..5..5 -.5 -. -.5 -. 4 6 8..5..5 -.5 -. -.5 -. 4 6 8 Title_5nanoM_E blau.indd Page 77 s with singlemode polarization-maintaining fiber s 5nanoM-... 5nanoTE-FI-... accuracy metrology Characteristics of laser diode beam source of type 5nano-......8.4 6 min Pnoise peak value in % With RF, mean laser power is constant with noise <.% RMS (< MHz) Disadvantages of conventional laser diode sources...8.4 6 min Pnoise peak value in % noise from laser diode which ge nerates an cavity with the fiber coupling 5%.5 nm roadened spectrum (~.5 nm ) with reduced coherence length (~. mm) as a result of RF. No mode hopping occurs. Mode hopping with tem poral shifts between modes. The coherence length changes over time can be > m. Low speckle contrast from reduced co he rence length: uniform illumi nation of 4-qua drant diodes with improved position detection in FM 5nanoTE-FI-... control (< %) of center wavelength Integrated Faraday Iso lator (optical diode) Temperature control: 5nanoTE / 5nanoTE-FI Drift nm for T= K.5 nm Diodes show a drift of. nm (Gas) over a temperature range of C. This can also be observed for the center wavelength of the laser diode beam sources of type 5nano in white: T low, in red: T higher. control with the 5nanoTE 5nanoTE-FI stabilizes the center wavelength. s of Type 5nano Features 5nanoM-... 5nanoFI-... 5nanoTE-... 5nanoTE-FI-... Reduced coherence x x x x Reduced noise x x x x Low speckle contrast x x x x Faraday Isolator x x Temperature control x x range [nm] 45-55 45-55 45-55 45-55 Vacuum feed-through x x x x PC-Interface x x Page 78 79 8 8 Further pplications 5nanoTE-... Optical Tweezers 5nanoFI-... 5nanoM-... by a stard laser diode beam has a speckle pattern, increasing the sta tistical un certainty in position deter mi na tions. for djustment Laser lignment Characteristics of s 5nano-... Coherence length μm <.% RMS (< MHz) Spectral range 45 to 55 nm Laser output power up to mw Output power adjustable using potentiometer or voltage control input Modulation inputs for analog TTL control ( khz) fiber, polarization-maintaining or stard, optional DIN VIO, ST or E eam profile with rotational sym metry Gaussian intensity distri bution Laser diode beam sources of type 5nanoM-..., 5nanoFI-..., 5nanoTE-... 5nanoTE-FI-... have reduced power noise, reduced coherence length low speckle contrast. These characteristics make these laser diode beam sources highly suitable for atomic force microscopy (FM), particle measurements for LID measurements (laser-induced deflections). pplications: Signal Signal D E time C.9.8.7.6.5.4... 4 6 8.9.8.7.6.5.4... 4 6 8 time Scratch Detector F Stard noisy signal 5nanoFI-... much less noise Fabry Perot Interferometry Graphene D Nanotube F tomic orce icroscopy M Scheme of a fiber-optic interferometer Laser beam source 5nanoFI-... fiber C Fiber-optic beam splitter (p. 4) D -PC fiber E Cantilever F Detector E C Oscillogram Stard Interferences disturb the signal 5nanoFI-...: No disturbing interferences With singlemode fibers, it is possible to create a compact interferometer. The light emanating from the fiber is partially backreflected at the fiber end facette (approx. 4%) is reflected by a moving mirror or cantilever. These two waves interfere, depending on the distance between fiber end-face mirror. The back-coupled light is guided through a fiber-optic beam splitter, where ack-reflection Particle Measurement F Optical scheme of particle measurement Laser beam source 5nanoFI-... fiber C Fiber-optical beam splitter (p. 4) D Fiber collimator with micro focus (p.ff) E Particle flow F Detector The radiation of the laser source 5nanoFI-... is guided via a singlemode fiber a fiber-optic beam splitter onto the particle flow. Particles passing through the focussed beam cause the light to scatter, with some back-reflected into the emitting fiber redirected into a detector. Precise measurements require low speckle contrast a constant laser power. y