P R O D U C T S P E C I F I C A T I O N F O R Z Y - D U A L A X I S A C C E L E R O M E T E R S C A D 0 6

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P R O D U C T S P E C I F I C A T I O N F O R Z Y - D U A L A X I S A C C E L E R O M E T E R S C A 1 0 2 0 D 0 6 Murata Electronics Oy 1/19

Table of Contents 1 General description... 3 1.1 Block diagram... 3 1.2 A1020 family Accelerometer Features... 3 2 Electrical specifications... 4 2.1 Electrical Connection... 4 2.1.1 Recommended connection when SPI interface is used... 5 2.1.2 Recommended connection when analog output is used... 5 2.1.3 Recommended EMC protection circuitry... 6 2.2 Absolute maximum ratings... 6 2.3 Electrical Specification of the A1020 D06... 7 2.3.1 Analog Output... 7 2.3.2 Digital Output... 10 3 SPI Interface... 11 3.1 DC characteristics of SPI interface... 13 3.2 AC characteristics of SPI interface... 14 3.3 SPI Commands... 15 4 Mechanical specification (Reference only)... 17 4.1 Dimensions (Reference only)... 17 5 Mounting... 18 Murata Electronics Oy 2/19

1 General description The A1020 accelerometer consists of two silicon bulk micro machined sensing element chips and a signal conditioning ASIC. The chips are mounted on a pre-molded package and wire bonded to appropriate contacts. The sensing elements and ASIC are protected with silicone gel and lid. The sensor has 12 SMD legs (Gull-wing type). 1.1 Block diagram ax sensing element C/V DAC filter1 gain DAC filter2 fail_det sample and hold S/H pfilter X_Ext_C X_OUT CSB K MOSI MISO ST_X/Test_in ST_Y interface+control logic+eeprom BG ADC DAC agnd por O clk gen HV pump VDD VSS ay sensing element C/V DAC filter1 gain DAC filter2 fail_det sample and hold S/H pfilter Y_Ext_C Y_OUT Figure 1. Block diagram of the A1020 1.2 A1020 family Accelerometer Features Single +5V supply Two ratiometric analog outputs in relation to supply voltage (Vdd = 4.75...5.25V) Wide load driving capability Serial Peripheral Interface (SPI) compatible Provides digital output for both channels Supports testing and programming Non-volatile programming features Factory programmable filter settings ( 400Hz, 1 khz, WB, Ext_C ) Offset and sensitivity calibration Linear temperature compensation Enhanced failure detection features True self test by deflecting the sensing elements proof mass by electrostatic force. Deflection voltage is adjustable with two memory bits for both channels. The self-test is channel specific, and separately activated for both channels by digital on-off commands via dedicated pins or via SPI bus. Continuous sensing element interconnection failure check Murata Electronics Oy 3/19

2 Electrical specifications 2.1 Electrical Connection The following is a typical requirement for electrical interface to the A1020. If special over voltage or reverse polarity protection is needed, please contact VTI Technologies for application information. If self test (Pins 9 and 10) is not used, it should be left floating / grounded K 1 12 VDD Ext_C_1 NC 2 11 OUT_1 MISO 3 10 ST_1/Test_in MOSI 4 9 ST_2 OUT_2 5 8 Ext_C_2 NC VSS 6 7 CSB No. Node I/O Description 1 K Input Serial clock 2 NC NC NC 3 MISO Output Master in slave out; data output 4 MOSI Input Master out slave in; data input 5 Out_2 Output Y axis Output (Ch 2) 6 VSS Power Negative supply voltage (VSS) 7 CSB Input Chip select (active low). If only analog outputs are used this should be connected to Vdd or left floating. 8 NC NC NC 9 ST_2 Input Self test input for Y axis (Ch 2) 10 ST_1 / Test_in Input Self test input for Z axis (Ch 1 ) / Analog test input 11 Out_1 Output Z axis output (Ch 1) 12 VDD Power Positive supply voltage (VDD) Figure 2. Pin layout and description of the A1020 Murata Electronics Oy 4/19

