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Microwave Office Application Note INTRODUCTION Wireless system components, including gallium arsenide (GaAs) pseudomorphic high-electron-mobility transistor (phemt) frequency doublers, quadruplers, and power amplifiers (PAs), are important for E-band applications to achieve optimum output power and power-added efficiency (PAE) over wide bandwidths. Circuits that provide 15dBm or more of RF power across the European Telecommunications Standards Institute (ETSI) E-bands of 71-76 and 81-86GHz are useful in radio systems for multipliers such as doublers, triplers, and quadruplers supplying local oscillator power to highly linear down- and up-converter mixers for high quadrature amplitude modulation (QAM) radio system and direct transmission for low QAM systems. Higher output power (greater than 20dBm or 100mW) is a desirable characteristic for linear E-band systems PAs, and the research and design communities are working towards the ultimate goal of providing 1W at the antenna for E-band system design. For any PA, PAE, as well as saturated output power, are parameters that are of paramount interest to radio designers. To achieve the desired performance, the high-power PP10 WIN process was chosen by the design team because of its high ft and high power capabilities. This created a huge challenge as the team had no previous experience correlating pre-production measurements of individual field-effect transistors (FETs) to production FETs, let alone to circuit performance. Microwave Office software showcasing the schematic, layout, 3D view, EM simulation, and S-parameter results for an E-band power amplifier design. Design of a Full ETSI E-band Circuit for a Millimeter-Wave Wireless System

This application note highlights how the design of a Q- to E-band doubler and a K- to E-band quadrupler circuit (that includes a medium E-band power amplifier) results in an increase in both gain and output power. The doubler provides 15dBm over the full ETSI E-bands. The quadrupler design provides more power over a narrower bandwidth such as might be used for a radio system with an LO between the two E-bands. This quadrupler produces a maximum of 19.2dBm. The power amplifier produces more than 200mW (23dBm) over the two ETSI E-bands and a maximum power of 24.2dBm (265mW). CIRCUIT DESIGN TOPOLOGY The designs for the doubler, quadrupler, and power amplifier were all simulated with AWR s Microwave Office high-frequency design software, using models extracted from multi-bias S-parameter measurements on a small test transistor. The circuits were fabricated on WIN Semiconductor s 0.10µm GaAs phemt process (PP10), which has ft at 135GHz, transconductance of 725mS/mm, and breakdown at 9V. The doubler (Figure 1a) was a two-stage, Q-band amplifier that drove a single-ended doubling element consisting of a FET biased close to pinch-off, which in turn drove a four-stage, E-band, medium-power amplifier. The quadrupler (Figure 1b) contained an additional K-band pre-amplifier and a K-to-Q doubling element. The output device in both circuits was a 4 50µm transistor. The power amplifier (Figure 1c) was a four-stage, balanced topology with the final transistor in each arm being a 6 50µm device customized to optimize the balance between gain, channel temperature, and output power. The doubler monolithic microwave integrated circuit (MMIC) was 2750µm 1250µm to fit the dicing requirements of other circuits on this wafer. The power amplifier layout was similarly influenced by the size of adjacent circuits, and could be reduced in a production version. All circuits used a three-step process for the design: Step 1: A schematic-based design was used to develop gross performance in agreement with the targeted specifications. Primarily linear design was done in this first pass, with cursory inclusion of nonlinear performance. Step 2: Individual subcircuits were laid out and the AWR EXTRACT flow was used with AWR s AXIEM 3D planar electromagnetic (EM) simulator to provide more accurate block-level design. Figure 1: Photograph of (a) the doubler, (b) the quadrupler, and (c) the power amplifier. Step 3: Critical portions of the entire chip-level metallization were run through the EXTRACT flow and compared to block-level simulations and overall target performance. The final verification of the design, including design rule check (DRC) and layout vs. schematic (LVS), was also done using the AWR software before tape-out for fabrication. MEASUREMENT TECHNIQUE A 50GHz signal source was used to provide sufficient input power to saturate the doubler and quadrupler. They were both measured using wideband 50-75GHz and 75-110GHz power sensors. The output components were a coaxial RF probe, a waveguide transition, and a WR-10 waveguide attenuator and power sensor. The output component losses were measured using a 110GHz Anritsu VectorStar network analyzer.