using RF-, the coherence length is reduced, the spectrum broadened the power averaged, resulting in detection of the sensitive signal with much less noise. Particle Measurement Laser Deflection Measurement The deflection of the cantilever is measured sensitively using a laser spot reflected from the top surface of the cantilever onto a quadrant diode. The 5nanoM-... used as the laser source avoids disturbing interferences from the back-scattered light of the sample. Oscillogram Stard Interferences disturb the signal 5nanoM-... No disturbing interferences one portion is redirected onto a detector for the interference measurement the other is blocked by the Faraday Isolator. The reduced coherence length of the 5nanoFI-... offers an additional advantage because the disturbing interference is suppressed only the interference between the surfaces of interest contribute to the signal. Lasers in Space Fiber-coupled laser sources Low -7 E Kieler Str., 55 Hamburg, Germany Tel: +49 4 85 9 97- Fax: +49 4 85 9 97-79 info@sukhamburg.de www.sukhamburg.com 77
Fiber-coupled laser sources Low ed accuracy acy metrology ogy 4 5nanoM-... (Tab. ) fiber with -PC 4 (for reduction of laser power output) Connector, interlock ttachments: Fiber collimator, focussable, 6-... Micro focus optics 5M-... M-... 5nanoM-... control (< %) 5nanoM-... with singlemode or polarization-maintaining singlemode fiber low noise reduced coherence length low speckle contrast Laser diode beam sources of type 5nanoM-... have reduced power noise, reduced coherence length low speckle contrast as a result of the internal RF. The laser diode beam source 5nanoM-... can be used for atomic force microscopy (FM) as a pilot laser during alignment applications. Spectral range 45 nm to 55 nm Laser output power up to mw <. % RMS (< MHz) Output power adjustable with potentiometer or voltage control input Modulation inputs for analog TTL control (up to khz) pplications Coherence length μm eam profile is rotationally symmetric with Gaussian intensity distribution fiber or polarization-maintaining fiber (polarization extinction ratio > d), optional DIN VIO, ST or E- Fiber with strain-relief protect. sleeving (Ø mm) Laser safety measures conforming to IEC 85 / EN 685-: Key switch Interlock connection Potentiomenter for reduction of power output Option: laser diode beam source 5nanoM-N-... On request: OEM version without key switch nor interlock not conforming to EN 685-. Table 5nanoM... Row 4 5 6 7 8 9 LD Laser Type Version P out (mw) Supply power Electric Fiber Fiber option (cm) type MFD Fiber length Case operation diode code (V) connection type e mode (μm) adjustment % 5nanoL S 45 5 M9 P........ L.8 < - 5nanoL S 55 X7 P........ L 5.5 < - 5nanoM S 65.5 H P 5/........ M 5.7 < - 4 5nanoM S 64 H P 5/........ M 5.8 < - 5 5nanoM S 6 M P 5/........ M 6. < - 6 5nanoM S Q P 5/........ M 6. < - 7 5nanoM S 685 H P 5/........ M 6. < - 8 5nanoM S 78 H6 P 5/........ M 6.7 < - 9 5nanoM S 8 8 H9 P 5/........ M 7. < - 5nanoM S 64 Q5 P 5/........ M 9. < - 5nanoM S.5 M4 P 5/........ M < - 5nanoM S 55 M8 P 5/........ M < - 5nanoM - S - - 6 - M - P - 5 - - 8 - - 5 Order Code with key switch interlock............s without key switch interlock (OEM)....N 5 V DC (stard)....5 Electrical :.5 m shielded x.4 mm............. as for, with SV (5 V)........ as for, with SV4 ( V).......4 Typical laser output power. The actual power output may differ by ±%. With effective fiber Ne =.7 Length of fiber in cm (stard = 5) = stard C = core-alignment (singlemode only) 8 = singlemode fiber, 8 = PM singlemode fiber, optional: Fiber DIN-vio, ST, E-. vailable with vacuum feed-through or prefitted fiberoptic beam splitter, upon request. Dimensions: M Connector SV (5 V) SV4 ( V) SV5 (for 5nanoM-N) Laser diode beam source 5nanoM-... fiber Ø mm 58 78 interlock Ø 6 4 Laser diode beam source 5nanoL-... L Connector SV (5 V) SV4 ( V) SV5 (for 5nanoM-N) fiber Ø mm 8 7 4 M interlock eam parameters advantages of the of type 5nano... 5%.5 nm Disadvantages of stard laser diode sources with conventional fiber coupling roadened spectrum (~.5 nm ) with reduced coherence length (~. mm) as a result of using RF. Mode hopping: temporal shifts between modes. The short-term coherence of individual modes is > m, but effective cohe rence length is reduced..8 6 min P noise peak value in % The RF results in a constant mean laser power. noise <.