2.1.1 Recommended connection when SPI interface is used Serial Clock K NC 1 2 Z 12 11 Vdd (+5V) VDD OUT_1 Min 100nF Data Out MISO 3 10 ST_1 Data In MOSI 4 9 ST_2 OUT_2 5 Y 8 NC VSS 6 7 CSB Chip select Recommended SPI-Output connection on PCB 2.1.2 Recommended connection when analog output is used When A1020 is used in Analog mode and the PCB is designed correctly the A610 / 620 and A1020 are interchangeable. If the PCB layout is designed for A1020, then A610 / 620 can be used for single axis applications. Pins 1, 2, 3, 4 and 8 can be connected to GND (pins 2 and 8 can be connected also to Vdd) but for the best EMC performance these pins should be left floating. CSB pin can be pulled up but it is recommended to left floating. The output of A610 / 620 corresponds to the output of channel 1 in the A1020 Vdd (+5V) K NC 1 2 Z 12 11 VDD OUT_1 Min 100nF Out 1 (Z) MISO MOSI 3 4 10 9 ST_1/Test_i n ST_2 Self-Test 1 Self-Test 2 Out 2 (Y) OUT_2 5 Y 8 NC VSS 6 7 CSB Recommended Analog output connection on PCB A610 or A620 connected to the A1020 lay-out Murata Electronics Oy 5/19

2.1.3 Recommended EMC protection circuitry The purpose of the following recommendation is to give generic EMC protection guidelines for the A1020. EMC susceptibility is highly dependent on the PCB layout and therefore the component values given here can be different depending on the actual PCB layout. With the following circuitry and properly designed PCB the part will pass 200V/m EMC susceptibility tests. Please note that only channel 1 output protection circuitry is presented. Similar kind of circuit must be also at the channel 2 output. Vdd (+5V) Vdd (+5V) K NC MISO MOSI 1 2 3 4 Z 12 11 10 9 VDD OUT_1 ST_1/Test_i n ST_2 Min 100nF Self-Test 1 Self-Test 2 68pF 68pF GND 10 ohm Out 1 (Z) Out 2 (Y) OUT_2 5 Y 8 NC VSS 6 7 CSB Recommended EMC protection circuitry 2.2 Absolute maximum ratings Supply voltage (V DD ) -0.3 V to +5.5V (continuous) -0.3V to 7V (5 seconds during 1 minutes cycle) Voltage at input / output pins -0.3V to (V DD + 0.3V) ESD HBM (Human Body Model) ±2kV CDM (Charged Device Model) ±500V Storage temperature -55 C to +125 C Operating temperature -40 C to +125 C Mechanical shock Drop from 1 meter on a concrete surface. Murata Electronics Oy 6/19

2.3 Electrical Specification of the A1020 D06 2.3.1 Analog Output Vdd = 5.00V and ambient temperature (23 C±5 C) unless otherwise specified. KPC (17 Parameter Condition Min. Typ Max. Units Z axis (Out_1) Measuring range (1 Nominal -1.7 +1.7 g (2 Y axis (Out_2) Measuring range (1 Nominal -1.7 +1.7 g (2 Supply voltage Vdd 4.75 5.0 5.25 V <CC> Current consumption Vdd = 5 V; No load 5.0 ma Operating temperature -40 +125 C Resistive output load (Analog Output) Vout to Vdd or Vss 10 kohm Capacitive load (Analog Output) Vout to Vdd or Vss 20 nf Min. output voltage; Vdd = 5V 10k from Vout to Vdd 0 0.25 V Max. output voltage; Vdd = 5V 10k from Vout to Vss 4.75 5.00 V <CC> Z axis (Out_1) Offset (output at 0g) (3, 13 @ room temperature Vdd/2 V <CC> Z axis (Out_1) Sensitivity (4, 13 @ room temperature 0.24 x Vdd V/g <> Z axis (Out_1) Offset Error (output at 0g) (5, 13 RT(23±5 C) -40 - +40 mg - -20...+85 C -75 - +75 <> Z axis (Out_1) Offset Temperature -20...+85 C (5, 13,14 Dependency (output at 0g) -40 +125 C -40 +125 C <> Z axis (Out_1) Sensitivity error (6, 13-40...+85 C -40...+125 C -90-35 -50-4 - - +90 +35 +50 ±3 - +4 <CC> Y axis (Out_2) Offset (output at 0g) (3, 13 @ room temperature Vdd/2 V <CC> Y axis (Out_2) Sensitivity (4, 13 @ room temperature 0.24 x Vdd V/g <> Y axis (Out_2) Offset Error (output at 0g) (5, 13 RT(25±5 C) -40 - +40 mg - -20...+85 C -75 - +75-40 +125 C -90 +90 <> Y axis (Out_2) Offset Temperature -20...+85 C (5, 13,14 Dependency (output at 0g) -40 +125 C <> Y axis (Out_2) Sensitivity error (6, 13-40...+85 C ±3 % -4 - +4-40...+125 C Typical non-linearity (7 Range = -1g...+1g -20 - +20 mg Z axis (Out_1) Frequency response -3dB (8 20 50 80 Hz Y axis (Out_2) Frequency response -3dB (8 20 50 80 Hz Ratiometric error (9 Vdd = 4.75...5.25V -2-2 % <> Cross-axis sensitivity (10 @ room temperature 3.5 % Output noise (11 From DC...4kHz 5 mvrms Start-up delay Reset and parity check 10 ms Self test input pull down current Vdd = 5V 10 21 30 µa T1: T st-on (15 Self test ON period. 10 100 ms Controlled externally by user T2: Tsat.del. (15 Saturation delay. Time 20 ms when element beam remains still out from linear operating range. T3: T recov. (15 Recovery time when element is back in linear operating range 50 ms -35-50 - - +35 +50 mg % mg Murata Electronics Oy 7/19