Fundamental leakage to the power meter head was negligible, as the 75GHz waveguide used for the attenuator and power sensor had a cut-off frequency of 60GHz. The third and higher harmonic content of the doubler was believed to be negligible because of the lack of gain in the output amplifier at greater than 1-1/2 times the input frequency. The doubler was used as a driver to achieve sufficient power to test the power amplifier in saturation. The doubler and power amplifier were epoxied side by side on a metal block and the RF connected by bond wires. Analyst, AWR s 3D FEM EM simulator, was used to model the bond-wire losses at each measurement frequency. The specific doubler used for this test was measured separately and the measured output power, corrected for the bond-wire loss, was used to calculate PAE. MEASURED RESULTS Doubler: Q-to-E-band Measured and simulated results for the doubler are shown in Figure 2. With a 4V supply, the doubler had an output power above 15dBm from 70 to 88GHz. The PAE exceeded four percent over this same band. The fundamental rejection had not yet been measured as the Q-band signal falls below the cut-off frequency of the waveguide used in the present measurement setup. Figure 2: Doubler saturated output power and PAE vs. output frequency with Pin = 0dBm, VGS = 0.3V, and VDS = 4.0V for measured (solid lines) and simulated (dashed lines) results. Figure 3: Quadrupler saturated output power and PAE vs. output frequency with Pin = 0dBm, VGS = 0.3V, and VDS = 4.0V for measured (solid lines) and simulated (dashed lines) results. Quadrupler: K-to-E-band Measured output power and PAE results for the quadrupler with a 4V supply are presented in Figure 3, along with the simulated performance. The quadrupler had a maximum output power of 19.2dBm at 85 GHz and delivered more than 18dBm from 76 to 89GHz. The quadrupler PAE exceeded six percent over this same bandwidth.

Power Amplifier: E-band The measured S-parameters for the power amplifier are plotted in Figure 4. To accurately gauge the impact of packaging on the PA, a 3D EM simulator was used to understand the impact of the bond wires, which were then integrated into the Microwave Office simulations. The full chip was then EXTRACTed leveraging Analyst EM analysis software. The results, shown in Figure 5, compare favorably with the measured data. In point of fact, however, the variation can be traced to the wafers themselves, which have a nominal thickness of 50µm for the process, but for the measured wafers was closer to the edge of the process window a major factor in shifting the performance. Figure 4: S-parameters (measured) for the power amplifier with VDS = 4V. Figure 5: E-band power amplifier MMIC leveraging Analyst EM 3D FEM simulation (solid lines) and measured data (dotted lines). Additionally, the measured saturated output power and PAE for the power amplifier were plotted in Figure 6 as a function of frequency for VDS = 3 to 5V. At the higher drain potential, the saturated output power reached 24.2dBm (265mW) and achieved 23dBm (0.2W) from 71 to 86GHz. For the 4V drain potential, the PAE exceeded eight percent across the 71 to 86GHz band. Figure 6: Saturated output power (Psat) with VDS = 3, 4, and 5V and measured PAE for VDS = 4V versus frequency for the power amplifier for measured data (solid) and simulated results (dashed lines) for only Psat and PAE for VDS = 4V. CONCLUSION The circuit design of a frequency doubler, quadrupler, and power amplifier for E-band applications has been demonstrated. The doubler has a broadband measured output power of over 15dBm and the quadrupler has a maximum measured output power of 19.2dBm. The power amplifier has a maximum measured output power