% RMS (< MHz). noise from a laser source coupled to a fiber. The fiber generates an cavi-.8 ty with the laser diode, 6 min resulting in stochastic P noise peak value in % power jumps. reduced Low speckle contrast due to reduced coherence length: uniform illumination of 4-quadrant diodes for FM improved edge detection during position measure ments. by a stard laser diode beam produces a speckle pattern, increasing the statistical uncertainty in position deter mi nations. Low Interference contrast of the collimated laser beam at a CCD sensor. No interference patterns, despite the CCD sensor protection window. reduced coherence low noise low speckle contrast low interference High Interference contrast The collimated laser beam recorded directly using a CCD sensor, with its protection window generating a disturbing pattern of interference. 5nanoM_ED_blau.indd Page 78 78-7 E Kieler Str., 55 Hamburg, Germany Tel: +49 4 85 9 97- Fax: +49 4 85 9 97-79 info@sukhamburg.de www.sukhamburg.com
accuracy metrology 5nanoFI-... (Tab. ) patch fiber with 4 (for reduction of laser power output) Connector, interlock Table 5nanoFI... Row 4 5 6 7 8 9 Type 4 Version 5nanoFI-... control (<-%) Integrated Faraday Iso lator (optical diode) P out (mw) 5nanoFI-... with singlemode or PM fiber Faraday Isolator Stable mode of operation for sensitive applications using back-reflection In addition to the laser diode beam source 5nanoM-... features of reduced power noise, reduced coherence length low speckle contrast, the 5nanoFI... has an integrated Faraday Isolator to protect the laser source from back- reflection (optical diode). Radiation that couples back into a laser diode results in mode hopping, noise, frequency instability decreased lifetime. Spectral range 45 nm to 55 nm Laser output power up to 7 mw <.% RMS (< MHz) Integrated Faraday Isolator for feedback protection Output power adjustable with potentiometer or voltage control input Modulation inputs for analog TTL control (up to khz) Laser diode code LD operation Supply power mode (V) Electr. connection Coherence length μm eam profile is rotationally symme tric with a fiber or polari za tion-maintaining singlemode fiber (polarization extinction ratio > d), optional DIN VIO, ST or E- Fiber with strain-relief protective sleeving (Ø mm) Fiber type Fiber option Fiber length (cm) pplications ack-reflection Particle Measurement FIER OPTIC FRY-PEROT Interferometer Laser safety according IEC 85 / EN 685- by: Key switch Interlock connection for reduction of power output Option: laser diode beam source 5nanoFI-N-... On request: OEM version without key switch nor interlock not conforming to EN 685-. Case type MFD e (μm) adjustment % 5nanoFI S 45 8 M9 P.........8 < - 5nanoFI S 55 8 X7 P........ C 5.5 < - 5nanoFI S 65. H P 5/........ C 5.7 < - 4 5nanoFI S 64 9 H P 5/........ C 5.8 < - 5 5nanoFI S 5.4 M P 5/........ C 6. < - 6 5nanoFI S 7 Q P 5/........ C 6. < - 7 5nanoFI S 685 8 H P 5/........ C 6. < - 8 5nanoFI S 78 8 H6 P 5/........ C 6.7 < - 9 5nanoFI S 8 7. H9 P 5/........ C 7. < - 5nanoFI S 64 8 Q5 P 5/........ C 9. < - 5nanoFI S M4 P 5/........ C < - 5nanoFI S 55.7 M8 P 5/........ C < - Fiber-coupled laser sources Low 5nanoFI - S - - 6 - M - P - 5 - - 8 - - 5 Order Code with key switch interlock............s without key switch interlock (OEM)....N 5 V DC (stard)....5 Electrical :.5 m shielded x.4 mm............. as for, with SV (5 V)........ as for, with SV4 ( V).......4 Typical laser output power. The actual power output may differ by ±%. With effective fiber Ne =.7 Length of fiber in cm (stard = 5) = stard 8 = singlemode fiber, 8 = PM singlemode fiber, optional: Fiber DIN-vio, ST, E-. vailable with vacuum feed-through or prefitted fiber-optic beam splitter, upon request. Dimensions: Laser diode beam source 5nanoFI-... Faraday Isolator 48FI Connector SV (5 V) 8 SV4 ( V) SV5 (for 5nanoFI-N) X fiber Ø mm L M interlock Case Type L 4 95 C 6 8 5% The Faraday isolator (see also page 57) is used to protect laser sources from back-reflection (an optical diode). Radiation reflected back into a laser diode leads to mode hopping, noise, frequency instability decrease in lifetime. Spectrum of an undisturbed laser beam source 5nano ack-reflections disturb spectrum (mode hopping) Electronics cessories for Laser eam Sources Type 5nanoM-... 5nanoFI-... 5nanoM_ED_blau.indd Page 79 Supplies for laser diode beam sources, electrically isolated,.5 m with (IEC6-9) series KV (female). Fiber collimators 6-... Linear power Switching power Input 5/ V C 4 V C Output with 5V DC/.4 CF V DC/.4 C4F 5V DC/.6 V DC/.5 CF C4F Order Code PSL5 PS PS5E PS56E Linear power, low noise, female 5-pin KV5 Switching power, (female 5-pin) KV5 for 5 V (pins compatible with KV) or 4-pin KV4 for V DC version cord for Supplies plies.5 m, IEC -pin line socket,, 5 V C with IEC (IEC-6) Europe US/Canada Great t ritain PC5DE PC5US PC5 UK DE US UK Laser Source with Multiple Fiber Outputs 5nanoM-... with fiber-optic beam splitters to convert a laser input into to 6 fiber-coupled outputs, integrated in a compact housing. Fiber outputs: 6-... fiber collimator with angular adjustment. Order Code 5nanoC4-... Electrical Data Supply voltage stard 5 V DC (±. V) optional V DC (±. V) Laser diode operation mode constant power Max. operating current 6 m mbient temperature range 5 5 C ±.5 Modulation frequency analog DC - khz TTL khz Laser power output potentiometer < % TTL logic TTL high nalog control voltage.5 V depending on laser diode: see Table -, col. Connectors (female) according IEC 6-9 Order Code C 6 F Type KV 6 (6-pin) for connection to interlock chain for -7 E Kieler Str., 55 Hamburg, Germany Tel: +49 4 85 9 97- Fax: +49 4 85 9 97-79 info@sukhamburg.de www.sukhamburg.com 79
Fiber-coupled laser sources Low accuracy metrology 5nanoTE-... control (< %) of central wavelength 5nanoTE-... (Table ) patch fiber with Connector, interlock Table 5nanoTE... Row 4 5 6 7 8 9 Laser LD operation Supply power Fiber Fiber Fiber Case Type Version P out (mw) Electr. connection MFD diode code mode (V) type option length (cm) type e (μm) adjustment % 5nanoTE S 45 5 M9 P........ E.8 < - 5nanoTE S 55 X7 P........ E 5.5 < - 5nanoTE S 65.5 H P........ E 5.7 < - 4 5nanoTE S 64 H P........ E 5.8 < - 5 5nanoTE S 6 M P........ E 6. < - 6 5nanoTE S Q P........ E 6. < - 7 5nanoTE S 685 H P........ E 6. < - 8 5nanoTE S 78 H6 P........ E 6.7 < - 9 5nanoTE S 8 8 H9 P........ E 7. < - 5nanoTE S 64 Q5 P........ E 9. < - 5nanoTE S.5 M4 P........ E < - 5nanoTE S 55 M8 P........ E < - 5nanoTE-... with singlemode or PM fiber with Temperature control. Stable operation mode for wavelength/temperature-sensitive applications longer diode lifetimes In addition to the laser diode beam source 5nanoM-... features of reduced power noise, reduced coherence length low speckle contrast, the 5nanoTE... has an integrated temperature control that stabilizes the center wavelength. This makes this laser beam source ideally suited for wavelengthsensitive applications. The 5nanoTE-FI... additionally has an integrated Faraday Isolator to protect the laser source from back- reflection. Spectral range 45 nm to 55 nm Laser output power up to mw <. % RMS (< MHz) control (. C) for wavelength/temperature-sensitive applications longer diode life times Output power adjustable with voltage control input Serial PC-Interface (RS) for temperature power control Modulation inputs for analog TTL control (up to khz) Coherence length μm eam profile is rotationally symmetric with a fiber or polarization-maintaining singlemode fiber (polarization extinction ratio > d), optional DIN VIO, ST or E- Fiber with strain-relief protective sleeving (Ø mm) Laser safety according IEC 85 / EN 685- by: Key switch Interlock connection Option: laser diode beam source 5nanoTE-N-... On request: OEM version without key switch nor interlock not conforming to EN 685-. 