T4: T stab. (15 Stabilization time, when 70 ms = T2+T3 self test is released. T5: T r (15 Rise time during self test, when Vout reach V2 10 ms V2 (15 Vout during self test 4.75 V (15, 16 V3 Stabilized output voltage after self-test is released. 0.95*V 1 V1 1.05 * V1 Note 1. The measuring range is limited only by the sensitivity, offset and supply voltage rails of the device Note 2. 1g = 9.82m/S 2 Note 3. Offset specified as Voffset = Vout(0g) [ V ]. See note 13. Note 4. Sensitivity specified as Vsens = {Vout(+1g) - Vout(-1g)}/2 [ V/g ]. See note 13 Note 5. Offset error specified as Offset Error = {Vout(0g) - Vdd/2} / Vsens [ g ] Vsens = Nominal sensitivity Vdd/2 = Nominal offset See note 13. Note 6. Sensitivity error specified as Sensitivity Error = { [Vout(+1g) - Vout(-1g)] / 2 - Vsens} / Vsens x 100% [% ] Vsens = Nominal sensitivity See note 13. Note 7. Note 8. Note 9. From straight line through -1g and +1g. The frequency response is determined by the sensing element s internal gas damping. The output has true DC (0Hz) response. The ratiometric error is specified as. 5. 00V Vout(@ Vx) RE = Vx 100% 1 Vout(@ 5V ) Note 10. The cross-axis sensitivity determines how much acceleration, perpendicular to the measuring axis, couples to the output. The total cross-axis sensitivity is the geometric sum of the sensitivities of the two axes that are perpendicular to the measuring axis. Note 11. In addition, supply voltage noise couples to the output due to the ratiometric nature of the accelerometer. Note 12. The self-test will increase the output voltage. The output will go to Vdd rail. The purpose of the self-test is to check out the total functionality of the sensor. It is not meant for calibration or auto zeroing. Murata Electronics Oy 8/19

Note 13. Measuring positions Note 14. Offset Temperature Dependency (Offset Tdep) specified as Offset Tdep = {Vout(0g@RT) - Vout(0g@T) } / Vsens [ g ] Vout(0g@RT) = Vout(0g) at room temperature (23±5 C) Vout(0g@T) = Vout(0g) at temperature T Vsens = Nominal sensitivity See note 13. Note 15. Self-test waveforms at 0g position (Z=0g and Y=0g): 5 V 0 V 5V Vout ST pin voltage V1 V2 V3 0 V T1 T2 T3 T5 Time [ ms ] T4 Note 16. V1= Initial output Voltage before self-test activation V3= Output voltage after self-test has been removed and after stabilization time. Please note that the error band specified for V3 is to guarantee that the output is within 5% of the initial value after the specified stabilization time. After longer time V1=V3. Note 17. CC= Critical Characteristics. Must be 100% monitored during production Murata Electronics Oy 9/19

