents arising from the use of tubes or other devices in accordance with information contained herein. CCD42-1 Inverted Mode Sensor, page 1 Printed in England # E2V Technologies