NSWC / Indian Head Division

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NDIA 48th Annual Fuze Conference Weapon Fuzing / Safety & Arming Technology Programs Overview NSWC / Indian Head Division John Hendershot (Code 4420: Phone 301-744-1934 or e-mail hendershotje@ih.navy.mil) Fuze Safety & Arm Branch Lead

OUTLINE Torpedo Fuze/S&A Technology Efforts MEMS G-Sensor Technology- Next Generation Miniature Fuze/S&A Technology Summary Sensor Output During X-Axis Shock Pulse Output (volts) 3.5 8 3 2.5 3 2-2 1.5 1-7 0.5 0-12 -0.1 0 0.1 0.2 0.3 0.4 Sensor Output Trigger Pulse Time (seconds)

Torpedo S&A Technology Canister CCAT (6.75 inch) Towed Intercept Sensor CCAT - Engineering Development Model Prototype (Pre-SDD) Multi Mission (MM) Torpedo S&A Technology Program - Defense & Offense Missions - Multiple Launch Platforms CIRCA 1972 CIRCA 1988 MK 21 Exploder (118 cu in) MK 22 Exploder (75 cu in) CCAT Exploder (15 cu in) Threat Torpedo Why MEMS Technology? Smaller, Lighter Fuze/S&A Increase S&A safeseparation accuracy Modular Architecture: adaptable to multiple platforms (sub & air) and missions Lower Total Ownership Cost for the Fleet Safety Mil-STD-1316 complaint, fail-safe design Miniaturized Fuze/S&A Technology for Next Generation of Navy Underwater Weapons

Torpedo S&A Technology Dual Point Initiated CCAT W/H MEMS S&A 6.75 inch OD Electrical via Fireset Lid Integrated high voltage Initiator package (Fire-set, Slapper, Leads) No external high voltage stripline required Kovar cup Slapper HNS IV (39 mg) PBXN 5 (2g) MEMS Technology Provides Arming & Firing Energy Control

Torpedo S&A Technology - CCAT S&A EDM-1 Design Integrated MEMS based COTS pressure sensor for water flow sensing Optical Charging System S&A Electronics - Processor and logic Circuit MEMS Safe-Arm chip package <1 cu inch Low Cost & High Accuracy MEMS based IMU Integrated initiator Fire-set, slapper, lead MEMS Safe-Arm Chip Provides Interruption and Arming Energy Control

Torpedo S&A Technology - CCAT S&A Program Status Design and fabrication proven through prototype development (FY02-03) Successful WSESRB Executive session brief March 03 Currently refining EDM-1 S&A design and integration for CCAT Over 150 integrated initiator tests, additional 200+ shots planned for CY04 Advanced IMU sensors development for CCAT S&A (ONR-FNC) MEMS S&A environmental & life cycle test (HALT) series on going System launch & CCAT sea-tests with fully integrated S&A scheduled for CY 04 S&A Briefed in Session IV-B

Torpedo S&A Technology - Integrated Initiator Effort Objective: Develop Miniaturized,Low-Cost, Integrated, High Voltage Slapper Initiation System Approach: Team with DOE (Honeywell FM&T) to develop Advanced Miniature High Voltage Initiation System Integrate all high voltage lines into package, minimize input requirements power, ground, trigger signal, system on Small total size ~1 cu in Status: Completed Phase I initiation system functional & explosive performance & characterization tests (125) Executing Phase II, refining fire-set, slapper & explosive component design to reduce parts & assembly steps Integrating into dual point initiated CCAT warhead Briefed in Session IV-B

Torpedo S&A Technology - IMU for Close-In Ship Defense OBJECTIVE: Adapt a low cost, small volume Inertial Measurement Unit (IMU) for accurate determination of safe separation STATUS: Evaluated COTS IMU s for CCAT S&A IMU Simulation Analysis Bench tests Selected Systron-Donner MMQ50 for further development tests Conducting IMU algorithm development Developing IMU electronics and packaging Allows close-in engagements at minimum safe separation distance MMQ50 IMU CCAT S&A

Torpedo S&A Technology - Micro-Systems Packaging Technology Objective: Develop & demonstrate robust, reliable & manufacturable MEMS packaging technologies for CCAT S&A application Approach: Integrate packaging structures/features with MEMS devices and fabrication techniques Adapt low cost MEMS and IC industry packaging technology Robustness evaluation through Highly Accelerated Lifecycle Testing (HALT) & MIL-STD 331 tests Status: Successfully demonstrated all individual MEMS (CCAT) S&A packaging steps Near completion: integration of all packaging steps in assembly sequence Fully packaged CCAT S&A to be demonstrated in at-sea field testing starting in 1Q FY05

Torpedo S&A Technology - Highly Accelerated Lifecycle Testing (HALT) of S&A OBJECTIVE: Determine failure modes in current MEMS S&A components caused by harsh temperature and vibration environments using Sandia National Laboratory HALT facilities leveraging DOE TCG-X Investment BENEFITS: Provide an early look at MEMS device level vulnerabilities Induce environmental failures in MEMS S&A packaging Determine temperature compatibilities of system materials beyond MIL-STD levels Receive insight into monitoring features to be incorporated into subsequent MEMS S&A designs STATUS: Indian Head packaged MEMS devices for test Sandia developed HALT compatible visual and electrical data acquisition systems Phase I HALT scheduled at the end of April on discrete MEMS components Phase II HALT to be performed on a more integrated system 2-3 months after Phase I