= Significant Characteristic. The process capability (Cpk) must be better than 1.33, which allows sample based testing. If process is not capable the part will be 100% tested 2.3.2 Digital Output Vdd = 5.00V and ambient temperature unless otherwise specified. Parameter Condition Min. Typ Max. Units Output load @500kHz 1 nf SPI clock frequency 500 khz Internal A/D conversion time 150 µs Data transfer time @500kHz 38 µs Murata Electronics Oy 10/19

3 SPI Interface Serial peripheral interface (SPI) is a 4-wire synchronous serial interface. Data communication is enabled with low active Slave Select or Chip Select wire (CSB). Data is transmitted with 3- wire interface consisting of serial data input (MOSI), serial data output (MISO) and serial clock (K). Every SPI system consists of one master and one or more slaves, where the master is defined as the microcomputer that provides the SPI clock, and the slave is any integrated circuit that receives the SPI clock from the master. MASTER MICROCONTROLLER DATA OUT (MOSI) DATA IN (MISO) SERIAL CLOCK (K) SS0 SS1 SS2 SS3 SLAVE SI SO K CS SI SO K CS SI SO K CS SI SO K Figure 4. Typical SPI connection CS The SPI interface of this ASIC is designed to support almost any micro controller that uses software implemented SPI. However it is not designed to support any particular hardware implemented SPI found in many commercial micro controllers. Serial peripheral interface in this product is used in testing and calibration purposes as well as in the final application. In normal use some testing and calibration commands are disabled and have not been documented here. This ASIC operates always as a slave device in the master-slave operation mode. The data transfer between the master (µp test machine etc.) and ASIC is performed serially with four wire system. MOSI master out slave in µp ASIC MISO master in slave out ASIC µp K serial clock µp ASIC CSB chip select (low active) µp ASIC Each transmission starts with a falling edge on CSB and ends with the rising edge. During the transmission, commands and data are controlled by K and CSB according to the following rules: commands and data are shifted MSB first LSB last each output data/status-bits are shifted out on the falling edge of K (MISO line) each bit is sampled on the rising edge of K (MOSI line) Murata Electronics Oy 11/19

after the device is selected with CSB going low, an 8-bit command is received. The command defines the operations to be performed the rising edge of CSB ends all data transfer and resets internal counter and command register if an invalid command is received, no data will be shifted into chip and the MISO will remain in high impedance state until the falling edge of CSB. This will reinitialize the serial communication. to be able to perform any other command than those listed in Table 1. SPI commands, the lock register content has to be set correctly. If other command is feed without correct lock register content, no data will be shifted into chip and the MISO will remain in high impedance state until the falling edge of CSB. data transfer to MOSI continues right after the command is received in all cases where data is to be written to ASIC s internal registers data transfer out from MISO starts with a falling edge of K right after the last bit of SPI command is sampled in on the rising edge of K maximum data transfer speed exceeds 500 khz clock rate SPI command can be an individual command or a combination of command and data. In the case of combined command and data, the input data follows uninterruptedly the SPI command and the output data is shifted out parallel with the input data. CSB K 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 M OSI COMMAND DATA IN 7 6 5 4 3 2 1 0 M ISO HIGH IMPEDANCE DATA OUT 7 6 5 4 3 2 1 0 Figure 5. One command and data transmission over the SPI After power up the circuit starts up in measure mode. This is the operation mode that is used in the final application. Murata Electronics Oy 12/19

3.1 DC characteristics of SPI interface Supply voltage is 5 V unless otherwise noted. Current flowing into the circuit has positive values. Parameter Conditions Symbol Min Typ Max Unit Input terminal CSB Pull up current V IN = 0 V I PU 13 22 35 µa Input high voltage V IH 4 Vdd+0.3 V Input low voltage V IL -0.3 1 V Hysteresis V HYST 0.23*Vdd V Input capacitance C IN 2 pf Input terminal MOSI, K Pull down current V IN = 5 V I PD 9 17 29 µa Input high voltage V IH 4 Vdd+0.3 V Input low voltage V IL -0.3 1 V Hysteresis V HYST 0.23*Vdd V Input capacitance C IN 2 pf Output terminal MISO Output high voltage I > -1mA V OH Vdd-0.5 V Output low voltage I < 1 ma V OL 0.5 V Tristate leakage 0 < V MISO < Vdd I LEAK 5 100 pa Table 1. DC characteristics of SPI interface Murata Electronics Oy 13/19