of 24.2dBm (265mW) and exceeds 23dBm (200mW) over the entire 15GHz bandwidth of the ETSI E-band specification. It achieves a measured PAE above eight percent across the ETSI E-bands. This is the highest saturated output power and PAE for a power amplifier spanning the full 71 to 86GHz span of the ETSI E-band specification for any semiconductor system. Good agreement between measurement and simulation has been demonstrated. The ability to bring together accurate circuit modeling and integrated design flow in a single powerful tool suite gave this experienced, world-class design team the platform for first-pass success. This design effort represents a major step forward in the industry s ability to deliver 1W radiated from a single chip solution in an E-band system. ADDENDUM: ADDITIONAL DISCUSSION The power amplifier presented here produced a peak of 24.2dBm from a 600µm output periphery, which corresponded to a power density of 440mW/mm. It exceeded the 219mW/mm reported for a 0.1µm GaAs phemt amplifier with 640µm output periphery and was similar to the 415mW/mm reported for a smaller 100µm output periphery. This suggested that the transistor combination used here had not resulted in significant power loss. These GaAs power densities were less than the values of 1400 to 1667mW/mm reported for the more expensive gallium nitride (GaN) on silicon carbide (SiC) processes. The power amplifier was laid out with resistors in the drain bias supply lines as a conservative measure to provide additional stability margin at low frequency. This reduced the drain efficiency of the power amplifier s last stage from an intrinsic value of approximately 35 percent to an extrinsic value of about 27 percent. These drain supply line resistors reduced the PAE by approximately two percentage points. The simulated performance for the power amplifier was in good agreement with the measured data for both saturated output power and PAE as shown in Figure 6. Additionally, it was shown prior, Figures 2 and 3, that the doubler and quadrupler simulated and measured data also agree rather. Considering that the models used for the simulations were based on a single model fit to not only a broad frequency range but also a high dynamic range encompassing extremely linear to highly nonlinear performance, the agreement between simulated and measured data stands out even more. In particular, for the quadrupler this included: HEMTs in Class-A linear and saturated modes at the K-band The K-to-Q doubling HEMT operating near pinch-off with low drain potential HEMTs in Class-A linear and saturated modes at the Q-band The Q-to-E doubling HEMT operating near pinch-off with low drain potential HEMTs in Class-A linear and saturated modes at the E-band In light of this, the agreement shown for the quadrupler circuit is not only reasonable but also quite good in its own right. [Note: A small discrepancy in the logarithmic output power simulation led to a larger discrepancy in the PAE being a linear metric, likewise for the doubler.]

Figure 7 shows the measured output power for the power amplifier with comparison data for the circuits at the E- and W-bands with an output power of 100mW (20dBm) or more. Figure 7: Output power for the PA presented here (solid line) compared with published data as referenced in Compound Semiconductor Integrated Circuit Symposium (CSICS), October 2012 IEEE proceedings. The power amplifi er presented here had a 3dB power bandwidth limited by the measurement set up to 18GHz (23 percent) compared with 13GHz for the GaN amplifi er. The achieved output power also compared favorably with other semiconductor systems. Although power bandwidth is a useful measure, it does not indicate the DC power required for the RF power produced. Lastly, Figure 8 compares the matching PAE data where reported. Figure 8: PAE for the PA presented here (solid line) compared with published data as referenced in Compound Semiconductor Integrated Circuit Symposium (CSICS), October 2012 IEEE proceedings. AWR would like to thank Dr. Michael Heimlich, CORE professor at Macquarie University, Sydney, Australia, for his contributions to this application note, as well as co-authors Anthony E. Parker, Department of Engineering, Macquarie University, Melissa C. Rodriguez, Jabra Tarazi, Anna Dadello, Emmanuelle R.O. Convert, MacCrae G. McCulloch, Simon J. Mahon, Steve Hwang, Rodney G. Mould, Anthony P. Fattorini, Alan C. Young, and James T. Harvey, Sydney Design Centre, MA/ COM Tech. Solutions, Australia, and Wen-Kai Wang, WIN Semiconductor, Taiwan. Dr. Michael Heimlich mike@awrcorp.com Copyright 2013 AWR Corporation. All rights reserved. AWR, Microwave Office and AXIEM are registered trademarks and the AWR logo, EXTRACT and Analyst are trademarks of AWR Corporation. Other product and company names listed are trademarks or trade names of their respective companies. AN-ETSI-2013.8.15 AWR Corporation www.awrcorp.com info@awrcorp.com +1 (310) 726-3000