Torpedo S&A Technology 96 97 98 99 00 01 02 03 04 TRL2 - Technology Maturity TRL3 TRL4 TRL5 (LIGA) TRL5 (DRIE) TRL6 Process Characteristics LIGA DRIE DRIE Industry Support Fabrication Cost Fabrication Facilities Packaging Maturity Ease of Packaging Material Property Consistency Maturity of S&A Design S&A Reflector Performance S&A Actuator Performance 05 TRL7 MEMS Technology for CCAT S&A Matured to TRL 6+

Torpedo S&A Technology - Technology Maturity cont. S&A Technology S&A Spiral 2 Prototype Prototype CCAT S&A prototype development successfully transitioned technology MEMS Processing Method for S&A Chip Arming Time CAT Interfaces S&A Explosive Train IMU Drift rate accuracy S&A Chip Packaging LIGA; ~$1000 per chip (FY2000) (qtys of 100 s) > 5 seconds Not networked with CCAT Discrete initiator components 300 deg / hr Non-hermetic, labor intensive package DRIE; $200 per chip (qtys of 100 s) < ½ second Fully networked and interfaced with CCAT Integrated initiation system Current 100 deg / hr (FNC IMU = 30 deg / hr) Hermetic, robust and producible packaging

Advanced Technology Ordnance Surveillance (ATOS) Advanced Concept Technology Demonstration FY 01-04 Demonstrate operational utility of miniature radio frequency identification (RFID) tags coupled with micro-electromechanical sensor (MEMs) technology for use in tracking/monitoring critical items ATOS-RFID SYSTEM ATOS TAG ENVIRONMENTAL DATABASE Inventory Data Sensors and Data Humidity Temperature Acceleration - Shock FIXED READER HAND-HELD READER PORTABLE READER LAN or RF SENSOR DATA INVENTORY DATA SERVICE INVENTORY MANAGEMENT

ATOS-RFID SYSTEM - Integrated MEMS G-Sensor(s) Technology Spring supported mass deflects into latch when G-Sensor undergoes a defined shock. ATOS-RFID records shock event when G-Sensor latched NSWCIH patent pending Latched Sensor Multi-Level Sensor Status of Sensor Development Five design iterations completed to date. All sensors tested have been accurate to within ±3%. Sensor Attributes No power needed to record shock. Can be electronically reset. Latch levels from 25 to 1500 g s. Advanced designs include multi-level and multi-directional. Sensor size: 6 by 3 mm. Over 1000 MEMS G-Sensors Successfully Fabricated to Date

MEMS F/S&A Next Generation Technology - Modular MEMS Fuze Integrate Electronics, S&A, Explosives into a Multi-Chip Module to: Reduce Cost and Size Increase Shock Survivability, Reliability, & Robustness Modular Design enables swapping sensors and electronics while retaining standard S&A and explosive design + + = MEMS S&A Chip Micro-Detonics Sensors and Electronics Multi-Chip Module Fuze From 100 Parts Per S&A to 100 S&A s Per Part

MEMS F/S&A Next Generation Technology - MEMS G sensor for High G Application NEE Collaborative effort with Dahlgren Fuze group Test samples not designed for high shock survivability DRIE SOI MEMS Sensors Two ATOS (prototype) sensors per chip designed to latch at 360 and 720 G Conducted 14 Setback tests from 1500 to 30,000 G s & 2 Cross-axis test (28,700 G max) Briefed in Session V-A Cross-axis Test Results - No observable damage to the substrate - 1 of 96 latches damaged below 25,000 G s - Approximately 10% of the components damaged between 25,000 & 30,000 G s * Damage attributed to non-optimized design features Setback High Shock Functionality & Survivability Demonstrated with MEMS G-Sensor

Micro Detonics for Next Generation - Miniature F/S&A Applications Objective: Develop MEMS based S&A technology with integrated energetic materials - Goal: Develop detonator that is less than 400µm thick Approach: An in situ formed explosive compatible with MEMS processing requiring no assembly No explosive waste or contact with MEMS processing equipment Physically out of line system utilizing inorganic salts as donor explosive Develop batch MEMS and explosive forming processes to minimize fabrication costs Leverage COTS MEMS processing Low initiation energy and power requirements NSWCIH patent pending Dime Sample Dent

Micro Detonics for Next Generation - Miniature F/S&A Applications Status: Initial explosive forming reactions have been very successful On-going efforts Characterization - Pre-reacted material - Explosive material Process optimization. Testing - Basic explosive output characterization - Demonstrated 1500µm translation Integration - Developing batch process for building S&A device - Initiated MEMS & micro detonics compatibility investigations & spark initiated integrated detonator NSWCIH patent pending

Micro Detonics for Next Generation - Miniature F/S&A Applications Integrated Detonator Proof of Principal Experiment - Before Detonation Dime Micro-Detonator S&A Chip High Speed Video - After Detonation Micro Detonics Technology Status = TRL 3 NSWCIH patent pending

Indian Head Division Micro-System Technology Development Partners MEMSCAP, MEMS Exchange MEMS and slapper foundry processing Applied Physics Lab JHU MEMS packaging and processing University of Maryland Optics and packaging R&D Rensselaer Polytechnic Institute MEMS packaging, manufacturing research Honeywell FM&T Miniature Fireset and Optical Interrupt

Summary Slide The Path Forward Coordination & collaboration between the Navy Energetics Labs the NEE Tri-Service & DOE coordination & collaboration DoD Fuze IPT & TCG Teaming with Industry & Academia DOTC, BAA s S&T in Advanced Sensors, Miniaturized (MEMS) & Modular S&A Architectures, and Miniaturized Energetics Fuze Technology for the Warfighter