3.2 AC characteristics of SPI interface Parameter Conditions Symbol Min Typ Max Unit Terminal CSB, K Time from CSB (10%) to T LS1 120 ns K (90%)1 Time from K (10%) to T LS2 120 ns CSB (90%)1 Terminal K K low time Load capacitance at T CL 1 µs MISO < 2 nf K high time Load capacitance at T CH 1 µs MISO < 2 nf Terminal MOSI, K Time from changing MOSI T SET 30 ns (10%, 90%) to K (90%)1. Data setup time Time from K (90%) to T HOL 30 ns changing MOSI (10%,90%)1. Data hold time Terminal MISO, CSB Time from CSB (10%) to Load capacitance at T VAL1 10 100 ns stable MISO (10%, 90%)1. Time from CSB (90%) to high impedance state of MISO1. Terminal MISO, K Time from K (10%) to stable MISO (10%, 90%)1. Terminal CSB Time between SPI cycles, CSB at high level (90%) 1 not production tested MISO < 15 pf Load capacitance at MISO < 15 pf Load capacitance at MISO < 15 pf T LZ 10 100 ns T VAL2 100 ns T LH 15 µs Table 2. AC characteristics of SPI interface T LS1 T CH T CL T LS2 T LH CSB K MOSI T HOL MSB in DATA in T SET LSB in T VAL1 T VAL2 T LZ MISO MSB out DATA out LSB out Figure 6. SPI bus timing diagram Murata Electronics Oy 14/19

3.3 SPI Commands This SPI interface utilizes an 8-bit instruction (or command) register. The list of commands available to end-user is presented in Table 3. Command Command Description: name format MEAS 00000000 Measure mode (normal operation mode after power on) RWTR 00001000 Read and write temperature data register RDSR 00001010 Read status register RLOAD 00001011 Reload NV data to memory output register STX 00001110 Activate Self test for Z-channel STY 00001111 Activate Self test for Y-channel RDAX 00010000 Read Z-channel acceleration through SPI RDAY 00010001 Read Y-channel acceleration through SPI Table 3. SPI commands Measure mode (MEAS): Standard operation mode after power-up. During normal operation, MEAS command is exit command from Self-Test. Read and write temperature data register (RWTR): Temperature data register can be read during normal operation without affecting the circuit operation. Temperature data register is loaded in every 150 µs, and the load operation is disabled whenever the CSB signal is low, hence CSB has to stay high at least 150 µs prior the RWTR command in order to guarantee correct data. The data transfer is as presented in Figure 5 and data is transferred MSB first. In normal operation, it doesn t matter what data is written to temperature data register during RWTR command and hence all zeros is recommended. Read status register (RDSR): Read status register command provides access to the status register. Status register format is shown in Table 4. Bold values in Definition column are the expected values during normal operation. Bit Bit 3 (PERR) Bit 2 (TEST) Bit 1 (LOCK) Bit 0 (PD) Table 4. Definition Bit 3 = 0 Parity check hasn t detected errors Bit 3 = 1 Parity error detected Bit 2 = 0 Analog test mode isn t active Bit 2 = 1 Analog test mode is active Bit 1 = 0 Lock register is open Bit 1 = 1 Lock register is locked Bit 0 = 0 circuit is not in power down mode Bit 0 = 1 circuit is in power down mode Status register bit definitions Reload NV data to memory output register (RLOAD): Reads NV data from EEPROM to the memory output register. Self test for Z-channel (STX): STX command activates the circuit s self test function for the Z-channel. Internal charge pump is activated and high voltage is applied to the Z- channel acceleration sensor element electrode. This causes electrostatic force, which Murata Electronics Oy 15/19