5nanoTE - S - - 6 - M - P - - 4-8 - - 5 Order Code with key switch interlock............s without key switch interlock (OEM)....N Electrical :.5 m shielded x.4 mm............. as for, with SV4 ( V).......4 Typical laser output power. The actual power output may differ by ±%. With effective fiber Ne =.7 Length of fiber in cm (stard = 5) = stard 8 = singlemode fiber, 8 = PM singlemode fiber, optional: Fiber DIN-vio, ST, E-. vailable with vacuum feed-through or prefitted fiber-optic beam splitter, upon request. Dimensions: Laser diode beam source 5nanoTE-... Connector SV4 ( V) SV8 (for 5nanoTE-N) fiber Ø mm 8 L M interlock Case Type E: L = = 54.5 Integrated Temperature Control Common singlemode diodes show a drift of. nm (Gas) for a temperature range of C. This temperature-dependence of the center wavelength can also be observed for the laser diode beam sources of type 5nano (in white: T low, in red: T higher). lthough the RF- leads to a broader spectrum with a of.5 nm, the center wavelength still varies with temperature. n integrated temperature control stabilizes the Drift nm for T= K.5 nm center wavelength, making the 5nanoTE-... 5nanoTE-FI-... ideal for wavelength or temperature-sensitive applications. nother positive effect is that the lifetime of the laser diode is increased. eam parameters advantages of the of type 5nano... 5%.5 nm roadened spectrum (~.5 nm ) with reduced coherence length (~. mm) as a result of using RF..8 6 min P noise peak value in % The RF results in a constant mean laser power. noise <.% RMS (< MHz). reduced Low speckle contrast due to reduced coherence length: uniform illumination of 4-quadrant diodes for FM improved edge detection during position measure ments. Low Interference contrast of the collimated laser beam at a CCD sensor. No interference patterns, despite the CCD sensor protection window. reduced coherence low noise low speckle contrast low interference Disadvantages of stard laser diode sources with conventional fiber coupling Mode hopping: temporal shifts between modes. The short-term coherence of individual modes can be > m, but effective coherence length is reduced. noise from a laser source coupled to a fiber. The fiber generates an cavi-.8 ty with the laser diode, 6 min resulting in stochastic P noise peak value in % power jumps. by a stard laser diode beam produces a speckle pattern, increasing the statistical uncertainty in position deter mi nations. High Interference contrast The collimated laser beam recorded directly using a CCD sensor, with its protection window generating a disturbing pattern of interference. 5nanoM_ED_blau.indd Page 8 8-7 E Kieler Str., 55 Hamburg, Germany Tel: +49 4 85 9 97- Fax: +49 4 85 9 97-79 info@sukhamburg.de www.sukhamburg.com
accuracy metrology 5nanoTE-FI-... control (< %) of central wavelength Integrated Faraday Iso lator (optical diode) 5nanoTE-FI-... (Tab. 4) patch fiber with Connector, interlock 5nanoTE-FI-... with singlemode or PM fiber with Faraday Isolator Temperature control. Stable operation mode for wavelength/temperature-sensitive applications longer diode lifetimes In addition to the laser diode beam source 5nanoM-... features of reduced power noise, reduced coherence length low speckle contrast, the 5nanoTE... has an integrated temperature control that stabilizes the center wavelength. This makes this laser beam source ideally suited for wavelength-sensitive applications. The 5nanoTE-FI... also has an integrated Faraday Isolator to protect the laser source from back- reflection. Table 4 5nanoTE-FI... Row 4 5 6 7 8 9 Type Version Laser LD operation Supply power Fiber Fiber Fiber length Case P out (mw) Electr. connection MFD diode code mode (V) type option (cm) type e (μm) adjustment % 5nanoTE-FI S 45 8 M9 P........ F.8 < - 5nanoTE-FI S 55 8 X7 P........ F 5.5 < - 5nanoTE-FI S 65. H P........ F 5.7 < - 4 5nanoTE-FI S 64 9 H P........ F 5.8 < - 5 5nanoTE-FI S 5.4 M P........ F 6. < - 6 5nanoTE-FI S 7 Q P........ F 6. < - 7 5nanoTE-FI S 685 8 H P........ F 6. < - 8 5nanoTE-FI S 78 8 H6 P........ F 6.7 < - 9 5nanoTE-FI S 8 7. H9 P........ F 7. < - 5nanoTE-FI S 64 8 Q5 P........ F 9. < - 5nanoTE-FI S M4 P........ F < - 5nanoTE-FI S 55.7 M8 P........ F < - Spectral range 45 nm to 55 nm Laser output power up to 7 mw <. % RMS (< MHz) control (. C) for wavelength/temperature-sensitive applications longer diode life times Integrated Faraday Isolator Output power adjustable with voltage control input Serial PC-Interface (RS) for temperature power control Modulation inputs for analog TTL control (up to khz) Coherence length μm eam profile is rotationally symmetric with a Gaussian intensity distribution fiber or polarization-maintaining singlemode fiber (polarization extinction ratio > d), optional DIN VIO, ST or E- Fiber with strain-relief protective sleeving (Ømm) Laser safety according IEC 85 / EN 685- by: Key switch Interlock connection Option: laser diode beam source 5nanoTE-FI-N-... On request: OEM version without key switch nor interlock not conforming to EN 685-. Fiber-coupled laser sources Low 5nanoTE-FI - S - - 6 - M - P - - 4-8 - - 5 with key switch interlock............s without key switch interlock (OEM)....N Electrical :.5 m shielded x.4 mm............. as for, with SV4 ( V).......4 Typical laser output power. The actual power output may differ by ±%. With effective fiber Ne =.7 Order Code Length of fiber in cm (stard = 5) = stard 8 = singlemode fiber, 8 = PM singlemode fiber, optional: Fiber DIN-vio, ST, E-. vailable with vacuum feed-through or prefitted fiber-optic beam splitter, upon request. Dimensions: Laser diode beam source 5nanoTE-FI-... Connector SV4 ( V) SV8 (for 5nanoTE-FI-N) fiber Ø mm 8 L M interlock Case Type F: L = = 54.5 Faraday Isolator 48FI for 5nanoTE-FI-... The Faraday Isolator (see also page 57) is used to protect laser sources from back-reflection (an optical diode). Radiation reflected back into a laser diode leads to mode hopping, noise, frequency instability decrease in lifetime. 5% Spectrum of an undisturbed laser beam source 5nano ack-reflections disturb spectrum (mode hopping) Electronics cessories for Laser eam Sources Type 5nanoTE-... 5nanoTE-FI-... 5nanoM_ED_blau.indd Page 8 Supplies for laser diode beam sources, elec trically isolated,.5 m with (IEC6-9) series KV (female). Switching power Input 4 V C Output with V DC /.5 C4F Europe PS56E Fiber Collimators 6-... Micro focus optic 5M-... Vacuum Feed-throughs V-KF-... Switching power, (female 4-pin) KV4 for V Fiber-optic eam Splitters FS-... cord for Supplies.5 m, IEC -pin line socket,, 5 V C with IEC (IEC-6) Europe US/Canada Great ritain PC5DE PC5US PC5 UK DE US UK s an option, the 5nano can be supplied directly coupled with vacuum feed-through V-... or fiber-optic beam splitter. Information order codes from page 4. For fiber collimators 6-..., from page or visit www.sukhamburg.com Electrical Data Supply voltage V DC (±. V) Laser diode operation mode constant power Max. operating current 5 m mbient temperature range 5 5 C ±.5 Modulation frequency analog DC - khz TTL khz Laser power output potentiometer < % TTL logic TTL high nalog control voltage.5 V depending on laser diode: see Tables 4, col. Connectors (female) according IEC 6-9 Order Code C 8 F Type KV 8 (8-pin) for connection to interlock chain for -7 E Kieler Str., 55 Hamburg, Germany Tel: +49 4 85 9 97- Fax: +49 4 85 9 97-79 info@sukhamburg.de www.sukhamburg.com 8