deflects the beam of the sensing element and simulates the acceleration to the positive direction. Z-channel self-test is de-activated by giving MEAS command. Self test for Y-channel (STY): STY command activates the circuit s self test function for the Y-channel. Internal charge pump is activated and high voltage is applied to the Y- channel acceleration sensor element electrode. This causes electrostatic force, which deflects the beam of the sensing element and simulates the acceleration to the positive direction. Y-channel self-test is de-activated by giving MEAS command. Read Z-channel acceleration (RDAX): RDAX command provides access to AD converted Z-channel acceleration signal stored in acceleration data register X. During normal operation acceleration data register X is loaded in every 150 µs, and the load operation is disabled whenever the CSB signal is low, hence CSB has to stay high at least 150 µs prior the RDAX command in order to guarantee correct data. Data output is an 11- bit digital word, which is feed out MSB first and LSB last. (See Figure 7). C S B S C K 0 1 2 3 4 5 6 7 8 9 1 0 1 1 1 2 1 3 1 4 1 5 1 6 1 7 1 8 M O S I C O M M A N D M IS O H IG H IM P E D A N C E D A T A O U T 1 0 9 8 7 6 5 4 3 2 1 0 Figure 7. RDAX command and data transmission over the SPI Read Y-channel acceleration (RDAY): RDAY command provides access to AD converted Y-channel acceleration signal which is stored in acceleration data register Y. During normal operation acceleration data register Y is loaded in every 150 µs and the load operation is disabled whenever the CSB signal is low, hence CSB has to stay high at least 150 µs prior the RDAY command in order to guarantee correct data. Data output is an 11-bit digital word, which is feed out MSB first and LSB last Detailed information on all SPI commands is presented in document IC008 Dual Axis Acceleration Sensor ASIC, Digital Specification. Murata Electronics Oy 16/19

4 Mechanical specification (Reference only) <CC> Lead frame material: Plating: Solderability: Co-planarity error Copper Nickel followed by Gold JEDEC standard: JESD22-B102-C 0.1mm max. 4.1 Dimensions (Reference only) Figure 8. Mechanical dimensions of the A1020 Murata Electronics Oy 17/19

5 Mounting The A1020 is suitable for Sn-Pb eutectic and Pb- free soldering process and mounting with normal SMD pick-and-place equipment. Recommended A1020 body temperature profile during reflow soldering: Average ramp-up rate (T L to T P) Preheat - Temperature min (T smin) - Temperature max (T smax) - Time (min to max) (ts) Tsmax to T L - Ramp up rate Time maintained above: - Temperature (T L) - Time (t L) Profile feature Sn-Pb Eutectic Assembly Pb-free Assembly 3 C/second max. 100 C 150 C 60-120 seconds 183 C 60-150 seconds 3 C/second max. 150 C 200 C 60-180 seconds 3 C/second max 217 C 60-150 seconds Peak temperature (T P) 240 +0/-5 C 250 +0/-5 C Time within 5 C of actual Peak Temperature (T P) 10-30 seconds 20-40 seconds Ramp-down rate 6 C/second max 6 C/second max Time 25 to Peak temperature 6 minutes max 8 minutes max Figure 9. Recommended A1020 body temperature profile during reflow soldering. Ref. IPC/JEDEC J-STD-020B. Note. Preheating time and temperatures according to solder paste manufacturer. Component body temperature during the soldering should be measured from the body of the component. Murata Electronics Oy 18/19

The Moisture Sensitivity Level of the part is 3 according to the IPC/JEDEC J-STD-020B. The part should be delivered in a dry pack. The manufacturing floor time (out of bag) in the customer s end is 168 hours. Maximum soldering temperature is 250 C/40sec. Figure 10. Recommended PCB lay-out Notes: It is important that the part is parallel to the PCB plane and that there is no angular alignment error from intended measuring direction during assembly process. 1 mounting alignment error will increase the cross-axis sensitivity by 1.7% 1 mounting alignment error will change the output by 17mg To achieve the highest accuracy and to minimize resonance, it is recommended to glue the accelerometer to the PCB before soldering Wave soldering is not recommended. A supply voltage by-pass capacitor (>100nF) must be used and located as close as possible to the Vdd and GND pins. Note: When the accelerometer is oriented in such a way that the arrow points toward the earth, the output will decrease. Please also note that you can rotate the part around the measuring axis for optimum mounting location. Murata Electronics Oy 19/19